[Fwd: Problem raith SNF 2008-04-22 18:17:11: problem encounter by several users getting level sample holders]
jwc at snf.stanford.edu
Tue Apr 22 18:27:48 PDT 2008
Users are requested to see me during my office hour if they either
encountered a stage to sample holder crash or any other problem during a
load lock procedure or of they have observed missing or out of focus
features from their EBL write results.
Over the weekend we lost the functionality of the sample holder Faraday
cup connection to the picoammeter and concurrently started measuring
very large out of level conditions on both the standard and the
universal sample holders. The magnitude of this issue as observed is
grossly larger than anything we have measured before and is a cause for
I am now suspecting damage to the piezo post mounting arms, or the
ceramic mounting balls on top of the piezo stacks themselves, as a
possible cause of this condition. This may have been a result of a user
incorrectly mounting then attempting to load the sample holder or some
other event affecting the mechanical integrity of the XY Stage.
-------- Original Message --------
Subject: Problem raith SNF 2008-04-22 18:17:11: problem encounter by
several users getting level sample holders
Date: Tue, 22 Apr 2008 18:17:12 -0700
From: jwc at snf.stanford.edu
To: raith-pcs at snf.stanford.edu
Caution to ALL USERS:
Both the Std. sample holder and now the Universal Sample Holder USH) are not landing onto the piezo mounts correctly. We are measuring ~ 0.770 - 0.880 mm total delta working distance across a 100 mm wafer -- when it should be less than 0.124 mm on the std. sample holder and less than 2 um on the USH.
Users are requested to reply if they encountered a stage or loading sample holder crash or misfortune during their operations over the last two weeks.
Users writing on the system the last two weeks are requested to carefully inspect their patterns before pattern transfer to confirm their CD's are to specifications. Please report to the raith at snf.stanford.edu list your observations.
Immediate field service request has been made to RAITH USA Inc. today at 6 PM PST.
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