Stage Chamber Vacuum problem
jesselu at stanford.edu
Mon Jan 14 10:40:56 PST 2008
After talking on the phone with James I put the Raith in red-light/shutdown.
The system doesn't seem able to pull vacuum in the main chamber possibly due
to overheating of the turbopump or some other mechanical problem.
On Jan 13, 2008 7:53 PM, Shinichi Koseki <shinichikoseki at gmail.com> wrote:
> I got the load lock error, and could not load the sample.
> When I tried to load the sample, the Raith computer gave me "Error
> Load Lock" tab
> saying "Vacuum in the stage chamber is not ready.
> Please start pumping and if ready press retry."
> The Vac status (SEM computer -> SEM control -> Vacuum tab) is "At air".
> So, I hit "pump", and the turbo pump started, but after 5mins it stopped
> the vacuum status is still "at air".
> Vacuum Ready lamp is off at the Airlock Control unit (left side of the
> Raith machine).
> I hit the red reset button there, but the situation did not improve.
> (Error lamp is flashing green)
> I could not repair the system. (I could not call to James because my
> cell's battery is out...)
> On Jan 13, 2008 6:52 PM, Byoungil Lee <bilee at stanford.edu> wrote:
> > Sorry for the late notice.
> > Sample is not ready.
> > Thanks,
> > Byoungil
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