From toecutter at att.blackberry.net  Wed Nov  5 19:51:39 2008
From: toecutter at att.blackberry.net (toecutter at att.blackberry.net)
Date: Thu, 6 Nov 2008 03:51:39 +0000
Subject: RAITH status 1930 wed.
Message-ID: <2089129382-1225943417-cardhu_decombobulator_blackberry.rim.net-1271786474-@bxe103.bisx.prod.on.blackberry>


Good evening,

The RAITH will continue to be offline to users through late tomorrow. 

We have exchanged the controller to the EHT section on the gun power supply, and several other sub-systems, as parts arrived at SNF. We have been tracing an odd electrical voltage spike that was affecting components across several sun-systems including the stage. 
 We are optimistic that we will be able bring the system back up tomorrow for testing. 
Users whom would like to assist in testing should introduce themselves to Lev Markov with RAITH late tomorrow afternoon in the Ebeam lab.

Thank you for your support.

James Conway
 
 
Sent via BlackBerry by AT&T


From toecutter at att.blackberry.net  Thu Nov  6 16:03:55 2008
From: toecutter at att.blackberry.net (toecutter at att.blackberry.net)
Date: Fri, 7 Nov 2008 00:03:55 +0000
Subject: RAITH will stay offline
Message-ID: <21516213-1226016151-cardhu_decombobulator_blackberry.rim.net-80645986-@bxe103.bisx.prod.on.blackberry>

Greetings
The RAITH will continue to stay off line to users overnight 

Will update to this list as soon as we have a change in status 

James
Sent via BlackBerry by AT&T


From toecutter at att.blackberry.net  Fri Nov  7 18:55:02 2008
From: toecutter at att.blackberry.net (toecutter at att.blackberry.net)
Date: Sat, 8 Nov 2008 02:55:02 +0000
Subject: RAITH ready for a test user
Message-ID: <1592770482-1226112818-cardhu_decombobulator_blackberry.rim.net-193723816-@bxe103.bisx.prod.on.blackberry>

Good evening

RAITH system is available for testing by users.
I would like any RAITH champion or experienced user to try a write run and report and problems to me directly by phone or sms.

Best of luck,
Likely all is fine.

Note the SE2 detector has been disconnected and only the in-lens detector is functioning.

All the best
James
Sent via BlackBerry by AT&T


From yiyangg at stanford.edu  Fri Nov  7 19:10:28 2008
From: yiyangg at stanford.edu (Yiyang Gong)
Date: Fri, 7 Nov 2008 19:10:28 -0800 (PST)
Subject: RAITH ready for a test user
In-Reply-To: <1592770482-1226112818-cardhu_decombobulator_blackberry.rim.net-193723816-@bxe103.bisx.prod.on.blackberry>
Message-ID: <2025989468.3777991226113828608.JavaMail.root@zm06.stanford.edu>

Hi everyone,

I'll be the guinea pig. I hope I can continue into the night, until 3am, and the user after that can take over.

Thanks,
Yiyang

----- Original Message -----
From: toecutter at att.blackberry.net
To: "EBEAM Ebeam Lab" <raith at snf.stanford.edu>
Sent: Friday, November 7, 2008 6:55:02 PM GMT -08:00 US/Canada Pacific
Subject: RAITH ready for a test user

Good evening

RAITH system is available for testing by users.
I would like any RAITH champion or experienced user to try a write run and report and problems to me directly by phone or sms.

Best of luck,
Likely all is fine.

Note the SE2 detector has been disconnected and only the in-lens detector is functioning.

All the best
James
Sent via BlackBerry by AT&T


From toecutter at att.blackberry.net  Fri Nov  7 19:12:19 2008
From: toecutter at att.blackberry.net (toecutter at att.blackberry.net)
Date: Sat, 8 Nov 2008 03:12:19 +0000
Subject: Yiyang has the ball
Message-ID: <2042953160-1226113855-cardhu_decombobulator_blackberry.rim.net-527580817-@bxe103.bisx.prod.on.blackberry>

Yiyang has the ball
Sent via BlackBerry by AT&T


From yiyangg at stanford.edu  Fri Nov  7 20:32:05 2008
From: yiyangg at stanford.edu (Yiyang Gong)
Date: Fri, 7 Nov 2008 20:32:05 -0800 (PST)
Subject: RAITH ready for a test user
In-Reply-To: <2025989468.3777991226113828608.JavaMail.root@zm06.stanford.edu>
Message-ID: <2026004621.3783531226118725010.JavaMail.root@zm06.stanford.edu>

Hi everyone,

Due to repeated EHT trips, I have decided to give up for the night. James has said that he will welcome business up to midnight, so if some other user would like to try his/her hand at this until then, please do so. Please call James if you are going to start the system again.

Thanks,
Yiyang

----- Original Message -----
From: "Yiyang Gong" <yiyangg at stanford.edu>
To: "EBEAM Ebeam Lab" <raith at snf.stanford.edu>
Sent: Friday, November 7, 2008 7:10:28 PM GMT -08:00 US/Canada Pacific
Subject: Re: RAITH ready for a test user

Hi everyone,

I'll be the guinea pig. I hope I can continue into the night, until 3am, and the user after that can take over.

Thanks,
Yiyang

----- Original Message -----
From: toecutter at att.blackberry.net
To: "EBEAM Ebeam Lab" <raith at snf.stanford.edu>
Sent: Friday, November 7, 2008 6:55:02 PM GMT -08:00 US/Canada Pacific
Subject: RAITH ready for a test user

Good evening

RAITH system is available for testing by users.
I would like any RAITH champion or experienced user to try a write run and report and problems to me directly by phone or sms.

Best of luck,
Likely all is fine.

Note the SE2 detector has been disconnected and only the in-lens detector is functioning.

All the best
James
Sent via BlackBerry by AT&T


From toecutter at att.blackberry.net  Mon Nov 10 17:29:04 2008
From: toecutter at att.blackberry.net (toecutter at att.blackberry.net)
Date: Tue, 11 Nov 2008 01:29:04 +0000
Subject: RAITH offline through wed evening at best.
Message-ID: <1836757271-1226366857-cardhu_decombobulator_blackberry.rim.net-769724447-@bxe103.bisx.prod.on.blackberry>


The RAITH system will continue to be offline to all users through days end Wednesday at best while we wait for more subsystem parts to arrive from Germany.
Thank you for your support.

James
Sent via BlackBerry by AT&T


From jwc at snf.stanford.edu  Wed Nov 12 09:09:32 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 12 Nov 2008 09:09:32 -0800
Subject: My 5 mm elevated Headway chick for small samples is missing == please
 return.
Message-ID: <491B0DCC.6080600@snf.stanford.edu>


Good Morning,

Yesterday it came to my attention that a custom 5 mm Headway chuck which 
is designed for working on small pieces was taken from my dry box and  
not returned to there after usage. It was likely taken last Thursday 
night or Friday. This chuck has a 5 mm circular elevated mesa on it so 
as to not get resist building up in the corners of a piece and provides 
a valuable solution for our EBL users.

This is very poor behavior and several users now cannot spin uniform 
thin films on their pieces.  If you used this chuck and forgot to return 
it please do so immediately.  If in the course of your work in the 
cleanroom you come across it please return it to me.

HENCEFORTH NO ENGINEERING MATERIALS WILL BE LOANED OR MAY BE BORROWED 
FROM MY DRY BOX STORAGE OR THE EBEAM LAB AREA PERIOD WITH NO EXCEPTIONS.

Users will need to order their own headway fixtures, and obtain their 
own substrates, syringes, and filters from the SNF Stockroom.

Thank  you,

James Conway




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From jwc at snf.stanford.edu  Wed Nov 12 09:22:46 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 12 Nov 2008 09:22:46 -0800
Subject: My 5 mm elevated Headway chick for small samples is missing ==
 please return.
In-Reply-To: <491B0DCC.6080600@snf.stanford.edu>
References: <491B0DCC.6080600@snf.stanford.edu>
Message-ID: <491B10E6.5030104@snf.stanford.edu>

The missing chuck has been returned to me.

Thank you for the quick response

James

James Conway wrote:
>
> Good Morning,
>
> Yesterday it came to my attention that a custom 5 mm Headway chuck 
> which is designed for working on small pieces was taken from my dry 
> box and  not returned to there after usage. It was likely taken last 
> Thursday night or Friday. This chuck has a 5 mm circular elevated mesa 
> on it so as to not get resist building up in the corners of a piece 
> and provides a valuable solution for our EBL users.
>
> This is very poor behavior and several users now cannot spin uniform 
> thin films on their pieces.  If you used this chuck and forgot to 
> return it please do so immediately.  If in the course of your work in 
> the cleanroom you come across it please return it to me.
>
> HENCEFORTH NO ENGINEERING MATERIALS WILL BE LOANED OR MAY BE BORROWED 
> FROM MY DRY BOX STORAGE OR THE EBEAM LAB AREA PERIOD WITH NO EXCEPTIONS.
>
> Users will need to order their own headway fixtures, and obtain their 
> own substrates, syringes, and filters from the SNF Stockroom.
>
> Thank  you,
>
> James Conway
>
>
>
>
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From jwc at snf.stanford.edu  Fri Nov 14 15:42:20 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Fri, 14 Nov 2008 15:42:20 -0800
Subject: Raith status Friday 16:40 hours.  System will remain off line to
 all users 
Message-ID: <491E0CDC.70304@snf.stanford.edu>

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From jwconway at stanford.edu  Mon Nov 17 15:49:58 2008
From: jwconway at stanford.edu (James Conway)
Date: Mon, 17 Nov 2008 15:49:58 -0800 (PST)
Subject: We are hoping to be able to qualifiy the system and turn over to
 users for test writes this evening.
Message-ID: <1215392779.681491226965798311.JavaMail.root@zm08.stanford.edu>

Greetings RAITH Users:

We have completed many repairs and test on our RAITH 150 system.  
We are hoping to be able to qualify the system, and then turn over to users for test writes this evening and overnight.

Users are requested to strive to share the ride and each do their part to assist everyone with catching up to the schedule.
All Users are requested to report their patterning results to the raith email list as they inspect their EBL writes.

All the Best,

James Conway

ALL REPLIES TO jwc at snf.stanford.edu


From toecutter at att.blackberry.net  Mon Nov 17 18:36:02 2008
From: toecutter at att.blackberry.net (toecutter at att.blackberry.net)
Date: Tue, 18 Nov 2008 02:36:02 +0000
Subject: RAITH is up for users
Message-ID: <136736692-1226975671-cardhu_decombobulator_blackberry.rim.net-194293681-@bxe103.bisx.prod.on.blackberry>


RAITH is up for users

We ran a qualification run and it went well and the system is exposing now and should be finished about 7:30 PM

Ready for your test writes and I will inspect the EBL results in the morning.
Thank you for your support!

James Conway
Call me immediately if you run into problems
Sent via BlackBerry by AT&T


From xutian at stanford.edu  Mon Nov 17 19:29:10 2008
From: xutian at stanford.edu (Xu Tian)
Date: Mon, 17 Nov 2008 19:29:10 -0800 (PST)
Subject: RAITH is up for users
In-Reply-To: <136736692-1226975671-cardhu_decombobulator_blackberry.rim.net-194293681-@bxe103.bisx.prod.on.blackberry>
Message-ID: <276298063.723581226978950251.JavaMail.root@zm02.stanford.edu>

Since James' exposure is done and nobody is using the machine. I will take the liberty to load my wafer and do a test writing now. Just to let you know.

Xu Tian
----- Original Message -----
From: toecutter at att.blackberry.net
To: "EBEAM Ebeam Lab" <raith at snf.stanford.edu>
Cc: "Eva Pavelka" <evapav1 at yahoo.com>, "Cole Loomis" <cl at raithusa.com>, "Lev Markov" <lm at raithusa.com>
Sent: Monday, November 17, 2008 6:36:02 PM GMT -08:00 US/Canada Pacific
Subject: RAITH is up for users


RAITH is up for users

We ran a qualification run and it went well and the system is exposing now and should be finished about 7:30 PM

Ready for your test writes and I will inspect the EBL results in the morning.
Thank you for your support!

James Conway
Call me immediately if you run into problems
Sent via BlackBerry by AT&T


From xutian at stanford.edu  Mon Nov 17 21:02:37 2008
From: xutian at stanford.edu (Xu Tian)
Date: Mon, 17 Nov 2008 21:02:37 -0800 (PST)
Subject: Small Problem
Message-ID: <507112971.739201226984557387.JavaMail.root@zm02.stanford.edu>

Hi, all:

I encountered a minor problem at the write field alignment step. When I opened a new position list and try to drag the item from scan manager into the position list, it won't end up there. However, I can drop it to the old position list. The mouse's symbol is a circle with a line crossed.

Anyway, I am able to do the exposure.

Xu Tian


From englund at stanford.edu  Mon Nov 17 22:52:11 2008
From: englund at stanford.edu (Dirk Englund)
Date: Mon, 17 Nov 2008 22:52:11 -0800
Subject: RAITH is up for users
In-Reply-To: <276298063.723581226978950251.JavaMail.root@zm02.stanford.edu>
References: <276298063.723581226978950251.JavaMail.root@zm02.stanford.edu>
Message-ID: <2AE8C15D-16A3-49AA-BD60-38AE517647EE@stanford.edu>

Hello,

I encountered the load lock error concerning the reach of the robot  
arm. My chip loaded, but the stage does not reach the load lock  
anymore. I tried correcting the problem manually, but it did not  
work.  The next users will probably need to wait for James to fix this.

The specific error is:

"Error LoadLock:
It is not possible to reach the outer position of the robot arm!"

-Dirk


On Nov 17, 2008, at 7:29 PM, Xu Tian wrote:

> Since James' exposure is done and nobody is using the machine. I  
> will take the liberty to load my wafer and do a test writing now.  
> Just to let you know.
>
> Xu Tian
> ----- Original Message -----
> From: toecutter at att.blackberry.net
> To: "EBEAM Ebeam Lab" <raith at snf.stanford.edu>
> Cc: "Eva Pavelka" <evapav1 at yahoo.com>, "Cole Loomis"  
> <cl at raithusa.com>, "Lev Markov" <lm at raithusa.com>
> Sent: Monday, November 17, 2008 6:36:02 PM GMT -08:00 US/Canada  
> Pacific
> Subject: RAITH is up for users
>
>
> RAITH is up for users
>
> We ran a qualification run and it went well and the system is  
> exposing now and should be finished about 7:30 PM
>
> Ready for your test writes and I will inspect the EBL results in the  
> morning.
> Thank you for your support!
>
> James Conway
> Call me immediately if you run into problems
> Sent via BlackBerry by AT&T

Postdoctoral Researcher in Electrical Engineering
Stanford University
cvitae.org/englund/





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From englund at stanford.edu  Mon Nov 17 22:54:34 2008
From: englund at stanford.edu (Dirk Englund)
Date: Mon, 17 Nov 2008 22:54:34 -0800
Subject: RAITH is DOWN
In-Reply-To: <2AE8C15D-16A3-49AA-BD60-38AE517647EE@stanford.edu>
References: <276298063.723581226978950251.JavaMail.root@zm02.stanford.edu> <2AE8C15D-16A3-49AA-BD60-38AE517647EE@stanford.edu>
Message-ID: <85D00CF3-0C91-4C5E-BD37-90D0FD909BFB@stanford.edu>

Bad subject line in the last email. Raith is down.

On Nov 17, 2008, at 10:52 PM, Dirk Englund wrote:

> Hello,
>
> I encountered the load lock error concerning the reach of the robot  
> arm. My chip loaded, but the stage does not reach the load lock  
> anymore. I tried correcting the problem manually, but it did not  
> work.  The next users will probably need to wait for James to fix  
> this.
>
> The specific error is:
>
> "Error LoadLock:
> It is not possible to reach the outer position of the robot arm!"
>
> -Dirk
>
>
> On Nov 17, 2008, at 7:29 PM, Xu Tian wrote:
>
>> Since James' exposure is done and nobody is using the machine. I  
>> will take the liberty to load my wafer and do a test writing now.  
>> Just to let you know.
>>
>> Xu Tian
>> ----- Original Message -----
>> From: toecutter at att.blackberry.net
>> To: "EBEAM Ebeam Lab" <raith at snf.stanford.edu>
>> Cc: "Eva Pavelka" <evapav1 at yahoo.com>, "Cole Loomis"  
>> <cl at raithusa.com>, "Lev Markov" <lm at raithusa.com>
>> Sent: Monday, November 17, 2008 6:36:02 PM GMT -08:00 US/Canada  
>> Pacific
>> Subject: RAITH is up for users
>>
>>
>> RAITH is up for users
>>
>> We ran a qualification run and it went well and the system is  
>> exposing now and should be finished about 7:30 PM
>>
>> Ready for your test writes and I will inspect the EBL results in  
>> the morning.
>> Thank you for your support!
>>
>> James Conway
>> Call me immediately if you run into problems
>> Sent via BlackBerry by AT&T
>
> Postdoctoral Researcher in Electrical Engineering
> Stanford University
> cvitae.org/englund/
>
>
>
>
>

Postdoctoral Researcher in Electrical Engineering
Stanford University
cvitae.org/englund/





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From jwc at snf.stanford.edu  Tue Nov 18 09:24:58 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 18 Nov 2008 09:24:58 -0800
Subject: Please return the RAITH SW dingles to me today.
Message-ID: <4922FA6A.3080209@snf.stanford.edu>


Dongles are checked out for two week intervals only.  I expected all of 
you to have returned them to me by now, for hand off to the Users 
waiting for them on the wait list I maintain.

If you need to regularly use the off line SW you should consider 
purchasing it from RAITH USA Inc.  Please contact Kevin Burcham at 
kb at raithusa.com for a current quotation and refer them to the Stanford 
RAITH 150 Tool.

Please return the dongles to me today!

James Conway



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From jwc at snf.stanford.edu  Tue Nov 18 10:51:49 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 18 Nov 2008 10:51:49 -0800
Subject: RAITH 150 Qualification results today status
In-Reply-To: <136736692-1226975671-cardhu_decombobulator_blackberry.rim.net-194293681-@bxe103.bisx.prod.on.blackberry>
References: <136736692-1226975671-cardhu_decombobulator_blackberry.rim.net-194293681-@bxe103.bisx.prod.on.blackberry>
Message-ID: <49230EC5.7020501@snf.stanford.edu>




*
Good Morning Raith Users,*

Raith Status for Tuesday November 18, 2008 - The system us up and 
available for Users.

I am pleased to report that the RAITH 150 Electron Beam Lithography 
system has passed its qualification test with no outstanding issues or 
problems observed.

Optical Microscope inspection at 1000X optical mag. exhibit excellent 
write field to write field stitching and resolution.

This wafer is now in metalization.   After metal lift off the wafer will 
be coated with PMMA and exposed for layer 1 to layer 2 registration as 
we move through the RAITH 150 System Qualification Template.

Thank you for your support!

James Conway




toecutter at att.blackberry.net wrote:
> RAITH is up for users
>
> We ran a qualification run and it went well and the system is exposing now and should be finished about 7:30 PM
>
> Ready for your test writes and I will inspect the EBL results in the morning.
> Thank you for your support!
>
> James Conway
> Call me immediately if you run into problems
> Sent via BlackBerry by AT&T
>   
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From xinranw at stanford.edu  Tue Nov 18 18:36:36 2008
From: xinranw at stanford.edu (Xinran Wang)
Date: Tue, 18 Nov 2008 18:36:36 -0800
Subject: raith free 21:00
Message-ID: <22ffcd060811181836o2cbdd8kbe92d798bcce66fe@mail.gmail.com>

sorry for the late notice, but my sample doesn't look good after previous
steps.

Xinran
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From ahazeghi at stanford.edu  Tue Nov 18 18:37:41 2008
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Tue, 18 Nov 2008 18:37:41 -0800
Subject: raith free 21:00
In-Reply-To: <22ffcd060811181836o2cbdd8kbe92d798bcce66fe@mail.gmail.com>
References: <22ffcd060811181836o2cbdd8kbe92d798bcce66fe@mail.gmail.com>
Message-ID: <000601c949ef$cbb1d350$631579f0$@edu>

I will take it

 

Thanks,

AH

 

 

----------------------------------------------------------------------------
------

Arash Hazeghi

 

PhD Candidate

Stanford Center for Integrated Systems

CIS-X 300, 420 Via Palou Mall, 

Stanford, CA 94305

 

phone: +1-650-725-0418

web: http://www.stanford.edu/~ahazeghi

 

 

 

From: xinranw at gmail.com [mailto:xinranw at gmail.com] On Behalf Of Xinran Wang
Sent: Tuesday, November 18, 2008 6:37 PM
To: Raith SNF Mailing list
Subject: raith free 21:00

 

sorry for the late notice, but my sample doesn't look good after previous
steps.

Xinran

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From faraon at stanford.edu  Tue Nov 18 20:15:05 2008
From: faraon at stanford.edu (Andrei Faraon)
Date: Tue, 18 Nov 2008 20:15:05 -0800
Subject: Raith free 3am-9am
Message-ID: <28d3ece90811182015m4c40aa28x8b6312a6bf9b8b43@mail.gmail.com>

Chip did not come out...

-- 
Andrei Faraon

Stanford University, Applied Physics
316 Via Pueblo Mall
Stanford, CA, 94305
Mobile: 650 714 7881
Office: 650 723 2279
www.stanford.edu/~faraon
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From jwc at snf.stanford.edu  Wed Nov 19 09:36:33 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 19 Nov 2008 09:36:33 -0800
Subject: I need the RAITH off line Software disk returned to me today.  
Message-ID: <49244EA1.4070708@snf.stanford.edu>

Good Morning Raith Users:

I need the RAITH off line Software disk and the USB SW dongle returned 
to me. It was not returned when it was loaned out two weeks ago.

You do not need the disk to run the software just a dongle inserted into 
the proper port.

Please bring it back to me and place it on my desk this morning.

Best,

James Conway



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From pgallagher at stanford.edu  Wed Nov 19 22:26:08 2008
From: pgallagher at stanford.edu (Patrick Gallagher)
Date: Wed, 19 Nov 2008 22:26:08 -0800
Subject: raith problems
Message-ID: <81ce74de0811192226v66e7a6bajc4729d3b162e124@mail.gmail.com>

I encountered a variety of problems today during my write. After a
couple hours on the phone with James these problems seem to be (at
least temporarily) resolved. Users are allowed on the tool overnight,
but are advised to contact James with any new problems.


From ahazeghi at stanford.edu  Wed Nov 19 23:13:40 2008
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Wed, 19 Nov 2008 23:13:40 -0800
Subject: raith problems
In-Reply-To: <81ce74de0811192226v66e7a6bajc4729d3b162e124@mail.gmail.com>
References: <81ce74de0811192226v66e7a6bajc4729d3b162e124@mail.gmail.com>
Message-ID: <001e01c94adf$83e90a20$8bbb1e60$@edu>

Hi,
I also encountered load lock errors last night upon every single load/unload
operation, however I was able to correct the problem with manual override. 


Thanks,
Arash


----------------------------------------------------------------------------
------
Arash Hazeghi

PhD Candidate
Stanford Center for Integrated Systems
CIS-X 300, 420 Via Palou Mall, 
Stanford, CA 94305

phone: +1-650-725-0418
web: http://www.stanford.edu/~ahazeghi



-----Original Message-----
From: patrick.r.gallagher at gmail.com [mailto:patrick.r.gallagher at gmail.com]
On Behalf Of Patrick Gallagher
Sent: Wednesday, November 19, 2008 10:26 PM
To: Raith SNF Mailing list
Subject: raith problems

I encountered a variety of problems today during my write. After a
couple hours on the phone with James these problems seem to be (at
least temporarily) resolved. Users are allowed on the tool overnight,
but are advised to contact James with any new problems.



From kodama at stanford.edu  Thu Nov 20 05:57:08 2008
From: kodama at stanford.edu (Takashi Kodama)
Date: Thu, 20 Nov 2008 05:57:08 -0800 (PST)
Subject: Unload error
Message-ID: <1029901839.29901227189428628.JavaMail.root@zm09.stanford.edu>


Hi,

The system indicate unload error and I can not recover it.
The sample inside the system is not mine but previous users'. When I come here today at 5:00 am 
I found that sample is still inside with a note. I attempt to unload it
but I could not do that because I am beginner and I encounter the problem
for the first time. Thus, I could not use the system today.
While I reserved the system until 9:00 am, I want to cancell it.

If anyone solve the problem, please use the system and please let me know
how to do that. 

Thanks,

Takashi Kodama
kodama at stanford.edu


From pgallagher at stanford.edu  Thu Nov 20 06:15:12 2008
From: pgallagher at stanford.edu (Patrick Gallagher)
Date: Thu, 20 Nov 2008 06:15:12 -0800
Subject: raith free 5-7 pm today
Message-ID: <81ce74de0811200615m5705947di7b7a9612f511ce33@mail.gmail.com>




From jwc at snf.stanford.edu  Thu Nov 20 13:55:33 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Thu, 20 Nov 2008 13:55:33 -0800
Subject: Load Lock exchange issues on the robot arm. 
In-Reply-To: <413538297.113961227217220769.JavaMail.root@zm09.stanford.edu>
References: <413538297.113961227217220769.JavaMail.root@zm09.stanford.edu>
Message-ID: <4925DCD5.9060409@snf.stanford.edu>


Problems reports on the RAITH.

Kodama and RAITH Users:

We have checked and reset the inner and outer robot arm positions this 
morning on the RAITH 150 system.  Yesterday we rebuilt the T loader arm, 
replacing the belt and cleaned the drive gear.
No other problems were seen on inspections and many test of the robot arm.

We have had three load unload cycles completed during User runs and so 
far we have not seen any problems.  We will continue to monitor and seek 
out the cause of last evenings problems urgently.

If any User encounters any problems on the tool they should see me, or 
contact me by cell phone, immediately .

Thank you for your support!

James Conway


PS Whomever has the RAITH 150 version 4 off line SW disk please return 
it to me immediately.



Takashi Kodama wrote:
> Hi James,
>
> Thank you so much.
> By the way, as I posted an e-mail to our discussion list, I could not solve the problem about unload error at this early morning.
> I found some descriptions in our common Lab note to overcome that. But I could not decide which "reset button" should be pressed.
> Could you tell me how to do that? I plan to use the equipment at this midnight. Thus, if possible, I want to understand it beforehand.
>
> Sincerely,
>
> Takashi Kodama
> kodama at stanford.edu
>
>
>   
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From toecutter at att.blackberry.net  Thu Nov 20 19:00:51 2008
From: toecutter at att.blackberry.net (toecutter at att.blackberry.net)
Date: Fri, 21 Nov 2008 03:00:51 +0000
Subject: RAITH if up.
Message-ID: <1637039480-1227236359-cardhu_decombobulator_blackberry.rim.net-1430395584-@bxe103.bisx.prod.on.blackberry>


No problems were encounterd this last 8 hours 

PLz be careful
Jwc
Sent via BlackBerry by AT&T


From kodama at stanford.edu  Fri Nov 21 04:37:02 2008
From: kodama at stanford.edu (Takashi Kodama)
Date: Fri, 21 Nov 2008 04:37:02 -0800 (PST)
Subject: Raith free from 5:00 am to 7:00am
Message-ID: <1111718259.241641227271022209.JavaMail.root@zm09.stanford.edu>


I finished today's process early and the system become free
from 5:00 am to 7:00 am.

Thanks,

takashi


From kodama at stanford.edu  Fri Nov 21 04:38:06 2008
From: kodama at stanford.edu (Takashi Kodama)
Date: Fri, 21 Nov 2008 04:38:06 -0800 (PST)
Subject: Raith free from 5:00 am to 7:00am
Message-ID: <1669713111.241721227271086379.JavaMail.root@zm09.stanford.edu>


I finished today's process early and the system become free
from 5:00 am to 7:00 am.

Thanks,

takashi
kodama at stanford.edu


From slatif at stanford.edu  Fri Nov 21 17:30:39 2008
From: slatif at stanford.edu (Salman Latif)
Date: Fri, 21 Nov 2008 17:30:39 -0800 (PST)
Subject: Anyone seen 2% PMMA
Message-ID: <1817747536.350801227317439485.JavaMail.root@zm06.stanford.edu>

Hi, has anyone seen the bottle of 2% PMMA, 950K ? It's not in the cabinet, or the metal carts, headway or develop areas. If I can find it before 10pm, I can start my session, otherwise raith will be free 10pm-2am.

Salman.


From raneeyoo at stanford.edu  Mon Nov 24 12:10:58 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Mon, 24 Nov 2008 12:10:58 -0800 (PST)
Subject: Raith offline software and USB dongle
Message-ID: <501446729.543651227557458266.JavaMail.root@zm06.stanford.edu>

Dear Raith users,

I am wondering if I can borrow the Raith offline software and USB dongle.
Please let me know and thanks,
Kyeongran


From jwc at snf.stanford.edu  Tue Nov 25 10:07:13 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Tue, 25 Nov 2008 10:07:13 -0800
Subject: All odd lots of PMMA should be deposited on wafers by the end of
 the year.  We will dispose of all odd lots in the SNF Cleanroom on December
 16, days end.
Message-ID: <492C3ED1.20505@snf.stanford.edu>


Greetings PMMA Users:

All bottles of User labeled odd lots and non-standard viscosities of 
PMMA  in the SNF Cleanroom should be finished up preferably by 
depositing these materials on wafers by the end of the year at shutdown. 
At days end on Tuesday December 16, 2008 I will dispose of all PMMA 
batches not consumed, when they will be packed up and safely discarded  
This is to aid in cleaning up the SNF cleanroom, and to reduce the 
volume and amounts of odd lots stored  in the Lab for the annual 
inventory of chemicals.

It is recommended to coat up wafers with these materials so we don't 
have to throw them away and pay extra disposal cost.

Thank you,

James Conway


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From ahazeghi at stanford.edu  Tue Nov 25 13:36:43 2008
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Tue, 25 Nov 2008 13:36:43 -0800 (PST)
Subject: Ma-N 2403 negative Ebeam resist and YES oven
In-Reply-To: <1911738719.736001227648887487.JavaMail.root@zm03.stanford.edu>
Message-ID: <1495263557.736371227649003869.JavaMail.root@zm03.stanford.edu>

Greetings,
A while back I posted about an issue not being able to spin Ma-N 2403 negative ebeam resist on wafers primed in the YES oven. Since then, I have only been using the standard 150C singe oven prior to Ma-N spin and the results have been good. Today I tried spinning MaN on a wafer that had gone in the YES oven (the wafer had ZEP on it before and thus primed in YES two days ago) and again to my surprise adhesion was very poor.
Although HMDS prime is recommended in the official data sheet for Ma-N2403, I have come to the conclusion that currently it is not compatible with the recipe used in the YES oven, so I thought I'd share this with other users who may want to use this resist. This also confirms Jim Kruger's findings. 


Best,
Arash


From jimkruger at yahoo.com  Tue Nov 25 14:26:30 2008
From: jimkruger at yahoo.com (jim kruger)
Date: Tue, 25 Nov 2008 14:26:30 -0800 (PST)
Subject: Ma-N 2403 negative Ebeam resist and YES oven
In-Reply-To: <1495263557.736371227649003869.JavaMail.root@zm03.stanford.edu>
Message-ID: <472035.60883.qm@web38902.mail.mud.yahoo.com>

I believe you can "spoil" the HMDS with a brief O2 plasma and restore Ma-N adhesion.  Solvents do not remove the HMDS.

jim


--- On Tue, 11/25/08, Arash Hazeghi <ahazeghi at stanford.edu> wrote:

> From: Arash Hazeghi <ahazeghi at stanford.edu>
> Subject: Ma-N 2403 negative Ebeam resist and YES oven
> To: "raith" <raith at snf.stanford.edu>, ebeam at snf.stanford.edu, yes at snf.stanford.edu
> Date: Tuesday, November 25, 2008, 1:36 PM
> Greetings,
> A while back I posted about an issue not being able to spin
> Ma-N 2403 negative ebeam resist on wafers primed in the YES
> oven. Since then, I have only been using the standard 150C
> singe oven prior to Ma-N spin and the results have been
> good. Today I tried spinning MaN on a wafer that had gone in
> the YES oven (the wafer had ZEP on it before and thus primed
> in YES two days ago) and again to my surprise adhesion was
> very poor.
> Although HMDS prime is recommended in the official data
> sheet for Ma-N2403, I have come to the conclusion that
> currently it is not compatible with the recipe used in the
> YES oven, so I thought I'd share this with other users
> who may want to use this resist. This also confirms Jim
> Kruger's findings. 
> 
> 
> Best,
> Arash


      


From raneeyoo at stanford.edu  Tue Nov 25 21:08:59 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Tue, 25 Nov 2008 21:08:59 -0800 (PST)
Subject: Raith SEM screen is just black
Message-ID: <938326130.745021227676139537.JavaMail.root@zm06.stanford.edu>

Hello!

My previous user finished it early, I got the tool.
However, when I tried to get some images, the SEM screen was frozen.  
With Yuan and Andrei's help, I restarted SEM computer after unloading my sample and logging off, but it did not work.
I also restarted both raith and sem computers, but still it did not work.

I made a reservation at 12-12:30am after previous user's reservation, but I deleted it.

I left voice messages on James's phone.

thanks,
Kyeongran


From raneeyoo at stanford.edu  Tue Nov 25 23:45:32 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Tue, 25 Nov 2008 23:45:32 -0800 (PST)
Subject: Raith SEM screen is back to normal
In-Reply-To: <938326130.745021227676139537.JavaMail.root@zm06.stanford.edu>
Message-ID: <1895538274.757071227685532983.JavaMail.root@zm06.stanford.edu>

Hello!

It is fine now after shutdown and rebooting the computers with James's help.

thanks,
Kyeongran
----- Original Message -----
From: "Kyeongran Yoo" <raneeyoo at stanford.edu>
To: "raith" <raith at snf.stanford.edu>
Sent: Tuesday, November 25, 2008 9:08:59 PM GMT -08:00 US/Canada Pacific
Subject: Raith SEM screen is just black

Hello!

My previous user finished it early, I got the tool.
However, when I tried to get some images, the SEM screen was frozen.  
With Yuan and Andrei's help, I restarted SEM computer after unloading my sample and logging off, but it did not work.
I also restarted both raith and sem computers, but still it did not work.

I made a reservation at 12-12:30am after previous user's reservation, but I deleted it.

I left voice messages on James's phone.

thanks,
Kyeongran


From jwc at snf.stanford.edu  Wed Nov 26 09:56:53 2008
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 26 Nov 2008 09:56:53 -0800
Subject: Ma-N 2403 negative Ebeam resist and YES oven
In-Reply-To: <1495263557.736371227649003869.JavaMail.root@zm03.stanford.edu>
References: <1495263557.736371227649003869.JavaMail.root@zm03.stanford.edu>
Message-ID: <492D8DE5.7050308@snf.stanford.edu>

Hello All:

I though we had beat this thread to death before.

I think it all depends on the cleanup used prior to the MaN-spin 
coating.  You cannot reply on a previous prime layer to stay intact 
after other resist processing. It is just a delicate mono-layer!!!
This week I coated several wafers with 1.0 um oxide after YES priming 
and MaN-2403 adhesion was fine with no blistering evident.
These wafers had been cleaned on wbnonmetal using the 9:1 H2SO4:H2O2 
etchant, 6X Dump rinses and 1X SRD rinsed and then immediately put into 
the prime oven.  The wafer was coated with resist immediately after the 
prime process was completed.

You shouldn't be surprised in the least that you had adhesion issues on 
your wafer after you stripped off ZEP- 520 resist and had employed a 
previous YES primed layer -- it likely became contaminated in the two 
days it sat out.  YES prime layers should be consider good for about a 
maximum of 24 hours before you should consider repeating the YES Prime 
after a complete wafer clean sequence is repeated.

If you obtain excellent adhesion which passes NIST Peel test I and II 
without YES prime fine just do it in your process. 
You will need to provide more data and higher N counts before I will buy 
in that priming is not necessary for my process which was tested over 
more than 20 wafer lots to date.

All the Best for the Holiday,

James Conway




Arash Hazeghi wrote:
> Greetings,
> A while back I posted about an issue not being able to spin Ma-N 2403 negative ebeam resist on wafers primed in the YES oven. Since then, I have only been using the standard 150C singe oven prior to Ma-N spin and the results have been good. Today I tried spinning MaN on a wafer that had gone in the YES oven (the wafer had ZEP on it before and thus primed in YES two days ago) and again to my surprise adhesion was very poor.
> Although HMDS prime is recommended in the official data sheet for Ma-N2403, I have come to the conclusion that currently it is not compatible with the recipe used in the YES oven, so I thought I'd share this with other users who may want to use this resist. This also confirms Jim Kruger's findings. 
>
>
> Best,
> Arash
>   
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From panjun at stanford.edu  Wed Nov 26 14:16:33 2008
From: panjun at stanford.edu (Jun Pan)
Date: Wed, 26 Nov 2008 14:16:33 -0800 (PST)
Subject: took the system
Message-ID: <1288602230.896901227737793692.JavaMail.root@zm06.stanford.edu>

the current user finished early. I took the system till 5:30p.


From hailiang at stanford.edu  Wed Nov 26 15:53:53 2008
From: hailiang at stanford.edu (Hailiang Wang)
Date: Wed, 26 Nov 2008 15:53:53 -0800 (PST)
Subject: raith free 9-11pm
Message-ID: <2103515135.908131227743633205.JavaMail.root@zm06.stanford.edu>

Sorry for late notice, but my samples are not ready.

Hailiang


From pgallagher at stanford.edu  Wed Nov 26 20:08:39 2008
From: pgallagher at stanford.edu (Patrick Gallagher)
Date: Wed, 26 Nov 2008 20:08:39 -0800
Subject: raith free now until 9pm
Message-ID: <81ce74de0811262008t3afa35e3icfe4844096633b62@mail.gmail.com>

My spinner failed, so I can't coat my chip. Sorry!


From zhangy at stanford.edu  Thu Nov 27 09:23:07 2008
From: zhangy at stanford.edu (Yuan Zhang)
Date: Thu, 27 Nov 2008 09:23:07 -0800
Subject: Raith free till 12:30pm
Message-ID: <20081127172308.56A61486411@smtp4.stanford.edu>

Sample not ready yet. Sorry for the late notice.

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From raneeyoo at stanford.edu  Thu Nov 27 09:33:13 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Thu, 27 Nov 2008 09:33:13 -0800 (PST)
Subject: Raith free on Saturday 3:30am-5am
In-Reply-To: <20081127172308.56A61486411@smtp4.stanford.edu>
Message-ID: <320696052.963041227807193983.JavaMail.root@zm06.stanford.edu>

Hello Raith Users,

I had a joint session with lwchang at 3:30-5am on Saturday, but we got other slot.
So now the slot is free.

Happy Thanksgiving!

best,
Kyeongran


From ecezhoulj at gmail.com  Thu Nov 27 09:47:58 2008
From: ecezhoulj at gmail.com (Linjie Zhou)
Date: Thu, 27 Nov 2008 09:47:58 -0800
Subject: Raith free till 12:30pm
References: <20081127172308.56A61486411@smtp4.stanford.edu>
Message-ID: <F246C086C5FA4EEEB6919FB8452F2926@Elcapitan>

I'll take it. thanks!
  ----- Original Message ----- 
  From: Yuan Zhang 
  To: 'EBEAM Ebeam Lab' 
  Sent: Thursday, November 27, 2008 9:23 AM
  Subject: Raith free till 12:30pm


  Sample not ready yet. Sorry for the late notice.
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From raneeyoo at stanford.edu  Thu Nov 27 19:27:50 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Thu, 27 Nov 2008 19:27:50 -0800 (PST)
Subject: I will start my raith session from 9pm
Message-ID: <712240741.991051227842870538.JavaMail.root@zm06.stanford.edu>

Hello!

I will start my joint raith session w/ englund from 9pm due to process delay.  However, I definitely need this session.
thank you so much.

best,
Kyeongran
Dirk


From anikak at stanford.edu  Fri Nov 28 11:01:56 2008
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Fri, 28 Nov 2008 11:01:56 -0800
Subject: Raith free 7-10:30 tonight
Message-ID: <fe7ed2cd0811281101y5312d4f9t4f9a336ca09e005@mail.gmail.com>

Happy late thanksgiving!
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From kocabas at stanford.edu  Fri Nov 28 12:01:58 2008
From: kocabas at stanford.edu (S. Ekin Kocabas)
Date: Fri, 28 Nov 2008 12:01:58 -0800
Subject: ma-D 532 Developer bottle empty
Message-ID: <b45e35bf0811281201u40af0254td5aeadd4ee935b2b@mail.gmail.com>

I used up the last bit of the ma-D 532. The bottle is now empty.

Ekin
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From raneeyoo at stanford.edu  Sat Nov 29 15:34:39 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Sat, 29 Nov 2008 15:34:39 -0800 (PST)
Subject: raith released until 5pm today
In-Reply-To: <709800201.1102391228001318307.JavaMail.root@zm06.stanford.edu>
Message-ID: <372525729.1102941228001679546.JavaMail.root@zm06.stanford.edu>

Hello!

I am releasing my raith session today until 5pm.
I had two problems during my raith session and do not have enough time to pattern my devices the rest of my session.
I was not able to log in to raith, so turned down the raith computer.  After then, it was OK to login.
After write field alignments, the SEM was frozen.
I unloaded my sample, log off from the two computers and turned off both raith and sem computer.  After rebooting, it shows SEM images.  But I do not have enough time to pattern it.
It seems OK, but please keep an eye on it.

thanks,
Kyeongran


From dalyx at stanford.edu  Sat Nov 29 16:25:55 2008
From: dalyx at stanford.edu (Dany-Sebastien Ly-Gagnon)
Date: Sat, 29 Nov 2008 16:25:55 -0800
Subject: raith released until 8h30pm today
Message-ID: <7f014b6b0811291625ie452995uafa44765e8e7e5a1@mail.gmail.com>

We're out of Ma-D 532 developer. Ed kindly went to look for more of it in
the stockroom, but couldn't find any. So I'm releasing my session and RAITH
is free until 8h30pm today.

Dany


On Sat, Nov 29, 2008 at 3:34 PM, Kyeongran Yoo <raneeyoo at stanford.edu>wrote:

> Hello!
>
> I am releasing my raith session today until 5pm.
> I had two problems during my raith session and do not have enough time to
> pattern my devices the rest of my session.
> I was not able to log in to raith, so turned down the raith computer.
>  After then, it was OK to login.
> After write field alignments, the SEM was frozen.
> I unloaded my sample, log off from the two computers and turned off both
> raith and sem computer.  After rebooting, it shows SEM images.  But I do not
> have enough time to pattern it.
> It seems OK, but please keep an eye on it.
>
> thanks,
> Kyeongran
>
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From kathrynt at stanford.edu  Sat Nov 29 17:11:31 2008
From: kathrynt at stanford.edu (Kathryn Todd)
Date: Sat, 29 Nov 2008 17:11:31 -0800
Subject: Raith released 9:30-11am Sunday
Message-ID: <4070ecc80811291711rc6ac433o4e5b59dc1f376bc4@mail.gmail.com>

Sample not ready.
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From kcbalram at stanford.edu  Sun Nov 30 05:21:18 2008
From: kcbalram at stanford.edu (Krishna C Balram)
Date: Sun, 30 Nov 2008 05:21:18 -0800
Subject: Raith Problem
Message-ID: <d703091d0811300521j136541b6uc118e8716b29ad14@mail.gmail.com>

Hi
There was a problem with Raith
details are on Coral

Krishna C Balram
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From anikak at stanford.edu  Sun Nov 30 10:48:48 2008
From: anikak at stanford.edu (Anika Kinkhabwala)
Date: Sun, 30 Nov 2008 10:48:48 -0800
Subject: free until 8pm
Message-ID: <fe7ed2cd0811301048s75b95bedsd1a72a0cbe852b30@mail.gmail.com>

Sounds like it's down, but if anyone wants to try and fix it...
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From raneeyoo at stanford.edu  Sun Nov 30 15:02:12 2008
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Sun, 30 Nov 2008 15:02:12 -0800 (PST)
Subject: Raith has been released because of the raith problem 8pm-midnight
In-Reply-To: <d703091d0811300521j136541b6uc118e8716b29ad14@mail.gmail.com>
Message-ID: <2120290777.1187261228086132061.JavaMail.root@zm06.stanford.edu>

Hello Raith Users,

I saw the problem statements on the coral.
I had same problems before.  At the time, after resetting the computers, it was OK to run.  However, at this time it is not the case.
I am releasing my session from 20-24 tonight.
Hopefully it will be resolved soon.

thanks,
Kyeongran
----- Original Message -----
From: "Krishna C Balram" <kcbalram at stanford.edu>
To: raith at snf.stanford.edu
Sent: Sunday, November 30, 2008 5:21:18 AM GMT -08:00 US/Canada Pacific
Subject: Raith Problem

Hi 


There was a problem with Raith 
details are on Coral 
  

Krishna C Balram