Reminder for Tomorrow: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. Tuesday October 09 and 23, 2007 from 10:15 - 13:00
jwc at snf.stanford.edu
Mon Oct 8 17:18:53 PDT 2007
*ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the
Greetings SNF Lab Users,
I will be conducting my bi-monthly *"Take A Spin with Me" *training
class Tuesday October 09 and 23, 2007 from *10:15* AM - 1 PM. There is
a sign up sheet posted on the white board in my office if you desire to
sign up in advance.
This is a great opportunity for you to get acquainted with the specific
points to employ when working with our Ebeam or Optical Resist materials
in order to obtain high quality thin film coatings over your wafers for
Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. These
applications accurate control of polymer thickness is important in order
to obtain consistent high quality lithography results.
We will be conducting this training on the Headway Spin Coater and users
attending this session will gain their qualification on this tool and
also learn to perform thin film measurements on the Nanospec TFA
Schedule of Events:
*10:15* - 11:00 I will start with substrate cleans on WET BENCH NONMETAL
performing Pirhana substrate cleans and HF etching of the intrinsic
native oxide on Silicon wafers. All users must have their substrates
cleaned and ready to go for spinning by the session time; either coming
out of the 150 degree Singe oven, or if you are working on oxides or
nitrides, coming out of the YES HMDS Prime oven directly.
11:00 - 12:30 We can apply what ever Ebeam or Optical Resist system you
desire for your work.
12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer
All interested parties are welcome to attend this session.
_*This is a Hands-On Lab Session so please have your substrates clean
and ready to coat on the Headway Coater. *_
Thank you for your interest in Ebeam and Optical Lithography at Stanford
James W. Conway
Ebeam Technology Group
Stanford Nanofabrication Facility
650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31
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