Raith down-Loadlock valve problem

linyouc at stanford.edu linyouc at stanford.edu
Sat May 31 00:59:00 PDT 2008

Raith seems have problem with Loadlock valve, which cannot be closed.   
James asks me to shut down the machine.  He will be back next Monday  
and help us out.



Linyou Cao
PhD candidate
Dept. of Mater. Sci.and Engin., Brongersma Group
Stanford Nanoscience&Nanotechnology Society
Stanford University

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