From bilee at stanford.edu Sun Jun 1 00:39:05 2008 From: bilee at stanford.edu (Byoungil Lee) Date: Sun, 1 Jun 2008 00:39:05 -0700 Subject: Raith update References: <22ffcd060805312258i51a3bf05s1969588c659d7e16@mail.gmail.com> Message-ID: <012301c8c3ba$91bfd220$b66018ac@BILEEOFFICE> Dear All, I thought I was going to be able to use the tool. But, since the tool is still in red, I assume I do not have access to the tool. (or, can I try to use it? ) I am releasing my session from 0am to 4am. Thank you, Byoungil ----- Original Message ----- From: Xinran Wang To: Jesse Lu Cc: John Shott ; Raith SNF Mailing list ; toecutter4ranger at gmail.com Sent: Saturday, May 31, 2008 10:58 PM Subject: Re: Raith update Hi Jesse, Thank you for your help to bring raith up. But raith is still in red light mode in coral, if this is the case, can we still use it or someone has to turn it to yellow first? Thanks, Xinran On Sat, May 31, 2008 at 2:48 PM, Jesse Lu wrote: Hey Raith users, After a few hours on the phone with James and a Raith representative, we seem to be able to load samples now. The T translation system seems to be still acting up, but we were able to successfully load a sample this afternoon at 2pm. However, we used a modified loading procedure. James says to: use a modified load procedure a.. Do not simply hit the Load Sample button in the Loadlock window to drive your sample into the e-beam chamber. b.. Instead, perform a Find Home position for T procedure a.. This is done by first going to the Find Home window a.. Then click on the lightning rod button on the T row b.. Wait a few seconds for the procedure to finish c.. Finally, check the Delta value for T in the Find Home window d.. Please perform this procedure 2-3 times until the Delta value is on the order of 20-50 microns c.. Then proceed with the normal load procedure by clicking the Load Sample button in the Loadlock window John Shott, James would also like you to put the system back in yellow light mode if possible. Finally, users Mitsuru and Kathryn are currently "sharing the ride" on the tool. Let's revert back to the usual schedule at midnight tonight with Bilee's reservation. If extra time is needed because of this delay, let's be flexible with one another. Jesse -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Sun Jun 1 06:32:43 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Sun, 1 Jun 2008 13:32:43 +0000 Subject: Raith update In-Reply-To: <012301c8c3ba$91bfd220$b66018ac@BILEEOFFICE> References: <22ffcd060805312258i51a3bf05s1969588c659d7e16@mail.gmail.com><012301c8c3ba$91bfd220$b66018ac@BILEEOFFICE> Message-ID: <1745282157-1212327205-cardhu_decombobulator_blackberry.rim.net-366019456-@bxe120.bisx.prod.on.blackberry> Just use the tool and send me email a d be sure to log your sessions in the logbook. Jwc Sent via BlackBerry by AT&T -----Original Message----- From: "Byoungil Lee" Date: Sun, 1 Jun 2008 00:39:05 To:"Jesse Lu" Cc:"John Shott" ,"Raith SNF Mailing list" , Subject: Re: Raith update Dear All, ? I thought I was going to be able to use the tool. But, since the tool is still in red, I assume I do not have access to the tool.? (or, can I try to use it? ) I am releasing my session from 0am to 4am. ? ? ? Thank you, Byoungil ? ----- Original Message ----- From: Xinran Wang To: Jesse Lu Cc: John Shott ; Raith SNF Mailing list ; toecutter4ranger at gmail.com Sent: Saturday, May 31, 2008 10:58 PM Subject: Re: Raith update Hi Jesse, Thank you for your help to bring raith up. But raith is still in red light mode in coral, if this is the case, can we still use it or someone has to turn it to yellow first? Thanks, Xinran On Sat, May 31, 2008 at 2:48 PM, Jesse Lu > wrote: Hey Raith users, After a few hours on the phone with James and a Raith representative, we seem to be able to load samples now. The T translation system seems to be still acting up, but we were able to successfully load a sample this afternoon at 2pm. However, we used a modified loading procedure. James says to: use a modified load procedure * Do not simply hit the Load Sample button in the Loadlock window to drive your sample into the e-beam chamber. * Instead, perform a Find Home position for T procedure * This is done by first going to the Find Home window * Then click on the lightning rod button on the T row * Wait a few seconds for the procedure to finish * Finally, check the Delta value for T in the Find Home window * Please perform this procedure 2-3 times until the Delta value is on the order of 20-50 microns * Then proceed with the normal load procedure by clicking the Load Sample button in the Loadlock window John Shott, James would also like you to put the system back in yellow light mode if possible. Finally, users Mitsuru and Kathryn are currently "sharing the ride" on the tool. Let's revert back to the usual schedule at midnight tonight with Bilee's reservation. If extra time is needed because of this delay, let's be flexible with one another. Jesse From shott at stanford.edu Sun Jun 1 07:17:46 2008 From: shott at stanford.edu (John Shott) Date: Sun, 01 Jun 2008 07:17:46 -0700 Subject: Raith in yellow .... Message-ID: <4842AF8A.6070806@stanford.edu> Raith Users: The Raith is now in yellow and I've posted the MODIFIED LOAD PROCEDURE that James, Jesse Lu, and Raith developed near the machine. I apologize that I did not see these notes about moving to yellow until now ... I had some performing arts commitments last night .... but, hopefully, you will all get a good day of processing today. Happy patterning, John From vsih at stanford.edu Sun Jun 1 09:44:21 2008 From: vsih at stanford.edu (Vanessa Sih) Date: Sun, 1 Jun 2008 09:44:21 -0700 Subject: Raith update In-Reply-To: <1745282157-1212327205-cardhu_decombobulator_blackberry.rim.net-366019456-@bxe120.bisx.prod.on.blackberry> References: <22ffcd060805312258i51a3bf05s1969588c659d7e16@mail.gmail.com> <012301c8c3ba$91bfd220$b66018ac@BILEEOFFICE> <1745282157-1212327205-cardhu_decombobulator_blackberry.rim.net-366019456-@bxe120.bisx.prod.on.blackberry> Message-ID: <354289b40806010944r1a4f3f0dn9eeaa9f279fbd0ab@mail.gmail.com> Hi, I tried to use the modified load procedure this morning, and I get the following error message when I click on the lightning rod button on the T row: > Find Home motor T failed (-1)! I tried shutting down both computers and retrying, but this did not help. I didn't want to try the normal load procedure, so I am giving up on Raith use for today. Vanessa On Sun, Jun 1, 2008 at 6:32 AM, wrote: > Just use the tool and send me email a d be sure to log your sessions in the > logbook. > > Jwc > Sent via BlackBerry by AT&T > > -----Original Message----- > From: "Byoungil Lee" > > Date: Sun, 1 Jun 2008 00:39:05 > To:"Jesse Lu" > Cc:"John Shott" ,"Raith SNF Mailing list" < > raith at snf.stanford.edu>, > Subject: Re: Raith update > > > Dear All, > > I thought I was going to be able to use the tool. But, since the tool is > still in red, I assume I do not have access to the tool. (or, can I try to > use it? ) > I am releasing my session from 0am to 4am. > > > > Thank you, > Byoungil > > ----- Original Message ----- > From: Xinran > Wang > To: Jesse Lu > Cc: John Shott ; Raith SNF > Mailing list ; > toecutter4ranger at gmail.com > Sent: Saturday, May 31, 2008 10:58 PM > Subject: Re: Raith update > > Hi Jesse, > Thank you for your help to bring raith up. But raith is still in red light > mode in coral, if this is the case, can we still use it or someone has to > turn it to yellow first? > > Thanks, > Xinran > > > > On Sat, May 31, 2008 at 2:48 PM, Jesse Lu jesselu at stanford.edu> > wrote: > Hey Raith users, > > After a few hours on the phone with James and a Raith representative, we > seem to be able to load samples now. The T translation system seems to be > still acting up, but we were able to successfully load a sample this > afternoon at 2pm. However, we used a modified loading procedure. > > James says to: use a modified load procedure > > > * Do not simply hit the Load Sample button in the Loadlock window to drive > your sample into the e-beam chamber. > * Instead, perform a Find Home position for T procedure > > * This is done by first going to the Find Home window > > > > * Then click on the lightning rod button on the T row > * Wait a few seconds for the procedure to finish > * Finally, check the Delta value for T in the Find Home window > * Please perform this procedure 2-3 times until the Delta value is on the > order of 20-50 microns > > * Then proceed with the normal load procedure by clicking the Load Sample > button in the Loadlock window > John Shott, James would also like you to put the system back in yellow > light mode if possible. > > Finally, users Mitsuru and Kathryn are currently "sharing the ride" on the > tool. Let's revert back to the usual schedule at midnight tonight with > Bilee's reservation. If extra time is needed because of this delay, let's be > flexible with one another. > > Jesse > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Sun Jun 1 19:43:00 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Sun, 01 Jun 2008 19:43:00 -0700 Subject: Raith free tomorrow 16:30-20:00 In-Reply-To: <1745282157-1212327205-cardhu_decombobulator_blackberry.rim.net-366019456-@bxe120.bisx.prod.on.blackberry> References: <22ffcd060805312258i51a3bf05s1969588c659d7e16@mail.gmail.com><012301c8c3ba$91bfd220$b66018ac@BILEEOFFICE> <1745282157-1212327205-cardhu_decombobulator_blackberry.rim.net-366019456-@bxe120.bisx.prod.on.blackberry> Message-ID: <20080601194300.8osby2tdj44gc4ks@webmail.stanford.edu> From zhangy at stanford.edu Sun Jun 1 20:17:46 2008 From: zhangy at stanford.edu (Yuan Zhang) Date: Sun, 1 Jun 2008 20:17:46 -0700 Subject: Raith update In-Reply-To: <354289b40806010944r1a4f3f0dn9eeaa9f279fbd0ab@mail.gmail.com> Message-ID: <20080602031745.9D754272BC4@smtp1.stanford.edu> Hi, I got the same error when I tried to use the modified procedure this evening. As a result, tomorrow morning's session (6-9:30am) is released. Yuan _____ From: vanessa.sih at gmail.com [mailto:vanessa.sih at gmail.com] On Behalf Of Vanessa Sih Sent: Sunday, June 01, 2008 9:44 AM To: toecutter4ranger at gmail.com Cc: Byoungil Lee; EBEAM Ebeam Lab Subject: Re: Raith update Hi, I tried to use the modified load procedure this morning, and I get the following error message when I click on the lightning rod button on the T row: > Find Home motor T failed (-1)! I tried shutting down both computers and retrying, but this did not help. I didn't want to try the normal load procedure, so I am giving up on Raith use for today. Vanessa On Sun, Jun 1, 2008 at 6:32 AM, wrote: Just use the tool and send me email a d be sure to log your sessions in the logbook. Jwc Sent via BlackBerry by AT&T -----Original Message----- From: "Byoungil Lee" Date: Sun, 1 Jun 2008 00:39:05 To:"Jesse Lu" Cc:"John Shott" ,"Raith SNF Mailing list" , Subject: Re: Raith update Dear All, I thought I was going to be able to use the tool. But, since the tool is still in red, I assume I do not have access to the tool. (or, can I try to use it? ) I am releasing my session from 0am to 4am. Thank you, Byoungil ----- Original Message ----- From: Xinran Wang To: Jesse Lu Cc: John Shott ; Raith SNF Mailing list ; toecutter4ranger at gmail.com Sent: Saturday, May 31, 2008 10:58 PM Subject: Re: Raith update Hi Jesse, Thank you for your help to bring raith up. But raith is still in red light mode in coral, if this is the case, can we still use it or someone has to turn it to yellow first? Thanks, Xinran On Sat, May 31, 2008 at 2:48 PM, Jesse Lu > wrote: Hey Raith users, After a few hours on the phone with James and a Raith representative, we seem to be able to load samples now. The T translation system seems to be still acting up, but we were able to successfully load a sample this afternoon at 2pm. However, we used a modified loading procedure. James says to: use a modified load procedure * Do not simply hit the Load Sample button in the Loadlock window to drive your sample into the e-beam chamber. * Instead, perform a Find Home position for T procedure * This is done by first going to the Find Home window * Then click on the lightning rod button on the T row * Wait a few seconds for the procedure to finish * Finally, check the Delta value for T in the Find Home window * Please perform this procedure 2-3 times until the Delta value is on the order of 20-50 microns * Then proceed with the normal load procedure by clicking the Load Sample button in the Loadlock window John Shott, James would also like you to put the system back in yellow light mode if possible. Finally, users Mitsuru and Kathryn are currently "sharing the ride" on the tool. Let's revert back to the usual schedule at midnight tonight with Bilee's reservation. If extra time is needed because of this delay, let's be flexible with one another. Jesse -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter at att.blackberry.net Mon Jun 2 07:17:28 2008 From: toecutter at att.blackberry.net (toecutter at att.blackberry.net) Date: Mon, 2 Jun 2008 14:17:28 +0000 Subject: T rod failed reports Message-ID: <1681337489-1212416294-cardhu_decombobulator_blackberry.rim.net-1979347249-@bxe120.bisx.prod.on.blackberry> Ignore error t rod home failed -1 Means the load lock door is closed as it should be during LL exchanges . Jwc Sent via BlackBerry by AT&T From jwc at snf.stanford.edu Mon Jun 2 12:03:39 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 02 Jun 2008 12:03:39 -0700 Subject: ANNOUNCEMENT: RAITH Group XXXII -- Intensive 4 day short course. June 17 - 20 2008 TUESDAY - FRIDAY 10 AM - 6 PM CIS 101 10 - 12:30 Ebeam Lab 2 - 6 PM Message-ID: <4844440B.1030303@snf.stanford.edu> *Greetings RAITH Group XXXII: ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXXII -- the next RAITH** Four Day Basic User Short Course. If you are listed in the CC: section of this email, I am** still ** in need of further information, or a commitment from you, and hope to add you in the next class. Any RAITH users wishing to attend are also welcome if you desire a review of operations on the RAITH 150 system. ** We wish to invite all interested parties to the Tuesday morning lecture session from 10:00 AM - 12:30 PM, and the following Demo Layer One training from 2 PM - 6 PM in the afternoon. All others are also welcome to attend as observers the other 'Hands-On' sessions through the week. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXXII Training course to be held June 17 to 20th, 2008 _*You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. I am next holding this class on June 10, 2008 from 10:15 - 12:30 PM in the SNF cleanroom. There is a separate sign up for this class on the white board in my office at CIS 31. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXXII **Schedule: ** * *Raith 150 Basic Users Training -- Intensive 4 Day Short Course* *June 17 to 20th, 2008 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday June 17, 2008: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS 101 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday June 18, 2008: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday June 19, 2008: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday June 20, 2008: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can stop by my office hour and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM CIS 31) Just bring along a USB drive! ------------------------------------------------------------------------------------------------------------------------------------------- *RAITH Group XXXII Date June 17 to 20th**, 2008:** BASIC USER INTENSIVE FOUR DAY SHORT COURSE. This is an tentative class listing due to pending certification of prerequisites to be completed by all those below: * Hailiang Wang hailiang at stanford.edu Coral: hailiang Hongjie Dai Group Project: Carbon Nano Tubes Joong Sun Park joongsun.park at stanford.edu Coral: joongsun Prinz Group Project: SOFC Solid Oxide Fuel Cell... Wonyoung Lee leewy at stanford.edu Coral: leewy Prinz Group Project SOFC Solid Oxide Fuel Cell... Xu Tian xutian at stanford.edu Coral: xutian Prinz Group Project: SOFC -- electrode/electrolyte interface studies Fuel cell. *Also invited are members of RAITH Group XXXIII Date August 12 to 15th**, 2008:** BASIC USER INTENSIVE FOUR DAY SHORT COURSE. * Julie Bert jbert at stanford.edu Coral: jbert Moler Project: Au and AL rings for persistent current measurements. Queued to complete training before this group start. Both James W. Conway and Nick Koshnick. Donkoun Lee dlee76 at stanford.edu Coral: dlee76 Shan Wang Group Project: Spin Torque Queued to complete training before this group start. Both James W. Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 384 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon Jun 2 12:14:48 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 02 Jun 2008 12:14:48 -0700 Subject: Users do not have to home T transfer rod before their LL operations. Message-ID: <484446A8.50108@snf.stanford.edu> Greetings RAITH Users: Users on the RAITH do not have to find home of the Transfer arm rod during their Load Lock sessions and the error flag -1 can be ignored. This is not a reason to abort or cancel your reservations and most users will not encounter problems with their loads since we made adjustments early Saturday afternoon. If you are having further problems with either stage coordinates or the Transfer arm you can home it and it will travel to where the limit switches make and update the Laser Stage coordinates. Raith is up and available to scheduled users... Happy exposures, JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From jesselu at stanford.edu Tue Jun 3 10:09:28 2008 From: jesselu at stanford.edu (Jesse Lu) Date: Tue, 3 Jun 2008 10:09:28 -0700 Subject: Raith update Message-ID: Hey, James is working on bringing the Raith back up. If the remaining users with reservations on the machine today would be prepared to load their samples together at 1:30pm, they can share the ride. Jesse -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 3 17:15:49 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 03 Jun 2008 17:15:49 -0700 Subject: Raith update Tuesday at 5:05 PM -- JWC will be loading manually for all users wioshing to work overnight. Be there 5:30 PM in the Ebeam Lab to load your samples -- last call is 5:40 TODAY! In-Reply-To: References: Message-ID: <4845DEB5.9010803@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 3 18:46:24 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 03 Jun 2008 18:46:24 -0700 Subject: Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2 Message-ID: <4845F3F0.70901@snf.stanford.edu> Hello Kathryn and Raith Users: Thank you for your report! I checked the LIS stage today and did not measure any significant drift or shifting of either the image or the stage SEMing an SOI chip covered with Espacer. The sample holder may have had a bad landing due to existing issues with the T loader transfer arm, or your sample could have been charging. How did the EBL exposure come out? kathrynt at snf.stanford.edu wrote: > Image was drifting ~.25 microns/sec Monday night after manual load procedure. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 3 18:57:01 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 03 Jun 2008 18:57:01 -0700 Subject: Next RAITH Load tomorrow WED. at 9:30 AM, we will be loading as many users as we can get onto one sample holder. last call is 9:45 AM. In-Reply-To: <4845DEB5.9010803@snf.stanford.edu> References: <4845DEB5.9010803@snf.stanford.edu> Message-ID: <4845F66D.6040200@snf.stanford.edu> An HTML attachment was scrubbed... URL: From kathrynt at snf.stanford.edu Tue Jun 3 19:06:14 2008 From: kathrynt at snf.stanford.edu (Kathryn Todd) Date: Tue, 3 Jun 2008 19:06:14 -0700 Subject: Problem raith SNF 2008-06-03 17:36:17: lots of stage drift 6-2 In-Reply-To: <4845F3F0.70901@snf.stanford.edu> References: <4845F3F0.70901@snf.stanford.edu> Message-ID: <4070ecc80806031906p52c3db48w4e603bf09db63cc9@mail.gmail.com> I didn't try the exposure, because the drift seemed so bad. This sample isn't different from the other samples I write, which don't generally have this drifting issue, so maybe it was a bad landing. There was (I believe) an incorrect (not zero) signal from the faraday cup on the sample holder too--I don't know if you expect this, or if it would go along with a bad landing. -Kathryn On Tue, Jun 3, 2008 at 6:46 PM, James Conway wrote: > Hello Kathryn and Raith Users: > > Thank you for your report! > > I checked the LIS stage today and did not measure any significant drift or > shifting of either the image or the stage SEMing an SOI chip covered with > Espacer. > The sample holder may have had a bad landing due to existing issues with the > T loader transfer arm, or your sample could have been charging. > How did the EBL exposure come out? > > kathrynt at snf.stanford.edu wrote: > > Image was drifting ~.25 microns/sec Monday night after manual load > procedure. > > From toecutter at att.blackberry.net Wed Jun 4 20:03:56 2008 From: toecutter at att.blackberry.net (toecutter at att.blackberry.net) Date: Thu, 5 Jun 2008 03:03:56 +0000 Subject: RAITH is up and online for users Message-ID: <2115983932-1212635038-cardhu_decombobulator_blackberry.rim.net-1300691116-@bxe120.bisx.prod.on.blackberry> Jwc Sent via BlackBerry by AT&T From jwc at snf.stanford.edu Thu Jun 5 11:34:46 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Jun 2008 11:34:46 -0700 Subject: ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway for JUNE. Tuesday JUNE 10 and 24th, 2008 10:15 AM to 12:30 PM Message-ID: <484831C6.8040700@snf.stanford.edu> *ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. * Greetings SNF Lab Users, I will be conducting my next *"Take A Spin with Me" *training class Tuesday June 10th and 24th , 2008 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Thu Jun 5 12:16:50 2008 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Thu, 5 Jun 2008 12:16:50 -0700 Subject: Raith free from now to 5:30PM Message-ID: <000601c8c740$b4af2270$1e0d6750$@edu> I can't find the 7.5um and 10um apertures and cancel the session. Yao-Te -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 5 12:40:18 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Jun 2008 12:40:18 -0700 Subject: Raith free from now to 5:30PM In-Reply-To: <000601c8c740$b4af2270$1e0d6750$@edu> References: <000601c8c740$b4af2270$1e0d6750$@edu> Message-ID: <48484122.7030409@snf.stanford.edu> YT Cheng, First check is to be sure to increase your contrast and brightness so you can see all the aperture holes. If the emission screen view is all 'white out' then reduce contrast and brightness. I will be in at 1:15 PM to check on things if you desire to resume your session then. Best, JWC Yao-Te Cheng wrote: > > I can't find the 7.5um and 10um apertures and cancel the session. > > > > Yao-Te > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 5 12:41:24 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Jun 2008 12:41:24 -0700 Subject: Raith apertures In-Reply-To: <000b01c8c741$5a493d10$0edbb730$@edu> References: <484831C6.8040700@snf.stanford.edu> <000b01c8c741$5a493d10$0edbb730$@edu> Message-ID: <48484164.30204@snf.stanford.edu> I will be in the lab starting about 1:15 - 1:30 and can take a look with you. Grab you session back if you are available. JWC Yao-Te Cheng wrote: > > Hi James, > > > > I was using the Raith this morning. I usually use 20KV and the 7.5um > aperture for writing. Somehow, I didn't find the 7.5um aperture when I > adjusted the gun alignment, and I didn't find the 10um aperture, > either. Also, I didn't see any image when I used the 7.5um aperture > and got an extremely dim image when using the 10um aperture. I > cancelled my session. Could you tell me how I could try to fix this > problem next time if I meet this again? Thank you. > > > > Best regards, > > Yao-Te > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 5 17:49:01 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 05 Jun 2008 17:49:01 -0700 Subject: James will be away from SNF through Tuesday June 10, 2008 at 8:30 AM. Link to "Who are you going to call for help on the RAITH System" Message-ID: <4848897D.5070909@snf.stanford.edu> * Greetings Raith Users:* Happy to report that the Transfer Loading arm problems we were having have been resolved. We have had many successful Load Lock Exchanges without any problems. Requesting that all Users strive to catch up to the back log of exposures that people desire to complete. You are encouraged to team up with other users on your Load Lock exchanges and 'Share the Ride'. If you run into any problems please refer to the "Whom are you going to call..." RAITH FAQ. I will be out of the SNF facility tomorrow Friday and Monday returning at 8:30 AM Tuesday and resume my normal office hours at this time. Will be on and off the cell phone grid through this period so please leave me a voice mail or send me an SMS to my cell. I will likely be available tomorrow AM for the usual office hour questions if you call my cell. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Thu Jun 5 19:34:05 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Thu, 5 Jun 2008 19:34:05 -0700 Subject: New offline computer Message-ID: <00ef01c8c77d$ca42e440$5ec8acc0$@edu> Hello Raith users, Good news! We finally got a new PC for RAITH offline SW, you will notice it on the table in the eBeam lab but it has not been fully set up yet so please don't turn it ON. James will let you know when it is ready for use. Also James is planning to retire the old PC so this is a good time to copy and backup whatever you have on that computer. Many thanks to Mary for getting us the new PC. Thanks, Arash ---------------------------------------------------------------------------- ------ Arash Hazeghi PhD Candidate Stanford Center for Integrated Systems CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305 phone: +1-650-725-0418 web: http://www.stanford.edu/~ahazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Thu Jun 5 20:55:19 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Thu, 5 Jun 2008 20:55:19 -0700 Subject: not using my 1hr session Message-ID: <00b801c8c789$233ac440$69b04cc0$@edu> I am not using my SEM session from 21:30-22:30, next user can load earlier. -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Fri Jun 6 22:43:36 2008 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 06 Jun 2008 22:43:36 -0700 Subject: Problem with loading/unloading sample Message-ID: <20080606224336.6d3dn8ycgkkks4w0@webmail.stanford.edu> Dear Raith users, During unloading and loading my sample today, an error occurs at the "Robot arm out" step, with a message saying that "manual procedure has to be followed to bring the robot arm to outer position". However, I checked the loadlock and found out the robot arm had been totally out. Then I clicked "OK" to all the message box without doing anything real to the system. The gate valve successfully closed afterwards, and the system went back to normal. I talked to some other user and found out this problem occurred since afternoon. I guess everyone after me may see the same problem. So my suggestion is to check if the robot arm is totally in loadlock (by eye) and make sure the gate valve is closed before you continue on. You don't have to adjust T position if the robot arm is in loadlock. If you have questions, please call James(I can't reach him) or one of the Raith champions. Hopefully it's just a software bug. I put the system in yellow light. Good luck, Yuan From xinranw at stanford.edu Sat Jun 7 08:36:53 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Sat, 7 Jun 2008 08:36:53 -0700 Subject: raith free sunday 21:00 Message-ID: <22ffcd060806070836q79e29ba9se709db90eb0c0732@mail.gmail.com> sample won't be ready. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Sun Jun 8 00:13:29 2008 From: zhangy at stanford.edu (Yuan Zhang) Date: Sun, 8 Jun 2008 00:13:29 -0700 Subject: Raith free 8:30-11:30am Sunday Message-ID: <20080608071329.7BB5E2D6948@smtp1.stanford.edu> My sample won't be ready, sorry for the late notice. -Yuan -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangli at stanford.edu Sun Jun 8 13:27:40 2008 From: zhangli at stanford.edu (Li Zhang) Date: Sun, 8 Jun 2008 13:27:40 -0700 Subject: Problem with loading/unloading sample In-Reply-To: <20080606224336.6d3dn8ycgkkks4w0@webmail.stanford.edu> References: <20080606224336.6d3dn8ycgkkks4w0@webmail.stanford.edu> Message-ID: <66aaf8f30806081327k2d5d2839qcc96eddf760f1bfb@mail.gmail.com> releasing my session from 2:00pm to 4:pm due to the load lock problem. Li On 6/6/08, Yuan Zhang wrote: > > Dear Raith users, > > During unloading and loading my sample today, an error occurs at the "Robot > arm out" step, with a message saying that "manual procedure has to be > followed to bring the robot arm to outer position". However, I checked the > loadlock and found out the robot arm had been totally out. Then I clicked > "OK" to all the message box without doing anything real to the system. The > gate valve successfully closed afterwards, and the system went back to > normal. I talked to some other user and found out this problem occurred > since afternoon. I guess everyone after me may see the same problem. So my > suggestion is to check if the robot arm is totally in loadlock (by eye) and > make sure the gate valve is closed before you continue on. You don't have to > adjust T position if the robot arm is in loadlock. If you have questions, > please call James(I can't reach him) or one of the Raith champions. > Hopefully it's just a software bug. I put the system in yellow light. > > Good luck, > Yuan > -- Li --------------------------------------- Li Zhang Dai's Group Department of Chemistry Stanford University --------------------------------------- .oooO ( ) Oooo. \ ( ( ) \ ) ) / Life is good, ( / it's just not easy. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Sun Jun 8 13:41:52 2008 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Sun, 8 Jun 2008 13:41:52 -0700 Subject: Problem with loading/unloading sample In-Reply-To: <66aaf8f30806081327k2d5d2839qcc96eddf760f1bfb@mail.gmail.com> References: <20080606224336.6d3dn8ycgkkks4w0@webmail.stanford.edu> <66aaf8f30806081327k2d5d2839qcc96eddf760f1bfb@mail.gmail.com> Message-ID: <000d01c8c9a8$1556d500$40047f00$@edu> I'm releasing my session due to the same problem. Now, Raith is free until 9PM. Yao-Te From: lizhang1 at gmail.com [mailto:lizhang1 at gmail.com] On Behalf Of Li Zhang Sent: Sunday, June 08, 2008 1:28 PM To: raith at snf.stanford.edu Subject: Re: Problem with loading/unloading sample releasing my session from 2:00pm to 4:pm due to the load lock problem. Li On 6/6/08, Yuan Zhang wrote: Dear Raith users, During unloading and loading my sample today, an error occurs at the "Robot arm out" step, with a message saying that "manual procedure has to be followed to bring the robot arm to outer position". However, I checked the loadlock and found out the robot arm had been totally out. Then I clicked "OK" to all the message box without doing anything real to the system. The gate valve successfully closed afterwards, and the system went back to normal. I talked to some other user and found out this problem occurred since afternoon. I guess everyone after me may see the same problem. So my suggestion is to check if the robot arm is totally in loadlock (by eye) and make sure the gate valve is closed before you continue on. You don't have to adjust T position if the robot arm is in loadlock. If you have questions, please call James(I can't reach him) or one of the Raith champions. Hopefully it's just a software bug. I put the system in yellow light. Good luck, Yuan -- Li --------------------------------------- Li Zhang Dai's Group Department of Chemistry Stanford University --------------------------------------- .oooO ( ) Oooo. \ ( ( ) \ ) ) / Life is good, ( / it's just not easy. -------------- next part -------------- An HTML attachment was scrubbed... URL: From linyouc at stanford.edu Sun Jun 8 16:51:00 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Sun, 08 Jun 2008 16:51:00 -0700 Subject: Raith is fine now Message-ID: <20080608165100.xpzsfzqn8kgkwgoc@webmail.stanford.edu> Somehow, the loadlock problem disappeared. The machine works very well now. Enjoy Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From kathrynt at stanford.edu Mon Jun 9 14:15:58 2008 From: kathrynt at stanford.edu (Kathryn Todd) Date: Mon, 9 Jun 2008 14:15:58 -0700 Subject: raith released 6:30-8:30pm this evening Message-ID: <4070ecc80806091415u416413batfcf84f03fd84edfb@mail.gmail.com> Sample won't be ready. Sorry for the late notice. From linyouc at stanford.edu Tue Jun 10 08:31:21 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Tue, 10 Jun 2008 08:31:21 -0700 Subject: Raith pumping problem Message-ID: <20080610083121.kybf05ogv4coc808@webmail.stanford.edu> It seems there is something wrong with the turbo pump again. As I tried to load the sample, it cannot move over the first step and the system warns the vacuum in the stage chamber is not ready. I have already tried to manually pump and call James for help. Hopefully, James can figure it out. Best Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From jwc at snf.stanford.edu Tue Jun 10 08:59:51 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 10 Jun 2008 08:59:51 -0700 Subject: TODAY: "Take A Spin with Me" -- Resist Handling Training on the Headway for JUNE. Tuesday JUNE 10 and 24th, 2008 10:15 AM to 12:30 PM Message-ID: <484EA4F7.6090407@snf.stanford.edu> *ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. * Greetings SNF Lab Users, I will be conducting my next *"Take A Spin with Me" *training class Tuesday June 10th and 24th , 2008 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Tue Jun 10 09:43:29 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Tue, 10 Jun 2008 09:43:29 -0700 Subject: released today 16:00 Message-ID: <22ffcd060806100943y564c2158k9ab4c4041cda1e05@mail.gmail.com> I forgot I have a final at this time... sorry for late notice. Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 10 18:31:51 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 10 Jun 2008 18:31:51 -0700 Subject: Shutdown raith S turbo / mechanical pump failed Message-ID: <484F2B07.1000308@snf.stanford.edu> Raith is Shutdown for all overnight operations. Early this morning we lost pumping capability on the system when either the Turbo pump or the mechanical pump backing the turbo lost functionality. We tested both and are still unsure as to the cause but we will be switching out the mechanical pump tomorrow morning and attempting to get the system back up for afternoon sessions after 2 PM. We have replacement turbo lined up but wish to cover all bases to rectify the situation. Thank you for your support! James Conway From jwc at snf.stanford.edu Thu Jun 12 09:29:49 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Jun 2008 09:29:49 -0700 Subject: Please return the raith dongles to me... Message-ID: <48514EFD.8090404@snf.stanford.edu> Greetings: I require all three of the raith dongles to be returned to me. Thank you, JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Thu Jun 12 13:54:53 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Thu, 12 Jun 2008 13:54:53 -0700 Subject: raith released tomorrow 11-14:30 Message-ID: <20080612135453.gi506ul9z44g4004@webmail.stanford.edu> From jwc at snf.stanford.edu Thu Jun 12 17:51:30 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Jun 2008 17:51:30 -0700 Subject: Don't steal from me! Message-ID: <4851C492.2030401@snf.stanford.edu> Good Afternoon Ebeam Lab Users: The Raith system will remain off line to users this evening as we continue to troubleshoot several issues that have appeared on the system. All Users are firmly reminded that all engineering materials in my dry box and my tool boxes are my property, and have been purchased at my expense and not paid for by SNF. Several items were taken from my amber dry box last night, including the last entire sheet of the 10 mm spectra tab low out gassing Carbon adhesive tabs. This is unacceptable and I will expect these material to be returned and on my desk by tomorrow morning or I will take further action. This was the third time in as many weeks that some person, or persons, have entered the Ebeam Lab during the evenings and taken precision tools and engineering materials from me. Theft will not be tolerated in my Lab. James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jun 13 18:43:28 2008 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Jun 2008 18:43:28 -0700 Subject: Stanford Raith 150 Status Friday 18:30 hours -- we have been unable to identify the root cause of the vacuum pumping problem so far. Message-ID: <48532240.5010400@snf.stanford.edu> Greetings Raith Users: The RAITH system will remain in shut down mode and we will be off line to all users over the weekend. Qualified Users may utilize the raith computer to prepare their GDS II patterns, etc... Synopsis: We encountered vacuum pumping problems Monday early morning and in the course of troubleshooting the system have swapped out the Membrane mechanical pump and now the Turbo pump in an effort to restore vacuum to the system. Today we spent the entire afternoon leak checking all components in line between the turbo and mechanical pumps and we still cannot achieve suitable vacuum to reach the set point to fire up the ion pumps in the column. The mechanical pump vacuum level is at the specified 2000 mt pressure. We are unsure if the turbo pump or controller are functioning properly but it was reported to have been tested after it was rebuilt by Pro-Vac in Santa Cruz. We will continue troubleshooting the system on Monday late morning. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 17 08:51:38 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 17 Jun 2008 08:51:38 -0700 Subject: TODAY: "Take A Spin with Me" -- Resist Handling Training on the Headway for JUNE. Tuesday JUNE 24th, 2008 10:15 AM to 12:30 PM Message-ID: <4857DD8A.5070204@snf.stanford.edu> *ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. * Greetings SNF Lab Users, I will be conducting my next *"Take A Spin with Me" *training class Tuesday 24th , 2008 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 17 09:24:31 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 17 Jun 2008 09:24:31 -0700 Subject: REMINDER TODAY: RAITH Group XXXII -- Intensive 4 day short course. June 17 - 20 2008 TUESDAY - FRIDAY 10 AM - 6 PM CIS 101 10 - 12:30 then later in the Ebeam Lab 2 - 6 PM Message-ID: <4857E53F.70000@snf.stanford.edu> *Greetings RAITH Group XXXII: Please note we are meeting in CIS 101 and not the normal CIS 201 room... ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXXII -- the next RAITH** Four Day Basic User Short Course. If you are listed in the CC: section of this email, I am** still ** in need of further information, or a commitment from you, and hope to add you in the next class. Any RAITH users wishing to attend are also welcome if you desire a review of operations on the RAITH 150 system. ** We wish to invite all interested parties to the Tuesday morning lecture session from 10:00 AM - 12:30 PM, and the following Demo Layer One training from 2 PM - 6 PM in the afternoon. All others are also welcome to attend as observers the other 'Hands-On' sessions through the week. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXXII Training course to be held June 17 to 20th, 2008 _*You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. I am next holding this class on June 10, 2008 from 10:15 - 12:30 PM in the SNF cleanroom. There is a separate sign up for this class on the white board in my office at CIS 31. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXXII **Schedule: ** * *Raith 150 Basic Users Training -- Intensive 4 Day Short Course* *June 17 to 20th, 2008 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday June 17, 2008: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS 101 14:00 - 17:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday June 18, 2008: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday June 19, 2008: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday June 20, 2008: 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 18:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can stop by my office hour and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM CIS 31) Just bring along a USB drive! ------------------------------------------------------------------------------------------------------------------------------------------- *RAITH Group XXXII Date June 17 to 20th**, 2008:** BASIC USER INTENSIVE FOUR DAY SHORT COURSE. This is an tentative class listing due to pending certification of prerequisites to be completed by all those below: * Hailiang Wang hailiang at stanford.edu Coral: hailiang Hongjie Dai Group Project: Carbon Nano Tubes Joong Sun Park joongsun.park at stanford.edu Coral: joongsun Prinz Group Project: SOFC Solid Oxide Fuel Cell... Wonyoung Lee leewy at stanford.edu Coral: leewy Prinz Group Project SOFC Solid Oxide Fuel Cell... Xu Tian xutian at stanford.edu Coral: xutian Prinz Group Project: SOFC -- electrode/electrolyte interface studies Fuel cell. *Also invited are members of RAITH Group XXXIII Date August 12 to 15th**, 2008 as observers:** BASIC USER INTENSIVE FOUR DAY SHORT COURSE. * Julie Bert jbert at stanford.edu Coral: jbert Moler Project: Au and AL rings for persistent current measurements. Queued to complete training before this group start. Both James W. Conway and Nick Koshnick. Donkoun Lee dlee76 at stanford.edu Coral: dlee76 Shan Wang Group Project: Spin Torque Queued to complete training before this group start. Both James W. Conway Lisa Chen lisachen at stanford.edu Coral: lisachen Shan Wang Group Project E341 Spin FET Arunanshu Roy amroy at stanford.edu Coral: amroy Saraswat Group Project: Spin FET. -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter at att.blackberry.net Thu Jun 19 00:38:12 2008 From: toecutter at att.blackberry.net (toecutter at att.blackberry.net) Date: Thu, 19 Jun 2008 07:38:12 +0000 Subject: RAITH coming up tomorrow afternoon Message-ID: <1453060872-1213861088-cardhu_decombobulator_blackberry.rim.net-1967938721-@bxe120.bisx.prod.on.blackberry> Greetings The system is now pumping and we will bring up the gun in the morning and most likely be ready for users by late afternoon. Hope to qualify and test the system during the RAITH class. With much relief James Sent via BlackBerry by AT&T From jwc at snf.stanford.edu Thu Jun 19 10:00:39 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 19 Jun 2008 10:00:39 -0700 Subject: Please return the off line SW installation disk and all dongles check out. Message-ID: <485A90B7.1070104@snf.stanford.edu> Greetings: I did not get back the RAITH off line installation disk when it was given to a user ABOUT two weeks ago. If you have this disk please return it to me today! I need it for my new users taking the raith Basic Users Class this week. All dongles that are checked out are to be returned to me this week. I will be working out an exchange of two of the dongles for USB dongles from raith USA Inc. JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Thu Jun 19 10:36:57 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Thu, 19 Jun 2008 10:36:57 -0700 Subject: In case, Raith will be released on Monday 10:30-14:30. Message-ID: <20080619103657.zq7nfr38qo0kwo84@webmail.stanford.edu> Hello! The one of the pre process step tools went down today. If the tool will not be up before my session on Monday morning, I will release my session on Monday at 10:30-14:30. Thanks, Kyeongran From jwc at snf.stanford.edu Thu Jun 19 18:41:04 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 19 Jun 2008 18:41:04 -0700 Subject: RAITH STATUS THURSDAY 18:00 SYSTEM IS UP FOR USERS -- NOT TO EXCEED 10 KEV ACCELERATION VOLTAGE UNTIL GUN VACUUM REACHES BASE PRESSURE. Message-ID: <485B0AB0.9020808@snf.stanford.edu> *Good Evening RAITH Users,* Raith system has been qualified for use during the Raith Basic Users training class this afternoon. SYSTEM IS UP FOR ALL USERS -- PLEASE NOT TO EXCEED 10 KEV ACCELERATION VOLTAGE UNTIL GUN VACUUM REACHES BASE PRESSURE. Users may notice reduced beam current levels as the FE-Gun runs itself back in. /Currently /30 um apt. 10 keV Beam Current is 0.118 nA and slowly increasing. :-D We will test the system at 15 and 20 keV tomorrow. Please call me if you encounter any problems. Thank you for your support! James Conway -------- Original Message -------- Subject: Re: Problem raith SNF 2008-06-19 09:04:52: FE_GUN running up Date: Thu, 19 Jun 2008 18:32:45 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu system qualified for use to 10 keV -------------- next part -------------- An HTML attachment was scrubbed... URL: From slatif at stanford.edu Sat Jun 21 00:27:22 2008 From: slatif at stanford.edu (Salman Latif) Date: Sat, 21 Jun 2008 00:27:22 -0700 Subject: continuing session -- next user not here Message-ID: <20080621002722.ffghl0jpcwow0ooc@webmail.stanford.edu> the next user isn't here yet, so I will continue my session till 4:30am, unless ljzhou comes in. From raneeyoo at stanford.edu Sat Jun 21 16:58:37 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Sat, 21 Jun 2008 16:58:37 -0700 Subject: raith released on Monday 10:30-14:30 In-Reply-To: <485B0AB0.9020808@snf.stanford.edu> References: <485B0AB0.9020808@snf.stanford.edu> Message-ID: <20080621165837.iw7opaeb4swokogk@webmail.stanford.edu> From bilee at stanford.edu Sun Jun 22 05:32:37 2008 From: bilee at stanford.edu (Byoungil Lee) Date: Sun, 22 Jun 2008 05:32:37 -0700 Subject: raith free on Monday 10:30am-14:30 References: <485B0AB0.9020808@snf.stanford.edu> <20080621165837.iw7opaeb4swokogk@webmail.stanford.edu> Message-ID: <009101c8d464$0dbc9520$b66018ac@BILEEOFFICE> From zhangli at stanford.edu Mon Jun 23 13:24:00 2008 From: zhangli at stanford.edu (Li Zhang) Date: Mon, 23 Jun 2008 13:24:00 -0700 Subject: raith free 2:30 to 5:30 this afternoon Message-ID: <66aaf8f30806231324ycd36bb3t58cb4f2314879927@mail.gmail.com> Sample died at the very last minute. Sorry for the late notice. -- Li --------------------------------------- Li Zhang Dai's Group Department of Chemistry Stanford University --------------------------------------- .oooO ( ) Oooo. \ ( ( ) \ ) ) / Life is good, ( / it's just not easy. -------------- next part -------------- An HTML attachment was scrubbed... URL: From faraon at stanford.edu Mon Jun 23 13:56:25 2008 From: faraon at stanford.edu (Andrei Faraon) Date: Mon, 23 Jun 2008 13:56:25 -0700 Subject: raith free 2:30 to 5:30 this afternoon In-Reply-To: <66aaf8f30806231324ycd36bb3t58cb4f2314879927@mail.gmail.com> References: <66aaf8f30806231324ycd36bb3t58cb4f2314879927@mail.gmail.com> Message-ID: <28d3ece90806231356q1207cfc6sf147e0ac803af099@mail.gmail.com> I will take it. Andrei On Mon, Jun 23, 2008 at 1:24 PM, Li Zhang wrote: > Sample died at the very last minute. Sorry for the late notice. > > -- > Li > --------------------------------------- > Li Zhang > Dai's Group > Department of Chemistry > Stanford University > --------------------------------------- > .oooO > ( ) Oooo. > \ ( ( ) > \ ) ) / > Life is good, ( / > it's just not easy. > -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 www.stanford.edu/~faraon -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 24 08:58:54 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 24 Jun 2008 08:58:54 -0700 Subject: Reminder: "Take A Spin with Me" -- Resist Handling Training on the Headway for JUNE. Tuesday JUNE 24th, 2008 10:15 AM to 12:30 PM Message-ID: <486119BE.2020409@snf.stanford.edu> * **ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. * Greetings SNF Lab Users, Today I will be conducting my *"Take A Spin with Me" *training class for Tuesday June 24th , 2008 from 10:15 AM - 12:30 PM. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 3681 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 49030 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Jun 26 17:04:25 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 26 Jun 2008 17:04:25 -0700 Subject: James will be away from SNF through Monday July 7 2008 at 10:30 AM. Link to "Who are you going to call for help on the RAITH System" Message-ID: <48642E89.6020703@snf.stanford.edu> * Greetings Raith Users:* I will be away from SNF and unavailable by email. SMS text messages or voice mail is preferred. Next week I will be unavailable by cell phone much of the time. If you run into any problems please refer to the "Whom are you going to call..." RAITH FAQ. I will be out of the SNF facility tomorrow Friday and all next week returning Monday July 9, 2008 at 10:30 AM and on Tuesday will resume my normal office hours. Will be on and off the cell phone grid through this period so please leave me a voice mail or send me an SMS to my cell if you try to reach me. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From pgallagher at stanford.edu Thu Jun 26 17:50:16 2008 From: pgallagher at stanford.edu (Patrick Gallagher) Date: Thu, 26 Jun 2008 17:50:16 -0700 Subject: Raith free 8-9:30am tomorrow Message-ID: <81ce74de0806261750t3ae36eaby65ab68e3f79f665d@mail.gmail.com> Sorry for the late notice: I had a last-minute equipment failure. -------------- next part -------------- An HTML attachment was scrubbed... URL: From pgallagher at stanford.edu Thu Jun 26 19:01:47 2008 From: pgallagher at stanford.edu (Patrick Gallagher) Date: Thu, 26 Jun 2008 19:01:47 -0700 Subject: Raith free tomorrow 10am-12pm Message-ID: <81ce74de0806261901j7011427fg1d19e9cfe1707e08@mail.gmail.com> Again, sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Fri Jun 27 10:59:50 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Fri, 27 Jun 2008 10:59:50 -0700 Subject: RAITH available for next user Message-ID: <20080627105950.c59kioiqsw4048wk@webmail.stanford.edu> finished SEMing... From pgallagher at stanford.edu Fri Jun 27 17:17:37 2008 From: pgallagher at stanford.edu (Patrick Gallagher) Date: Fri, 27 Jun 2008 17:17:37 -0700 Subject: Raith free 9-11:30pm today Message-ID: <81ce74de0806271717y6378bc75y997884a244ba721c@mail.gmail.com> Sorry for the late notice: equipment failure. -------------- next part -------------- An HTML attachment was scrubbed... URL: From linyouc at stanford.edu Fri Jun 27 23:45:15 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Fri, 27 Jun 2008 23:45:15 -0700 Subject: Raith free 16:00pm-18:00pm Saturday Message-ID: <20080627234515.6fjdfoavc0ggcskk@webmail.stanford.edu> Enjoy it. Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From ahazeghi at stanford.edu Sat Jun 28 00:10:50 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Sat, 28 Jun 2008 00:10:50 -0700 Subject: Raith free 16:00pm-18:00pm Saturday In-Reply-To: <20080627234515.6fjdfoavc0ggcskk@webmail.stanford.edu> References: <20080627234515.6fjdfoavc0ggcskk@webmail.stanford.edu> Message-ID: <002d01c8d8ee$18cf6440$4a6e2cc0$@edu> Changed my reservation to 16:00-20:00 available from 20:00 to 22:00 -----Original Message----- From: linyouc at stanford.edu [mailto:linyouc at stanford.edu] Sent: Friday, June 27, 2008 11:45 PM To: raith at snf.stanford.edu Subject: Raith free 16:00pm-18:00pm Saturday Enjoy it. Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From pgallagher at stanford.edu Sat Jun 28 16:37:58 2008 From: pgallagher at stanford.edu (Patrick Gallagher) Date: Sat, 28 Jun 2008 16:37:58 -0700 Subject: raith free tomorrow 10:30am-1:30pm Message-ID: <81ce74de0806281637y208746bbh49b573b397322d3c@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From linyouc at stanford.edu Sun Jun 29 01:08:48 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Sun, 29 Jun 2008 01:08:48 -0700 Subject: Raith Free Sunday 11:00am-1:00pm Message-ID: <20080629010848.6wgi2r2ogcso44ck@webmail.stanford.edu> Sample not gonna be ready by then. Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From linyouc at stanford.edu Mon Jun 30 08:15:18 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Mon, 30 Jun 2008 08:15:18 -0700 Subject: Raith is available for next user now Message-ID: <20080630081518.e07s7qhkowkwo4w8@webmail.stanford.edu> Done earlier. Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University