Best dose for dots and 2% resist

Arash Hazeghi ahazeghi at
Mon Jul 21 14:00:49 PDT 2008


Has anyone tried dots on 2% 950K resist recently? I tried 120 uC/cm^2 but my
dots where overexposed (~100nm) I was wondering if anyone knows what the
right dose is.


Thank you,







Arash Hazeghi


PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall, 

Stanford, CA 94305


phone: +1-650-725-0418



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