From jwc at snf.stanford.edu Thu May 1 10:54:50 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 01 May 2008 10:54:50 -0700 Subject: System should be on line for users later this afternoon. Message-ID: <481A03EA.1060703@snf.stanford.edu> Greetings Raith Users: I am working hard at completing testing of the load lock exchange assemblies and measurements of the Stage movements on the RAITH 150. After that I can begin to evaluate level and plane of focus issues of the sample holders that are used on the system. Willing to share the ride during these test with the afternoon users on the system starting at 1:30 PM. So then, if it is possible to load samples together for Bing Dai and Dirk Englund at 1:30 PM it might save us some Load Lock time. I will need to have access to the system until that time. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu May 1 17:34:35 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 01 May 2008 17:34:35 -0700 Subject: RAITH Status Thursday May 1, 2008 17:30 hours -- System available to users -- yellow light on coral -- We are allowing coral schedule to slide back 1 hour this evening. Message-ID: <481A619B.9040801@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 2 13:43:59 2008 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 02 May 2008 13:43:59 -0700 Subject: Raith will go off line to users for stage measurements and adjustments Tuesday and possibly WED. afternoon next week. Message-ID: <481B7D0F.2010005@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 2 13:48:03 2008 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 02 May 2008 13:48:03 -0700 Subject: Universal holder test In-Reply-To: <023e01c8ac55$083f8f80$b66018ac@BILEEOFFICE> References: <4819203F.5000001@snf.stanford.edu> <017001c8ab43$7fe0da20$b66018ac@BILEEOFFICE> <481A6A93.2000600@snf.stanford.edu> <023e01c8ac55$083f8f80$b66018ac@BILEEOFFICE> Message-ID: <481B7E03.3010400@snf.stanford.edu> :-) Thank you for your measurements! These are very encouraging numbers! Users should note that I have not yet performed any mechanical adjustments to either sample holder as of yet. Talk with you next Monday afternoon. James Byoungil Lee wrote: > Dear James, > > I have tested the universal holder this morning. > Fortunately, now, leveling works for 4inch wafer-range !! > > The WD's was > 5.297 @ -40,0 > 5.229 @ 40,0 > 5.259 @ 0, -40 > > You may want to do a little more adjustment. > > Thank you, > Byoungil > > > ----- Original Message ----- > *From:* James Conway > *To:* Byoungil Lee > *Sent:* Thursday, May 01, 2008 6:12 PM > *Subject:* Re: RAITH Status 18:00 Wednesday -- System repairs > completed -- I need to finish more testing tomorrow before > releasing to users. > > I have not had the time to get to this point yet. But likely it > is much better than last week! ;-) > > Give it a try and let me know... > > I will continue on the system tomorrow morning with my Raith Class > 10 - 2 PM > > Best, > > James Conway > > Byoungil Lee wrote: >> Dear James, >> >> Regarding the condition of Raith, I have a question. >> Is the Universal Holder ready also for leveling or height control? >> My chip size is about 1cm and it was not possible to get >> reasonable WD uniformity across the chip. >> >> Thank you for your support, >> Byoungil >> >> >> ----- Original Message ----- >> *From:* James Conway >> *To:* Raith SNF Mailing list >> *Cc:* Cole Loomis -- RAITH USA. ; >> Jason Sanabia ; Mirwais Aktary >> >> *Sent:* Wednesday, April 30, 2008 6:43 PM >> *Subject:* RAITH Status 18:00 Wednesday -- System repairs >> completed -- I need to finish more testing tomorrow before >> releasing to users. >> >> *Good Evening Raith Community: >> * >> Many thanks to the many Users whom have offered assistance, a >> spare hand to help me reach things from behind the tool, and >> support during this very difficult week. >> >> I believe we have completed repairs to the stage and today I >> replaced the O-ring seal to the rear door that prevented me >> from pumping down the system last night. The rear door >> O-ring seal is a difficult one to keep in place during >> installation and fitting of the door to the chamber. Last >> night as I screwed down the door I pinched the O-ring on the >> seal surface and it was sliced. >> >> Currently I am pumping down the system,and running up the >> FE-Gun. I have successfully completed three automatic and two >> manual Load Lock exchanges of the Universal Sample Holder. >> >> Tomorrow I will test each of the two sample holders by >> performing the Load Lock exchange five times each to ensure >> that we are going to stay up when Users come onto the tool. >> >> I hope to resume the coral schedule in the mid to late >> afternoon. Best guess is 3 PM hand off to users on the >> schedule. FE-Gum emission should be close to normal levels. >> >> To catch up to the schedule I am asking all users to "Share >> the Ride" and load with others after you to create >> opportunities for those whom were impacted by this down time. >> It is also now expected that all Users will be in attendance >> at the RAITH tool as their exposures complete to reduce idle >> system time between reservation slots. >> >> If anyone has any questions please see me during my office hours. >> >> Thank you for your support! >> >> James Conway >> >> -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Sat May 3 23:07:26 2008 From: bdai at stanford.edu (Bing Dai) Date: Sat, 03 May 2008 23:07:26 -0700 Subject: Raith free for next user Message-ID: <20080503230726.jzesz7oxcs4w8w0s@webmail.stanford.edu> Finished early. Thanks. Bing -- Bing Dai Applied Physics Department CISX B103, 420 Via Palou, Stanford, CA 94305 (650) 723 4566 From mkoto at stanford.edu Sun May 4 17:17:38 2008 From: mkoto at stanford.edu (mkoto at stanford.edu) Date: Sun, 04 May 2008 17:17:38 -0700 Subject: Raith free 5/5 4:00-7:00 am In-Reply-To: <20080503230726.jzesz7oxcs4w8w0s@webmail.stanford.edu> References: <20080503230726.jzesz7oxcs4w8w0s@webmail.stanford.edu> Message-ID: <20080504171738.kupu068qo4040gog@webmail.stanford.edu> Hi all, Sample was not good...... sorry for late notice. Makoto *************************************************** Makoto Koto Visiting Scholar 476 Lomita Mall 244 McCullough Building Stanford, CA 94305-4045 *************************************************** From jwc at snf.stanford.edu Mon May 5 13:14:23 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 05 May 2008 13:14:23 -0700 Subject: ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway for MAY. Tuesday May 6 and 20th, 2008 10:15 AM to 12:30 PM Message-ID: <481F6A9F.5030201@snf.stanford.edu> * **ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. MARCH CLASSES. * Greetings SNF Lab Users, I will be conducting my next *"Take A Spin with Me" *training class Tuesday May 6 and 20th , 2008 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 3681 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 49030 bytes Desc: not available URL: From chenyw at stanford.edu Tue May 6 16:20:45 2008 From: chenyw at stanford.edu (Vincent Yi Wei Chen) Date: Tue, 6 May 2008 16:20:45 -0700 Subject: Raith Free Thursday May.8. 3-7am Message-ID: <00b701c8afcf$cfa33590$8c3342ab@stanford.edu> Samples won't be ready. Sorry for the late notice Vincent -------------- next part -------------- An HTML attachment was scrubbed... URL: From anikaak at gmail.com Wed May 7 16:08:56 2008 From: anikaak at gmail.com (anika kinkhabwala) Date: Wed, 07 May 2008 16:08:56 -0700 Subject: =?windows-1252?B?W0ludml0YXRpb25dIChObyBTdWJqZWN0KSBAIFdlZCBNYXkgNyA0OjMwcG0gliA1OjM=?= =?windows-1252?B?MHBtICgp?= Message-ID: <000e0cd28d4aa2ae95044cac0c83@google.com> raith at snf.stanford.edu, you are invited to Title: (No Subject) Time: Wed May 7 4:30pm ? 5:30pm (Timezone: Pacific Time) Calendar: Description: You can view this event at http://www.google.com/calendar/event?action=VIEW&eid=azdrMjI0ZWhzYWg0Y2htMmRzc25iOTEyaWsgcmFpdGhAc25mLnN0YW5mb3JkLmVkdQ&tok=MTcjYW5pa2Fha0BnbWFpbC5jb201MzYyZDU5OTBkNjFjNzc0MTY2NTkyYTU1MTcwZmQ5NjljNTNiZjAz&ctz=America%2FLos_Angeles&hl=en You are receiving this courtesy email at the account raith at snf.stanford.edu because you are an attendee of this event. To stop receiving future notifications for this event, decline this event. Alternatively you can sign up for a Google account at http://www.google.com/calendar/ and control your notification settings for your entire calendar. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: text/calendar Size: 989 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: invite.ics Type: application/ics Size: 989 bytes Desc: not available URL: From anikak at stanford.edu Wed May 7 16:08:57 2008 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Wed, 7 May 2008 16:08:57 -0700 Subject: Raith free 5:30a-8a tomorrow morning Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: invite.ics Type: text/calendar Size: 829 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: invite20080507T163000.ics Type: application/ics Size: 855 bytes Desc: not available URL: From anikak at stanford.edu Wed May 7 16:13:15 2008 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Wed, 7 May 2008 16:13:15 -0700 Subject: Raith free 5:30a-8a tomorrow morning Message-ID: Oops, not sure what happened with gmail, but I just meant to say that the Raith will be free tomorrow morning. Ignore the event invitations. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Wed May 7 22:33:02 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 7 May 2008 22:33:02 -0700 Subject: Problem with RAITH computer Message-ID: <046501c8b0cc$fbf93790$f3eba6b0$@edu> Hi, This evening I had several issues with RAITH150 computer, first RAITH was not able to acquire a scan image while SEM image was perfect, I tried single and continuous scan but nothing would show up in the image window. Based on advice from James I did a hardware reset on both RAITH and LEO and then I was able to acquire image. However when I was copying my patterns to the PL, RAITH application crashed and I had to kill it, I am attaching two screen shots. I finished my session since I didn't have time to refocus the beam etc. after killing the RAITH150 application the following error popped up: Access violation @ address 04e53B17 module "EEMGDSII.dll" read address 00000C08. Do you have an idea what could have caused the problem? my patters are very simple small lines. Thanks, Arash ---------------------------------------------------------------------------- ------ Arash Hazeghi PhD Candidate Stanford Center for Integrated Systems CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305 phone: +1-650-725-0418 web: http://www.stanford.edu/~ahazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Image018.jpg Type: image/jpeg Size: 244659 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Image021.jpg Type: image/jpeg Size: 216062 bytes Desc: not available URL: From zhangli at stanford.edu Thu May 8 16:51:45 2008 From: zhangli at stanford.edu (Li Zhang) Date: Thu, 8 May 2008 16:51:45 -0700 Subject: raith free Saturday 9:00am to noon Message-ID: <66aaf8f30805081651v2edb71b7xd914e027948404ec@mail.gmail.com> sample won't be ready. -- Li --------------------------------------- Li Zhang Dai's Group Department of Chemistry Stanford University --------------------------------------- .oooO ( ) Oooo. \ ( ( ) \ ) ) / Life is good, ( / it's just not easy. -------------- next part -------------- An HTML attachment was scrubbed... URL: From linyouc at stanford.edu Thu May 8 18:10:45 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Thu, 08 May 2008 18:10:45 -0700 Subject: Raith free Saturday 5:00pm-8:00pm In-Reply-To: <66aaf8f30805081651v2edb71b7xd914e027948404ec@mail.gmail.com> References: <66aaf8f30805081651v2edb71b7xd914e027948404ec@mail.gmail.com> Message-ID: <20080508181045.se1rwxubk0g0084k@webmail.stanford.edu> Take an earlier slot. Linyou Quoting Li Zhang : > sample won't be ready. > > -- > Li > --------------------------------------- > Li Zhang > Dai's Group > Department of Chemistry > Stanford University > --------------------------------------- > .oooO > ( ) Oooo. > \ ( ( ) > \ ) ) / > Life is good, ( / > it's just not easy. > -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From kimsangb at stanford.edu Fri May 9 11:30:57 2008 From: kimsangb at stanford.edu (SangBum Kim) Date: Fri, 9 May 2008 11:30:57 -0700 Subject: raith free from 10PM to 3AM Message-ID: <002c01c8b202$d2704170$a9b50c80@sangbumhome> RTA is down so the sample is not ready. Sorry for late notice. SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Fri May 9 12:37:54 2008 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 09 May 2008 12:37:54 -0700 Subject: Raith free 6am-10am Sunday morning Message-ID: <20080509123754.52gwmr3y8w4g80s0@webmail.stanford.edu> Sample won't be ready by then. -Yuan Yuan Zhang EE department From mitsuru1 at stanford.edu Fri May 9 13:22:04 2008 From: mitsuru1 at stanford.edu (toishi mitsuru) Date: Fri, 9 May 2008 13:22:04 -0700 Subject: Raith free 6am-10am Sunday morning In-Reply-To: <20080509123754.52gwmr3y8w4g80s0@webmail.stanford.edu> References: <20080509123754.52gwmr3y8w4g80s0@webmail.stanford.edu> Message-ID: <97ae680805091322y16f630bcs5739122cea585164@mail.gmail.com> Taken. Thanks. Mitsuru 2008/5/9 Yuan Zhang : > Sample won't be ready by then. > > -Yuan > > Yuan Zhang > EE department > > -- Mitsuru Toishi -------------- next part -------------- An HTML attachment was scrubbed... URL: From linyouc at stanford.edu Fri May 9 21:46:31 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Fri, 09 May 2008 21:46:31 -0700 Subject: Raith free 8:00-12:00am Saturday Message-ID: <20080509214631.jtjw2virs4sswg08@webmail.stanford.edu> Sample cannot be ready by then. Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From bilee at stanford.edu Sat May 10 04:31:42 2008 From: bilee at stanford.edu (Byoungil Lee) Date: Sat, 10 May 2008 04:31:42 -0700 Subject: Raith free 8:00-12:00am Saturday References: <20080509214631.jtjw2virs4sswg08@webmail.stanford.edu> Message-ID: <091301c8b291$6b7dfcc0$b66018ac@BILEEOFFICE> Taken. Thanks, Byoungil ----- Original Message ----- From: To: Sent: Friday, May 09, 2008 9:46 PM Subject: Raith free 8:00-12:00am Saturday > > Sample cannot be ready by then. > > Linyou > -- > Linyou Cao > PhD candidate > Dept. of Mater. Sci.and Engin., Brongersma Group > President&Co-founder > Stanford Nanoscience&Nanotechnology Society > Stanford University > From panjun at stanford.edu Sat May 10 12:19:55 2008 From: panjun at stanford.edu (Jun Pan) Date: Sat, 10 May 2008 12:19:55 -0700 Subject: raith free 8pm Message-ID: <200805101919.m4AJJq8W005539@smtp-roam.Stanford.EDU> -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Mon May 12 10:55:06 2008 From: kimsangb at stanford.edu (SangBum Kim) Date: Mon, 12 May 2008 10:55:06 -0700 Subject: raith free fromm 13:30 to 17:30 Message-ID: <001201c8b459$4fe13f30$a9b50c80@sangbumhome> Unexpected delay in preparing samples. I am sorry for late notice. SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From faraon at stanford.edu Mon May 12 10:58:07 2008 From: faraon at stanford.edu (Andrei Faraon) Date: Mon, 12 May 2008 10:58:07 -0700 Subject: raith free fromm 13:30 to 17:30 In-Reply-To: <001201c8b459$4fe13f30$a9b50c80@sangbumhome> References: <001201c8b459$4fe13f30$a9b50c80@sangbumhome> Message-ID: <28d3ece90805121058h7e96b012ve0f2f6f569f7ed13@mail.gmail.com> I took it! Thanks Andrei On Mon, May 12, 2008 at 10:55 AM, SangBum Kim wrote: > Unexpected delay in preparing samples. > > I am sorry for late notice. > > SangBum > > > -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 www.stanford.edu/~faraon -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 12 10:58:32 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 12 May 2008 10:58:32 -0700 Subject: ANNOUNCEMENT: "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway for MAY. Tuesday May 6 and 20th, 2008 10:15 AM to 12:30 PM Message-ID: <48288548.6050808@snf.stanford.edu> * **ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. MARCH CLASSES. * Greetings SNF Lab Users, I will be conducting my next *"Take A Spin with Me" *training class Tuesday May 6 and 20th , 2008 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 3681 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 49030 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon May 12 14:15:23 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 12 May 2008 14:15:23 -0700 Subject: Problem with RAITH computer In-Reply-To: <046501c8b0cc$fbf93790$f3eba6b0$@edu> References: <046501c8b0cc$fbf93790$f3eba6b0$@edu> Message-ID: <4828B36B.4060209@snf.stanford.edu> 1. RE: Access violation @ address 04e53B17 module "EEMGDSII.dll" read address 00000C08. -- This error appears as a window memory array addressing issue when the RAITH application attempts to write to a restricted area of memory reserved by windowns XP. Normally this is trivial and does not affect the application to th epoint of crashing it. 2. RE: Image acquisition issues: Generally when you run into image acquisition issues they can resolved by gracefully exiting and shutting down then after 10 seconds restarting the windows XP OS. Other Users: it would be helpful to me to track these events if you record these errors encountered in RAITH operations notebook number 4. Have a nice day! James Arash Hazeghi wrote: > > Hi, > > This evening I had several issues with RAITH150 computer, first RAITH > was not able to acquire a scan image while SEM image was perfect, I > tried single and continuous scan but nothing would show up in the > image window. Based on advice from James I did a hardware reset on > both RAITH and LEO and then I was able to acquire image. However when > I was copying my patterns to the PL, RAITH application crashed and I > had to kill it, I am attaching two screen shots. I finished my session > since I didn't have time to refocus the beam etc. after killing the > RAITH150 application the following error popped up: Access violation > @ address 04e53B17 module "EEMGDSII.dll" read address 00000C08. > > Do you have an idea what could have caused the problem? my patters are > very simple small lines. > > > > Thanks, > > Arash > > > > > > ---------------------------------------------------------------------------------- > > Arash Hazeghi > > > > PhD Candidate > > Stanford Center for Integrated Systems > > CIS-X 300, 420 Via Palou Mall, > > Stanford, CA 94305 > > > > phone: +1-650-725-0418 > > web: http://www.stanford.edu/~ahazeghi > > > > > ------------------------------------------------------------------------ > > > ------------------------------------------------------------------------ > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... 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URL: From ahazeghi at stanford.edu Mon May 12 21:00:27 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 12 May 2008 21:00:27 -0700 Subject: Problem with RAITH computer In-Reply-To: <4828B36B.4060209@snf.stanford.edu> References: <046501c8b0cc$fbf93790$f3eba6b0$@edu> <4828B36B.4060209@snf.stanford.edu> Message-ID: <054f01c8b4ad$e0f2a780$a2d7f680$@edu> James, I had a quick session today, I just did SEM but I noticed the PL window was somewhat slow to scroll and drag, maybe because I had too many features (a 4X7 matrix copy) although each device is fairly simple , just a few lines and pads. Can we solve this issue by getting extra RAM for the RAITH computer? Looks like currently it has 2GB and Windows XP can address up to 3.5GB. Thanks, Arash ---------------------------------------------------------------------------- ------ Arash Hazeghi PhD Candidate Stanford Center for Integrated Systems CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305 phone: +1-650-725-0418 web: http://www.stanford.edu/~ahazeghi From: James Conway [mailto:jwc at snf.stanford.edu] Sent: Monday, May 12, 2008 2:15 PM To: Arash Hazeghi Cc: raith at snf.stanford.edu Subject: Re: Problem with RAITH computer 1. RE: Access violation @ address 04e53B17 module "EEMGDSII.dll" read address 00000C08. -- This error appears as a window memory array addressing issue when the RAITH application attempts to write to a restricted area of memory reserved by windowns XP. Normally this is trivial and does not affect the application to th epoint of crashing it. 2. RE: Image acquisition issues: Generally when you run into image acquisition issues they can resolved by gracefully exiting and shutting down then after 10 seconds restarting the windows XP OS. Other Users: it would be helpful to me to track these events if you record these errors encountered in RAITH operations notebook number 4. Have a nice day! James Arash Hazeghi wrote: Hi, This evening I had several issues with RAITH150 computer, first RAITH was not able to acquire a scan image while SEM image was perfect, I tried single and continuous scan but nothing would show up in the image window. Based on advice from James I did a hardware reset on both RAITH and LEO and then I was able to acquire image. However when I was copying my patterns to the PL, RAITH application crashed and I had to kill it, I am attaching two screen shots. I finished my session since I didn't have time to refocus the beam etc. after killing the RAITH150 application the following error popped up: Access violation @ address 04e53B17 module "EEMGDSII.dll" read address 00000C08. Do you have an idea what could have caused the problem? my patters are very simple small lines. Thanks, Arash ---------------------------------------------------------------------------- ------ Arash Hazeghi PhD Candidate Stanford Center for Integrated Systems CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305 phone: +1-650-725-0418 web: http://www.stanford.edu/~ahazeghi _____ _____ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 244659 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 216062 bytes Desc: not available URL: From jwc at snf.stanford.edu Tue May 13 18:29:37 2008 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 13 May 2008 18:29:37 -0700 Subject: [Fwd: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing] Message-ID: <482A4081.9060205@snf.stanford.edu> Greetings Users: The system just came down with problems in the Laser stage virtual motor control software or possibly a real hardware issue with the X-Y Laser stage assemblies. Xinran W. could not complete his Load Lock Procedure and currently his sample and the transfer arm are inside the system chamber. System is down for users overnight while I figure out the best approach to resolve this problem. I also just email Raith USA Inc. So have a nice quiet evening, James -------- Original Message -------- Subject: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing Date: Tue, 13 May 2008 18:14:47 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu today during my test session I encountered several x motor SW flags which indicate a possible motion or SW control problem. This may or may not be related to the lost ceramic ball inside the stage rack. Hopefully it is sitting on the system chamber floor... monitoring overnight ... James -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ball.gif Type: image/gif Size: 1653 bytes Desc: not available URL: From xinranw at stanford.edu Tue May 13 19:36:28 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Tue, 13 May 2008 18:36:28 -0800 Subject: [Fwd: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing] In-Reply-To: <482A4081.9060205@snf.stanford.edu> References: <482A4081.9060205@snf.stanford.edu> Message-ID: <22ffcd060805131936o65a3f5ebsb0636fc6dd48556c@mail.gmail.com> Hi James, Actually after hitting the retry button for ~20times I was able to finish the loading procedure. So I tried to do the exposure as normal, but I found that if I want to move the stage in a relatively large distance, eg. from a clip to farady cup on sample holder, the stage some times stopped in the middle and there is an error message with virtual motor control. So I decided to unload my sample. During the way out, the same error in loading procedure appeared a couple of times ("it's not possible to reach the upper exchange position. X: -6.700") but after I hit retry the stage is now out. I also noticed that on the raith hardware module the "frequency locked" light is flashing rather than on steady. I'm not sure what caused this. Hope this information is useful for tomorrow trouble shooting. Best, Xinran On Tue, May 13, 2008 at 5:29 PM, James Conway wrote: > Greetings Users: > > The system just came down with problems in the Laser stage virtual motor > control software or possibly a real hardware issue with the X-Y Laser stage > assemblies. > Xinran W. could not complete his Load Lock Procedure and currently his > sample and the transfer arm are inside the system chamber. > > System is down for users overnight while I figure out the best approach > to resolve this problem. I also just email Raith USA Inc. > > So have a nice quiet evening, > > James > > > > > > -------- Original Message -------- Subject: Comment raith SNF 2008-05-13 > 18:14:46: x y Laser stage motor issues surfacing Date: Tue, 13 May 2008 > 18:14:47 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu > > today during my test session I encountered several x motor SW flags which indicate a possible motion or SW control problem. > This may or may not be related to the lost ceramic ball inside the stage rack. Hopefully it is sitting on the system chamber floor... > > monitoring overnight ... > James > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ball.gif Type: image/gif Size: 1653 bytes Desc: not available URL: From toecutter4ranger at gmail.com Wed May 14 09:27:14 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Wed, 14 May 2008 16:27:14 +0000 Subject: Xmotor issues Message-ID: <2014895890-1210782483-cardhu_decombobulator_blackberry.rim.net-1795679912-@bxe120.bisx.prod.on.blackberry> Good morning Overnight problems were encountered with the X motor I the laser stage. I will resume troubleshooting at 10 am Do not attempt to load the tool without me there. JWC Sent via BlackBerry by AT&T From jwc at snf.stanford.edu Wed May 14 18:27:26 2008 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 14 May 2008 18:27:26 -0700 Subject: Notice of RAITH off line status at some time next week to replace the X motor on the LIS Stage on the RAITH. day and time to be determined... Message-ID: <482B917E.10209@snf.stanford.edu> Good Afternoon Raith Community: The Raith system is up and Users are on the tool this evening. Current Issues and system status: 1. *X Motor controller errors -- motor is going bad slowly.* I was able to make changes to the X motor speed settings, reducing the speed of travel during movements of the Laser Interferometer Stage, in order to eliminate for a time the X motor control errors that we encountered yesterday evening. This is just a short term fix as the motor is slowly failing. A new motor is on order and it will be installed upon its arrival. At some point next week likely Tuesday or Wednesday afternoon I will take the system away from scheduled users to perform this work. Expect the system to be off line 8 - 10 hours before resuming the schedule. 2. *Neslab Chiller and cooling loop service scheduled for **this **Friday.* The situation is deteriorating rapidly with reduced flow through the cooling water loop and likely a restriction through the upper turbo pump cooling jacket from corrosion or debris in the lines as in the past. It is now less than 10 % of specified flow rate and I am starting to see some effects on the SEM platform such as drifting of the SEM image during high magnification imaging. We also had a possible arcing event last evening as the Column Chamber Valve was actuated during a Load Lock procedure. The EHT power supply and the FE-Gun tripped off and I was able to quickly recover the beam and bring up the system again for the next User. So far we have not yet had a water flow or temperature alarm situation. Currently the E/O card temperature is 30.3 degrees C. and rising slowly. I give it a 50:50 chance we will be able to continue operations through Friday at 10 AM when I take the system off-line for these repairs. We have a plan in place to have the system back up and ready for Users by about 4 PM Friday. 3. *Universal Sample Holder and Standard Sample Holder measurements have been completed.* No further changes to the Piezo post heights appear to be called for examining my initial data sets but I will be repeating these measurements and examining the total Delta WD measurements across a 90 mm transit across the 100 mm wafers. Currently for a clean wafer mounted on the _Universal Sample Holder_ I was able to level the wafer successfully using the leveling routine. You can level to within +-2.71 um across all three points using the leveling routine. I was able to repeat this measurement three times on three different wafers with nearly identical results. Currently for a clean 100 mm wafer mounted on the _Standard Sample Holder_, clipping with clips 2 and 4 inner positions , I was able to level the wafer successfully using the stage leveling routine on two runs to within +- 2.61 ?ms after leveling. I was able to perform this two times with the same wafer. On the third attempt to level the same wafer we tested today I was unable to level within the range of the piezo post 100 ?m limit of travel. The measurements indicated a 90 ?m total delta WD during the leveling routine. Likely this was a particle on the wafer backside or a new scratch on the sample holder. We plan to repeat these measurements in coming weeks to confirm and obtain better statistics. The _ElectroStatic Chuck (ESC) _has not be tested yet but I have writes in the plan for early June which will test this fixture and we will make mechanical adjustments to this holder as necessary. 4. Please welcome Lev Markov... Finally I would like to welcome the newest addition to RAITH USA Inc., Field Service Engineer Lev Markov. Lev Markov will be living, working and based in the SF Bay area to improve the technical and maintenance support for our RAITH 150 tool and will quickly become a very valuable resource for the Ebeam Lab. He will be working with me from 10 - 4 PM Friday so if you are in the Cleanroom, please visit the Ebeam Lab and assist me in welcoming him here to the Bay Area. Lev Markov brings with him a wealth of experience and many skills to the RAITH USA Inc. organization and will become our primary service contact. *All Users are asked to be careful with the system and to report any unusual error messages during their operations to me by email.* I will be out of the office tomorrow Thursday visiting UC Berkeley's Nanofabrication Labs. SMS is preferred way to reach me during 9:30 AM - 5 PM tomorrow. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: GrBar.gif Type: image/gif Size: 3624 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed May 14 19:01:51 2008 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 14 May 2008 19:01:51 -0700 Subject: new Thread: My contamination dots appear as strange single pixel lines and why. In-Reply-To: <28d3ece90805141053x10ba047ew20f9dbaabc7f51ae@mail.gmail.com> References: <482A4081.9060205@snf.stanford.edu> <28d3ece90805131837l6cc32b35l220d7f33daf108b1@mail.gmail.com> <482B2603.9060500@snf.stanford.edu> <28d3ece90805141053x10ba047ew20f9dbaabc7f51ae@mail.gmail.com> Message-ID: <482B998F.9060102@snf.stanford.edu> Hi Andrei and RAITH Users: Likely this effect could simply be astigmatism? Make the imaged feature as /'round ' /or circular/ /as you can using focus, seeking the 'center of focus' where the blur is neither vertical (focused above the feature) nor completely horizontal. (Focused below the feature) Now try to carefully translate the stigmation controls in X-Y and try to create a sharper and properly stigmated SEM image. Then check your focus again. Users may have to reiterate this process several times until they obtain a nearly perfect contamination dots. Users are reminded that your Ebeam Lithography writing result will only be as good as your focus, so it is worth the time and effort to ensure you are carefully focused and properly stigmated on your sample before performing a write field alignment and finally beginning your exposure. Good Question and I will make it a FAQ. in the near future! Good Evening, James Conway Andrei Faraon wrote: > OK... > > So why when we burn contamination dots they look like lines instead of > dots? > > Andrei > > > > On Wed, May 14, 2008 at 10:48 AM, James Conway > wrote: > > The stage is not drifting. The image is due to cooling loop > fluctuations. > > Best, > > JWC > > > Andrei Faraon wrote: >> Hi James, >> >> I used the Raith yesterday and today and I noticed that the stage >> drifts considerably during SEM-ing and while burning >> contamination dots (sometimes dots come out as lines). Do you >> think that this current problem is correlated to the stage drift >> problem? >> >> Andrei >> >> >> >> On Tue, May 13, 2008 at 6:29 PM, James Conway >> > wrote: >> >> Greetings Users: >> >> The system just came down with problems in the Laser stage >> virtual motor control software or possibly a real hardware >> issue with the X-Y Laser stage assemblies. >> Xinran W. could not complete his Load Lock Procedure and >> currently his sample and the transfer arm are inside the >> system chamber. >> >> System is down for users overnight while I figure out the >> best approach to resolve this problem. I also just email >> Raith USA Inc. >> >> So have a nice quiet evening, >> >> James >> >> >> >> >> >> -------- Original Message -------- >> Subject: Comment raith SNF 2008-05-13 18:14:46: x y Laser >> stage motor issues surfacing >> Date: Tue, 13 May 2008 18:14:47 -0700 >> From: jwc at snf.stanford.edu >> To: raith-pcs at snf.stanford.edu >> >> >> >> >> today during my test session I encountered several x motor SW flags which indicate a possible motion or SW control problem. >> This may or may not be related to the lost ceramic ball inside the stage rack. Hopefully it is sitting on the system chamber floor... >> >> monitoring overnight ... >> James >> >> >> >> >> >> >> -- >> Andrei Faraon >> >> Stanford University, Applied Physics >> 316 Via Pueblo Mall >> Stanford, CA, 94305 >> Mobile: 650 714 7881 >> Office: 650 723 2279 >> www.stanford.edu/~faraon > > > > > -- > Andrei Faraon > > Stanford University, Applied Physics > 316 Via Pueblo Mall > Stanford, CA, 94305 > Mobile: 650 714 7881 > Office: 650 723 2279 > www.stanford.edu/~faraon -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 1653 bytes Desc: not available URL: From ahazeghi at stanford.edu Wed May 14 19:11:10 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 14 May 2008 19:11:10 -0700 Subject: new Thread: My contamination dots appear as strange single pixel lines and why. In-Reply-To: <482B998F.9060102@snf.stanford.edu> References: <482A4081.9060205@snf.stanford.edu> <28d3ece90805131837l6cc32b35l220d7f33daf108b1@mail.gmail.com> <482B2603.9060500@snf.stanford.edu> <28d3ece90805141053x10ba047ew20f9dbaabc7f51ae@mail.gmail.com> <482B998F.9060102@snf.stanford.edu> Message-ID: <062501c8b630$f169d730$d43d8590$@edu> James, I observed the drift during my SEM session today and also on Monday, I am attaching two images obtained a few hours ago, while focus was prefect and I was able to see very sharp grains (these are 5-20nm Pd grains) in continuous averaging mode speed 4~5 the image would drift during slow scan and thus loosing sharpness. Features would drift ~10-25nm during a slow scan speed 9. Best, Arash ---------------------------------------------------------------------------- ------ Arash Hazeghi PhD Candidate Stanford Center for Integrated Systems CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305 phone: +1-650-725-0418 web: http://www.stanford.edu/~ahazeghi From: James Conway [mailto:jwc at snf.stanford.edu] Sent: Wednesday, May 14, 2008 7:02 PM To: Andrei Faraon Cc: Raith SNF Mailing list; sem4160 at snf.stanford.edu; semhitachi at snf.stanford.edu Subject: new Thread: My contamination dots appear as strange single pixel lines and why. Hi Andrei and RAITH Users: Likely this effect could simply be astigmatism? Make the imaged feature as 'round ' or circular as you can using focus, seeking the 'center of focus' where the blur is neither vertical (focused above the feature) nor completely horizontal. (Focused below the feature) Now try to carefully translate the stigmation controls in X-Y and try to create a sharper and properly stigmated SEM image. Then check your focus again. Users may have to reiterate this process several times until they obtain a nearly perfect contamination dots. Users are reminded that your Ebeam Lithography writing result will only be as good as your focus, so it is worth the time and effort to ensure you are carefully focused and properly stigmated on your sample before performing a write field alignment and finally beginning your exposure. Good Question and I will make it a FAQ. in the near future! Good Evening, James Conway Andrei Faraon wrote: OK... So why when we burn contamination dots they look like lines instead of dots? Andrei On Wed, May 14, 2008 at 10:48 AM, James Conway wrote: The stage is not drifting. The image is due to cooling loop fluctuations. Best, JWC Andrei Faraon wrote: Hi James, I used the Raith yesterday and today and I noticed that the stage drifts considerably during SEM-ing and while burning contamination dots (sometimes dots come out as lines). Do you think that this current problem is correlated to the stage drift problem? Andrei On Tue, May 13, 2008 at 6:29 PM, James Conway wrote: Greetings Users: The system just came down with problems in the Laser stage virtual motor control software or possibly a real hardware issue with the X-Y Laser stage assemblies. Xinran W. could not complete his Load Lock Procedure and currently his sample and the transfer arm are inside the system chamber. System is down for users overnight while I figure out the best approach to resolve this problem. I also just email Raith USA Inc. So have a nice quiet evening, James -------- Original Message -------- Subject: Comment raith SNF 2008-05-13 18:14:46: x y Laser stage motor issues surfacing Date: Tue, 13 May 2008 18:14:47 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu today during my test session I encountered several x motor SW flags which indicate a possible motion or SW control problem. This may or may not be related to the lost ceramic ball inside the stage rack. Hopefully it is sitting on the system chamber floor... monitoring overnight ... James -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 www.stanford.edu/~faraon -- Andrei Faraon Stanford University, Applied Physics 316 Via Pueblo Mall Stanford, CA, 94305 Mobile: 650 714 7881 Office: 650 723 2279 www.stanford.edu/~faraon -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.gif Type: image/gif Size: 1653 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PMMA5-450K-45sec-dev8-09.jpg Type: image/jpeg Size: 105485 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: PMMA5-450K-45sec-dev8-05.jpg Type: image/jpeg Size: 577550 bytes Desc: not available URL: From dejia at stanford.edu Wed May 14 20:08:32 2008 From: dejia at stanford.edu (Deji A.) Date: Wed, 14 May 2008 20:08:32 -0700 Subject: new Thread: My contamination dots appear as strange single pixel lines and why. In-Reply-To: <482B998F.9060102@snf.stanford.edu> References: <482A4081.9060205@snf.stanford.edu> <28d3ece90805131837l6cc32b35l220d7f33daf108b1@mail.gmail.com> <482B2603.9060500@snf.stanford.edu> <28d3ece90805141053x10ba047ew20f9dbaabc7f51ae@mail.gmail.com> <482B998F.9060102@snf.stanford.edu> Message-ID: <482BA930.3060309@stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 1653 bytes Desc: not available URL: From raneeyoo at stanford.edu Thu May 15 16:11:56 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Thu, 15 May 2008 16:11:56 -0700 Subject: Raith is free tomorrow from 16:30pm-20:30pm Message-ID: <20080515161156.tedwuzlpdwgw0w0s@webmail.stanford.edu> I am concerned about the current raith status. thanks, kyeongran From jwc at snf.stanford.edu Fri May 16 19:28:12 2008 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 16 May 2008 19:28:12 -0700 Subject: [Fwd: Comment raith SNF 2008-05-16 19:21:16: just running gun up and it all looks normal] Message-ID: <482E42BC.5060706@snf.stanford.edu> System is up and the vacuum and gun parameters look good. It will take a couple of hours to a day to reach normal emission levels. Go ahead and give it a whorl. Call me if you have any questions I will be on the rode to home and will be driving till ~ 2 AM... Thank you for your support! James Conway -------- Original Message -------- Subject: Comment raith SNF 2008-05-16 19:21:16: just running gun up and it all looks normal Date: Fri, 16 May 2008 19:21:16 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu next users go ahead and try it out and call me if you have problems. Thank you for your support! james -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri May 16 19:30:52 2008 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 16 May 2008 19:30:52 -0700 Subject: James will be away form the office Monday morning. SMS text preferred... Message-ID: <482E435C.2030407@snf.stanford.edu> Greetings: I have a meeting at UC Davis in the morning so I will be arriving at SNF in the afternoon. Users can reach me by cell phone at 415-412-4825 but SMS text messages are preferred after 9 AM. All The Best, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From bdai at stanford.edu Fri May 16 22:50:22 2008 From: bdai at stanford.edu (Bing Dai) Date: Fri, 16 May 2008 22:50:22 -0700 Subject: Raith Available for next user Message-ID: <20080516225022.gglfzf5g74wk4gg8@webmail.stanford.edu> Finished early Thanks, Bing -- Bing Dai PhD Candidate Applied Physics Department CISX B103, 420 Via Palou, Stanford, CA 94305 (650) 723 4566 From slatif at stanford.edu Fri May 16 23:18:02 2008 From: slatif at stanford.edu (Salman Latif) Date: Fri, 16 May 2008 23:18:02 -0700 Subject: Rservation released tomorrow 5-7pm Message-ID: <20080516231802.tvcgy3o734k4sg8g@webmail.stanford.edu> From dalyx at stanford.edu Sat May 17 12:29:13 2008 From: dalyx at stanford.edu (Dany-Sebastien Ly-Gagnon) Date: Sat, 17 May 2008 12:29:13 -0700 Subject: Minor problems this morning Message-ID: <7f014b6b0805171229u13a6d922hbf847a64dac85845@mail.gmail.com> I encountered 2 minor problems with RAITH this morning. (1) Camera and SEM didn't work. Couldn't use the camera (TV) nor SEM right after loading. Both computers were shutdown and rebooted, then SEM computer was back in normal conditions and I could now see the stage through the camera (TV). Encountered the same problem a second time after doing a write field alignment. I noticed that the EHT went down for no apparent reason. There was no image even through the camera. Again, shutdown and reboot worked, but refocus & astigmatism was necessary. (2) Error Piezo Control message upon loading RAITH150. The error message was "Piezo Hardware not connected." Didn't seem to cause problem, as I don't use the piezo anyway. -- Dany -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Sat May 17 18:35:42 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Sat, 17 May 2008 18:35:42 -0700 Subject: RAITH available now Message-ID: <20080517183542.chutgw905c08oc48@webmail.stanford.edu> I am unloading my wafer now, RAITH sw is not talking to the stage piezos, it is not possible to level sample. Arash From bilee at stanford.edu Sun May 18 05:23:33 2008 From: bilee at stanford.edu (Byoungil Lee) Date: Sun, 18 May 2008 05:23:33 -0700 Subject: Raith free Mon 0-3am References: <20080517183542.chutgw905c08oc48@webmail.stanford.edu> Message-ID: <006e01c8b8e1$fd1281a0$b66018ac@BILEEOFFICE> Leveling does not seem to work. Byoungil ----- Original Message ----- From: "Arash Hazeghi" To: Sent: Saturday, May 17, 2008 6:35 PM Subject: RAITH available now >I am unloading my wafer now, RAITH sw is not talking to the stage > piezos, it is not possible to level sample. > > Arash > From slatif at stanford.edu Sun May 18 20:26:50 2008 From: slatif at stanford.edu (Salman Latif) Date: Sun, 18 May 2008 20:26:50 -0700 Subject: ending session early Message-ID: <20080518202650.tb4n237dc8oow4ss@webmail.stanford.edu> I used an Espacer polymer coating on my sample, but it turns out because of that I can't see any of the features on the chip to which I have to align to. From linyouc at stanford.edu Sun May 18 22:23:49 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Sun, 18 May 2008 22:23:49 -0700 Subject: Raith is available for next user Message-ID: <20080518222349.3lf5xl9l44s4koww@webmail.stanford.edu> Done earlier. linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From jwc at snf.stanford.edu Mon May 19 18:29:51 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 19 May 2008 18:29:51 -0700 Subject: Minor problems this morning In-Reply-To: <7f014b6b0805171229u13a6d922hbf847a64dac85845@mail.gmail.com> References: <7f014b6b0805171229u13a6d922hbf847a64dac85845@mail.gmail.com> Message-ID: <4832298F.2010708@snf.stanford.edu> Hello Dany-Sebastian and Raith Users: So it seems that we have seen this problem several times over the weekend as I received two calls SAT and one this afternoon on thread No 2, below. If you don't have cameras or detectors then it is a module called L-REM that didn't register on the server properly OR its' instruction set became corrupted upon the read operation. Gracefully exit out of both the LEO column control and Windows XP OS applications gracefully selecting 'shutdown'. Upon rebooting the computer it should be OK! NO 2 is a loss of the IEEE-488 communications buss to the Piezo support post in the Laser Interferometer Stage and it too will be resolved by shutting down the RAITH PC and rebooting. Remember on both of these computers to [SHUTDOWN] and not [RESTART} as it needs the 0 volt signal to reinit the communications across several buss for everything to work properly. All the Best, James Conway Dany-Sebastien Ly-Gagnon wrote: > I encountered 2 minor problems with RAITH this morning. > > (1) Camera and SEM didn't work. Couldn't use the camera (TV) nor SEM > right after loading. Both computers were shutdown and rebooted, then > SEM computer was back in normal conditions and I could now see the > stage through the camera (TV). Encountered the same problem a second > time after doing a write field alignment. I noticed that the EHT went > down for no apparent reason. There was no image even through the > camera. Again, shutdown and reboot worked, but refocus & astigmatism > was necessary. > > (2) Error Piezo Control message upon loading RAITH150. The error > message was "Piezo Hardware not connected." Didn't seem to cause > problem, as I don't use the piezo anyway. > > -- > Dany -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 19 18:50:56 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 19 May 2008 18:50:56 -0700 Subject: Please return the RAITH dongles to me... Message-ID: <48322E80.2020600@snf.stanford.edu> Greetings: Raith Dongles are normally checked out for a two week only loan period. Please bring back the RAITH dongles. I have other users in the queue whom are waiting. Thank you, JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 19 18:54:23 2008 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 19 May 2008 18:54:23 -0700 Subject: Reminder-- "Take A Spin with Me" -- Ebeam Resist Handling Training on the Headway TOMORROW ==> Tuesday 20th, 2008 10:15 AM to 12:30 PM SNF Cleanroom Message-ID: <48322F4F.5020401@snf.stanford.edu> * **ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. MARCH CLASSES. * Greetings SNF Lab Users, I will be conducting my next *"Take A Spin with Me" *training class Tuesday May 20th , 2008 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. *This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. * Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply any Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 3681 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 49030 bytes Desc: not available URL: From zhangli at stanford.edu Mon May 19 19:23:28 2008 From: zhangli at stanford.edu (Li Zhang) Date: Mon, 19 May 2008 19:23:28 -0700 Subject: raith free tomorrow from noon to 3:00pm Message-ID: <66aaf8f30805191923t5ff93d99l11aa098b14f69d4b@mail.gmail.com> Sample is not ready. Enjoy. -- Li --------------------------------------- Li Zhang Dai's Group Department of Chemistry Stanford University --------------------------------------- .oooO ( ) Oooo. \ ( ( ) \ ) ) / Life is good, ( / it's just not easy. -------------- next part -------------- An HTML attachment was scrubbed... URL: From kathrynt at stanford.edu Mon May 19 19:25:34 2008 From: kathrynt at stanford.edu (Kathryn Todd) Date: Mon, 19 May 2008 19:25:34 -0700 Subject: raith free tomorrow from noon to 3:00pm In-Reply-To: <66aaf8f30805191923t5ff93d99l11aa098b14f69d4b@mail.gmail.com> References: <66aaf8f30805191923t5ff93d99l11aa098b14f69d4b@mail.gmail.com> Message-ID: <4070ecc80805191925q6a71a210j38cee6702d268e14@mail.gmail.com> taken On Mon, May 19, 2008 at 7:23 PM, Li Zhang wrote: > Sample is not ready. Enjoy. > > -- > Li > --------------------------------------- > Li Zhang > Dai's Group > Department of Chemistry > Stanford University > --------------------------------------- > .oooO > ( ) Oooo. > \ ( ( ) > \ ) ) / > Life is good, ( / > it's just not easy. > From toecutter4ranger at gmail.com Wed May 21 10:51:01 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Wed, 21 May 2008 17:51:01 +0000 Subject: RAITH will be here this afternoon to replace x motor on stage. Message-ID: <1748282269-1211392309-cardhu_decombobulator_blackberry.rim.net-433640428-@bxe120.bisx.prod.on.blackberry> Greetings RAITH will be here this afternoon to replace x motor on stage. As announced in previous emails I will be taking the system from users when they arrive about 1:30 to 2 PM. We hope to have this work completed by 7PM Thank you for your support! James Sent via BlackBerry by AT&T From mpreiner at stanford.edu Wed May 21 13:23:20 2008 From: mpreiner at stanford.edu (mpreiner at stanford.edu) Date: Wed, 21 May 2008 13:23:20 -0700 Subject: RAITH open tomorrow (May 22) noon-5pm. In-Reply-To: <1748282269-1211392309-cardhu_decombobulator_blackberry.rim.net-433640428-@bxe120.bisx.prod.on.blackberry> References: <1748282269-1211392309-cardhu_decombobulator_blackberry.rim.net-433640428-@bxe120.bisx.prod.on.blackberry> Message-ID: <20080521132320.52r9dkvhkoo8oswg@webmail.stanford.edu> enjoy, mike From dalyx at stanford.edu Wed May 21 13:27:30 2008 From: dalyx at stanford.edu (Dany-Sebastien Ly-Gagnon) Date: Wed, 21 May 2008 13:27:30 -0700 Subject: RAITH open tomorrow (May 22) noon-5pm. In-Reply-To: <20080521132320.52r9dkvhkoo8oswg@webmail.stanford.edu> References: <1748282269-1211392309-cardhu_decombobulator_blackberry.rim.net-433640428-@bxe120.bisx.prod.on.blackberry> <20080521132320.52r9dkvhkoo8oswg@webmail.stanford.edu> Message-ID: <7f014b6b0805211327i12ea202ek35d08cc8ee5ef83d@mail.gmail.com> Thanks! I took 1pm to 3h30pm. -- Dany On Wed, May 21, 2008 at 1:23 PM, wrote: > enjoy, > mike > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed May 21 18:38:22 2008 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 21 May 2008 18:38:22 -0700 Subject: ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway for JUNE. Tuesday JUNE 10 and 24th, 2008 10:15 AM to 12:30 PM Message-ID: <4834CE8E.3000603@snf.stanford.edu> * **ANNOUNCEMENT: "Take A Spin with Me" -- Resist Handling Training on the Headway Coater. * Greetings SNF Lab Users, I will be conducting my next *"Take A Spin with Me" *training class Tuesday June 10th and 24th , 2008 from 10:15 AM - 12:30 PM. There is a sign up sheet posted on the white board in my office if you desire to sign up in advance. This is a great opportunity for you to get acquainted with the specific points to employ when working with our Ebeam or Optical Resist materials in order to obtain high quality thin film coatings over your wafers for Electron Beam, Scanning Probe (SPL), and Optical Lithography. In these applications accurate control of polymer thickness is important in order to obtain consistent high quality lithography results. We will be conducting this training on the Headway Spin Coater. Users attending this session will gain their qualification on this tool and also learn to perform thin film measurements on the Nanospec TFA measurement tool. This is a Hands-On Lab Session, please have your substrates clean and ready to coat on the Headway Coater. Class Schedule: 10:15 - 11:00 I will start with substrate cleans on WET BENCH NONMETAL performing Pirhana substrate cleans and HF etching of the intrinsic native oxide on Silicon wafers. All users must have their substrates cleaned and ready to go for spinning by the session time; either coming out of the 150 degree Singe oven, or if you are working on oxides or nitrides, coming out of the YES HMDS Prime oven directly. 11:00 - 12:00 We can apply what ever Ebeam or Optical Resist system you desire for your work. 12:00 - 12:30 Thin Film Measurements on the Nanospec Thin Film Analyzer All interested parties are welcome to attend this session. Thank you for your interest in Ebeam and Optical Lithography at Stanford Nanofabrication Facility, James W. Conway Ebeam Technology Group Stanford Nanofabrication Facility 650-725-7075 office hour Tuesday - Friday 8:30 - 9:30 AM CIS 31 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 3681 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 49030 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu May 22 19:58:07 2008 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 22 May 2008 19:58:07 -0700 Subject: FAQ NO 6: HOW to get help on the RAITH System during your session -- "Who are your gonna call" Message-ID: <483632BF.8010201@snf.stanford.edu> *Attention Raith Users: We have recovered from the problems we ran into on equipment in the Ebeam Lab and the RAITH is ready for users. Please be careful with the systems. *Starting tomorrow and continuing through June 2, 2008 I will be away from SNF attending the Three Beams conference in Portland, OR. During this time I will be off the cell phone grid at times and you will be unable to reach me by cell phone for support on the Raith 150 system. I will respond to all voice mail left on my phone as soon as I am able to at 415-412-4825. SMS may get a faster response from me as well. All PMMA's have been stocked in sufficient supplies to last through this period. Please use these expensive engineering materials frugally and if we run out please see David Cala to obtain the next bottle of materials. Please enlist the aid of your local Raith Champions for assistance on the tool should you run into any problems whatsoever. Below and attached I have the Raith FAQ No. 6,* *How to Get Help - "WHO ARE YOU GOING TO CALL" and the Raith Champion list and email addresses. Please play nicely together and work to maximize throughput on the system while I am away. Please refrain from shutting down the system on Coral during my absence. Thank you for your support! James Conway _______________________________________________________________________________________________________________________________________________ *RAITH FAQ NO 6: RAITH SYSTEM PROBLEMS: How to Get Help - "WHO ARE YOU GOING TO CALL" * * * *Greetings Raith Users:** *I wish to remind everyone that we have set into place a hierarchical structure on what to do and whom to call if you encounter problems on the RAITH 150 system during my absence, or for those times I am not be available by cell phone. * For Example:* ? You encounter a LOAD LOCK ERROR on the system and cannot ? continue the Load or Unload cycle without an administrator login and support. ? The pumps or system hardware are not working normally and the ? logic may have become reversed. ? Beam Blanking Logic is reversed due to an RAITH150.exe ? application crash when the beam was unblanked in your software panel ... any unforeseen problems with the Water flow and cooling or the LIS stage. 1. If I am available, try to call me on my cell phone and I will walk you through the Recovery procedures. My number is 001-415-412-4825. Be sure to leave Voice Mail if I don't answer! SMS is preferred between 8 AM and 8 PM as Three Beams is a very active conference for me. 2. Try then to contact a RAITH Champion: Ilya Fushman ifushman at stanford 650-804-1058 Jun Pan panjun at stanford.edu 1-650-353-6588 Dirk Englund englund at stanford.edu 1-650-450-3829 3. Contact a RAITH USA Application Support Specialist: Dr. Joseph Klingfus, Applications Scientist jk at raithusa.com 1-218-483-1267 4. For Major Hardware issues and all emergencies with the LEO or RAITH Hardware: Contact the RAITH USA Field Service Manager, Cole Loomis cl at raithusa.com (631) 738-9500 or Kevin Burcham kb at raithusa.com at the same number RAITH USA. Please be careful with the system during my absence! *Thank you all for your support!* James Conway Ebeam Technology Group Stanford Nanofabrication Facility. Cell 415-412-4825 jwc at snf.stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Thu May 22 23:18:00 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Thu, 22 May 2008 23:18:00 -0700 Subject: In case, tomorrow 21:30pm - 1:30am will be released Message-ID: <20080522231800.o4n1ezuxpcggowcw@webmail.stanford.edu> Hello! If the T robot arm issue has not been solved until my session at 21:30pm tomorrow, I will release my session. thanks, Kyeongran From ahazeghi at stanford.edu Fri May 23 01:52:49 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Fri, 23 May 2008 01:52:49 -0700 Subject: RAITH available tomorrow 11:30-13:00PM Message-ID: <00db01c8bcb2$60970650$21c512f0$@edu> I am attending the annual CPN workshop tomorrow and thus reducing my reservation time, I will start at 13:00, tool is available from 11:30-13:00 if the load issue is cleared by then. Thanks, Arash ---------------------------------------------------------------------------- - Arash Hazeghi PhD Candidate, Stanford Center for Integrated Systems 420 Via Palou Mall, CIS-X 300 Stanford, CA 94305 phone: +1-(650)-725-0418 http://www.stanford.edu/~ahazeghi/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Fri May 23 08:12:43 2008 From: krivoire at stanford.edu (krivoire at stanford.edu) Date: Fri, 23 May 2008 08:12:43 -0700 Subject: raith update; if you are writing today please load your sample at 9:30 am today Message-ID: <20080523081243.xbfyl5zlv4s0ckss@webmail.stanford.edu> Hi raith users, As many of you are aware, Raith is having loading problems, and James is out of town. With help from James by phone, I was able to use the service login to load my chip this morning. In order to avoid having to do this for every session, James would like to load chips for *ALL* users scheduled to write today when my session ends at 9:30 am, when either he will be available by phone to guide the loading process or will have someone from Raith call us to help. thanks, Kelley From xinranw at stanford.edu Fri May 23 09:12:27 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Fri, 23 May 2008 09:12:27 -0700 Subject: raith update; if you are writing today please load your sample at 9:30 am today In-Reply-To: <20080523081243.xbfyl5zlv4s0ckss@webmail.stanford.edu> References: <20080523081243.xbfyl5zlv4s0ckss@webmail.stanford.edu> Message-ID: <22ffcd060805230912gf2b7727qade291a42aea421c@mail.gmail.com> Hi Kelley, Is there a way to write down the loading procedure for people to follow while James is away? If this continue to be a problem, we cannot just load people's chips in one time of a day because of limited clips and the availability of the samples. Can we ask for James permission to use the administrator login for this limited time and then he can change the password once coming back? If there is a phone number we can call 24/7 that will be ok too... Thanks, Xinran On Fri, May 23, 2008 at 8:12 AM, wrote: > Hi raith users, > > As many of you are aware, Raith is having loading problems, and James is > out of town. > > With help from James by phone, I was able to use the service login to load > my chip this morning. In order to avoid having to do this for every session, > James would like to load chips for *ALL* users scheduled to write today when > my session ends at 9:30 am, when either he will be available by phone to > guide the loading process or will have someone from Raith call us to help. > > thanks, > Kelley > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kathrynt at stanford.edu Fri May 23 09:47:47 2008 From: kathrynt at stanford.edu (Kathryn Todd) Date: Fri, 23 May 2008 09:47:47 -0700 Subject: raith free till 1pm Message-ID: <4070ecc80805230947n218269cdq22c929085d770440@mail.gmail.com> Sorry for the late notice. Worried about the loading. From krivoire at stanford.edu Fri May 23 09:54:04 2008 From: krivoire at stanford.edu (krivoire at stanford.edu) Date: Fri, 23 May 2008 09:54:04 -0700 Subject: loading problem resolved; raith is green lighted again Message-ID: <20080523095404.iqi40nar4g8c04wk@webmail.stanford.edu> Hi raith users, With the help of Cole Loomis at Raith USA, I was able to resolve the loadload error. I have now completed two normal loads of the system, and Mary Tang is going to green light the machine, per the recommendation of James. Kelley From toecutter4ranger at gmail.com Fri May 23 10:16:28 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Fri, 23 May 2008 17:16:28 +0000 Subject: RAITH is back up Message-ID: <237721892-1211563033-cardhu_decombobulator_blackberry.rim.net-1358048692-@bxe120.bisx.prod.on.blackberry> The exchange position for the t arm has been reset. Load and unload of the system will no longer be troublesome. James Sent via BlackBerry by AT&T From raneeyoo at stanford.edu Fri May 23 16:11:49 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Fri, 23 May 2008 16:11:49 -0700 Subject: zep520 In-Reply-To: <483632BF.8010201@snf.stanford.edu> References: <483632BF.8010201@snf.stanford.edu> Message-ID: <20080523161149.e4y44gxcpwsggwco@webmail.stanford.edu> Hello! I am wondering if anyone see the ZEP520 bottle? The dilute zep520 is almost gone. So I tried to fine the original bottle, bit couldn't. I think I can use the current dilute one for my small sample now. But if you plan to use it in the near future, we may need one. Thanks and have a nice weekend! best, Kyeongran From linyouc at stanford.edu Sat May 24 18:26:37 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Sat, 24 May 2008 18:26:37 -0700 Subject: Kindly reminder: Please do not shut down Raith unless 100% sure Message-ID: <20080524182637.brfccgkf4ko4kw4w@webmail.stanford.edu> Just kindly remind that please think carefully before deciding to shut down Raith. If you are confronted with problems you cannot solve, the first choice would be turning it be yellow. If you have to shut it down, please announce it out. This morning some user shut down the machine because some problem eventually turns out to be minor. The machine now seems in a very good shape, but we cannot use it as James is out of reach for re-activation. The machine is so heavily used, and any delay would cause much inconvenience for many of us. Best Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From bdai at stanford.edu Sat May 24 18:34:18 2008 From: bdai at stanford.edu (Bing Dai) Date: Sat, 24 May 2008 18:34:18 -0700 Subject: Kindly reminder: Please do not shut down Raith unless 100% sure In-Reply-To: <20080524182637.brfccgkf4ko4kw4w@webmail.stanford.edu> References: <20080524182637.brfccgkf4ko4kw4w@webmail.stanford.edu> Message-ID: <20080524183418.zjqy7wtm3kggo0kk@webmail.stanford.edu> I'm agree with Linyou. Please be more considerate... Thanks, Bing Quoting linyouc at stanford.edu: > > Just kindly remind that please think carefully before deciding to shut > down Raith. If you are confronted with problems you cannot solve, the > first choice would be turning it be yellow. If you have to shut it > down, please announce it out. > > This morning some user shut down the machine because some problem > eventually turns out to be minor. The machine now seems in a very good > shape, but we cannot use it as James is out of reach for re-activation. > The machine is so heavily used, and any delay would cause much > inconvenience for many of us. > > Best > > > Linyou > -- > Linyou Cao > PhD candidate > Dept. of Mater. Sci.and Engin., Brongersma Group > President&Co-founder > Stanford Nanoscience&Nanotechnology Society > Stanford University -- Bing Dai Applied Physics Department CISX B103, 420 Via Palou, Stanford, CA 94305 (650) 723 4566 From shott at stanford.edu Sat May 24 19:14:04 2008 From: shott at stanford.edu (John Shott) Date: Sat, 24 May 2008 19:14:04 -0700 Subject: Kindly reminder: Please do not shut down Raith unless 100% sure In-Reply-To: <20080524182637.brfccgkf4ko4kw4w@webmail.stanford.edu> References: <20080524182637.brfccgkf4ko4kw4w@webmail.stanford.edu> Message-ID: <4838CB6C.1020302@stanford.edu> Linyou and Bing: Based on your comments in the previous message, I've removed the shutdown in hopes that one of you will be able to run the system and recover from the apparent vacuum problem of earlier. I'd like to ask everyone who may be using the system between now and the time that James returns to operate things very carefully. If things get damaged as a result of me clearing this shutdown .... you can imagine that I'll be in hot water and will be less inclined to stick my neck out in the future. So, please, proceed carefully .... and if there is a serious problem, please shutdown the tool. Thanks .... and happy processing, John From bdai at stanford.edu Sat May 24 23:32:01 2008 From: bdai at stanford.edu (Bing Dai) Date: Sat, 24 May 2008 23:32:01 -0700 Subject: Raith Status Update Message-ID: <20080524233201.nn2fkkq9ts0kg0w8@webmail.stanford.edu> Hi all, The vacuum was fine when John Shott cleared the 'shut down' and I was able to unload the previous user's samples. However, during my session the vacuum was off twice. First time it was off during the write field alignment. Repumping returned the vacuum to normal and I was able to start my writing. But vacuum and EHT were off again during the exposure. I could only finish part of my exposure and had to cancel the remaining of my session. Currently the system vacuum is OK but Gun vacuum is as low as 1.7e-7Pa. It might still be OK for ebeam writing but it would be better if we can wait till the problem is solved. 'Yellow light' was put on coral. Regards, Bing -- Bing Dai Applied Physics Department CISX B103, 420 Via Palou, Stanford, CA 94305 (650) 723 4566 From toecutter4ranger at gmail.com Sun May 25 08:57:53 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Sun, 25 May 2008 15:57:53 +0000 Subject: Next user call me to enable Message-ID: <878608722-1211731116-cardhu_decombobulator_blackberry.rim.net-2081927872-@bxe120.bisx.prod.on.blackberry> Hello I can't see RAITH emails But it appears you need help getting tool up or online Next user call me Before I am off the grid again Jwc. Lassen park Sent via BlackBerry by AT&T From toecutter4ranger at gmail.com Sun May 25 09:29:09 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Sun, 25 May 2008 16:29:09 +0000 Subject: Raith status .... In-Reply-To: <483992C4.3090106@stanford.edu> References: <483992C4.3090106@stanford.edu> Message-ID: <1841752930-1211732995-cardhu_decombobulator_blackberry.rim.net-1029339046-@bxe120.bisx.prod.on.blackberry> Thanks John Sounds like a water flow or turbo speed or cooling issue. Gun vac needs to be below 2E-9mbar For gun to stay on And enable EHT CC'd RAITH for service assist On grid through lunchtime then running some trails PM Best James Sent via BlackBerry by AT&T -----Original Message----- From: John Shott Date: Sun, 25 May 2008 09:24:36 To:toecutter4ranger at gmail.com Subject: Raith status .... James: Hopefully you can see this from your blackberry ... A user had shut the system for what Bing Dai thought was a minor vacuum problem. I cleared the shutdown for him and then this is the most recent message from Bing Dai: The vacuum was fine when John Shott cleared the 'shut down' and I was able to unload the previous user's samples. However, during my session the vacuum was off twice. First time it was off during the write field alignment. Repumping returned the vacuum to normal and I was able to start my writing. But vacuum and EHT were off again during the exposure. I could only finish part of my exposure and had to cancel the remaining of my session. Currently the system vacuum is OK but Gun vacuum is as low as 1.7e-7Pa. It might still be OK for ebeam writing but it would be better if we can wait till the problem is solved. 'Yellow light' was put on coral. Hope that helps .... John From shott at stanford.edu Tue May 27 10:12:13 2008 From: shott at stanford.edu (John Shott) Date: Tue, 27 May 2008 10:12:13 -0700 Subject: Raith field service coming today .... Message-ID: <483C40ED.9040308@stanford.edu> Raith Community: While I don't yet know what time they will arrive, I believe that Raith field service will show up to help us out a bit later today. If anyone who is more knowledgeable than I might be available to either tell them what you've observed or can send me email with any more detailed reports over and above what was written up in the problem reports, I'd be most appreciative if you could contact me. Thanks, John From raneeyoo at stanford.edu Tue May 27 15:03:18 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Tue, 27 May 2008 15:03:18 -0700 Subject: raith tentatively free tomorrow 10am - 2pm Message-ID: <20080527150318.n8bp6zr94w40gw4c@webmail.stanford.edu> depending on the system status and sample preparation From xinranw at stanford.edu Tue May 27 15:04:54 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Tue, 27 May 2008 15:04:54 -0700 Subject: raith tentatively free tomorrow 10am - 2pm In-Reply-To: <20080527150318.n8bp6zr94w40gw4c@webmail.stanford.edu> References: <20080527150318.n8bp6zr94w40gw4c@webmail.stanford.edu> Message-ID: <22ffcd060805271504n12222688x43063ce95bc16da2@mail.gmail.com> taken, if the system is up and your sample is not ready. Thanks, Xinran On Tue, May 27, 2008 at 3:03 PM, Kyeongran Yoo wrote: > depending on the system status and sample preparation > -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Tue May 27 17:07:15 2008 From: shott at stanford.edu (John Shott) Date: Tue, 27 May 2008 17:07:15 -0700 Subject: Raith update .... Message-ID: <483CA233.7080105@stanford.edu> Raith User Community: Lev from Raith had done a lot of work on the cooling loop and, we think, it is close to running. Because I will not be here this evening, I've cleared the shutdown and enabled it in my name. Lev is currently working on turning the system back on. HOWEVER, UNLESS YOU SEE AN OK NOTE FROM LEV, YOU CANNOT USE THE SYSTEM!!!! He has promised that he will leave a note on the keyboard letting you know whether the system is OK or not. Thanks, John From raneeyoo at stanford.edu Tue May 27 17:29:13 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Tue, 27 May 2008 17:29:13 -0700 Subject: raith free tomorrow 10am - 2pm In-Reply-To: <22ffcd060805271504n12222688x43063ce95bc16da2@mail.gmail.com> References: <20080527150318.n8bp6zr94w40gw4c@webmail.stanford.edu> <22ffcd060805271504n12222688x43063ce95bc16da2@mail.gmail.com> Message-ID: <20080527172913.hd0tst7r404kcg4c@webmail.stanford.edu> Quoting Xinran Wang : > taken, if the system is up and your sample is not ready. > > Thanks, > Xinran > > On Tue, May 27, 2008 at 3:03 PM, Kyeongran Yoo > wrote: > >> depending on the system status and sample preparation >> > From slatif at stanford.edu Wed May 28 05:15:02 2008 From: slatif at stanford.edu (Salman Latif) Date: Wed, 28 May 2008 05:15:02 -0700 Subject: finishing early -- beam blanking issues Message-ID: <20080528051502.jtybfy05a8ok08gk@webmail.stanford.edu> The beam blank button seemed to be in reverse mode. I could see the SEM image in the off mode, and vice versa. More importantly, the beam would not stay blanked during a move from one position to another (whether you turn the blanker on or off). I shut down both computers, and after starting up again, could not see the SEM image at all. From bilee at stanford.edu Wed May 28 05:21:11 2008 From: bilee at stanford.edu (Byoungil Lee) Date: Wed, 28 May 2008 05:21:11 -0700 Subject: finishing early -- beam blanking issues References: <20080528051502.jtybfy05a8ok08gk@webmail.stanford.edu> Message-ID: <001101c8c0bd$50f34010$9bb30c80@bileehome> It's a problem caused by a switch in the controller box. The switch called 'ebeam' should be up position, but sometimes it's mysteriously switched down... It was okay until 3am today. Byoungil ----- Original Message ----- From: "Salman Latif" To: "Raith SNF Mailing list" Sent: Wednesday, May 28, 2008 5:15 AM Subject: finishing early -- beam blanking issues > The beam blank button seemed to be in reverse mode. I could see the SEM > image in the off mode, and vice versa. More importantly, the beam would > not stay blanked during a move from one position to another (whether you > turn the blanker on or off). I shut down both computers, and after > starting up again, could not see the SEM image at all. > From linyouc at stanford.edu Wed May 28 09:19:02 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Wed, 28 May 2008 09:19:02 -0700 Subject: Raith available till 10:00am In-Reply-To: <001101c8c0bd$50f34010$9bb30c80@bileehome> References: <20080528051502.jtybfy05a8ok08gk@webmail.stanford.edu> <001101c8c0bd$50f34010$9bb30c80@bileehome> Message-ID: <20080528091902.z4p41dbvwgcg8wk4@webmail.stanford.edu> Done earlier. It seems to work very well so far. Linyou Quoting Byoungil Lee : > It's a problem caused by a switch in the controller box. > The switch called 'ebeam' should be up position, but sometimes it's > mysteriously switched down... > It was okay until 3am today. > > Byoungil > > ----- Original Message ----- From: "Salman Latif" > To: "Raith SNF Mailing list" > Sent: Wednesday, May 28, 2008 5:15 AM > Subject: finishing early -- beam blanking issues > > >> The beam blank button seemed to be in reverse mode. I could see the >> SEM image in the off mode, and vice versa. More importantly, the >> beam would not stay blanked during a move from one position to >> another (whether you turn the blanker on or off). I shut down both >> computers, and after starting up again, could not see the SEM >> image at all. >> -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From mpreiner at stanford.edu Wed May 28 13:43:52 2008 From: mpreiner at stanford.edu (mpreiner at stanford.edu) Date: Wed, 28 May 2008 13:43:52 -0700 Subject: Raith available Thrs 10am-3pm. In-Reply-To: <20080528091902.z4p41dbvwgcg8wk4@webmail.stanford.edu> References: <20080528051502.jtybfy05a8ok08gk@webmail.stanford.edu> <001101c8c0bd$50f34010$9bb30c80@bileehome> <20080528091902.z4p41dbvwgcg8wk4@webmail.stanford.edu> Message-ID: <20080528134352.zo5uvwvxcgcgwosw@webmail.stanford.edu> enjoy. mike From anikak at stanford.edu Thu May 29 09:55:49 2008 From: anikak at stanford.edu (Anika Kinkhabwala) Date: Thu, 29 May 2008 09:55:49 -0700 Subject: Tomorrow (Friday) 4a-8a free Message-ID: Enjoy! -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Thu May 29 14:18:29 2008 From: shott at stanford.edu (John Shott) Date: Thu, 29 May 2008 14:18:29 -0700 Subject: Possible visit/interruption from Raith USA .... Message-ID: <483F1DA5.8020905@stanford.edu> Raith community: As you know, we have been experiencing cooling flow problems that affect the turbo pump and, ultimately, the entire system. Lev Markov from Raith USA purged out the cooling lines on Tuesday afternoon. I have been monitoring the pressure and flow since that time and have found that the coolant flow is falling ... it was about 2 l/min on Tuesday evening and it had fallen to about half of that a bit ago. While I've bumped up the pressure to get a bit more flow, Lev is on his way back. When he arrives later this afternoon, he may need to interrupt activities at the next logical break point in order to investigate this problem. That may entail a system shutdown in order to break into the turbo pump cooling lines. I apologize in advance for any inconvenience this may cause, but it is important that we come up with a good long-term resolution to this problem. Thanks, John From ecezhoulj at gmail.com Thu May 29 14:17:16 2008 From: ecezhoulj at gmail.com (Linjie Zhou) Date: Thu, 29 May 2008 14:17:16 -0700 Subject: Raith free May 30 Friday 0am-3am References: Message-ID: <013001c8c1d1$60f9d310$934aeda9@Elcapitan> Sorry for the short notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From slatif at stanford.edu Thu May 29 14:30:02 2008 From: slatif at stanford.edu (Salman Latif) Date: Thu, 29 May 2008 14:30:02 -0700 Subject: Raith free May 30 Friday 0am-3am In-Reply-To: <013001c8c1d1$60f9d310$934aeda9@Elcapitan> References: <013001c8c1d1$60f9d310$934aeda9@Elcapitan> Message-ID: <20080529143002.vmeb7983zgo40css@webmail.stanford.edu> I'll take it. Thanks. Quoting Linjie Zhou : > Sorry for the short notice. > From shott at stanford.edu Fri May 30 16:45:54 2008 From: shott at stanford.edu (John Shott) Date: Fri, 30 May 2008 16:45:54 -0700 Subject: Cooling water update .... Message-ID: <484091B2.3090802@stanford.edu> Raith Users: I believe that we have resolved the cooling water issue. Lev is checking the imaging properties now. If all goes well, the machine should be ready to run soon. I've cleared the shutdown, but please check the machine itself. I've asked Lev to put an "OK to use" note on the load lock if things look fine. Thanks .... and happy processing, John From shott at stanford.edu Fri May 30 22:40:00 2008 From: shott at stanford.edu (John Shott) Date: Fri, 30 May 2008 22:40:00 -0700 Subject: Cooling update .... Message-ID: <4840E4B0.5080600@stanford.edu> Raith Community: This afternoon Lev Markov from Raith USA came in for some additional work on the problematic turbo cooling situation. In the process of investigating and localizing flow limitations in the system, a kink in one of the water lines was found. Once the kink in the line was straightened, a healthy flow of about 2.3 liters per minute at a chiller pressure of only about 40 PSI was observed. Yesterday at this time, it took 80 PSI to force only 1.2 liters per minute through the system. While we will continue to monitor the flows, we are optimistic that this may resolve this problematic issue. I'd like to particularly thank Rohan Kekatpure for finishing early and, in particular, Patrick Gallagher and Kelley Riviore for giving up their time slots this afternoon so that Lev could investigate this problem ... had they not been so gracious, we would not have been able to investigate this matter today and Lev will be in LA all next week. They deserve a thank you from everyone for their community-minded spirit in this regard. As you know, the system is booked around the clock. If any of you need to cancel a time slot because samples won't be ready or think you may finish early, I'd like to ask you to contact Patrick (pgallagh at stanford.edu) and Kelley (kriviore at stanford.edu) first to see if we can get them some "make up time" over the next 2-3 days. Please let Kelley and Patrick know if you think you know of some time that may open up in the near future .... Happy processing, John From linyouc at stanford.edu Fri May 30 23:32:22 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Fri, 30 May 2008 23:32:22 -0700 Subject: Loadlock problem In-Reply-To: <4840E4B0.5080600@stanford.edu> References: <4840E4B0.5080600@stanford.edu> Message-ID: <20080530233222.hirnyqbmogkwcs88@webmail.stanford.edu> The loadlock apprently has something wrong. The sample of the previous user is till in the chamber, and I cannot unload it. The system says something wrong happens to the robot arm. Does anyone have any hint to solve this problem? Many thanks Linyou Quoting John Shott : > Raith Community: > > This afternoon Lev Markov from Raith USA came in for some additional > work on the problematic turbo cooling situation. In the process of > investigating and localizing flow limitations in the system, a kink in > one of the water lines was found. Once the kink in the line was > straightened, a healthy flow of about 2.3 liters per minute at a > chiller pressure of only about 40 PSI was observed. Yesterday at this > time, it took 80 PSI to force only 1.2 liters per minute through the > system. > > While we will continue to monitor the flows, we are optimistic that > this may resolve this problematic issue. > > I'd like to particularly thank Rohan Kekatpure for finishing early and, > in particular, Patrick Gallagher and Kelley Riviore for giving up their > time slots this afternoon so that Lev could investigate this problem > ... had they not been so gracious, we would not have been able to > investigate this matter today and Lev will be in LA all next week. > They deserve a thank you from everyone for their community-minded > spirit in this regard. As you know, the system is booked around the > clock. If any of you need to cancel a time slot because samples won't > be ready or think you may finish early, I'd like to ask you to contact > Patrick (pgallagh at stanford.edu) and Kelley (kriviore at stanford.edu) > first to see if we can get them some "make up time" over the next 2-3 > days. Please let Kelley and Patrick know if you think you know of some > time that may open up in the near future .... > > Happy processing, > > John -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From kimsangb at stanford.edu Sat May 31 00:14:29 2008 From: kimsangb at stanford.edu (SangBum Kim) Date: Sat, 31 May 2008 00:14:29 -0700 Subject: Loadlock problem In-Reply-To: <20080530233222.hirnyqbmogkwcs88@webmail.stanford.edu> References: <4840E4B0.5080600@stanford.edu> <20080530233222.hirnyqbmogkwcs88@webmail.stanford.edu> Message-ID: <004401c8c2ed$f73ae950$a9b50c80@sangbumhome> Dear raith users, I have posted this message on the coral also. " While unloading and loading, I encountered robot arm error. The error message says "Manual procedure to bring the robot arm back in its outer position. Please follow the instruction." I followed the instruction and the it cause fatal error while closing gate valve. I had to call James and he helped me to clear the error. The system is ok but you might encounter the same error. " The system worked fine other than the problem described above. If you encounter this error, you might want to call James or raith champions since you need administrator password to clear the error. The sample holder is empty now without any sample on it. I loaded the empty holder back to the chamber without knowing that I don't need to do that. Sorry for the inconvenience. Thanks, SangBum -----Original Message----- From: linyouc at stanford.edu [mailto:linyouc at stanford.edu] Sent: Friday, May 30, 2008 11:32 PM To: raith at snf.stanford.edu Subject: Loadlock problem The loadlock apprently has something wrong. The sample of the previous user is till in the chamber, and I cannot unload it. The system says something wrong happens to the robot arm. Does anyone have any hint to solve this problem? Many thanks Linyou Quoting John Shott : > Raith Community: > > This afternoon Lev Markov from Raith USA came in for some additional > work on the problematic turbo cooling situation. In the process of > investigating and localizing flow limitations in the system, a kink in > one of the water lines was found. Once the kink in the line was > straightened, a healthy flow of about 2.3 liters per minute at a > chiller pressure of only about 40 PSI was observed. Yesterday at this > time, it took 80 PSI to force only 1.2 liters per minute through the > system. > > While we will continue to monitor the flows, we are optimistic that > this may resolve this problematic issue. > > I'd like to particularly thank Rohan Kekatpure for finishing early > and, in particular, Patrick Gallagher and Kelley Riviore for giving up > their time slots this afternoon so that Lev could investigate this > problem ... had they not been so gracious, we would not have been able > to investigate this matter today and Lev will be in LA all next week. > They deserve a thank you from everyone for their community-minded > spirit in this regard. As you know, the system is booked around the > clock. If any of you need to cancel a time slot because samples won't > be ready or think you may finish early, I'd like to ask you to contact > Patrick (pgallagh at stanford.edu) and Kelley (kriviore at stanford.edu) > first to see if we can get them some "make up time" over the next 2-3 > days. Please let Kelley and Patrick know if you think you know of > some time that may open up in the near future .... > > Happy processing, > > John -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From toecutter4ranger at gmail.com Sat May 31 00:45:38 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Sat, 31 May 2008 07:45:38 +0000 Subject: Shutdown. Load lock valve Message-ID: <942330678-1212219978-cardhu_decombobulator_blackberry.rim.net-245289232-@bxe120.bisx.prod.on.blackberry> Shutdown tool Load lock valve cannot close Poss. Low N2 or Cda pressure ? Jwc Sent via BlackBerry by AT&T From linyouc at stanford.edu Sat May 31 00:59:00 2008 From: linyouc at stanford.edu (linyouc at stanford.edu) Date: Sat, 31 May 2008 00:59:00 -0700 Subject: Raith down-Loadlock valve problem Message-ID: <20080531005900.672nvw0tq8scws8w@webmail.stanford.edu> Raith seems have problem with Loadlock valve, which cannot be closed. James asks me to shut down the machine. He will be back next Monday and help us out. Best Linyou -- Linyou Cao PhD candidate Dept. of Mater. Sci.and Engin., Brongersma Group President&Co-founder Stanford Nanoscience&Nanotechnology Society Stanford University From toecutter4ranger at gmail.com Sat May 31 10:35:50 2008 From: toecutter4ranger at gmail.com (toecutter4ranger at gmail.com) Date: Sat, 31 May 2008 17:35:50 +0000 Subject: Need a user on the tool Message-ID: <1276393316-1212255391-cardhu_decombobulator_blackberry.rim.net-1657685083-@bxe120.bisx.prod.on.blackberry> Good morning I need a user at the RAITH tool to see if we can get the tool back up together. Callme at 4154124825 James Sent via BlackBerry by AT&T From jesselu at stanford.edu Sat May 31 14:48:21 2008 From: jesselu at stanford.edu (Jesse Lu) Date: Sat, 31 May 2008 14:48:21 -0700 Subject: Raith update Message-ID: Hey Raith users, After a few hours on the phone with James and a Raith representative, we seem to be able to load samples now. The T translation system seems to be still acting up, but we were able to successfully load a sample this afternoon at 2pm. However, we used a modified loading procedure. James says to: *use a modified load procedure* - Do *not* simply hit the *Load Sample* button in the *Loadlock* window to drive your sample into the e-beam chamber. - Instead, perform a *Find Home position for T* procedure - This is done by first going to the *Find Home *window - Then click on the *lightning rod* button on the *T* row - Wait a few seconds for the procedure to finish - Finally, check the *Delta* value for *T* in the *Find Home *window - Please perform this procedure 2-3 times until the *Delta* value is on the order of 20-50 microns - Then proceed with the normal load procedure by clicking the *Load Sample* button in the *Loadlock* window John Shott, James would also like you to put the system back in yellow light mode if possible. Finally, users Mitsuru and Kathryn are currently "sharing the ride" on the tool. Let's revert back to the usual schedule at midnight tonight with Bilee's reservation. If extra time is needed because of this delay, let's be flexible with one another. Jesse -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Sat May 31 22:58:00 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Sat, 31 May 2008 22:58:00 -0700 Subject: Raith update In-Reply-To: References: Message-ID: <22ffcd060805312258i51a3bf05s1969588c659d7e16@mail.gmail.com> Hi Jesse, Thank you for your help to bring raith up. But raith is still in red light mode in coral, if this is the case, can we still use it or someone has to turn it to yellow first? Thanks, Xinran On Sat, May 31, 2008 at 2:48 PM, Jesse Lu wrote: > Hey Raith users, > > After a few hours on the phone with James and a Raith representative, we > seem to be able to load samples now. The T translation system seems to be > still acting up, but we were able to successfully load a sample this > afternoon at 2pm. However, we used a modified loading procedure. > > James says to: *use a modified load procedure* > > - Do *not* simply hit the *Load Sample* button in the *Loadlock* window > to drive your sample into the e-beam chamber. > - Instead, perform a *Find Home position for T* procedure > - This is done by first going to the *Find Home *window > - Then click on the *lightning rod* button on the *T* row > - Wait a few seconds for the procedure to finish > - Finally, check the *Delta* value for *T* in the *Find Home *window > - Please perform this procedure 2-3 times until the *Delta* value is > on the order of 20-50 microns > - Then proceed with the normal load procedure by clicking the *Load > Sample* button in the *Loadlock* window > > John Shott, James would also like you to put the system back in yellow > light mode if possible. > > Finally, users Mitsuru and Kathryn are currently "sharing the ride" on the > tool. Let's revert back to the usual schedule at midnight tonight with > Bilee's reservation. If extra time is needed because of this delay, let's be > flexible with one another. > > Jesse > -------------- next part -------------- An HTML attachment was scrubbed... URL: