Problem with RAITH computer

[Arash Hazeghi]

Hi,

This evening I had several issues with RAITH150 computer, first RAITH was
not able to acquire a scan image while SEM image was perfect, I tried single
and continuous scan but nothing would show up in the image window. Based on
advice from James I did a hardware reset on both RAITH and LEO and then I
was able to acquire image. However when I was copying my patterns to the PL,
RAITH application crashed and I had to kill it, I am attaching two screen
shots. I finished my session since I didn't have time to refocus the beam
etc. after killing the RAITH150 application the following error popped up:
Access violation @ address 04e53B17 module "EEMGDSII.dll" read address
00000C08. 

Do you have an idea what could have caused the problem? my patters are very
simple small lines.

 

Thanks,

Arash

 

 

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Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall, 

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi

 

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