From jwc at snf.stanford.edu Wed Jan 7 17:31:03 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 07 Jan 2009 17:31:03 -0800 Subject: [Fwd: Problem raith SNF 2009-01-07 16:55:00: system qualification FAILED == poor write field to write field stitching] Message-ID: <49655757.10005@snf.stanford.edu> *Good Afternoon Raith Users:* Today I attempted to qualify the RAITH 150 system for performance and stitching. The system FAILED its qualification due to very poor stitching performance and some variability in the measured Beam Current (Beam I) through the course of many measurements. I was able to obtain a 10 nm short period shot dot and image it clearly showing exceptional resolution of the FE SEM column. Some house vibration was evident as has been normal due to the construction across the street. Image ripple is 5 - 7 nm FWHM. Users will note that it takes very little translation of the focus or stigmation controls to evidence a change in focus or stigmation. This indicates a very clean column and no contamination in the column from hydrocarbons. Users are requested to bake out all samples going into the system at 90 degrees C. for 2 minutes on the hot plate in the Ebeam Lab to ensure system cleanliness is maintained. The write field alignment values I obtained this morning were slightly different that before the column PM routine was performed -- this may have been due to operator error in the dot selection during the Manual write field alignment operation I performed as I set up my exposure job. The USH holder stage was flat to within 2.2 ?m across a 90 mm wafer and it is well within specification. Tomorrow, January 8, 2009 starting at about 10 AM I will "Share the Ride' with the scheduled Users coming onto the system, Hailang and Salmon I think. I will then repeat the System qualification again and attempt to qualify the system for all Users before seeking further avenues of support RAITH Champions only on the system overnight, unless you contact me in advance before 10 PM. Users are requested to carefully inspect their patterns for pattern design CD to EBL patterning results CD and report minimum resolution obtained, write field to write field stitching, and exposure matrix dose issues before committing to any pattern transfer method. Please briefly report your results to this email list. Please log all parameters requested in the Operations Log Book for my evaluation tomorrow. Welcome Back and Happy New Years! James Conway ------- Original Message -------- Subject: Problem raith SNF 2009-01-07 16:55:00: system qualification FAILED == poor write field to write field stitching Date: Wed, 7 Jan 2009 16:55:00 -0800 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Good Afternoon: RAITH system qualification FAILED == poor write field to write field stitching results in numerous patterns written. While stage flatness and imaging resolution was excellent and very high resolution features were obtained; the write field to write field stitching results were far out of specification. I will repeat the System qualification in my session tomorrow. James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From slatif at stanford.edu Thu Jan 8 16:06:23 2009 From: slatif at stanford.edu (Salman Latif) Date: Thu, 8 Jan 2009 16:06:23 -0800 (PST) Subject: Releasing my reservation: raith free 4:30-5:30 Message-ID: <928743538.1623921231459583506.JavaMail.root@zm06.stanford.edu> James should be done with his write by 4:30pm. From jwc at snf.stanford.edu Thu Jan 8 17:47:35 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 08 Jan 2009 17:47:35 -0800 Subject: RAITH system passed qualification with excellent stitching and resolution. System up for Users. Message-ID: <4966ACB7.1060200@snf.stanford.edu> Good Evening RAITH Users: I am pleased to report that the RAITH system passed it qualification testing this afternoon with excellent Write Field to Write Field stitching being observed after adjustments were made to a power supply and a controller card to the X motor on the LIS stage. Resolution and focus were excellent across an entire 100 mm B-prime wafer with no exposure errors or defects encountered during the optical microscope inspection. We will proceed with overlay layer 1 to layer two testing tomorrow morning. System is up and available for all qualified Users. Users in need of Raith application or pattern transfer support for their patterns should visit me during my office hours. (Tuesday to Friday 8:30 - 9:30 AM at CIS 31.) Anyone wishing to 'Share the Ride' with me on Friday's 10 to 2 PM session should be ready to load at 10:16 AM in the Ebeam Lab. Have a great evening, James Conway PS -- Deji Akinwande in the H.S. Philip Wong Group defends tomorrow 9 - 10 AM CIS X -- please attend if you can make the meeting. It will be a great show. -------- Original Message -------- Subject: Re: Problem raith SNF 2009-01-07 16:55:00: system qualification FAILED == poor write field to write field stitching Date: Thu, 8 Jan 2009 17:31:24 -0800 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu Adjusted the power supply voltage to the rate servo card and checked there voltages to specification on the X motor controller == excellent stitching was obtained on the second exposures. Overlay testing tomorrow in preparation for pattern transfer jwc -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jan 9 14:26:41 2009 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 09 Jan 2009 14:26:41 -0800 Subject: RAITH system qualification completed. Message-ID: <4967CF21.6030301@snf.stanford.edu> RAITH system qualification completed! Everything looks great! Please READ the coral message below... Have a nice weekend, James Conway -------- Original Message -------- Subject: Comment raith SNF 2009-01-09 14:07:36: qualification completed Date: Fri, 9 Jan 2009 14:07:37 -0800 From: jwc at snf.stanford.edu To: raith-pcs at snf.stanford.edu I completed the system qualification this afternoon. Outstanding Ebeam resolution was achieved. Ebeam waist measured < 1.0 nm at 15 kV and 1.1 - 1.4 nm at 10 kV. 5 mm WD 10 um aperture. We are observing some increased vibration in the Lab from air handlers and local construction effects from across the street. Stitching was less than 15 nm mean + 3 sigma on the Demo patterns. Better than specification by a factor of 2! Overlay registration was also superb and remains to be measured using Ebeam scans. Additional test patterns were written this afternoon which will be RIE etched and then measured by SEM and AFM next week. System has now been handed off to all Qualified Users in an optimal state and I am very pleased with the Column PM routine result. Kudos to Lev Markov with RAITH Field Service who did an excellent job adjusting the Electron optical cards settings including the three Mag. range and stigmation amplifier settings for all apertures. Users may notice the aperture positions are rotated from previous position in the past -- this is not a concern whatsoever. Tested system at 10 and 15 kV acceleration voltages and will test at higher voltages next week as system access allows. Beam Current is currently 10kV 30 um aperture is 0.191 nA. 15 kV 20 um aperture is 0.100 nA. Extraction I is in the 80's.(uA) *All Users are requested to bake out their samples before loading. 2 minutes at 90 degrees C. is recommended. All Users are requested to not exceed 21 kV acceleration voltage to allow gun vacuum to reach mid to low E-010 Torr levels and for FE-GUN emission to reach optimal peak values. Call me if you have any questions! 415-412-4825 but plz. after 7 PM as I am out of free minutes during daytime hours. James Conway* -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Mon Jan 12 14:51:55 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Mon, 12 Jan 2009 14:51:55 -0800 Subject: raith free 2pm-6pm Tuesday and 2:30pm-5:30pm Thursday Message-ID: <000e01c97508$5e359d90$1aa0d8b0$@edu> Sample is not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Jan 12 15:07:42 2009 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 12 Jan 2009 15:07:42 -0800 Subject: raith free 2pm-6pm Tuesday and 2:30pm-5:30pm Thursday taken by agreement... In-Reply-To: <000e01c97508$5e359d90$1aa0d8b0$@edu> References: <000e01c97508$5e359d90$1aa0d8b0$@edu> Message-ID: <496BCD3E.90304@snf.stanford.edu> Hello Raith Users: Arash Hazeghi and I have agreed to split the opening that came up in tomorrow afternoons 12 - 6 PM slots. This give us both access to complete out tasking on the system. Thank you, JWC Yao-Te Cheng wrote: > > Sample is not ready. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jan 14 17:19:23 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 14 Jan 2009 17:19:23 -0800 Subject: Raith Nanoseminar 2009 Dortmund, Germany march 2-3 2009. Message-ID: <496E8F1B.8070808@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jan 15 16:39:25 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 15 Jan 2009 16:39:25 -0800 Subject: ANNOUNCEMENT: Raith Group XXXV - Intensive Four Day Short Course for Basic Users Tuesday to Friday January 20 to 23rd, 2009 10 AM to 6 PM Message-ID: <496FD73D.3080505@snf.stanford.edu> *Greetings RAITH Group XXXV: ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXXV -- the next RAITH** Four Day Basic User Short Course. If you are listed in the CC: section of this email, I am** still ** in need of further information or a commitment from you and I hope to add you in the next class if you cannot attend these sessions. Any RAITH users wishing to attend are welcome if you desire a review of operations on the RAITH 150 system. ** We wish to invite all interested parties to the Tuesday morning lecture session from 10:00 AM - 12:30 PM, and the following Demo Layer One training from 2 PM - 6 PM in the afternoon. All are also welcome to attend as observers the other 'Hands-On' sessions through the week. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXXV Training course to January 20 to 23rd, 2009. You must have completed the prerequisite ALL LITHO and SEM training in order to attend as a participant. Otherwise you may attend as an Observer. _*You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. I am next holding this class on Tuesday January 27th, 2009 from 10:15 - 12:30 PM. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXXV **Schedule: ** * *Raith 150 Basic Users Training -- Intensive 4 Day Short Course* *January 20 to 23rd, 2009 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday January 20, 2009: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS - 201 14:00 - 18:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday January 21, 2009: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY Layer 1 to Layer 2 registration -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday January 22, 2009: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday January 23, 2009 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 16:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. You can also stop by my office and pick up a copy of these training materials during my daily office hour. (8:30 - 9:30 AM Tuesdays to Friday at CIS 31) Bring along your USB drive! ------------------------------------------------------------------------------------------------------------------------------------------- Tentative Class listing pending completion of all prerequisites: RAITH Group XXXV Participants: 1. Ching-yang Yu leoyu at stanford.edu coral: leoyu Phone: 650-644-9486 Yamamoto Group Project: Waveguide coupling into disk resonators on III/V. dimensions from 20nm to mms. 2. Larkhoon Leem tryon16 at stanford.edu coral: ________ Phone: 650-776-3273 Harris Group Project: Magnetic Coupled Spin Torque Devices. 3. Thorsten Hesjedal thesjeda at ecemail.uwaterloo.ca Coral: _____ Phone: ________ Harris Group Project: Magnetic Coupled Spin Torque Devices with Larkhoon Leem 4. David Bernstein dpb167 at stanford.edu Coral: dpb167 Phone: 650-862-7998 cell Stohr Group Project: magnetic dynamic of nano-ellipses. 5. Bjoern Braeuer bbj at stanford.edu Coral: bbj Phone: 650-303-4519 cell Stohr Group Project: magnetic dynamic of nano-ellipses. 6. Edward Barnard barnarde at stanford.edu Coral barnarde Phone: 650-796-9301 Brongersma Project: Plasmonic resonator antennas on Qz. Raith Group XXXV Observers: 7. Timothy Phung timphung at stanford.edu Coral: _______ Phone: 408-417-0938 Harris Group Project: Magnetic Coupled Spin Torque Devices 8. John Mannion john_mannion at agilent.com Coral: Phone: 609-658-5811 Agilent Labs Project: nano-channel for DNA sensing on Qz. 9. Xinyu Bao xinyubao at stanford.edu Coral: xinyubao Phone: 858-531-2541 H.S. Phillip Wong Project: III/V nanowire Growth for solar cell 10. Carter Lin carterl at stanford.edu Coral: carterlin Phone: 617-259-7988 Vuckovic Group Project: GaAs Photonic crystal cavity research. James W. Conway Stanford Nanofabrication Facility Stanford University 650-725-7075 -- 415-412-4825 jwc at snf.stanford.edu ** * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From slatif at stanford.edu Mon Jan 19 00:40:54 2009 From: slatif at stanford.edu (Salman Latif) Date: Mon, 19 Jan 2009 00:40:54 -0800 (PST) Subject: taking 3 hours after my reservation Message-ID: <1651419242.1236071232354454186.JavaMail.root@zm06.stanford.edu> User brayne cancelled his reservation, so I'm continuing my session an extra 3 hours (3-6am). Salman. From ytcheng at stanford.edu Wed Jan 21 16:12:17 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Wed, 21 Jan 2009 16:12:17 -0800 Subject: raith free 10PM-2AM tonight Message-ID: <002901c97c26$162d9fa0$4288dee0$@edu> Sample is not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Thu Jan 22 00:53:27 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Thu, 22 Jan 2009 00:53:27 -0800 (PST) Subject: RAITH available from 1:30AM Message-ID: <1855641062.1894311232614407587.JavaMail.root@zm03.stanford.edu> I noticed next user removed their reservation I used some of their time but I'm done now-system is available until 8:30AM Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From xinranw at stanford.edu Mon Jan 26 11:07:01 2009 From: xinranw at stanford.edu (Xinran Wang) Date: Mon, 26 Jan 2009 11:07:01 -0800 (PST) Subject: raith finished earlier Message-ID: <1506867399.2628411232996821734.JavaMail.root@zm06.stanford.edu> free until noon. Xinran From dalyx at stanford.edu Mon Jan 26 22:06:52 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Mon, 26 Jan 2009 22:06:52 -0800 (PST) Subject: RAITH free 9am to 11am Tuesday morning Message-ID: <839868348.2727861233036412121.JavaMail.root@zm03.stanford.edu> Samples not ready. Dany From slatif at stanford.edu Tue Jan 27 11:10:06 2009 From: slatif at stanford.edu (Salman Latif) Date: Tue, 27 Jan 2009 11:10:06 -0800 (PST) Subject: raith released 7pm-10pm Message-ID: <903437756.2918701233083406828.JavaMail.root@zm06.stanford.edu> sorry for the late notice. From ahazeghi at stanford.edu Wed Jan 28 15:25:52 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 28 Jan 2009 15:25:52 -0800 (PST) Subject: RAITH available for next user Message-ID: <1573528374.3130241233185152660.JavaMail.root@zm03.stanford.edu> Finished early. Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From rissman at stanford.edu Thu Jan 29 08:31:19 2009 From: rissman at stanford.edu (Paul Rissman) Date: Thu, 29 Jan 2009 08:31:19 -0800 Subject: SVTC and Toppan joint presentation - Monday, February 2nd, 3 pm Message-ID: <20090129163122.C3FC97FE7@smtp-roam.stanford.edu> Wilbur Catabay of SVTC and representatives of Toppan Photomasks will be here Monday February 2nd at 3 pm in CIS 101 for a joint presentation. Topics to be discussed include: * SVTC company background * Making the transition of your project from SNF to SVTC * Toppan company background * E-beam lithography services at SVTC * Summary and timeline The representatives of SVTC and Toppan will be happy to hear your comments and questions. Refreshments will be served. From xinranw at stanford.edu Thu Jan 29 11:07:25 2009 From: xinranw at stanford.edu (Xinran Wang) Date: Thu, 29 Jan 2009 11:07:25 -0800 (PST) Subject: raith done early Message-ID: <1687885348.3377661233256045169.JavaMail.root@zm06.stanford.edu> free until 1:30pm Xinran From ahazeghi at stanford.edu Fri Jan 30 13:48:25 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Fri, 30 Jan 2009 13:48:25 -0800 (PST) Subject: RAITH free 2-3PM Message-ID: <1567392659.3520171233352105232.JavaMail.root@zm03.stanford.edu> Sorry for the late notice but my sample will not be ready by 2 I will start at 3PM. Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From hailiang at stanford.edu Sat Jan 31 14:12:41 2009 From: hailiang at stanford.edu (Hailiang Wang) Date: Sat, 31 Jan 2009 14:12:41 -0800 (PST) Subject: Raith free now to 4pm Message-ID: <10431944.3751451233439961054.JavaMail.root@zm06.stanford.edu> finished early Liying