From xutian at stanford.edu Mon Dec 1 10:19:59 2008 From: xutian at stanford.edu (Xu Tian) Date: Mon, 1 Dec 2008 10:19:59 -0800 (PST) Subject: 10am-1pm released Message-ID: <1108612632.1563961228155599223.JavaMail.root@zm02.stanford.edu> We still have no image on the SEM. Xu Tian From jwc at snf.stanford.edu Mon Dec 1 13:02:18 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 01 Dec 2008 13:02:18 -0800 Subject: RAITH STATUS 13:00 Monday -- System down and off line to Users due to chiller pump problems. No flow on loaner pump Message-ID: <493450DA.2000009@snf.stanford.edu> Good Afternoon: *RAITH STATUS: DOWN AND OFF LINE TO USERS...* Many of the problems encountered -- but not all the problems reported -- have been traced to failure of the cooling water recirculation pump to the lens, vacuum control card and EHT power supply on the RAITH system. Will be troubleshooting flow and pressure and arranging for yet another NESLAB recirculation unit later this afternoon. Raith service has been contacted and a field service person will be on site, either very late tonight or, first thing tomorrow morning. (Tuesday AM) System is off line for all users until repairs can be effected and the system re-qualified for EBL performance. Good Day, JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Dec 1 13:17:25 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 01 Dec 2008 13:17:25 -0800 Subject: Anyone seen 2% PMMA In-Reply-To: <1817747536.350801227317439485.JavaMail.root@zm06.stanford.edu> References: <1817747536.350801227317439485.JavaMail.root@zm06.stanford.edu> Message-ID: <49345465.7010209@snf.stanford.edu> The current bottle of Microchem 2% 950K PMMA is in the lab and it is labeled NON-STANDARD LOT. This is from a manufacturer lot that is different than the previous bottle batch of four bottles. But it is still the same material you employ for your work if you are working in 2% 950K MW PMMA in Anisole and is total fine for lab use. I am attempting to use up all the bottled resist in the lab and cleanroom before the holiday in order to start the year out on new batch lots of all the normally used PMMA materials. Thank you for your support! James Conway Salman Latif wrote: > Hi, has anyone seen the bottle of 2% PMMA, 950K ? It's not in the cabinet, or the metal carts, headway or develop areas. If I can find it before 10pm, I can start my session, otherwise raith will be free 10pm-2am. > > Salman. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Dec 2 17:31:59 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 02 Dec 2008 17:31:59 -0800 Subject: RAITH status Tuesday December 2, 2008 Off line to Users overnight through tomorrow afternoon. Message-ID: <4935E18F.2030603@snf.stanford.edu> *Greeting Raith Users,* We have found that the NESLAB recirculating pump is fine but there was some clog or restriction in the cooling loop through the RAITH system. We are currently running pure distilled 50 grain vinegar through the cooling loop in an attempt to reduce, or remove, the offending object from the cooling loop lines. Improved flow has already been observed. We will flush out the system and start to bring the FE-GUN up and on line tomorrow morning with hopes of returning the tool to Users by late afternoon * Stay tuned* for further updates on status about lunchtime tomorrow. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: raith_orangeflair.jpg Type: image/jpeg Size: 5543 bytes Desc: not available URL: From lwchang at stanford.edu Wed Dec 3 15:24:07 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Wed, 3 Dec 2008 15:24:07 -0800 Subject: Raith is not up yet so my reservation until 20:30 is released! Message-ID: <8ab79e460812031524y17b5a1fj635596a7cb119ddd@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Dec 3 16:43:25 2008 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 03 Dec 2008 16:43:25 -0800 Subject: RAITH system coming back up. Hand off to Kocabas or next User about 8 - 9 PM Message-ID: <493727AD.1090602@snf.stanford.edu> Good Evening: RAITH system coming back up and we are waiting for a vacuum set point to be reached before we can start the FE-GUN. Kocabas is next in queue and his samples are inside the machine to compete their aborted write. My plan is to return at 7:15 PM and if the gun emission is stable to hand off to team of Kocabas and Krishna Coimbatore Balram or the next available User about 8 - 9 PM. Best, JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Dec 3 19:07:37 2008 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 03 Dec 2008 19:07:37 -0800 Subject: RAITH system coming back up. Hand off to Kocabas or next User about8 - 9 PM In-Reply-To: <928636309-1228359350-cardhu_decombobulator_blackberry.rim.net-339278884-@bxe012.bisx.prod.on.blackberry> References: <928636309-1228359350-cardhu_decombobulator_blackberry.rim.net-339278884-@bxe012.bisx.prod.on.blackberry> Message-ID: <49374979.6040908@snf.stanford.edu> Hello Arash, Krishna, and Ekin as well as the other RAITH Users. System is up and FE-Gun emission is climbing. Krishna and Ekin if you wish to start you should be in good shape to go, otherwise let Arash play through and SEM his stuff and follow him and test the system functions for me. Any problems let me know I am just a short trip away this evening till 1 AM. JWC Arash Hazeghi wrote: > James let me know if the system is available at 7pm i > ------Original Message------ > From: James Conway > To: Raith SNF Mailing list > To: Arash Hazeghi > To: S. Ekin Kocabas > To: Krishna Coimbatore Balram > Sent: Dec 3, 2008 4:43 PM > Subject: RAITH system coming back up. Hand off to Kocabas or next User about8 - 9 PM > > Good Evening: > > RAITH system coming back up and we are waiting for a vacuum set point to be reached before we can start the FE-GUN. Kocabas is next in queue and his samples are inside the machine to compete their aborted write. My plan is to return at 7:15 PM and if the gun emission is stable to hand off to team of Kocabas and Krishna Coimbatore Balram or the next available User about 8 - 9 PM. > > Best, > > JWC > > > > Arash Hazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Dec 3 19:08:05 2008 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 03 Dec 2008 19:08:05 -0800 Subject: [Fwd: Re: RAITH system coming back up. Hand off to Kocabas or next User about 8 - 9 PM] Message-ID: <49374995.4030502@snf.stanford.edu> An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Wed Dec 3 19:08:42 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Thu, 4 Dec 2008 03:08:42 +0000 Subject: RAITH system coming back up. Hand off to Kocabas or next Userabout8 - 9 PM In-Reply-To: <49374979.6040908@snf.stanford.edu> References: <928636309-1228359350-cardhu_decombobulator_blackberry.rim.net-339278884-@bxe012.bisx.prod.on.blackberry><49374979.6040908@snf.stanford.edu> Message-ID: <1440532868-1228360124-cardhu_decombobulator_blackberry.rim.net-1056535230-@bxe012.bisx.prod.on.blackberry> Ekin and krishna please let me know if I can use the system I am in urgent need to SEM my wafer. Thanks, Arash Arash Hazeghi -----Original Message----- From: James Conway Date: Wed, 03 Dec 2008 19:07:37 To: ; S. Ekin Kocabas; Krishna Coimbatore Balram Cc: Raith SNF Mailing list Subject: Re: RAITH system coming back up. Hand off to Kocabas or next User about8 - 9 PM Hello Arash, Krishna, and Ekin as well as the other RAITH Users. System is up and FE-Gun emission is climbing. Krishna and Ekin if you wish to start you should be in good shape to go, otherwise let Arash play through and SEM his stuff and follow him and test the system functions for me. Any problems let me know I am just a short trip away this evening till 1 AM. JWC Arash Hazeghi wrote: > James let me know if the system is available at 7pm i > ------Original Message------ > From: James Conway > To: Raith SNF Mailing list > To: Arash Hazeghi > To: S. Ekin Kocabas > To: Krishna Coimbatore Balram > Sent: Dec 3, 2008 4:43 PM > Subject: RAITH system coming back up. Hand off to Kocabas or next User about8 - 9 PM > > Good Evening: > > RAITH system coming back up and we are waiting for a vacuum set point to be reached before we can start the FE-GUN. Kocabas is next in queue and his samples are inside the machine to compete their aborted write. My plan is to return at 7:15 PM and if the gun emission is stable to hand off to team of Kocabas and Krishna Coimbatore Balram or the next available User about 8 - 9 PM. > > Best, > > JWC > > > > Arash Hazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From kodama at stanford.edu Thu Dec 4 17:02:15 2008 From: kodama at stanford.edu (Takashi Kodama) Date: Thu, 4 Dec 2008 17:02:15 -0800 (PST) Subject: Raith free 3:30am - 6:30 am Friday morning Message-ID: <1273989293.1870991228438935922.JavaMail.root@zm09.stanford.edu> Hi all, I am so sorry that I failed the preliminary microfabrication process and that I cancelled the researvation. I am sorry for the late notice. Takashi Kodama From zhangy at stanford.edu Fri Dec 5 20:25:18 2008 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 5 Dec 2008 20:25:18 -0800 Subject: Raith free 12-2am Saturday Message-ID: <20081206042516.E49E9170E6A@smtp1.stanford.edu> Sample not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From slatif at stanford.edu Fri Dec 5 20:30:04 2008 From: slatif at stanford.edu (Salman Latif) Date: Fri, 5 Dec 2008 20:30:04 -0800 (PST) Subject: Raith free 12-2am Saturday In-Reply-To: <20081206042516.E49E9170E6A@smtp1.stanford.edu> Message-ID: <1660699376.2322791228537804654.JavaMail.root@zm06.stanford.edu> I'll take it. Thanks. ----- Original Message ----- From: Yuan Zhang To: 'EBEAM Ebeam Lab' Sent: Fri, 5 Dec 2008 20:25:18 -0800 (PST) Subject: Raith free 12-2am Saturday Sample not ready. From faraon at stanford.edu Sat Dec 6 20:20:31 2008 From: faraon at stanford.edu (Andrei Faraon) Date: Sat, 6 Dec 2008 20:20:31 -0800 Subject: Finished early, Raith free for next user Message-ID: <28d3ece90812062020w644a1a82i45b0c7e03ad26383@mail.gmail.com> -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 www.stanford.edu/~faraon -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Dec 9 12:54:43 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 09 Dec 2008 12:54:43 -0800 Subject: Action Required == PLEASE REMOVE ALL SAMPLES AND SUBSTRATES FROM THE EBEAM LAB PASS THROUGH. Please also help up clean up the ebeam lab area. Message-ID: <493EDB13.6030400@snf.stanford.edu> GREETINGS: As we approach our annual holiday shutdown we will be cleaning up the Ebeam Lab area. Users are requested to take a minute or two while the systems are pumping down to help us clean up the lab area spaces by wiping down all the surfaces with IPA. If everyone working in the Ebeam does this for a couple minutes each it will help SNF staff greatly. NOTICE: PLEASE REMOVE ALL SAMPLES AND SUBSTRATES FROM THE EBEAM LAB PASS THROUGH BY MONDAY DECEMBER 15, 2008. ON TUESDAY DECEMBER 16, 2008 AT ~ 10 AM I WILL DISCARD ALL SAMPLES, SUBSTRATES, AND TWEEZER PACKAGES REMAINING IN THE PASS THROUGH. Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Dec 9 13:04:22 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 09 Dec 2008 13:04:22 -0800 Subject: All Coral reservations for RAITH after 10 AM Tuesday December 16, 2008 have been removed and cancelled -- Lab will be shut down Message-ID: <493EDD56.8020200@snf.stanford.edu> An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Wed Dec 10 01:54:52 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Wed, 10 Dec 2008 01:54:52 -0800 Subject: raith free Wed 10am Message-ID: <22ffcd060812100154m33867a10iee5248a98fbd4781@mail.gmail.com> My sample won't be ready, sorry for last minute notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From kathrynt at stanford.edu Wed Dec 10 10:51:07 2008 From: kathrynt at stanford.edu (Kathryn Todd) Date: Wed, 10 Dec 2008 10:51:07 -0800 Subject: load with me 11:30 am? Message-ID: <4070ecc80812101051ke52b38ajd8be4f77f3fadd11@mail.gmail.com> Hi, I have time from 11:30-2pm which I cannot use all of. Would anyone like to load with me at 11:30am? I will likely use only an hour, from 1130-12:30. -------------- next part -------------- An HTML attachment was scrubbed... URL: From kathrynt at stanford.edu Wed Dec 10 11:30:18 2008 From: kathrynt at stanford.edu (Kathryn Todd) Date: Wed, 10 Dec 2008 11:30:18 -0800 Subject: raith free 12:30-2 today Message-ID: <4070ecc80812101130t42506ac6tcf83105f27e441d9@mail.gmail.com> moved my reservation earlier -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Dec 11 08:16:49 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 11 Dec 2008 08:16:49 -0800 Subject: JWC session start time change -- I will be starting my session at about 1:30 instead of 1:00 this afternoon. Message-ID: <49413CF1.4050907@snf.stanford.edu> FYI: JWC session start time change -- I will be starting my session at about 1:30 instead of 1:00 this afternoon. Kosar is riding back up and we hope to get several exposures completed on Goecheritz's project as well. Good Morning, JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Dec 12 10:06:42 2008 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 12 Dec 2008 10:06:42 -0800 Subject: Lab shutdown plan and schedule for the Ebeam Lab at SNF Message-ID: <4942A832.6080402@snf.stanford.edu> *Good Morning Ebeam Lab Users:* *The following is our holiday shut down plan for the Ebeam Lab:* Ebeam Lab Pass Thru: All samples must be removed from this box by days end next Monday. No sample storage over the holidays. All your Engineering Materials should be removed from the SNF cleanroom. This pass thru will be cleaned and all remaining samples discarded on Wednesday December 17, 2008. Donations of GaAs and Fused Silica (Quartz) substrates of any size happily accepted! * /Ebeam,/* the Hitachi HL-700F writer, is off line to Users and will continue to be in Red Light status going into the New Year. /*SEM4160: */This system will be available until the Lab closes to all Users on the morning of Wednesday December 17, 2008. /*SEMHITACHI: */This system will be available until the Lab closes to all Users on the morning of Wednesday December 17, 2008. /*RAITH150: */This system will be available for Users currently scheduled on the CORAL system until 7 AM Wednesday December 17, 2008 when the SNF Cleanroom closes to Users. Upon arrival of RAITH Field Service we will start the annual column rebuild and aperture and FE-Gun replacement. We will performing a number of preventative maintenance items through the next days until the SNF lab closes to staff members. Please see me if you have an critical exposure need, or were impacted by the recent down time, there may be a few slots left the last 24 hours of operations. All Users are expected to 'Share the Ride' with other users needing access to maximize system throughput until we shut down for the holidays. * The following is our Startup plan for January 2009:* The SNF cleanroom opens for Users Tuesday January 6, 2009 at 7 AM. /*SEM4160: */This system will be available to users once the system is brought up and released by Ted Berg likely in the afternoon of Tuesday January 6, 2009. /*SEMHITACHI: */This system will be available to users once the system is brought up and released by Ted Berg likely late in the morning of Tuesday January 6, 2009. * /Ebeam:/* The Hitachi HL-700F writer, will likely remain off line to Users through the first weeks of the New Year. We will need to evaluate and perform further repairs to the system to return it to a working state. /*RAITH150: */Raith Field Service will be bringing up the system and running in the FE-Gun over January 5th and 6th. They will also complete E/O card and aperture and stigmation amplifier alignments late Tuesday afternoon. If everything goes to plan, _Raith Champions only_ will be able to access the system Tuesday evening starting at 18:00 hours through 10 AM Wednesday January 7, 2009. At that time I will start the qualification process for the Raith 150 system performance. All other Users scheduled on Coral will begin work at 3 PM Wednesday January 7, 2009. Please see me directly if you have questions. 2008 was a very busy year for the SNF Ebeam Lab and I continue to be amazed at the great Community that has developed and grown throughout the year. I am very pleased with the synergy in the Lab; especially the willingness of all Users to assist others, especially the very large number of new Users working on the systems. All Raith Champions should also be commended for their great efforts at assisting me to maintain a very high level of uptime and User support on the system 24/7 through the last year. Thank you for your interest in Ebeam Technologies here at SNF! You comments and suggestions are always welcomed. Happy Holidays, James W. Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Green_Ball.gif Type: image/gif Size: 257 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Red-ball.gif Type: image/gif Size: 384 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: xmooselights.gif Type: image/gif Size: 45777 bytes Desc: not available URL: From goeckeri at yahoo.com Fri Dec 12 16:36:33 2008 From: goeckeri at yahoo.com (Goeckeritz Jeremy) Date: Fri, 12 Dec 2008 16:36:33 -0800 (PST) Subject: Etching EBL patterns with STSetch Message-ID: <591812.4404.qm@web30408.mail.mud.yahoo.com> Hi, I'm trying to etch Silicon gratings about 250 nm wide several microns deep using a ZEP resist mask. Does anyone have experience in this area? I'm primarily looking for an etch rate, even a ballpark starting point would be useful. I'm headed back to Salt Lake City on Wednesday, so any help before then would be greatly appreciated. Best Regards, Jeremy University of Utah 50 S Central Campus Drive Salt Lake City, UT 84112 MEB Rm 1448 Office: 801-587-9462 Cell: 801-815-9981 From dlee76 at stanford.edu Fri Dec 12 17:41:07 2008 From: dlee76 at stanford.edu (Donkoun Lee) Date: Fri, 12 Dec 2008 17:41:07 -0800 Subject: Raith is released from 10:00 to 16:00 (today) and 10:00 to13:30 (tomorrow) Message-ID: Hi. My samples are broken. Sorry for late notice. Thanks. Don -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From arkam at stanford.edu Sat Dec 13 12:37:57 2008 From: arkam at stanford.edu (Arka Majumdar) Date: Sat, 13 Dec 2008 12:37:57 -0800 (PST) Subject: Raith free 1-2 Message-ID: <1029674317.3667391229200677743.JavaMail.root@zm06.stanford.edu> Finished early Arka From raneeyoo at stanford.edu Sat Dec 13 19:55:12 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Sat, 13 Dec 2008 19:55:12 -0800 (PST) Subject: headway does not work... Message-ID: <2039086887.3691341229226912221.JavaMail.root@zm06.stanford.edu> Hello! The headway chuck does not move. When I put a wafer on top of the chuck, it just suck it without moving. I tried to almost every single chuck, but it does not help. I also turned off and turned on again, but it did not help either. Please let me know if anyone knows how to fix it. I have a share a ride session from 8pm today, but I cannot use headway now. It took me around 30min, but no luck. thanks, Kyeongran From yiyangg at stanford.edu Sat Dec 13 21:10:26 2008 From: yiyangg at stanford.edu (Yiyang Gong) Date: Sat, 13 Dec 2008 21:10:26 -0800 (PST) Subject: raith session In-Reply-To: <2039086887.3691341229226912221.JavaMail.root@zm06.stanford.edu> Message-ID: <516587026.3694561229231426479.JavaMail.root@zm06.stanford.edu> Hi everyone, I have taken the raith session from lwchang since he/she has not shown up for one hour already. Thanks, Yiyang From raneeyoo at stanford.edu Sat Dec 13 21:20:32 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Sat, 13 Dec 2008 21:20:32 -0800 (PST) Subject: raith session In-Reply-To: <343899464.3695061229231923431.JavaMail.root@zm06.stanford.edu> Message-ID: <2127782284.3695121229232032909.JavaMail.root@zm06.stanford.edu> Hello! Headway is down due to motor problem, so I was waiting inside the room and just got out of there. I sent email to raith users saying I have a share a ride session from 8pm, but I may forgot to say raith. I am waiting for fixing the headway and modifying a layout to use my old sample which has resist. May I ask a favor? Do you think I can use some of them? Please let me know and thanks, Kyeongran 650-269-7791 ----- Original Message ----- From: "Yiyang Gong" To: "raith" Sent: Saturday, December 13, 2008 9:10:26 PM GMT -08:00 US/Canada Pacific Subject: raith session Hi everyone, I have taken the raith session from lwchang since he/she has not shown up for one hour already. Thanks, Yiyang From arkam at stanford.edu Sun Dec 14 09:21:31 2008 From: arkam at stanford.edu (Arka Majumdar) Date: Sun, 14 Dec 2008 09:21:31 -0800 (PST) Subject: Raith free from 10-12 Message-ID: <191946496.3709581229275291220.JavaMail.root@zm06.stanford.edu> Smaple not redy..sorry for the late notice Arka From jwc at snf.stanford.edu Mon Dec 15 11:45:39 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 15 Dec 2008 11:45:39 -0800 Subject: LAST CALL ON THE OLD PMMA BLENDS. Please use it up and get it onto your substrates, it all gets removed from the lab Wednesday morning. Message-ID: <4946B3E3.3020408@snf.stanford.edu> *Greetings Lab Members: * This is your last reminder to use up all the old PMMA blends in the SNF lab. The Plan is to start the new year with new bottles of material in the normal dilutions. As that most of the custom viscosity blends I have made for you are now 1 to 2 years old they will be removed and discarded as well. If you desire coat up your substrates for your next round of R&D and help us use the materials up today! * LAST CALL ON THE OLD PMMA BLENDS.* *Please use it up and get it onto your substrates, it all gets removed from the lab _Wednesday morning._ * Happy Holidays, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From kocabas at stanford.edu Mon Dec 15 12:16:01 2008 From: kocabas at stanford.edu (Sukru Ekin Kocabas) Date: Mon, 15 Dec 2008 12:16:01 -0800 (PST) Subject: Raith Will be Free in about an hour (circa 13:10) Message-ID: <2138619489.3810181229372161858.JavaMail.root@zm06.stanford.edu> I have a reservation until 15:00, but I won't need all that time. Raith will be free between 13:10-15:00. I've emptied that slot on coral. Ekin From jwc at snf.stanford.edu Tue Dec 16 17:23:07 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 16 Dec 2008 17:23:07 -0800 Subject: [Fwd: EIPBN (Marco Island FL) abstract deadline: Jan 9] Message-ID: <4948547B.6020406@snf.stanford.edu> Its that time again -- time to get the Three Beams abstracts submitted. Happy Holidays James -------- Original Message -------- Subject: EIPBN (Marco Island FL) abstract deadline: Jan 9 Date: Mon, 15 Dec 2008 13:21:58 -0500 From: eipbn at gir.eng.yale.edu To: jwc at snf.stanford.edu click here and send any blank message to get off this mailing list eipbn M A R C O I S L A N D M A R R I O T T B E A C H R E S O R T F L O R I D A, M A Y 26 - 29 2 0 0 9 E I P B N . O R G * *Dear Colleague, The EIPBN, or 3-Beams, Conference, now in its 50th year, is the premier conference on the science and technology of lithography and nanofabrication. Stephen Chou and I are honored to serve as the Conference and Program Chairs, respectively, and would like to invite you to participate in the meeting. This year the conference celebrates the 50th anniversary of Feynman's 1959 lecture, "There is Plenty of Room at the Bottom." The site of this conference is at the lovely resort of Marco Island, Florida. This is the final call for papers. Abstracts for papers are due on Friday, January 9, 2009 and can be submitted and reviewed on-line. Visit eipbn.org to submit your abstract. Details of the conference and call for papers can be found on our web site or in the tri-fold PDF printable document. Please mark your calendar for the dates between May 26-29, 2009. We look forward to seeing you in Florida! Sincerely, Elizabeth Dobisz and Stephen Chou *Stephen Chou* Joseph C. Elgin Professor of Engineering B412 Engineering Quad Princeton University Princeton, NJ 08544 Phone: 609-258-4416 E-mail: chou at princeton.edu *Elizabeth Dobisz* Hitachi San Jose Research Center 3403 Yerba Buena Rd. San Jose, CA 95135 Phone: 408-717-5492 Fax: 408-717-9066 E-mail: e.dobisz at gmail.com *The 53rd International Conference on Electron, Ion, and Photon Beam technology and**Nanofabrication, **Marco Island, Florida, May 26 - May 29, 2009 **ANNOUNCEMENT* *Background* The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and process technology and its use in micro and nanofabrication techniques and their applications. The conference brings together engineers and scientists from industries and universities from all over the world to discuss recent progress and future trends. The EIPBN conference is incorporated as a nonprofit organization in the state of New Jersey and is co-sponsored by the American Vacuum Society (www.avs.org ), in cooperation with the IEEE Electron Devices and Lasers and Electrooptics Societies and the Optical Society of America. It is organized by a steering committee that elects two new members each year from those that regularly attend the conference. *Format* The conference opens on Tuesday afternoon with a special commercial session which features vendors of materials and equipment relevant to the conference. The plenary session is on Wednesday morning. The remainder of the conference is organized in two parallel sessions. The length of presentation and discussion is 30 minutes for invited papers and 20 minutes for contributed papers. A special feature of the technical program is the poster session that includes invited and contributed papers. There is only one poster session, but posters will be displayed for informal viewing throughout the entire conference. No distinction is made between the importance of poster and oral presentations. *Technical Scope* Abstracts representing high quality original research are invited in the following areas: Immersion and EUV lithography Electron and ion beam lithography Sub-half wavelength "super resolution" optical lithography Photon- and charged-particle optics Metrology and alignment Resists and resist processing Plasma etching and deposition Nanofabrication techniques Maskless lithography Nanoimprint lithography, embossing and soft lithography Topics in nanofabrication and emerging technologies include: * Simulation and computer aided design for the Nanoscale Era * Nanophotonic devices Nanomagnetic devices * Novel ultrahigh density data storage devices * Molecular and low-dimensional nano-electronics * Bio-nanotechnology & hybrid bio/solid state devices * Micro and nano-scaled MEMS * Nanoparticle synthesis and assembly * Self-assembly and directed self-assembly * Nanofabrication for energy sources * Atomic and Molecular manipulation * Optical tweezers *Conference Registration* We strongly encourage you to register on line by using our website *www.eipbn.org.* * *Early registration and special student rates are available. The early registration deadline is May 16, 2009. *Conference Location* *Marco Island Marrott Beach Resort**400 S Collier Blvd**Marco Island, FL 34145* *Phone: (239) 394-2511* *Fax: (239) 642-2672 *www.marcoislandmarriott.com *On-line hotel registration is available on the EIPBN website* *Abstract Submission* The quality of the abstracts will form the basis for selection of papers for the conference and will be peer reviewed according to the following criteria: Originality of work Specific results achieved and described Potential impact and interest to the attendees *Abstracts should be submitted online at **www.eipbn.org* Abstracts are limited to one page of text (12 point or larger type) and a second, optional page with up to four figures. *Abstract deadline: January 9, 2009* Late submissions may be considered but only if they report truly outstanding results. Please prepare abstracts carefully and describe accomplishments specifically. Authors will be notified of acceptance by April 11, 2009. Earlier notification will be provided to those authors providing an e-mail address. *Micrograph Contest* On a less technical level, EIPBN offers the opportunity to immortalize your favorite micrograph(s). Categories and previous winners are described on our website. *Manuscript Submission* Manuscripts must be submitted at the conference and will be subjected to a critical peer review before they can be accepted for publication in the Nov/Dec 2009 issue of the Journal of Vacuum Science and Technology. Please note that authors are required to pay a publication charge of about $100 per page. *Student Support* Limited funds are available to support student travel. The Conference Chair must receive a letter requesting support from the student's advisor by January 9, 2009. Conference Chair Stephen Y. Chou Joseph C. Elgin Professor of Engineering B412 Engineering Quad Princeton University Princeton, NJ 08544 Phone: 609-258-4416 E-mail: chou at princeton.edu Program Chair Elizabeth A. Dobisz Hitachi San Jose Research Center 3403 Yerba Buena Rd. San Jose, CA 95135 Phone: 408-717-5492 Fax: 408-717-9066 E-mail: e.dobisz at gmail.com *To add your name to the mailing list, please mail a business card or e-mail to the Conference Chair.* *Conference Site and Area Attractions*The 2009 conference will be held at the Marco Island Marriott Beach Resort. The resort is on the beach on the Gulf of Mexico coast of Florida. Golf, tennis, swimming, boating, and snorkeling are on location. Restaurants, shopping and parks are nearby. It is accessible from three major airports. It is a relaxing paradise location for everyone. The conference rate is available on the weekends before and after the conference to accommodate EIPBN attendees. For more information visit: www.marcoislandmarriott.com www.marcoislandcity.com www.marcoislandonline.com -------------- next part -------------- An HTML attachment was scrubbed... URL: