From xinranw at stanford.edu Mon Sep 3 18:14:16 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Mon, 3 Sep 2007 18:14:16 -0700 Subject: raith free tomorrow 10:30 Message-ID: <22ffcd060709031814y6282120bt44de80117256ffed@mail.gmail.com> My sample is broken last minute... Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From chandran at stanford.edu Thu Sep 6 09:55:46 2007 From: chandran at stanford.edu (Anu Chandran) Date: Thu, 6 Sep 2007 09:55:46 -0700 Subject: Cancelled session Today 6:30 - 10:30pm Message-ID: Sample not ready. Sorry for the late notice. Anu -- Anu Chandran Materials Science & Engineering 476 Lomita Mall,McCullough Building Stanford CA 94305-4045 T:6507236466 Lab T:6507234874 Office F:6507249851 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sunxuhui at gmail.com Mon Sep 10 13:37:08 2007 From: sunxuhui at gmail.com (Xuhui Sun) Date: Mon, 10 Sep 2007 13:37:08 -0700 Subject: Raith free from now to 4:00PM (Finished early) Message-ID: finished early. Jeff Sun From gyzhang at stanford.edu Mon Sep 10 17:28:57 2007 From: gyzhang at stanford.edu (Guangyu Zhang) Date: Mon, 10 Sep 2007 17:28:57 -0700 Subject: finished earlier, Message-ID: <20070910172857.rwpw8g50kk4k8g4w@webmail.stanford.edu> and ready for use for everybody... Guangyu From jwc at snf.stanford.edu Thu Sep 13 08:55:42 2007 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 13 Sep 2007 08:55:42 -0700 Subject: Please return all the raith dongles... Message-ID: <46E95D7E.4000303@snf.stanford.edu> Hello Users, Please return any raith SW dongles you may have to my desk ASAP. Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From faraon at stanford.edu Fri Sep 14 23:35:18 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Fri, 14 Sep 2007 23:35:18 -0700 Subject: ratih free Saturday 2-5pm Message-ID: <28d3ece90709142335o35b62fc5hfbba157669cc04e9@mail.gmail.com> No chlorine in Pquest so I can not etch the chip. -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sunxuhui at gmail.com Mon Sep 17 08:58:34 2007 From: sunxuhui at gmail.com (Xuhui Sun) Date: Mon, 17 Sep 2007 08:58:34 -0700 Subject: Raith free today 2:00PM-5:00PM Message-ID: Sorry for late notice. Because there is a financial problem in my account, I cannot use the machine until it is solved. Jeff Sun From faraon at stanford.edu Tue Sep 18 20:17:12 2007 From: faraon at stanford.edu (Andrei Faraon) Date: Tue, 18 Sep 2007 20:17:12 -0700 Subject: Raith free tomorrow 5pm-12pm Message-ID: <28d3ece90709182017n4d98a629hf2153bd69fd01380@mail.gmail.com> I have to release the reservation because, the chlorine can not be used in Pquest so I can not process my chip. -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Thu Sep 20 00:28:39 2007 From: xinranw at stanford.edu (Xinran Wang) Date: Thu, 20 Sep 2007 00:28:39 -0700 Subject: raith free Thu 21:00 Message-ID: <22ffcd060709200028o212f8acfwb949e99fdbb67cf9@mail.gmail.com> Sample won't be ready, sorry for late notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Sep 21 09:22:51 2007 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 21 Sep 2007 09:22:51 -0700 Subject: No one is currently enabled on the RAITH -- available for use or on to the next User if they wish to start earlier than expected. Message-ID: <46F3EFDB.8030404@snf.stanford.edu> Good Morning, It is very important for all Users to show up on time and honor their RAITH reservations. All cancellations must be posted well in advance to the raith at snf.stanford.edu list. There is a reservation in place for 8:00 - 10:00 and that User has not appeared nor enabled the system. I could not reach them by email either. So then, as no one is currently enabled on the RAITH, it is available for use by anyone whom wished to enable, or lets go on to the next User if they wish to start early. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Fri Sep 21 10:49:48 2007 From: ytcheng at stanford.edu (ytcheng at stanford.edu) Date: Fri, 21 Sep 2007 10:49:48 -0700 Subject: RAITH is free from 11am to 3pm today Message-ID: <20070921104948.mp5m44tb4k44g4c0@webmail.stanford.edu> I'm releasing my session from 11am to 3pm today. Yao-Te From koseki at stanford.edu Fri Sep 21 22:09:17 2007 From: koseki at stanford.edu (Shinichi Koseki) Date: Fri, 21 Sep 2007 22:09:17 -0700 Subject: Raith free 22:30pm on Sat & Sun Message-ID: <000701c7fcd6$b9b36090$231b40ab@nausicaa> Wafer was not ready. Raith is free on this weenend's nights. Hope someone can make use of these prime time slots. regards, Shinichi From bdai at stanford.edu Fri Sep 21 23:50:29 2007 From: bdai at stanford.edu (Bing Dai) Date: Fri, 21 Sep 2007 23:50:29 -0700 Subject: Raith 10am to 2pm Sat released Message-ID: <001c01c7fce4$dd58dd00$980a9700$@edu> I changed my session to Sunday morning. Sorry for the late notice. Bing From mpovinel at stanford.edu Mon Sep 24 09:57:23 2007 From: mpovinel at stanford.edu (Michelle Povinelli) Date: Mon, 24 Sep 2007 09:57:23 -0700 Subject: Raith free until 1 In-Reply-To: <46D45EBC.5080908@snf.stanford.edu> References: <46D45EBC.5080908@snf.stanford.edu> Message-ID: I have moved my reservation back to 1pm; Raith is free until then. --Michelle From jwc at snf.stanford.edu Tue Sep 25 08:59:39 2007 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 25 Sep 2007 08:59:39 -0700 Subject: Reminder "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway. TODAY! Tuesday September 25th 2007 from 10:15 - 13:00 In-Reply-To: <20070920172655.58F464C6EC@smtp2.stanford.edu> References: <20070920172655.58F464C6EC@smtp2.stanford.edu> Message-ID: <46F9306B.1090603@snf.stanford.edu> Just a reminder that we will start at 10:15 AM at Wet bench nonmetal for Silicon substrate cleans and then move onto the Headway Spinner at 11:00. All interested parties are welcome. > > > -------- Original Message -------- > > *Subject: * > > > > ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training > on the Headway. Tuesday September 11 and 25th 2007 from 10:00 - 13:00 > > *Date: * > > > > Wed, 29 Aug 2007 16:37:18 -0700 > > *From: * > > > > James Conway > > *Organization: * > > > > Stanford Nanofabrication Facility - Stanford University > > *To: * > > > > Ebeam List , > Raith SNF Mailing list > , beamtools at snf.stanford.edu > , headway2 at snf.stanford.edu > > > > > *ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on > the Headway Coater.* > > > Greetings Ebeam Lab Users, > > I will be conducting my bi-monthly *"Take A Spin with Me" *training > class Tuesday September 11 and 25th, 2007 from 10:15 AM - 1 PM. There > is a sign up sheet posted on the white board in my office if you > desire to sign up in advance. > > This is a great opportunity for you to get acquainted with the > specific points to employ when working with our Ebeam or Optical > Resist materials in order to obtain high quality thin film coatings > over your wafers for Electron Beam, Scanning Probe (SPL), and optical > Nano-Lithography. These applications accurate control of polymer > thickness is important in order to obtain consistent high quality > lithography results. > > We will be conducting this training on the Headway Spin Coater and > users attending this session will gain their qualification on this > tool and also learn to perform thin film measurements on the Nanospec > TFA measurement tool. > > Schedule of Events: > > 10 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL > performing Pirhana substrate cleans and HF etching of the intrinsic > native oxide on Silicon wafers. All users are encouraged to have > their substrates cleaned and ready to go for spinning by the session > time; either coming out of the 150 degree Singe oven, or if you are > working on oxides or nitrides, coming out of the YES HMDS Prime oven > directly. > > 11:00 - 12:30 We can apply what ever Ebeam or Optical Resist system > you desire for your work. > > 12:30 - 1:00 Thin Film Measurements on the Nanospec Thin Film Analyzer > > All interested parties are welcome to attend this session. > This is a Hands-On Lab Session so please have you substrates clean > and ready to coat on the Headway Spin Coater. > Thank you for your interest in Ebeam Technologies here at Stanford > Nanofabrication Facility, > > James W. Conway > Ebeam Technology Group > Stanford Nanofabrication Facility > 650-725-7075 office hour M-F 8:30 - 9:30 AM CIS 31 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From ycjun at stanford.edu Tue Sep 25 23:30:55 2007 From: ycjun at stanford.edu (Young Chul Jun) Date: Tue, 25 Sep 2007 23:30:55 -0700 Subject: release reservation (11-12pm) Message-ID: <20070925233055.jp9aibkusocc00s8@webmail.stanford.edu> I started today's session earlier.. So, I release tomorrow's one hour slot.. - Y.C. From ytcheng at stanford.edu Sun Sep 30 10:47:12 2007 From: ytcheng at stanford.edu (ytcheng at stanford.edu) Date: Sun, 30 Sep 2007 10:47:12 -0700 Subject: Can't clear the error message of RAITH In-Reply-To: <46F9306B.1090603@snf.stanford.edu> References: <20070920172655.58F464C6EC@smtp2.stanford.edu> <46F9306B.1090603@snf.stanford.edu> Message-ID: <20070930104712.f37ccozv9ck8gg08@webmail.stanford.edu> Hi James and raith users, I met a error message when I unloaded the sample for the previous user this morning. I clicked the cancel buttom, but there is an "advanced loadlock control" window popped-up with some error message. I can't reset the error message there, and someone told me that message should be cleared by an advanced account. Hence, I release my session until 3pm today. Best regards, Yao-Te From renshen at stanford.edu Sun Sep 30 11:55:59 2007 From: renshen at stanford.edu (Shen Ren) Date: Sun, 30 Sep 2007 11:55:59 -0700 Subject: Can't clear the error message of RAITH In-Reply-To: <20070930104712.f37ccozv9ck8gg08@webmail.stanford.edu> References: <20070920172655.58F464C6EC@smtp2.stanford.edu> <46F9306B.1090603@snf.stanford.edu> <20070930104712.f37ccozv9ck8gg08@webmail.stanford.edu> Message-ID: <628a66910709301155i7569e4afi9b5268bb44be141a@mail.gmail.com> Error cleared with great help from James. Tool is up again. Will take the session with the permission from prevuous user. Thanks, shen On 9/30/07, ytcheng at stanford.edu wrote: > > Hi James and raith users, > > I met a error message when I unloaded the sample for the previous user > this morning. I clicked the cancel buttom, but there is an "advanced > loadlock control" window popped-up with some error message. I can't > reset the error message there, and someone told me that message should > be cleared by an advanced account. Hence, I release my session until > 3pm today. > > Best regards, > Yao-Te > -- Best wishes, Shen Ren Department of Electrical Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: