Universal holder test
jwc at snf.stanford.edu
Fri May 2 13:48:03 PDT 2008
Thank you for your measurements!
These are very encouraging numbers!
Users should note that I have not yet performed any mechanical
adjustments to either sample holder as of yet.
Talk with you next Monday afternoon.
Byoungil Lee wrote:
> Dear James,
> I have tested the universal holder this morning.
> Fortunately, now, leveling works for 4inch wafer-range !!
> The WD's was
> 5.297 @ -40,0
> 5.229 @ 40,0
> 5.259 @ 0, -40
> You may want to do a little more adjustment.
> Thank you,
> ----- Original Message -----
> *From:* James Conway <mailto:jwc at snf.stanford.edu>
> *To:* Byoungil Lee <mailto:bilee at stanford.edu>
> *Sent:* Thursday, May 01, 2008 6:12 PM
> *Subject:* Re: RAITH Status 18:00 Wednesday -- System repairs
> completed -- I need to finish more testing tomorrow before
> releasing to users.
> I have not had the time to get to this point yet. But likely it
> is much better than last week! ;-)
> Give it a try and let me know...
> I will continue on the system tomorrow morning with my Raith Class
> 10 - 2 PM
> James Conway
> Byoungil Lee wrote:
>> Dear James,
>> Regarding the condition of Raith, I have a question.
>> Is the Universal Holder ready also for leveling or height control?
>> My chip size is about 1cm and it was not possible to get
>> reasonable WD uniformity across the chip.
>> Thank you for your support,
>> ----- Original Message -----
>> *From:* James Conway <mailto:jwc at snf.stanford.edu>
>> *To:* Raith SNF Mailing list <mailto:raith at snf.stanford.edu>
>> *Cc:* Cole Loomis -- RAITH USA. <mailto:cl at raithusa.com> ;
>> Jason Sanabia <mailto:js at raithusa.com> ; Mirwais Aktary
>> <mailto:ma at raithusa.com>
>> *Sent:* Wednesday, April 30, 2008 6:43 PM
>> *Subject:* RAITH Status 18:00 Wednesday -- System repairs
>> completed -- I need to finish more testing tomorrow before
>> releasing to users.
>> *Good Evening Raith Community:
>> Many thanks to the many Users whom have offered assistance, a
>> spare hand to help me reach things from behind the tool, and
>> support during this very difficult week.
>> I believe we have completed repairs to the stage and today I
>> replaced the O-ring seal to the rear door that prevented me
>> from pumping down the system last night. The rear door
>> O-ring seal is a difficult one to keep in place during
>> installation and fitting of the door to the chamber. Last
>> night as I screwed down the door I pinched the O-ring on the
>> seal surface and it was sliced.
>> Currently I am pumping down the system,and running up the
>> FE-Gun. I have successfully completed three automatic and two
>> manual Load Lock exchanges of the Universal Sample Holder.
>> Tomorrow I will test each of the two sample holders by
>> performing the Load Lock exchange five times each to ensure
>> that we are going to stay up when Users come onto the tool.
>> I hope to resume the coral schedule in the mid to late
>> afternoon. Best guess is 3 PM hand off to users on the
>> schedule. FE-Gum emission should be close to normal levels.
>> To catch up to the schedule I am asking all users to "Share
>> the Ride" and load with others after you to create
>> opportunities for those whom were impacted by this down time.
>> It is also now expected that all Users will be in attendance
>> at the RAITH tool as their exposures complete to reduce idle
>> system time between reservation slots.
>> If anyone has any questions please see me during my office hours.
>> Thank you for your support!
>> James Conway
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