From kodama at stanford.edu Wed Apr 1 12:43:10 2009 From: kodama at stanford.edu (Takashi Kodama) Date: Wed, 1 Apr 2009 12:43:10 -0700 (PDT) Subject: Raith free: from 4:00 am to 7:00 am tomorrow Message-ID: <1460087528.709151238614990043.JavaMail.root@zm09.stanford.edu> My sample preparation has not been finished due to the schedule of the instrument. I am so sorry for the late notice. Takashi Kodama kodama at stanford.edu From bilee at stanford.edu Tue Apr 7 05:27:42 2009 From: bilee at stanford.edu (Byoungil Lee) Date: Tue, 7 Apr 2009 05:27:42 -0700 Subject: raith free midnight-2am on Wed (4/8) References: <763751477.2788731236815998617.JavaMail.root@zm03.stanford.edu> Message-ID: Took a session today. -Byoungil From ahazeghi at stanford.edu Tue Apr 7 11:14:37 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 7 Apr 2009 11:14:37 -0700 Subject: System released 11:00PM-12:00AM Message-ID: <00c301c9b7ac$b629f230$227dd690$@edu> My sample has not arrived yet. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Apr 7 15:24:04 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 07 Apr 2009 15:24:04 -0700 Subject: Whomever has the raith off-line SW installation disk please return it to me ASAP. Message-ID: <49DBD284.2060902@snf.stanford.edu> Greetings RAITH Users: Please return the Raith off-line SW installation disk to me ASAP. I thought I had this disk in my desk drawer but cannot locate it now. Needed to install this SW app. on another Users computer. All the best, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Apr 9 09:36:29 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 09 Apr 2009 09:36:29 -0700 Subject: JWC is on the Raith tool this afternoon starting at 2:30 until 6 PM examining HSQ negative tone EBL resist and RIE structures. Good introduction to the RAITH 150 SEM package... Message-ID: <49DE240D.9060006@snf.stanford.edu> Good Morning Future Raith 150 Users: As I mentioned to each of you in the recent past. I operate the ebeam lab as an open lab resource for Users. You are welcome to join either myself or any other Raith User, preferably a Raith Champion, to gain exposure to and even get exposure performed on the system. This is a great way to get up to speed on the system before the next class in May. I have scheduled this class for the week of May 12 to 15th, 2009 from 10 to 6 PM each day. Please put this on your schedules if you will be able to attend the class. I look forward to getting your projects started while working together and learning more about your research here at SNF in the coming weeks before the class. Announcement: This afternoon Thursday April 09, 2009 from 2:30 until roughly 6 PM, I will be working on the RAITH performing a inspection of HSQ negative tone resist EBL writes and RIE etch structures on Silicon. This will include some low voltage SEM work to evaluate resist etching characterization of thin and normal specification thicknesses of this material to evaluate how well its survives the RIE etching in the P-5000 MERIE system. During this time I will be working at multiple acceleration voltages and with different SEM control settings and it would be a good introduction to the SEM side of the package if you are available. Everyone of interest is welcome to attend any of my sessions. Best, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From arkam at stanford.edu Thu Apr 9 14:58:33 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 9 Apr 2009 14:58:33 -0700 (PDT) Subject: Raith free from 11 to whole night Message-ID: <1224239541.2785901239314313704.JavaMail.root@zm06.stanford.edu> Sorry for the late notice....other fabrication steps did not work out as expected Arka -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From dalyx at stanford.edu Thu Apr 9 15:10:22 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Thu, 9 Apr 2009 15:10:22 -0700 (PDT) Subject: Raith free from 11 to whole night In-Reply-To: <1224239541.2785901239314313704.JavaMail.root@zm06.stanford.edu> Message-ID: <468482442.2395981239315022219.JavaMail.root@zm03.stanford.edu> I'll take it. Thanks! Dany ----- Original Message ----- From: "Arka Majumdar" To: "raith" Sent: Thursday, April 9, 2009 2:58:33 PM GMT -08:00 US/Canada Pacific Subject: Raith free from 11 to whole night Sorry for the late notice....other fabrication steps did not work out as expected Arka -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From dalyx at stanford.edu Thu Apr 9 19:02:29 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Thu, 9 Apr 2009 19:02:29 -0700 (PDT) Subject: Raith free from 11 to whole night In-Reply-To: <468482442.2395981239315022219.JavaMail.root@zm03.stanford.edu> Message-ID: <610283257.2443531239328949815.JavaMail.root@zm03.stanford.edu> Hmmm... Looks like I'm not quite ready yet. The slot is now free. I've reverted to my original slot on tomorrow morning. Cheers, Dany ----- Original Message ----- From: "Dany Ly-Gagnon" To: "Arka Majumdar" Cc: "raith" Sent: Thursday, April 9, 2009 3:10:22 PM GMT -08:00 US/Canada Pacific Subject: Re: Raith free from 11 to whole night I'll take it. Thanks! Dany ----- Original Message ----- From: "Arka Majumdar" To: "raith" Sent: Thursday, April 9, 2009 2:58:33 PM GMT -08:00 US/Canada Pacific Subject: Raith free from 11 to whole night Sorry for the late notice....other fabrication steps did not work out as expected Arka -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From jwc at snf.stanford.edu Fri Apr 10 14:28:58 2009 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 10 Apr 2009 14:28:58 -0700 Subject: New bottle of MaN-2403 in the lab please finish the old bottle first Message-ID: <49DFBA1A.8000904@snf.stanford.edu> An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Sun Apr 12 20:53:48 2009 From: xinranw at stanford.edu (Xinran Wang) Date: Sun, 12 Apr 2009 20:53:48 -0700 (PDT) Subject: raith free tomorrow 8:30am Message-ID: <276453427.183291239594828817.JavaMail.root@zm06.stanford.edu> My sample won't be ready, sorry for the late notice. Xinran From bdai at stanford.edu Mon Apr 13 05:09:44 2009 From: bdai at stanford.edu (Bing Dai) Date: Mon, 13 Apr 2009 05:09:44 -0700 (PDT) Subject: Shut down Raith due to Loadlock Error Message-ID: <1548028283.236501239624584649.JavaMail.root@zm06.stanford.edu> Dear Raith users, A fatal error "Error 214: CloseValve" popped up during unloading and I had to shut down Raith. Thanks, Bing From linyouc at stanford.edu Mon Apr 13 15:10:35 2009 From: linyouc at stanford.edu (Linyou Cao) Date: Mon, 13 Apr 2009 15:10:35 -0700 (PDT) Subject: Looking for trading 1hr Raith time today Message-ID: <1670372084.353421239660635353.JavaMail.root@zm06.stanford.edu> Could those users having reservation today or early tomorrow morning trade part of your session with me? ?I need just one hour and, as return, would give you a two-hour-long slot Wednesday morning 8:30-10:30am. Many thanks Linyou -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Tue Apr 14 17:30:49 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 14 Apr 2009 17:30:49 -0700 (PDT) Subject: Power glitch Message-ID: <1077852162.643041239755449708.JavaMail.root@zm03.stanford.edu> Apparently there were two power glitches during my session, James and I recovered the system after the first power glitch, at 5:15 there was another power glitch which tripped the beam and caused a loud friction sound, the joystick is behaving erratically and I get fatal load error because the connection between RAITH sw and stage controller is lost. I will try to recover the system by doing a hard reset if it does not work I will shutdown the system to prevent any damage. If I succeed in recoevring the system I will leave it under yellow light until James does a full inspection, please be careful if you intend to use the system as Ed warned there might be further power glitches today. Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From leoyu at stanford.edu Tue Apr 14 20:49:15 2009 From: leoyu at stanford.edu (Leo Yu) Date: Tue, 14 Apr 2009 20:49:15 -0700 (PDT) Subject: RAITH free Wed 0530-0830 Message-ID: <1017860519.679511239767355373.JavaMail.root@zm03.stanford.edu> Sample won't be ready. Sorry for the late notice. From hailiang at stanford.edu Tue Apr 14 21:18:51 2009 From: hailiang at stanford.edu (Hailiang Wang) Date: Tue, 14 Apr 2009 21:18:51 -0700 (PDT) Subject: Raith free 10pm to midnight Message-ID: <260228112.757151239769131440.JavaMail.root@zm06.stanford.edu> Sorry for the very late notice. Hailiang From xutian at stanford.edu Tue Apr 14 21:53:54 2009 From: xutian at stanford.edu (Xu Tian) Date: Tue, 14 Apr 2009 21:53:54 -0700 (PDT) Subject: Raith free 10pm to midnight In-Reply-To: <260228112.757151239769131440.JavaMail.root@zm06.stanford.edu> Message-ID: <1388562299.728191239771234600.JavaMail.root@zm02.stanford.edu> I will take it to finish more samples. Thanks. Xu Tian ----- Original Message ----- From: "Hailiang Wang" To: "raith" Sent: Tuesday, April 14, 2009 9:18:51 PM GMT -08:00 US/Canada Pacific Subject: Raith free 10pm to midnight Sorry for the very late notice. Hailiang From ahazeghi at stanford.edu Wed Apr 15 16:44:06 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 15 Apr 2009 16:44:06 -0700 (PDT) Subject: 5:30-6:30 released Message-ID: <473695585.874801239839046273.JavaMail.root@zm03.stanford.edu> My sample is still processed and will not be ready by 5:30, I will start my session at 6:30. Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Wed Apr 15 16:50:30 2009 From: krivoire at stanford.edu (Kelley Rivoire) Date: Wed, 15 Apr 2009 16:50:30 -0700 (PDT) Subject: 5:30-6:30 released In-Reply-To: <473695585.874801239839046273.JavaMail.root@zm03.stanford.edu> Message-ID: <1196190687.927681239839430591.JavaMail.root@zm02.stanford.edu> Taken, thanks. Kelley ----- Original Message ----- From: "Arash Hazeghi" To: "raith" Sent: Wednesday, April 15, 2009 4:44:06 PM GMT -08:00 US/Canada Pacific Subject: 5:30-6:30 released My sample is still processed and will not be ready by 5:30, I will start my session at 6:30. Thanks, Arash From kocabas at stanford.edu Fri Apr 17 16:23:54 2009 From: kocabas at stanford.edu (Sukru Ekin Kocabas) Date: Fri, 17 Apr 2009 16:23:54 -0700 (PDT) Subject: Raith is back on-line Message-ID: <1157655813.1363151240010634909.JavaMail.root@zm06.stanford.edu> Raith field service came today. Here are the notes that Marry wrote to coral: "The field service rep replaced and tightened the belt. He also saw a water flow error, so flushed the cooling lines. According to him, the system is available to use. Please check equipment status and setup carefully before using. And many thanks to Andrei! Have fun writing!" After the field service had left, there were some error messages which were not cleared, Andrei cleared them in a heroic manner. Raith seems to be working fine now. Li (coral zhangli) gratuitously let us use the time she had. Krishna (coral kcbalram) and I (coral kocabas) are on the tool now. Ekin From xutian at stanford.edu Sat Apr 18 19:44:27 2009 From: xutian at stanford.edu (Xu Tian) Date: Sat, 18 Apr 2009 19:44:27 -0700 (PDT) Subject: Beam blanker logic reversed Message-ID: <1958774754.1504911240109067148.JavaMail.root@zm02.stanford.edu> Hi, I got reversed logic of Beam blanker, however, at first I didn't follow the procedure on the FAQ. Instead, I restarted computer twice. Now when I try to follow the procedure to reset the hardware, there is no response on the Beam Blank Controller? Anybody knows how to solve the problem? Xu From xutian at stanford.edu Sat Apr 18 21:14:43 2009 From: xutian at stanford.edu (Xu Tian) Date: Sat, 18 Apr 2009 21:14:43 -0700 (PDT) Subject: Beam Blanker logic Message-ID: <14125471.1511121240114483219.JavaMail.root@zm02.stanford.edu> Hi, In order to solve the beam blanker logic problem, I flip the BEAM toggle upside, this is the third toggle in the ELPHY PLUS FE controller. It seemed working all right, but I am not sure if there will be a side effect of this. So next user please be aware of this. Xu Tian From gdiankov at stanford.edu Mon Apr 20 17:05:22 2009 From: gdiankov at stanford.edu (Georgi Diankov) Date: Mon, 20 Apr 2009 17:05:22 -0700 (PDT) Subject: Raith free 6-9 pm tonight Message-ID: <1905678621.1452531240272322451.JavaMail.root@zm07.stanford.edu> Process delayed. Sorry for the late notice. From jwc at snf.stanford.edu Tue Apr 21 08:48:07 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 21 Apr 2009 08:48:07 -0700 Subject: Problem raith SNF 2009-04-20 22:06:30: Raith Load locked Message-ID: <49EDEAB7.2010708@snf.stanford.edu> Good morning to Everyone: Sanaka-san and I will be going into the lab to clear out this Load Lock error at about 9 AM ands we should be up shortly. Anyone could have called me last night and we could have brought the system back up sooner. Best, JWC sanaka at snf.stanford.edu wrote: > Raith load locked. 6 samples are still inside. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Apr 21 17:18:27 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 21 Apr 2009 17:18:27 -0700 Subject: RAITH 150 system is off line to Users through tomorrow afternoon at best, Cooling loop issues ... Message-ID: <49EE6253.3030507@snf.stanford.edu> Greetings Raith Community, Despite my best efforts put forward to return the system to normal working state today, I am unable to get the system back up and running due to cooling loop issues resulting in reduced flow to sub-systems in the RAITH 150 system. We are seeking an more effective long term solution to these problems than simply flushing and back flushing the cooling loop as we have made repeatedly in the past. I will email out an announcement to this list when the system will be coming up. My apologizes to the interruption in your research and fabrication work. Good Evening, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Apr 22 18:38:09 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 22 Apr 2009 18:38:09 -0700 Subject: Raith is up and ready for your usage -- please call me if you encounter problems Message-ID: <49EFC681.60701@snf.stanford.edu> Greetings: *Raith is up and ready for your usage -- please call me if you encounter problems...* Thank you for your support! James -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Apr 23 09:13:05 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 23 Apr 2009 09:13:05 -0700 Subject: [Fwd: Comment raith SNF 2009-04-23 09:09:04: Cooling loop flow check 9 AM 4-23-09] Message-ID: <49F09391.7060906@snf.stanford.edu> Good Morning Raith Users and Raith Field Service: Good flow and pressure were observed this morning after repairs effected late yesterday to the cooling loop. The Fe-Gun has returned to normal emission levels after its start up last evening. Users are requested to call me immediately if any cooling or operations issues are encountered. Thank you for your support! James Conway -------- Original Message -------- Subject: Comment raith SNF 2009-04-23 09:09:04: Cooling loop flow check 9 AM 4-23-09 Date: Thu, 23 Apr 2009 09:09:05 -0700 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu I am pleased to report that my efforts to pickle the cooling line loop to the raith appears to have be successful. After repairs were completed last evening the measured flow rate was 2.5 lpm at ~ 100 psi measured on the output side of the chiller. This morning inspection measured 3.0 lpm plus and a very nice flow of clean solution is circulating through the loop. I am going to continue allowing this solution to circulate through the system over the weekend until RAITH Field Service personnel are available to check the system out and flush and refill with normal solutions. We will monitor flow rate and pressure twice each working day, or if problems are encountered on the tool. JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From rissman at stanford.edu Fri Apr 24 11:58:38 2009 From: rissman at stanford.edu (Paul Rissman) Date: Fri, 24 Apr 2009 11:58:38 -0700 Subject: Genisys proximity effect software Message-ID: <20090424185841.A1B8677B5C@smtp-roam.stanford.edu> Hi All, I have a trial copy of Genisys proximity effect correction software. This software will correct patterns for the Raith. James may have mentioned that if you have a challenging pattern you would like me to try to prepare for the Raith, I would be happy to give it a try. You can then expose the corrected pattern and see if you get better results than without correction. Thanks, Paul Rissman From ytcheng at stanford.edu Sat Apr 25 19:44:08 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Sat, 25 Apr 2009 19:44:08 -0700 (PDT) Subject: raith free 8pm-11pm In-Reply-To: <20090424185841.A1B8677B5C@smtp-roam.stanford.edu> Message-ID: <289978477.77831240713848451.JavaMail.root@zm06.stanford.edu> Sample is not ready. Sorry for the late notice. ytcheng From ytcheng at stanford.edu Mon Apr 27 15:51:47 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Mon, 27 Apr 2009 15:51:47 -0700 Subject: Releasing raith 7-10am on Wed. and 5:30-8pm next Mon. Message-ID: <001801c9c78a$bea0bff0$3be23fd0$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From dalyx at stanford.edu Tue Apr 28 10:21:59 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Tue, 28 Apr 2009 10:21:59 -0700 (PDT) Subject: RAITH free until 11am. Message-ID: <1942267065.528521240939319729.JavaMail.root@zm03.stanford.edu> From jwc at snf.stanford.edu Tue Apr 28 11:39:51 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 28 Apr 2009 11:39:51 -0700 Subject: Ma-N old bottle is over In-Reply-To: References: Message-ID: <49F74D77.3020406@snf.stanford.edu> Ma-D 532 developer is in the house and may need to be restocked, or do you mean MaN-2403 resist of which there is a new bottle in my dry box in my lab. Finish the old material first please... Krishna C Balram wrote: > Hi james > > The old bottle is over... > I am not sure where to put it..... > > I am keeping it along with the other solvents.... if there is a > problem with that please let me know > > -- > Krishna -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Tue Apr 28 19:08:59 2009 From: zhangy at stanford.edu (Yuan Zhang) Date: Tue, 28 Apr 2009 19:08:59 -0700 Subject: Raith free 12-3am Wednesday morning Message-ID: <20090429020856.A22AF3B65FA@smtp5.stanford.edu> Sample not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Wed Apr 29 11:35:31 2009 From: krivoire at stanford.edu (Kelley Rivoire) Date: Wed, 29 Apr 2009 11:35:31 -0700 (PDT) Subject: raith free noon-1 pm today In-Reply-To: <1541070973.871641241030123761.JavaMail.root@zm02.stanford.edu> Message-ID: <1935533098.871741241030131468.JavaMail.root@zm02.stanford.edu> will finish early Kelley From ahazeghi at stanford.edu Wed Apr 29 11:37:28 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 29 Apr 2009 11:37:28 -0700 Subject: raith free noon-1 pm today In-Reply-To: <1935533098.871741241030131468.JavaMail.root@zm02.stanford.edu> References: <1541070973.871641241030123761.JavaMail.root@zm02.stanford.edu> <1935533098.871741241030131468.JavaMail.root@zm02.stanford.edu> Message-ID: <00d101c9c8f9$8c55b990$a5012cb0$@edu> Taken Thanks -----Original Message----- From: Kelley Rivoire [mailto:krivoire at stanford.edu] Sent: Wednesday, April 29, 2009 11:36 AM To: raith at snf.stanford.edu Subject: raith free noon-1 pm today will finish early Kelley From ahryciw at stanford.edu Wed Apr 29 22:05:40 2009 From: ahryciw at stanford.edu (Aaron Hryciw) Date: Wed, 29 Apr 2009 22:05:40 -0700 Subject: Raith writing but disabled Message-ID: <4d36fb940904292205rebcb967h81f4afacf1fbdedf@mail.gmail.com> Hi Raith users, The Raith appears to be writing right now, but is not enabled. More Coral problems? Cheers! - Aaron -- Dr. Aaron Hryciw Postdoctoral Scholar Geballe Laboratory for Advanced Materials Stanford University 476 Lomita Mall (04-490) McCullough Building, Rm. 325 Stanford, CA 94305-4045 Tel.: (650) 723-5840 Fax.: (650) 736-1984 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Apr 30 08:37:03 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 30 Apr 2009 08:37:03 -0700 Subject: Raith writing but disabled In-Reply-To: <4d36fb940904292205rebcb967h81f4afacf1fbdedf@mail.gmail.com> References: <4d36fb940904292205rebcb967h81f4afacf1fbdedf@mail.gmail.com> Message-ID: <49F9C59F.1080806@snf.stanford.edu> Yes there has been problems with coral recently and I have disabled the interlock to avoid recurrent Load Lock Failures on the system as happened many times over Friday and Saturday last weekend. In fact I spent almost 6 hours on my cell phone overnight these two days clearing errors and problems during user sessions. So then if you were on the system and did not or could not enable please send me a short email with the pertinent information and I will adjust charges on your accounts: Your coral login name Raith or other machine Date Time start Time end any problems encountered during your sessions. James Aaron Hryciw wrote: > Hi Raith users, > > The Raith appears to be writing right now, but is not enabled. More > Coral problems? > > Cheers! > > - Aaron > > > -- > Dr. Aaron Hryciw > Postdoctoral Scholar > Geballe Laboratory for Advanced Materials > Stanford University > 476 Lomita Mall (04-490) > McCullough Building, Rm. 325 > Stanford, CA 94305-4045 > > Tel.: (650) 723-5840 > Fax.: (650) 736-1984 -------------- next part -------------- An HTML attachment was scrubbed... URL: