From jwc at snf.stanford.edu  Tue Jan  8 10:12:45 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 08 Jan 2008 10:12:45 -0800
Subject: starting a half hour late I do want my session 10 - 2 PM.
Message-ID: <4783BD1D.7030702@snf.stanford.edu>

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From bilee at stanford.edu  Tue Jan  8 15:45:55 2008
From: bilee at stanford.edu (Byoungil Lee)
Date: Tue, 8 Jan 2008 15:45:55 -0800
Subject: Raith released 6pm-11pm
Message-ID: <002601c85250$9c3c7bd0$946040ab@BILEEOFFICE>

Sample is not ready.

Thanks,
Byoungil
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From jwc at snf.stanford.edu  Tue Jan  8 17:54:22 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 08 Jan 2008 17:54:22 -0800
Subject: restriction on operation acceleration voltage increased to 20 keV
 for all Users.
In-Reply-To: <4783BD1D.7030702@snf.stanford.edu>
References: <4783BD1D.7030702@snf.stanford.edu>
Message-ID: <4784294E.9040808@snf.stanford.edu>

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From anikak at stanford.edu  Wed Jan  9 18:55:10 2008
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Wed, 09 Jan 2008 18:55:10 -0800
Subject: raith free 8-10:30 tonight
Message-ID: <20080109185510.q2748ldvvo8w888g@webmail.stanford.edu>

will finish early.


From shinichikoseki at gmail.com  Wed Jan  9 20:41:04 2008
From: shinichikoseki at gmail.com (Shinichi Koseki)
Date: Wed, 9 Jan 2008 20:41:04 -0800
Subject: raith free 8-10:30 tonight
In-Reply-To: <20080109185510.q2748ldvvo8w888g@webmail.stanford.edu>
References: <20080109185510.q2748ldvvo8w888g@webmail.stanford.edu>
Message-ID: <3b532e5a0801092041i76b2e24dyf6243ac243191ed3@mail.gmail.com>

Taken, thanks !

Shinichi

On Jan 9, 2008 6:55 PM, Anika Kinkhabwala <anikak at stanford.edu> wrote:
> will finish early.
>


From bryane at stanford.edu  Thu Jan 10 11:34:24 2008
From: bryane at stanford.edu (Bryan Ellis)
Date: Thu, 10 Jan 2008 11:34:24 -0800
Subject: Raith free Saturday 12:30pm-5:30pm
Message-ID: <22cc95d90801101134i7a3a7daav9d2c9d32abf71c28@mail.gmail.com>

I can't use this reservation

Bryan
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From linyouc at stanford.edu  Fri Jan 11 09:03:42 2008
From: linyouc at stanford.edu (linyouc at stanford.edu)
Date: Fri, 11 Jan 2008 09:03:42 -0800
Subject: Raith Free till 10:00am (Friday)
Message-ID: <20080111090342.u40ve6oms84sgsoc@webmail.stanford.edu>


Done earlier.

Linyou
-- 
Linyou Cao
PhD candidate
Department of Materials Science and Engineering
Brongersma Group
Stanford University


From jwc at snf.stanford.edu  Fri Jan 11 09:52:24 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 11 Jan 2008 09:52:24 -0800
Subject: Problem raith SNF 2008-01-11 00:52:07: Error in Blanking
Message-ID: <4787ACD8.6060702@snf.stanford.edu>

Greetings and Good Morning,

I tried to pick up when you called last night but could not get a 
carrier signal from where I was staying.

Likely this is either a switch on the ELPHY+ pattern generator or your 
login state in your user.vbd has become reversed.

Going in to check this out at 10 AM.  next User come on down to load and 
we can go over this together.

Good Day,

James

bilee at snf.stanford.edu wrote:
> The "Blank Beam" button on Raith150 software doen't work properly. "Beam On" command on Raith150 software actually blanks the beam (SEM image on LEO program is blanked), and "Beam Off" command on Raith150 removes the blank and SEM image on LEO software becomes on.
>
>   
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From xinranw at stanford.edu  Sat Jan 12 13:51:13 2008
From: xinranw at stanford.edu (Xinran Wang)
Date: Sat, 12 Jan 2008 13:51:13 -0800
Subject: free Tue from 16:30
Message-ID: <22ffcd060801121351w57cd1de7m82e298bd1e8d1391@mail.gmail.com>

Sample was damaged, not able to catch the session.

Xinran
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From zhangy at stanford.edu  Sat Jan 12 13:56:27 2008
From: zhangy at stanford.edu (Yuan Zhang)
Date: Sat, 12 Jan 2008 13:56:27 -0800
Subject: Raith free now till 5:30pm
Message-ID: <20080112215626.74AE765BF9C@smtp2.stanford.edu>

Bad sample. 

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From raneeyoo at stanford.edu  Sat Jan 12 14:24:06 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Sat, 12 Jan 2008 14:24:06 -0800
Subject: free Tue from 16:30
In-Reply-To: <22ffcd060801121351w57cd1de7m82e298bd1e8d1391@mail.gmail.com>
References: <22ffcd060801121351w57cd1de7m82e298bd1e8d1391@mail.gmail.com>
Message-ID: <20080112142406.x7nzcbb0yasss8gk@webmail.stanford.edu>

I will take it.
thanks,
Kyeongran


Quoting Xinran Wang <xinranw at stanford.edu>:

> Sample was damaged, not able to catch the session.
>
> Xinran
>




From raneeyoo at stanford.edu  Sat Jan 12 14:28:10 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Sat, 12 Jan 2008 14:28:10 -0800
Subject: raith free from 16:00 to 19:00 on Sunday
Message-ID: <20080112142810.yczjmghd34s0c4g0@webmail.stanford.edu>

Raith is free from 16:00 to 19:00 on Sunday because I took Tuesday  
released slot.
thanks,
Kyeongran


From bilee at stanford.edu  Sun Jan 13 18:52:45 2008
From: bilee at stanford.edu (Byoungil Lee)
Date: Sun, 13 Jan 2008 18:52:45 -0800
Subject: raith free now - 10pm
References: <20080112142810.yczjmghd34s0c4g0@webmail.stanford.edu>
Message-ID: <002b01c85658$8a68e4a0$946040ab@BILEEOFFICE>

Sorry for the late notice.
Sample is not ready.

Thanks,
Byoungil


From shinichikoseki at gmail.com  Sun Jan 13 19:53:11 2008
From: shinichikoseki at gmail.com (Shinichi Koseki)
Date: Sun, 13 Jan 2008 19:53:11 -0800
Subject: Stage Chamber Vacuum problem
Message-ID: <3b532e5a0801131953l20c21c7cxb1b8b78485369c65@mail.gmail.com>

I got the load lock error, and could not load the sample.

When I tried to load the sample, the Raith computer gave me "Error
Load Lock" tab
saying "Vacuum in the stage chamber is not ready.
Please start pumping and if ready press retry."

The Vac status (SEM computer -> SEM control -> Vacuum tab) is "At air".
So, I hit "pump", and the turbo pump started, but after 5mins it stopped and
the vacuum status is still "at air".

Vacuum Ready lamp is off at the Airlock Control unit (left side of the
Raith machine).
I hit the red reset button there, but the situation did not improve.
(Error lamp is flashing green)

I could not repair the system. (I could not call to James because my
cell's battery is out...)

regards,

Shinichi


On Jan 13, 2008 6:52 PM, Byoungil Lee <bilee at stanford.edu> wrote:
> Sorry for the late notice.
> Sample is not ready.
>
> Thanks,
> Byoungil
>


From jesselu at stanford.edu  Mon Jan 14 10:40:56 2008
From: jesselu at stanford.edu (Jesse Lu)
Date: Mon, 14 Jan 2008 10:40:56 -0800
Subject: Stage Chamber Vacuum problem
In-Reply-To: <3b532e5a0801131953l20c21c7cxb1b8b78485369c65@mail.gmail.com>
References: <3b532e5a0801131953l20c21c7cxb1b8b78485369c65@mail.gmail.com>
Message-ID: <df72e81b0801141040h3a8ef86em6d2b37a2b4952073@mail.gmail.com>

After talking on the phone with James I put the Raith in red-light/shutdown.
The system doesn't seem able to pull vacuum in the main chamber possibly due
to overheating of the turbopump or some other mechanical problem.

Jesse

On Jan 13, 2008 7:53 PM, Shinichi Koseki <shinichikoseki at gmail.com> wrote:

> I got the load lock error, and could not load the sample.
>
> When I tried to load the sample, the Raith computer gave me "Error
> Load Lock" tab
> saying "Vacuum in the stage chamber is not ready.
> Please start pumping and if ready press retry."
>
> The Vac status (SEM computer -> SEM control -> Vacuum tab) is "At air".
> So, I hit "pump", and the turbo pump started, but after 5mins it stopped
> and
> the vacuum status is still "at air".
>
> Vacuum Ready lamp is off at the Airlock Control unit (left side of the
> Raith machine).
> I hit the red reset button there, but the situation did not improve.
> (Error lamp is flashing green)
>
> I could not repair the system. (I could not call to James because my
> cell's battery is out...)
>
> regards,
>
> Shinichi
>
>
> On Jan 13, 2008 6:52 PM, Byoungil Lee <bilee at stanford.edu> wrote:
> > Sorry for the late notice.
> > Sample is not ready.
> >
> > Thanks,
> > Byoungil
> >
>
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From jwc at snf.stanford.edu  Mon Jan 14 12:15:49 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 14 Jan 2008 12:15:49 -0800
Subject: Raith system off line through tonight.  Vacuum pump system problems,
 mechanical pump...
Message-ID: <478BC2F5.50206@snf.stanford.edu>

Good Afternoon,

Mechanical pump or sensing issues have us off line this afternoon.  I am 
trying to recover system vacuum in attempt to bring system back up.

More information at 5 PM...

James Conway

-------- Original Message --------
Subject: 	Shutdown raith SNF 2008-01-14 12:07:19: mechanical pumping and 
sensing issues
Date: 	Mon, 14 Jan 2008 12:07:19 -0800
From: 	jwc at snf.stanford.edu
To: 	raith-pcs at snf.stanford.edu



Users last evening reported issues during session...  
Loss of vacuum to chamber and isolation of FE-Gun section.  
Several attempts to restart vacuum system encountered thermal overload of mechanical vacuum pump and/or 
time outs of vacuum target set points while waiting for turbo pump to come to speed. 
Suspect worn out mechanical pump motor or thermal switch or less likely possible failed penning gage in system chamber.
Three resets have encountered same problem.  Allowing pump to cool for an hour.  

Replacement mechanical pump requested from RAITH USA Inc asking for shipment on today's FED-X for overnight.  Will they make the truck?!!

James 


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From jwc at snf.stanford.edu  Mon Jan 14 15:31:30 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 14 Jan 2008 15:31:30 -0800
Subject: Raith Status  15:30 hours Monday -- System down for repairs and waiting
 for parts.
Message-ID: <478BF0D2.7090608@snf.stanford.edu>

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From jwc at snf.stanford.edu  Wed Jan 16 16:31:59 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 16 Jan 2008 16:31:59 -0800
Subject: ANNOUNCEMENT:  "Take A Spin with Me" -- Ebeam Resist Handling Training
 on the Headway.  Tuesday  January 29, 2008 from 10:15  - 12:30
Message-ID: <478EA1FF.3010205@snf.stanford.edu>

*ANNOUNCEMENT:  "Take A Spin with Me" -- Resist Handling Training on the 
Headway Coater.*

Greetings SNF Lab Users,

I will be conducting my bi-monthly *"Take A Spin with Me" *training 
class Tuesday January 29, 2008 from 10:15 AM  - 12:30 PM. There is a 
sign up sheet posted on the white board in my office if you desire to 
sign up in advance.

This is a great opportunity for you to get acquainted with the specific 
points to employ when working with our Ebeam or Optical Resist materials 
in order to obtain high quality thin film coatings over your wafers for 
Electron Beam, Scanning Probe (SPL), and optical Nano-Lithography. In 
these applications accurate control of polymer thickness is important in 
order to obtain consistent high quality lithography results.

We will be conducting this training on the Headway Spin Coater.  Users 
attending this session will gain their qualification on this tool and 
also learn to perform thin film measurements on the Nanospec TFA 
measurement tool.
This is a Hands-On Lab Session, please have your substrates clean and 
ready to coat on the Headway Coater.

Schedule of Events:

10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL 
performing Pirhana substrate cleans and HF etching of the intrinsic 
native oxide on Silicon wafers.  All users must have their substrates 
cleaned and ready to go for spinning by the session time; either coming 
out of the 150 degree Singe oven, or if you are working on oxides or 
nitrides, coming out of the YES HMDS Prime oven directly.

11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you 
desire for your work.

12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer

All interested parties are welcome to attend this session.
Thank you for your interest in Ebeam and Optical Lithography at Stanford 
Nanofabrication Facility,

James W. Conway
Ebeam Technology Group
Stanford Nanofabrication Facility
650-725-7075  office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31

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From jwc at snf.stanford.edu  Thu Jan 17 18:59:55 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 17 Jan 2008 18:59:55 -0800
Subject: [Fwd: Problem raith SNF 2008-01-17 18:25:30: system in pumpdown and
 initial test 
Message-ID: <4790162B.8090402@snf.stanford.edu>

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From lsmoore at stanford.edu  Fri Jan 18 11:38:28 2008
From: lsmoore at stanford.edu (Lindsay Moore)
Date: Fri, 18 Jan 2008 11:38:28 -0800
Subject: raith free 7:30-9:30 tonight
Message-ID: <4dfce5b30801181138qeb9ed06lf2bff23407987737@mail.gmail.com>

I need 30kV.
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From raneeyoo at stanford.edu  Fri Jan 18 11:49:42 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Fri, 18 Jan 2008 11:49:42 -0800
Subject: raith free 19:30-22:oo Saturday
In-Reply-To: <4dfce5b30801181138qeb9ed06lf2bff23407987737@mail.gmail.com>
References: <4dfce5b30801181138qeb9ed06lf2bff23407987737@mail.gmail.com>
Message-ID: <20080118114942.sj968k6zi8csswk0@webmail.stanford.edu>

I reserved morning session on Saturday instead of this.
thanks,
Kyeongran



From ytcheng at stanford.edu  Fri Jan 18 12:20:16 2008
From: ytcheng at stanford.edu (Yao-Te Cheng)
Date: Fri, 18 Jan 2008 12:20:16 -0800
Subject: raith free till 1:30pm
Message-ID: <47910A00.2040706@stanford.edu>

done early.

Yao-Te


From jwc at snf.stanford.edu  Fri Jan 18 12:47:45 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 18 Jan 2008 12:47:45 -0800
Subject: Canceling our RAITH Session on Monday January 21, 2008 from 13:00
 - 20:00 hours
Message-ID: <47911071.3000005@snf.stanford.edu>

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From jwc at snf.stanford.edu  Fri Jan 18 13:14:33 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 18 Jan 2008 13:14:33 -0800
Subject: raith free 7:30-9:30 tonight -- need 30kV.
In-Reply-To: <4dfce5b30801181138qeb9ed06lf2bff23407987737@mail.gmail.com>
References: <4dfce5b30801181138qeb9ed06lf2bff23407987737@mail.gmail.com>
Message-ID: <479116B9.1090502@snf.stanford.edu>

Hello Lindsay,

I expect we should be able to work at 30 keV by mid week next week.  
Need Gun section vacuum levels to be below 8E-010 Torr.  I tested the 
system to 25 kV this morning and vacuum levels are fine but emission on 
the FE-GUN is still very low.  It will take some time to run in this 
FE-Gun tip, in normal practice we normally put on 250 hours before 
running up the emission to normal values.  This week and next I will be 
slowly bringing the Extraction voltage upwards in 100 volts steps per 
day till I hit my target values.

All the Best,

James Conway



Lindsay Moore wrote:
> I need 30kV.
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From jwc at snf.stanford.edu  Fri Jan 18 13:39:10 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 18 Jan 2008 13:39:10 -0800
Subject: Raith Status 13:00 hours Friday January 18, 2008 -- System is UP
 tested and calibrated.  Acceleration Voltage not to exceed 20 keV.
Message-ID: <47911C7E.8020701@snf.stanford.edu>

Greetings Raith Community:

I wish to thank those individuals whom help me this past week in 
troubleshooting the components of the vacuum system on the RAITH tool.   
With all the software and set points that it takes to run the system 
when problems are encountered it can be difficult to trace to the actual 
problem.  I have added some more vacuum sensing to the system so we can 
more easily monitor vacuum levels at the mechanical pump lines.  There 
was a real team effort within the Maintenance Group here at SNF to help 
me get the system back up, which I very much appreciate.  Many Thanks!

The final diagnosis of what brought the system down Monday morning is 
that one of the bearings sets in the turbo pump, which was only two 
weeks old, had developed unusual wear and was working itself loose 
inside the pump. In continued operation it was eventually was unable to 
reach suitable speed and could not make the vacuum set point in the time 
allowed within the software. This event then tripped a automatic shut 
down into standby mode and took the pumps off line.  Initially it 
appeared to be a vacuum sense or mechanical pump thermal overheat problem.

Special Thanks also to Paul Flood at Pro-Vac, Santa Cruz, CA whom 
provided us with a qualified and tested rebuilt Turbo pump as goodwill 
and without having a PO in hand!
He will rebuild the old pump and return it to RAITH USA Inc.


*System is now up, tested, and calibrations have been checked and 
available to all users.  *
Users will note that FE-GUN emission levels and Beam Current 
measurements are quite low compared to the old tip we replaced at the 
Holiday shutdown. I expect it will take several weeks of gentle care and 
adjustments to approach the levels we had before.  Users are reminded 
that this will not change any dose delivered on the system just the time 
it takes to reach the specified exposure dose.
  I will continue to make regular adjustments increasing the Extraction 
Voltage applied to the FE-GUN until we reach normal levels.

*ALL USERS ARE RESTRICTED TO NO MORE THAN 20 keV ACCELERATION VOLTAGE 
UNTIL FURTHER NOTICE.* 
I PLAN TO BRING THIS UP TO 25 keV ON TUESDAY AFTERNOON NEXT WEEK AND 
TEST FOR 30 keV ONCE GUN VACUUM IS BELOW 8E-010 TORR LEVEL.

Thank you for your support!  Have a nice holiday weekend. 

James Conway


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From raneeyoo at stanford.edu  Sat Jan 19 10:05:56 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Sat, 19 Jan 2008 10:05:56 -0800
Subject: raith free from 11:30-15 today
In-Reply-To: <47911C7E.8020701@snf.stanford.edu>
References: <47911C7E.8020701@snf.stanford.edu>
Message-ID: <20080119100556.j0c3hfmgg04ks8cw@webmail.stanford.edu>

sample issue
sorry for short notice.
thanks,
Kyeongran


From englund at stanford.edu  Sat Jan 19 10:16:08 2008
From: englund at stanford.edu (Dirk Englund)
Date: Sat, 19 Jan 2008 10:16:08 -0800
Subject: raith free from 11:30-15 today
In-Reply-To: <20080119100556.j0c3hfmgg04ks8cw@webmail.stanford.edu>
References: <47911C7E.8020701@snf.stanford.edu> <20080119100556.j0c3hfmgg04ks8cw@webmail.stanford.edu>
Message-ID: <FFA08F32-D93E-41ED-9775-F7808746C306@stanford.edu>

I'll take it.  thanks.

Dirk

On Jan 19, 2008, at 10:05 AM, Kyeongran Yoo wrote:

> sample issue
> sorry for short notice.
> thanks,
> Kyeongran

Grad. Student in Appl. Physics - Stanford U.
cvitae.org/englund/


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From kocabas at stanford.edu  Mon Jan 21 04:57:54 2008
From: kocabas at stanford.edu (S. Ekin Kocabas)
Date: Mon, 21 Jan 2008 04:57:54 -0800
Subject: Today 8-13 Free
Message-ID: <479496D2.9050109@stanford.edu>

I'm releasing my reservation on Mon, Jan 21, 8-13.
I'm aware that this is an extremely late notification, but instead of 
using the machine without a proper sample-purpose pair I might as well 
not use it. I hope someone else can make better use of Raith, if not 
please charge the account I use with the necessary amount.

Ekin


From linyouc at stanford.edu  Mon Jan 21 11:39:58 2008
From: linyouc at stanford.edu (linyouc at stanford.edu)
Date: Mon, 21 Jan 2008 11:39:58 -0800
Subject: Raith 13:00-15:00 today free
Message-ID: <20080121113958.s5hf1rtl48o4gwks@webmail.stanford.edu>


Sample not ready yet.

Linyou
-- 
Linyou Cao
PhD candidate
Department of Materials Science and Engineering
Brongersma Group
Stanford University


From anikak at stanford.edu  Mon Jan 21 11:43:13 2008
From: anikak at stanford.edu (anika kinkhabwala)
Date: Mon, 21 Jan 2008 11:43:13 -0800
Subject: Raith free tomorrow 4a-9a
Message-ID: <fe7ed2cd0801211143g690b0dcar84d320208dec6c70@mail.gmail.com>


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From raneeyoo at stanford.edu  Tue Jan 22 10:56:27 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Tue, 22 Jan 2008 10:56:27 -0800
Subject: raith free from 21-24 tonight
Message-ID: <20080122105627.hkueus8740oc8oo4@webmail.stanford.edu>



----- Forwarded message from MAILER-DAEMON at stanford.edu -----
     Date: Tue, 22 Jan 2008 10:51:51 -0800 (PST)
     From: Mail Delivery System <MAILER-DAEMON at stanford.edu>
Reply-To: Mail Delivery System <MAILER-DAEMON at stanford.edu>
  Subject: Undelivered Mail Returned to Sender
       To: raneeyoo at stanford.edu

This is the mail system at host webmail04.stanford.edu.

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From: Kyeongran Yoo <raneeyoo at stanford.edu>
Subject: raith released from 21-24 tonight
Date: Tue, 22 Jan 2008 10:51:51 -0800
Size: 838
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From xinranw at stanford.edu  Tue Jan 22 20:48:31 2008
From: xinranw at stanford.edu (Xinran Wang)
Date: Tue, 22 Jan 2008 20:48:31 -0800
Subject: free saturday 18:00
Message-ID: <22ffcd060801222048t1f31c267kc75070e8bc19e2ac@mail.gmail.com>

Sample could be done by hitachi, so don't need raith session any more.

Xinran
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From jwc at snf.stanford.edu  Wed Jan 23 11:13:03 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 23 Jan 2008 11:13:03 -0800
Subject: ANNOUNCEMENT: RAITH Group XXX -- Intensive 4 day short course. Tuesday
 and Thursdays 10 - 6 PM starting Tuesday February 5th, 2008 at 10  AM in
 CIS 201
Message-ID: <479791BF.5050300@snf.stanford.edu>

*Greetings RAITH Group XXX:

**If you are listed in the To: section of this email you are confirmed 
to be in RAITH Group** XXX -- the next RAITH** Four Day Basic User Short 
Course.
If you are listed in the CC: section of this email, I am** still ** in 
need of further information or a commitment from you, and hope to add 
you in the next class.
Any RAITH users wishing to attend are also welcome if you desire a 
review of operations on the RAITH 150 system.
**
We wish to invite all other interested parties to the Tuesday morning 
lecture session from 10:00 AM  - 12:30 PM,  and the following Demo Layer 
One training from 2 PM - 6 PM in the afternoon.  All others are also 
welcome to attend as observers the other 'Hands-On' sessions through the 
week.
*
*If you are listed in the To: section of this email:
*This is your first reminder and confirmation of your commitment for 
attending the RAITH Group XXX Training course to be held starting 
February 5, 2008
_*You are expected to attend all sessions in order to gain the 
experience and skills you will need to qualify on the RAITH 150 system.*

_Users are also encouraged to attend the *"Take a Spin with Me"* 
<http://snf.stanford.edu/cgi-bin/ezmlm-cgi?430:mss:73:200801:bleokmmlinkjilfgnknc> 
class covering Ebeam Resist handling procedures. I am next holding this 
class on January 29th from 10:15 - 12:30 PM in the SNF cleanroom. There 
is a separate sign up for this class on the white board in my office at 
CIS 31.

Thank you for your interest in Electron Beam Technologies at the 
Stanford Nanofabrication Facility,

James Conway
Ebeam Technology Group
650-725-7075
---------------------------------

*   **RAITH Group** XXX **Schedule: **   *

*Raith 150 Basic Users Training -- Intensive 4 Day Short Course*

*Tuesdays and Thursdays as follows:
Week One: Tuesday February 5th and Thursday February 7th, 2007 from 10 - 
6 PM
Week Two: Tuesday February 12th and Thursday February 14th, 2007 from 10 
- 6 PM.
*

*The Plan of Action:
*We will start out with a half day of lecture in the morning Tuesday; 
quickly moving into entirely 'hands on' operations training through the 
next two weeks.
We will break for lunch at various times, while the system is writing, 
so plan to be flexible with your other outside commitments.  You should 
have started working on your GDS II patterns and preparing PMMA on your 
substrates if you wish to write on your material. Please bring your 
patterns and materials to the 'Hands-On' sessions. Some afternoons we 
may also be able to finish earlier,  letting the system write on its own 
to the end of our reservations on the system.*
*

* Schedule:*
Tuesday February 5, 2008:
10:00 - 12:30   Session 1:  Basic Users Course Lecture  -- CIS-X 201
14:00 - 18:00  Session 2:  RAITH System Demonstration - Layer One -- 
EBEAM LAB CIS L104

Thursday February 7, 2008:
10:00 - 12:30 Session 3:  RAITH System Demonstration - Layer Two: 
OVERLAY -- EBEAM LAB CIS L104
14:00 - 18:00 Session 4:  Hands On training session One -- EBEAM LAB CIS 
L104

Tuesday February 12, 2008:
10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104
14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB 
CIS L104

Friday February 14, 2008:
10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS 
L104
14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS 
L104

Individual Qualification Sessions will be held after this class where 
you can demonstrate your skill on the system to me and gain your login 
to the system.


I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU 
HAVE NOT ALREADY RECEIVED ONE YET.
You can stop by my office hour and pick up a copy of these training 
materials during my daily office hour. (8:30 - 9:30 AM CIS 31) Just 
bring along a USB drive!

-------------------------------------------------------------------------------------------------------------------------------------------

*RAITH Group XXX Starting Date February 5, 2008:**
BASIC USER INTENSIVE FOUR DAY SHORT COURSE.
tentative class listing due to pending certification of prerequisites 
completed.
*

Trudie Wang trudie at stanford.edu <mailto:trudie at stanford.edu>  Coral: trudie
Phone: 510-852-4058 Peumans Group
Project: lateral multi-junction nanowire nano-concentrator photovoltaic

Mike Preiner  mpreiner at stanford.edu <mailto:mpreiner at stanford.edu> Coral 
mpreiner Phone: 650-387-7729 cell
Nick Melosh Project: Plasmonic Waveguide for molecular electronics.

Vincent Yi Wei Chen chenyw at stanford.edu <mailto:chenyw at stanford.edu> 
Coral: vincentcyw Phone: 650-498-8206
Paul McIntyre Group
Project: Fabricating nanowire biosensors using e-beam to put patterns of 
small gold dots - ~70nm in diameter in a trench so that nanowires can be 
grown later.








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From jwc at snf.stanford.edu  Wed Jan 23 12:08:04 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 23 Jan 2008 12:08:04 -0800
Subject: Comment ebeam SNF 2008-01-23 11:36:38: last drop of PMMA 495
 5A used
Message-ID: <47979EA4.2060206@snf.stanford.edu>


Greetings PMMA Users:

We just received the new source bottles of 495 and 950K Molecular weight 
PMMA's about a week ago.
 I will be packaging them up and restocking our supplies in the 
cleanroom later this afternoon.

as they say, 'Its good to the last drop'

Best,

JWC




From zhangy at stanford.edu  Fri Jan 25 00:15:26 2008
From: zhangy at stanford.edu (Yuan Zhang)
Date: Fri, 25 Jan 2008 00:15:26 -0800
Subject: Raith free till 8am
Message-ID: <20080125001526.fciemaj39cwowss8@webmail.stanford.edu>

My sample was done early, and nobody reserves till 8:30am Friday morning.


Yuan Zhang
EE department



From chandran at gmail.com  Fri Jan 25 06:17:24 2008
From: chandran at gmail.com (anu chandran)
Date: Fri, 25 Jan 2008 06:17:24 -0800
Subject: Free from 9:30am - 1 pm today
Message-ID: <ecc0293e0801250617v704e4cdcwf4126c9cd2b42554@mail.gmail.com>

Came in early as the machine was not in use.
Regards
anu

-- 
Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851
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From chandran at stanford.edu  Fri Jan 25 06:18:16 2008
From: chandran at stanford.edu (Anu Chandran)
Date: Fri, 25 Jan 2008 06:18:16 -0800
Subject: Free from 9:30am - 1 pm today
In-Reply-To: <ecc0293e0801250617v704e4cdcwf4126c9cd2b42554@mail.gmail.com>
References: <ecc0293e0801250617v704e4cdcwf4126c9cd2b42554@mail.gmail.com>
Message-ID: <ecc0293e0801250618i1a7abbf2ne61b5d7a0a23cdde@mail.gmail.com>

Came in early as the machine was not in use.
Regards
anu

-- 
Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851



-- 
Anu Chandran
Materials Science & Engineering
476 Lomita Mall,McCullough Building
Stanford CA 94305-4045
T:6507236466 Lab
T:6507234874 Office
F:6507249851
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From jwc at snf.stanford.edu  Fri Jan 25 10:49:00 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 25 Jan 2008 10:49:00 -0800
Subject: Note to Users on the two blends of Microchem 5% PMMA in Anisole.
  Two different molecular weights are available for your usage.
Message-ID: <479A2F1C.6090905@snf.stanford.edu>


Good Morning to all SNF 5% PMMA Users:

I just wanted to remind All PMMA Users that we currently have in the 
Cleanroom two blends of 5% PMMA in Anisole manufactured by Microchem:

1.  5% 495K Molecular Weight PMMA in Anisole 
<http://snf.stanford.edu/Process/Lithography/EBResist/5P495kMWPMMA-Anisole.pdf> 
-- This is our standard PMMA resist and if you use the default spin 
speed in our process sheet you will obtain thin films on the order of 
300 nm in thickness.
     This is suitable for fine lines down to below 50 nm and should be 
employed if you are performing metal lift-off with stack thicknesses 
greater than 200 nm, or if you prefer to perform RIE for etch processes 
as deep as 400 - 500 nm into Silicon.  This material can also be 
employed as the lower layer in a dual layer stack for thick metal lift 
off processing.

I have stocked a new bottle of this material into the SNF cleanroom 
yesterday and it is from the same Microchem Batch Lot number as the 
previous bottles we have had in the lab this last year.

2. 5% 950K Molecular Weight PMMA in Anisole 
<cid:part1.04010606.08020409 at snf.stanford.edu> - This material is the 
same PMMA material and is blended to the same 5% solids content in 
Anisole as the 495K, but formulated to a longer polymeric chain length 
which results in a higher molecular weight. It is suitable for all 
processes with the exception of the dual layer processes used for thick 
metal lift-off processing. In my initial measurements its spin speed as 
a function of thickness is slightly thicker than the 5% 495K PMMA 
material. My new Single Layer 5% 950K PMMA Ebeam resist process is 
attached as a MS word document for your review. 
Your comments are invited.

This material is currently under evaluation to determine if we can 
obtain improved performance leading to better ultimate resolution in 
feature size or an improved RIE etching characteristic.  I have this 
material currently stocked in the SNF Fab and Users are encouraged to 
give this material a trial using their patterns and processes. Please be 
sure to provide us with your feedback and images and data from your best 
results to add to SNF Ebeam Resist Process Suite on our website.

Thank you for your interest in Ebeam Technologies here at the Stanford 
Nanofabrication Facility,

James Conway






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From jwc at snf.stanford.edu  Wed Jan 30 10:31:23 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 30 Jan 2008 10:31:23 -0800
Subject: We are letting the RAITH coral schedule slip and hour to allow users
 a chance to complete tasking after LEO SEM problems...
Message-ID: <47A0C27B.2050705@snf.stanford.edu>

Hello Raith Users:

We encountered a minor imaging problem on the LEO SEM on the RAITH 
Tool.  The L-REM control firmware hung up and the user on the tool was 
delayed in completing his tasking.
Kathryn Todd and Yao-Te-Cheng are letting that user use an additional 
hour to complete their Ebeam write. We will then let the schedule slide 
back by an hour. 
We should be able to catch back up to the schedule by late this afternoon.

Thank you,

James Conway


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From mpovinel at stanford.edu  Wed Jan 30 10:46:58 2008
From: mpovinel at stanford.edu (Michelle Povinelli)
Date: Wed, 30 Jan 2008 10:46:58 -0800
Subject: Raith free tomorrow 9am-10am
In-Reply-To: <47A0C27B.2050705@snf.stanford.edu>
References: <47A0C27B.2050705@snf.stanford.edu>
Message-ID: <729FF1F4-1C54-482C-B11B-C9584225C298@stanford.edu>

I shortened my reservation; now 9am-10am is free.


On Jan 30, 2008, at 10:31 AM, James Conway wrote:

> Hello Raith Users:
>
> We encountered a minor imaging problem on the LEO SEM on the RAITH  
> Tool.  The L-REM control firmware hung up and the user on the tool  
> was delayed in completing his tasking.
> Kathryn Todd and Yao-Te-Cheng are letting that user use an  
> additional hour to complete their Ebeam write. We will then let the  
> schedule slide back by an hour.
> We should be able to catch back up to the schedule by late this  
> afternoon.
>
> Thank you,
>
> James Conway
>
>

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From jwc at snf.stanford.edu  Wed Jan 30 12:02:36 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 30 Jan 2008 12:02:36 -0800
Subject: please return the raith dongles to me - I have Users waiting to borrow
 the dongles to use the off line SW.
Message-ID: <47A0D7DC.2000306@snf.stanford.edu>

Raith Users whom have the dongle:

Please return the raith dongles to me ASAP - I have Users waiting to 
borrow the dongles to use the off line SW.

Thank you,

JWC

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