which metal for lift off

Arash Hazeghi ahazeghi at stanford.edu
Thu Jul 10 12:25:27 PDT 2008

Hello RAITH users,

I am writing 50nm square arrays as well as dot arrays on 2% 950K resist. In
order to inspect the quality of the exposure I want to do a quick
metallization + lift off, has anyone tried lift off on dot arrays recently?
What is the ideal metal and thickness?


Thank you,






Arash Hazeghi


PhD Candidate,

Stanford Center for Integrated Systems

420 Via Palou Mall, CIS-X 300

Stanford, CA 94305

phone: +1-(650)-725-0418






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