Problem raith SNF 2008-04-23 19:15:49: calibration are required to piezo post and mech. adjustments to all sample holders need to be completed]
jwc at snf.stanford.edu
Thu Apr 24 09:16:39 PDT 2008
Good Morning Koseki-san,
Thank you for your measurements! This is great help to me to obtain
these values from you. Today in the Raith class I will compare your
numbers to mine using a 100 mm wafer clipped to the Std. sample holder.
Shinichi Koseki wrote:
> Hi James,
> I am using the machine, and encountered no problems so far.
> Thanks for the repair !
> FYI, here are the parameters I got. WD uniformity is also good.
> clip #2 at the standard sample holder.
> 30 um aperture / 0.17039 nA
> WD=4.7158mm @ V=2.7mm (on my chip, U=left end of the chip)
> WD=4.7122mm @ V=4.5mm (after ~2hrs)
> WD=4.7092mm @ V=6.6mm (further after ~2hrs)
> ----- Original Message -----
> *From:* James Conway <mailto:jwc at snf.stanford.edu>
> *To:* Raith SNF Mailing list <mailto:raith at snf.stanford.edu> ;
> Makoto Koto <mailto:mkoto at stanford.edu> ; Mike Preiner
> <mailto:mpreiner at stanford.edu> ; Shinichi Koseki
> <mailto:koseki at stanford.edu> ; Xinran Wang
> <mailto:xinranw at stanford.edu> ; Filip Crnogorac
> <mailto:filip at stanford.edu>
> *Sent:* Wednesday, April 23, 2008 7:26 PM
> *Subject:* [Fwd: Problem raith SNF 2008-04-23 19:15:49:
> calibration are required to piezo post and mech. adjustments to
> all sample holders need to be completed]
> Greetings RAITH Community:
> The system is coming back up after repairs. More testing and
> mechanical adjustments to the sample holders are required and I
> will continue this effort tomorrow.
> Experienced Users only unless you have my permission through
> tomorrow afternoon. Call me if you have any concerns.
> Users on the CORAL schedule overnight this evening and morning
> have my blessings to come onto the system.
> Good Luck. Please report if you see anything unusual.
> Thank you,
> James Conway
> -------- Original Message --------
> Subject: Problem raith SNF 2008-04-23 19:15:49: calibration are
> required to piezo post and mech. adjustments to all sample holders
> need to be completed
> Date: Wed, 23 Apr 2008 19:15:49 -0700
> From: jwc at snf.stanford.edu
> To: raith-pcs at snf.stanford.edu
> Thanks to an incredible effort and response by RAITH Field service leader Bern Steggemann, whom by chance was traveling through SFO this morning we have effected repairs and replacement to the ceramic ball mounted on Piezo post three of the XY Laser stage.
> The electrical connection to the Faraday Cup on stage also resolved itself with this repair.
> I have tested the Load Lock and Robot arm and exchange position settings for sample holder transfer.
> Just brought the FE-GUN back up and it will take about six hours for emission to stabilize and possibly a day or more to return to previous emission levels.
> Vacuum levels are elevated but safe to resume operations this evening.
> I loaded the Universal Sample holder and attempted to level using the Piezo controls, but was unable to successfully level to any less than a total delta WD of 0.194 mm across a 96 mm axis across a 100 mm wafer.
> Note Piezo three is the fixed reference post height that the others are adjusted to mechanically.
> I desire to repeat this measurement again before attempting to perform mechanical adjustments to both the Universal and Electrostatic chuck sample holders.
> Note the Std. sample holder cannot be adjusted as they are pressed in, its detents are worn, and likely should soon be replaced or simply discarded.
> I will confirm with RAITH USA Inc. if I need to recalibrate the piezo controls before performing mechanical adjustments.
> *With some reservations I am releasing the system to experienced users only.*
> Users should carefully check their focus and perform a write field alignment within ~ 5 mm of where they intend to write their patterns.
> Be sure TO center all piezos as you come onto the system.
> Thank you for your support!
> James Conway
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