RAITH system qualification completed.
jwc at snf.stanford.edu
Fri Jan 9 14:26:41 PST 2009
RAITH system qualification completed! Everything looks great!
Please READ the coral message below...
Have a nice weekend,
-------- Original Message --------
Subject: Comment raith SNF 2009-01-09 14:07:36: qualification completed
Date: Fri, 9 Jan 2009 14:07:37 -0800
From: jwc at snf.stanford.edu
To: raith-pcs at snf.stanford.edu
I completed the system qualification this afternoon.
Outstanding Ebeam resolution was achieved. Ebeam waist measured < 1.0 nm at 15 kV and 1.1 - 1.4 nm at 10 kV. 5 mm WD 10 um aperture.
We are observing some increased vibration in the Lab from air handlers and local construction effects from across the street.
Stitching was less than 15 nm mean + 3 sigma on the Demo patterns. Better than specification by a factor of 2!
Overlay registration was also superb and remains to be measured using Ebeam scans.
Additional test patterns were written this afternoon which will be RIE etched and then measured by SEM and AFM next week.
System has now been handed off to all Qualified Users in an optimal state and I am very pleased with the Column PM routine result.
Kudos to Lev Markov with RAITH Field Service who did an excellent job adjusting the Electron optical cards settings including the three Mag. range
and stigmation amplifier settings for all apertures.
Users may notice the aperture positions are rotated from previous position in the past -- this is not a concern whatsoever.
Tested system at 10 and 15 kV acceleration voltages and will test at higher voltages next week as system access allows.
Beam Current is currently 10kV 30 um aperture is 0.191 nA. 15 kV 20 um aperture is 0.100 nA. Extraction I is in the 80's.(uA)
*All Users are requested to bake out their samples before loading. 2 minutes at 90 degrees C. is recommended.
All Users are requested to not exceed 21 kV acceleration voltage to allow gun vacuum to reach mid to low E-010 Torr levels
and for FE-GUN emission to reach optimal peak values.
Call me if you have any questions! 415-412-4825 but plz. after 7 PM as I am out of free minutes during daytime hours.
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