which metal for lift off

Arash Hazeghi ahazeghi at stanford.edu
Thu Jul 10 12:25:27 PDT 2008


Hello RAITH users,

I am writing 50nm square arrays as well as dot arrays on 2% 950K resist. In
order to inspect the quality of the exposure I want to do a quick
metallization + lift off, has anyone tried lift off on dot arrays recently?
What is the ideal metal and thickness?

 

Thank you,

 

Arash

 

 

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Arash Hazeghi

 

PhD Candidate,

Stanford Center for Integrated Systems

420 Via Palou Mall, CIS-X 300

Stanford, CA 94305

phone: +1-(650)-725-0418

 

 

http://www.stanford.edu/~ahazeghi/

 

 

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