Best dose for dots and 2% resist

Arash Hazeghi ahazeghi at stanford.edu
Mon Jul 21 14:00:49 PDT 2008


Hi,

Has anyone tried dots on 2% 950K resist recently? I tried 120 uC/cm^2 but my
dots where overexposed (~100nm) I was wondering if anyone knows what the
right dose is.

 

Thank you,

Arash

 

 

 

 

----------------------------------------------------------------------------
------

Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall, 

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi

 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/raith/attachments/20080721/e2e0edcf/attachment.html>


More information about the raith mailing list