Loadlock problem
linyouc at stanford.edu
linyouc at stanford.edu
Fri May 30 23:32:22 PDT 2008
The loadlock apprently has something wrong. The sample of the
previous user is till in the chamber, and I cannot unload it. The
system says something wrong happens to the robot arm.
Does anyone have any hint to solve this problem?
Many thanks
Linyou
Quoting John Shott <shott at stanford.edu>:
> Raith Community:
>
> This afternoon Lev Markov from Raith USA came in for some additional
> work on the problematic turbo cooling situation. In the process of
> investigating and localizing flow limitations in the system, a kink in
> one of the water lines was found. Once the kink in the line was
> straightened, a healthy flow of about 2.3 liters per minute at a
> chiller pressure of only about 40 PSI was observed. Yesterday at this
> time, it took 80 PSI to force only 1.2 liters per minute through the
> system.
>
> While we will continue to monitor the flows, we are optimistic that
> this may resolve this problematic issue.
>
> I'd like to particularly thank Rohan Kekatpure for finishing early and,
> in particular, Patrick Gallagher and Kelley Riviore for giving up their
> time slots this afternoon so that Lev could investigate this problem
> ... had they not been so gracious, we would not have been able to
> investigate this matter today and Lev will be in LA all next week.
> They deserve a thank you from everyone for their community-minded
> spirit in this regard. As you know, the system is booked around the
> clock. If any of you need to cancel a time slot because samples won't
> be ready or think you may finish early, I'd like to ask you to contact
> Patrick (pgallagh at stanford.edu) and Kelley (kriviore at stanford.edu)
> first to see if we can get them some "make up time" over the next 2-3
> days. Please let Kelley and Patrick know if you think you know of some
> time that may open up in the near future ....
>
> Happy processing,
>
> John
--
Linyou Cao
PhD candidate
Dept. of Mater. Sci.and Engin., Brongersma Group
President&Co-founder
Stanford Nanoscience&Nanotechnology Society
Stanford University
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