From timphung at stanford.edu Thu Jul 2 07:45:54 2009 From: timphung at stanford.edu (Timothy Phung) Date: Thu, 2 Jul 2009 07:45:54 -0700 (PDT) Subject: raith free until 8:30 am finished early Message-ID: <1460401583.4399781246545954069.JavaMail.root@zm06.stanford.edu> From jwc at snf.stanford.edu Thu Jul 2 11:43:34 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 02 Jul 2009 11:43:34 -0700 Subject: No one is on the tool this morning since 8 AM! Uses are requested to check and honor their coral reservations. Message-ID: <4A4CFFD6.5080701@snf.stanford.edu> *All Users are requested to carefully check their reservations and remove reservations that are either not for themselves or that you will not be utilizing. July is normally one of our busiest periods on the SNF Ebeam systems. All Users are hereby warned that if you do not show up for your scheduled session, or announce to this list your cancellation well in advance, that I will take you off the system for a period yet to be determined by me. I am considering a one month period for every two no show incidents within 90 day period. This recent spate of no show RAITH sessions and the loss of opportunity for others in need of the system is unacceptable period. Will I need to become aggressive in my response to those users in the coming weeks?! Your comments are invited.... James Conway Ebeam Lab * -------------- next part -------------- An HTML attachment was scrubbed... URL: From xutian at stanford.edu Thu Jul 2 12:47:20 2009 From: xutian at stanford.edu (Xu Tian) Date: Thu, 2 Jul 2009 12:47:20 -0700 Subject: Raith reservation released Saturday 1:00-7:00pm References: <4A4CFFD6.5080701@snf.stanford.edu> Message-ID: Sample won't arrive. Xu ----- Original Message ----- From: James Conway To: Raith SNF Mailing list ; Gary Shambat Sent: Thursday, July 02, 2009 11:43 AM Subject: No one is on the tool this morning since 8 AM! Uses are requested to check and honor their coral reservations. All Users are requested to carefully check their reservations and remove reservations that are either not for themselves or that you will not be utilizing. July is normally one of our busiest periods on the SNF Ebeam systems. All Users are hereby warned that if you do not show up for your scheduled session, or announce to this list your cancellation well in advance, that I will take you off the system for a period yet to be determined by me. I am considering a one month period for every two no show incidents within 90 day period. This recent spate of no show RAITH sessions and the loss of opportunity for others in need of the system is unacceptable period. Will I need to become aggressive in my response to those users in the coming weeks?! Your comments are invited.... James Conway Ebeam Lab -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Jul 3 12:32:57 2009 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 3 Jul 2009 12:32:57 -0700 Subject: Shutdown tool load lock belt or gear damaged Message-ID: <7B79B449-A13E-4FEC-B792-2802323D7DD2@gmail.com> This morning we encountered load lock belt issues. We will need to shut down the tool until we can get Raith field service in to replace the belt. I expect to have the system back up Tuesday noon. Thank you James Sent from my iPhone From arkam at stanford.edu Sun Jul 5 14:06:24 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Sun, 5 Jul 2009 14:06:24 -0700 (PDT) Subject: Raith free tomorrow from 6-30 to 12-30 at night Message-ID: <218250727.9860691246827984405.JavaMail.root@zm06.stanford.edu> I wont be able to reach Stanford tomrrow (as my flight got cancelled)..so Raith is free--Sorry for the delay -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From anikak at stanford.edu Tue Jul 7 09:24:10 2009 From: anikak at stanford.edu (Anika Amir Kinkhabwala) Date: Tue, 7 Jul 2009 09:24:10 -0700 (PDT) Subject: 2% PMMA missing Message-ID: <1777117691.9892871246983850849.JavaMail.root@zm03.stanford.edu> I checked a few of the usual places it seems to end up, but I can't find it. It is not in the main solvent cabinets or in the small photolithography resist cabinet. I was basically the only one in the cleanroom earlier this morning, so I don't think it could currently be in use. Please let me know if anyone finds it. Thanks! -Anika From kcbalram at stanford.edu Tue Jul 7 10:24:01 2009 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Tue, 7 Jul 2009 10:24:01 -0700 (PDT) Subject: Raith free from 12:30 - 3:30 Pm Message-ID: <2093237491.10169661246987441497.JavaMail.root@zm06.stanford.edu> From gdiankov at stanford.edu Tue Jul 7 19:04:17 2009 From: gdiankov at stanford.edu (Georgi Diankov) Date: Tue, 7 Jul 2009 19:04:17 -0700 (PDT) Subject: Raith free tonight from 9:30 Message-ID: <1516371067.29145151247018657008.JavaMail.root@zm07.stanford.edu> Sorry for the late notice. From tryon16 at stanford.edu Tue Jul 7 21:11:03 2009 From: tryon16 at stanford.edu (Lark-Hoon Leem) Date: Tue, 7 Jul 2009 21:11:03 -0700 (PDT) Subject: Raith free tomorrow 3:30pm~7:30pm Message-ID: <1870479160.8223311247026263278.JavaMail.root@zm02.stanford.edu> From anikak at stanford.edu Tue Jul 7 21:14:38 2009 From: anikak at stanford.edu (Anika Amir Kinkhabwala) Date: Tue, 7 Jul 2009 21:14:38 -0700 (PDT) Subject: Raith free all night until 11am Message-ID: <1395027971.10122311247026478145.JavaMail.root@zm03.stanford.edu> Switched my time to later in the afternoon From ahazeghi at stanford.edu Tue Jul 7 21:17:24 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 7 Jul 2009 21:17:24 -0700 (PDT) Subject: Raith free tomorrow 3:30pm~7:30pm In-Reply-To: <1870479160.8223311247026263278.JavaMail.root@zm02.stanford.edu> Message-ID: <1172816612.10122581247026644536.JavaMail.root@zm03.stanford.edu> Hi Lark-Hoon, I'd like to take this slot however looks like it belongs to Anikak, are you sure this is your reservation? Thanks, Arash ----- Original Message ----- From: "Lark-Hoon Leem" To: "raith" Sent: Tuesday, July 7, 2009 9:11:03 PM GMT -08:00 US/Canada Pacific Subject: Raith free tomorrow 3:30pm~7:30pm -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Tue Jul 7 21:18:51 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Tue, 7 Jul 2009 21:18:51 -0700 Subject: Raith free all night until 11am In-Reply-To: <1395027971.10122311247026478145.JavaMail.root@zm03.stanford.edu> References: <1395027971.10122311247026478145.JavaMail.root@zm03.stanford.edu> Message-ID: <000f01c9ff83$32a6ca40$97f45ec0$@edu> I took from 8-11am. Thanks. -----Original Message----- From: Anika Amir Kinkhabwala [mailto:anikak at stanford.edu] Sent: Tuesday, July 07, 2009 9:15 PM To: raith at snf.stanford.edu Subject: Raith free all night until 11am Switched my time to later in the afternoon From arkam at stanford.edu Thu Jul 9 07:23:26 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 9 Jul 2009 07:23:26 -0700 (PDT) Subject: problems in raith Message-ID: <2040183574.62101247149406801.JavaMail.root@zm06.stanford.edu> I faced this error message while opening my Raith account.. Digital Pattern Generator failed. Demo mode enabled. Also the vacuum pump takes much longer time to start (compared to before). Arka -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From arkam at stanford.edu Thu Jul 9 07:32:21 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 9 Jul 2009 07:32:21 -0700 (PDT) Subject: more problem Message-ID: <1227061.62731247149941432.JavaMail.root@zm06.stanford.edu> The loading procedure works OK..but then it could not set the voltage to the desired value. Arka -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From jwc at snf.stanford.edu Thu Jul 9 11:33:08 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 09 Jul 2009 11:33:08 -0700 Subject: raith gun alignment problems aligning gun apertures -- resolved In-Reply-To: <2100009651.10727381247071651848.JavaMail.root@zm06.stanford.edu> References: <2100009651.10727381247071651848.JavaMail.root@zm06.stanford.edu> Message-ID: <4A5637E4.9000707@snf.stanford.edu> Hello Raith Users: Over the course of the last three days we have had three or more user reports of having run into this problem. This is likely due to a problem in communication or corruption of the L-REM module which is firmware on the LEO SEM side of the platform. Simply shutting down the PC and restarting the system and launching the LEO application anew resolved this problem. Users whom had simply closed and relaunched the application and/or simply logged out and 'restarted' the Windows 2000 OS were not able to resolve the problem. REMEMBER THAT ON EITHER SIDE OF THE RAITH PLATFORM'S COMPUTERS _ALWAYS SELECT SHUTDOWN _AND NOT RESTART. THIS IS TO CORRECTLY REINITIALIZE THE HARDWARE AND COMMUNICATION INTERFACES S AND REREAD THE FIRMWARE THAT CONTROLS THE HARDWARE ON THE SYSTEM. Thank you for your support! James Conway Yao-Te Cheng wrote: > Hi James, > > I couldn't get a good alignment to the aperture 30um, 10um and 7.5um with 20KV Ebeam this morning. I used to meet this problem before. Everything would be fine after I restarted the computer, but it didn't work this morning. I decided to quit my session. Could you please check the gun alignment with 20KV if you have time? Thank you. > > Best regards, > Yao-Te > -------------- next part -------------- An HTML attachment was scrubbed... URL: From fanpy839 at stanford.edu Thu Jul 9 16:40:18 2009 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Thu, 9 Jul 2009 16:40:18 -0700 Subject: raith free 5am-8am tomorrow Message-ID: <200907091640186713940@stanford.edu> sample not ready 2009-07-09 Pengyu Fan PhD student, Materials Science & Engineering, Stanford University, Stanford, CA BS in Physics 2008, School of Physics, Peking University, Beijing, China -------------- next part -------------- An HTML attachment was scrubbed... URL: From bryane at stanford.edu Fri Jul 10 15:40:48 2009 From: bryane at stanford.edu (Bryan Christopher Ellis) Date: Fri, 10 Jul 2009 15:40:48 -0700 (PDT) Subject: Raith free Monday 8am-1pm Message-ID: <1764492274.8748101247265648301.JavaMail.root@zm02.stanford.edu> Sample is not ready. Bryan From xiangyuc at stanford.edu Sat Jul 11 16:54:07 2009 From: xiangyuc at stanford.edu (Xiangyu Chen) Date: Sat, 11 Jul 2009 16:54:07 -0700 (PDT) Subject: Raith release Sun 10:30pm to Mon 1:30am Message-ID: <1178612520.8451971247356447687.JavaMail.root@zm01.stanford.edu> Samples won't be ready. From ahazeghi at stanford.edu Mon Jul 13 11:02:59 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 13 Jul 2009 11:02:59 -0700 Subject: Reservation deleted from 12-13 Message-ID: <001d01ca03e4$2860cda0$792268e0$@edu> Sample will not come out of litho on time. Arash Hazeghi PhD Candidate Paul G Allen Center for Integrated Systems, CIS-X 300 420 Via Palou Mall, Stanford, CA 94305 Phone:+1-650-725-0418 Cell:+1-650-353-1866 web: www.stanford.edu/~ahazeghi http://nano.stanford.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From hailiang at stanford.edu Mon Jul 13 13:01:43 2009 From: hailiang at stanford.edu (Hailiang Wang) Date: Mon, 13 Jul 2009 13:01:43 -0700 (PDT) Subject: Raith free today 9pm to midnight Message-ID: <1990045737.581351247515303868.JavaMail.root@zm06.stanford.edu> Sorry for the late notice From leoyu at stanford.edu Tue Jul 14 09:46:03 2009 From: leoyu at stanford.edu (Leo Yu) Date: Tue, 14 Jul 2009 09:46:03 -0700 (PDT) Subject: RAITH free 1100-1400 Message-ID: <1783863167.11122381247589963002.JavaMail.root@zm03.stanford.edu> Sample won't be ready due to failure of upstream equipment. Sorry for the late notice. From ytcheng at stanford.edu Tue Jul 14 09:50:58 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Tue, 14 Jul 2009 09:50:58 -0700 Subject: RAITH free 1100-1400 In-Reply-To: <1783863167.11122381247589963002.JavaMail.root@zm03.stanford.edu> References: <1783863167.11122381247589963002.JavaMail.root@zm03.stanford.edu> Message-ID: <000001ca04a3$436540d0$ca2fc270$@edu> Taken. Thanks. -----Original Message----- From: Leo Yu [mailto:leoyu at stanford.edu] Sent: Tuesday, July 14, 2009 9:46 AM To: raith Subject: RAITH free 1100-1400 Sample won't be ready due to failure of upstream equipment. Sorry for the late notice. From ytcheng at stanford.edu Tue Jul 14 09:52:20 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Tue, 14 Jul 2009 09:52:20 -0700 Subject: RAITH free 7:30am-10am In-Reply-To: <000001ca04a3$436540d0$ca2fc270$@edu> References: <1783863167.11122381247589963002.JavaMail.root@zm03.stanford.edu> <000001ca04a3$436540d0$ca2fc270$@edu> Message-ID: <000101ca04a3$744771a0$5cd654e0$@edu> Got a session this morning and cancel my reservation tomorrow. -----Original Message----- From: Yao-Te Cheng [mailto:ytcheng at stanford.edu] Sent: Tuesday, July 14, 2009 9:51 AM To: 'raith' Subject: RE: RAITH free 1100-1400 Taken. Thanks. -----Original Message----- From: Leo Yu [mailto:leoyu at stanford.edu] Sent: Tuesday, July 14, 2009 9:46 AM To: raith Subject: RAITH free 1100-1400 Sample won't be ready due to failure of upstream equipment. Sorry for the late notice. From dalyx at stanford.edu Tue Jul 14 14:47:29 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Tue, 14 Jul 2009 14:47:29 -0700 (PDT) Subject: Took 3:30pm to 4:30pm today Message-ID: <174262464.11189681247608049751.JavaMail.root@zm03.stanford.edu> Took open slot from 3:30pm to 4:30pm. Thanks, Dany From dalyx at stanford.edu Tue Jul 14 16:59:33 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Tue, 14 Jul 2009 16:59:33 -0700 (PDT) Subject: Releasing ~5:45pm to 7:30pm Message-ID: <1197950402.11216441247615973687.JavaMail.root@zm03.stanford.edu> Started early, (will) finish early. Dany From arkam at stanford.edu Wed Jul 15 07:59:01 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Wed, 15 Jul 2009 07:59:01 -0700 (PDT) Subject: Raith free till 10 Message-ID: <1494868530.907521247669941718.JavaMail.root@zm06.stanford.edu> There is some problem with my chip. I cannot coat resist on it. So Cannot write. Sorry for the late notice -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From bryane at stanford.edu Wed Jul 15 11:56:21 2009 From: bryane at stanford.edu (Bryan Christopher Ellis) Date: Wed, 15 Jul 2009 11:56:21 -0700 (PDT) Subject: Raith free 1-3pm Message-ID: <1372939914.9384491247684181776.JavaMail.root@zm02.stanford.edu> I will be done early and will not need the final 2 hours of my time. Bryan From arkam at stanford.edu Thu Jul 16 08:57:43 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 16 Jul 2009 08:57:43 -0700 (PDT) Subject: Free till 10, finished early Message-ID: <290885319.1086711247759863052.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From jwc at snf.stanford.edu Thu Jul 16 10:09:52 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 16 Jul 2009 10:09:52 -0700 Subject: ANNOUNCEMENT: POZZETTA PRODUCTS PRESENTATION -- FRIDAY JULY 17, 2009 from 10 -11 AM in ALLEN 101 (formerly CIS 101) Message-ID: <4A5F5EE0.1080104@snf.stanford.edu> Good Morning Lab Members: I have invited Artemis Vasiliades to visit Stanford tomorrow for an exchange of information regarding process and storage cassettes as we seek solutions to handle and process our smaller and more fragile GaAs and thinned Fused Silica (Quartz) substrates often used in the Ebeam Lab. I know that many of you are processing by hand what we could possibly be batch processing in cassettes for a cleaner and higher quality processing result. Users with odd shaped and sized substrates are especially encouraged to bring drawings or actual samples of their substrates to this meeting. Ms. Vasiliades will also bring several product samples that may be useful for your work here at SNF. All interested parties are welcome to attend! Thank you for attending this session, James Conway Stanford Nanofabrication Facility *Artemis Vasiliades* Account Executive Pozzetta Products, Inc Direct: 303-783-7926 artemis at pozzetta.com For product updates and news follow Pozzetta on Twitter http://twitter.com/photomask -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/png Size: 346436 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Stanford Boiler Plate.pdf Type: application/pdf Size: 237595 bytes Desc: not available URL: From ytcheng at stanford.edu Sat Jul 18 00:30:41 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Sat, 18 Jul 2009 00:30:41 -0700 Subject: raith free 9:30am-1pm Sat. Message-ID: <001a01ca0779$a7c1e5a0$f745b0e0$@edu> Sample is not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Sat Jul 18 21:10:36 2009 From: krivoire at stanford.edu (Kelley Rivoire) Date: Sat, 18 Jul 2009 21:10:36 -0700 (PDT) Subject: raith free from midnight Message-ID: <2045295610.10013641247976636369.JavaMail.root@zm02.stanford.edu> I got sick a couple of hours ago, so I am canceling my reservation. Kelley From xiangyuc at stanford.edu Mon Jul 20 11:54:29 2009 From: xiangyuc at stanford.edu (Xiangyu Chen) Date: Mon, 20 Jul 2009 11:54:29 -0700 (PDT) Subject: Finish early. Raith free until 1pm Message-ID: <1849844930.9614861248116069226.JavaMail.root@zm01.stanford.edu> Change of plan. So...finished early. From dalyx at stanford.edu Mon Jul 20 19:21:12 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Mon, 20 Jul 2009 19:21:12 -0700 (PDT) Subject: RAITH free from 8am to 10am tomorrow Message-ID: <1393054665.12053941248142872355.JavaMail.root@zm03.stanford.edu> Change of plans. Enjoy! Dany From jwc at snf.stanford.edu Tue Jul 21 10:05:00 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 21 Jul 2009 10:05:00 -0700 Subject: Announcement -- Ebeam Lab Town Hall Meeting This THURSDAY 3 - 4:30 PM CIS 201 SPECIAL SPEAKER Paul Rissman on Exposure Proximity Correction Methods. Message-ID: <4A65F53C.9000802@snf.stanford.edu> Good Morning Ebeam Lab Users: My apologizes for this short notice, previously queued email announcements evidently failed last week when the servers went off-line. Ebeam Town Hall Meeting Announcement: THIS Thursday July 23, 2009 from 3:00 to 4:30 PM we will be holding an Ebeam Town Hall Meeting for all interested SNF Ebeam Labs Users in CIS 201 The agenda is open and will close at 6 PM tomorrow. Ebeam Town Hall Meeting Agenda: 1. Discussion on Ebeam Lab Policies in place with proposed changes, additions, or deletions to our lab policies... 10 minutes -fast review of the reservation and equipment usage policies for the Ebeam tools. 2. SPECIAL SPEAKER: PAUL RISSMAN --- 45 + 15 minutes for Q&A. Paul Rissman will give a presentation on details of Electron Beam Exposure Proximity Correction methodologies. Paul has a wealth of experience in this area having modeled and developed methods for EPC since the early 1990's. He will show examples of several modeling and EPC design tools results. 3. Additional Items To-Be-Added -- 20 minutes. It is hoped that all Ebeam Lab members will be able to attend and add to these discussions. Thank you for your support, James Conway Ebeam Lab Stanford Nanofabrication Facility -------------- next part -------------- An HTML attachment was scrubbed... URL: From fanpy839 at stanford.edu Tue Jul 21 18:17:51 2009 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Tue, 21 Jul 2009 17:17:51 -0800 Subject: zep520 questions Message-ID: <200907211717499846436@stanford.edu> Hi All, I have been using zep520 (~250nm thickness). My pattern involves 100nm-1000nm wide areas to be exposed with 200nm separation in between. I have tried exposure dose from 35-40uC/cm^2 @10keV. After development, I could only identify the separation between 100nm wide patterns. For wider patterns, the 200nm separations between them just disappear and the exposed areas look like having merged into a whole big pad. Is this due to proximity effect? Do you have any advice and tips (such as a smaller dose overall or applying the proximity correction software on raith)? Thank you very much and I would really appreciate your replies! Best, Pengyu 2009-07-21 Pengyu Fan PhD student, Materials Science & Engineering, Stanford University, Stanford, CA BS in Physics 2008, School of Physics, Peking University, Beijing, China -------------- next part -------------- An HTML attachment was scrubbed... URL: From arkam at stanford.edu Thu Jul 23 07:17:42 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 23 Jul 2009 07:17:42 -0700 (PDT) Subject: raith free till 8--finished early Message-ID: <959830488.2111491248358662126.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From dlee76 at stanford.edu Thu Jul 23 13:40:05 2009 From: dlee76 at stanford.edu (Donkoun Lee) Date: Thu, 23 Jul 2009 13:40:05 -0700 Subject: Release from 14:00 to 17:30 Message-ID: Hi. My samples turn out to be bad for the e-beam process. Sorry for the late notice. Don -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From jwc at snf.stanford.edu Thu Jul 23 13:54:50 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 23 Jul 2009 13:54:50 -0700 Subject: REMINDER EBEAM LAB TOWN HALL MEETING -- THURSDAY JULY 23, 2009 3:00 - 4:30 pm CIS 201 Message-ID: <4A68CE1A.9020307@snf.stanford.edu> Nano-bowtie written using FIB on a RAITH IonLINE by Anika Kinkhabwala Ebeam Town Hall Meeting Announcement: TODAY Thursday July 23, 2009 from 3:00 to 4:30 PM we will be holding an Ebeam Town Hall Meeting for all interested SNF Ebeam Labs Users in CIS 201 1. Discussion on Ebeam Lab Policies in place with proposed changes, additions, or deletions to our lab policies... 10 minutes -fast review of the reservation and equipment usage policies for the Ebeam tools. 2. SPECIAL SPEAKER: PAUL RISSMAN --- 45 + 15 minutes for Q&A. Paul Rissman will give a presentation on details of Electron Beam Exposure Proximity Correction methodologies. Paul has a wealth of experience in this area having modeled and developed methods for EPC since 1979. He will show examples of several modeling and EPC design tools results. It is hoped that all Ebeam Lab members will be able to attend and add to these discussions! Thank you for your support! James Conway Stanford Nanofabrication Facility -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 34334 bytes Desc: not available URL: From fanpy839 at stanford.edu Fri Jul 24 07:09:43 2009 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Fri, 24 Jul 2009 07:09:43 -0700 (PDT) Subject: universal sample holder In-Reply-To: <1790027324.10517831248444321580.JavaMail.root@zm01.stanford.edu> Message-ID: <1370072994.10517961248444583265.JavaMail.root@zm01.stanford.edu> Hi All, Just a quick reminder to whoever has been using the universal sample holder, recently I have noticed twice that the holder was incorrectly placed in the pallet.You might notice that there is a pin on the backside of the holder and a hole on the pallet, so the holder should only sit onto the pallet in one way, otherwise you'll leave the holder hanging onto its edge. Thanks a lot! Best, Pengyu From raneeyoo at stanford.edu Fri Jul 24 18:56:45 2009 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Fri, 24 Jul 2009 18:56:45 -0700 (PDT) Subject: raith is free until 8pm Message-ID: <413907059.2387671248487005505.JavaMail.root@zm06.stanford.edu> I finished it early. There was a loadlock pumping error during unloading process. With Donkoun's help, it was OK after clearing turbo pump error. thanks, Kyeongran From xiangyuc at stanford.edu Fri Jul 24 21:57:47 2009 From: xiangyuc at stanford.edu (Xiangyu Chen) Date: Fri, 24 Jul 2009 21:57:47 -0700 (PDT) Subject: Raith free until 2300 Message-ID: <1829194575.10671731248497867860.JavaMail.root@zm01.stanford.edu> Finish early. From dalyx at stanford.edu Sat Jul 25 10:26:42 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Sat, 25 Jul 2009 10:26:42 -0700 (PDT) Subject: Raith free noon - 1pm Message-ID: <465208564.12761461248542802404.JavaMail.root@zm03.stanford.edu> Not ready. From kcbalram at stanford.edu Sat Jul 25 10:44:25 2009 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sat, 25 Jul 2009 10:44:25 -0700 (PDT) Subject: Raith free from 1 to 4:30 PM Message-ID: <1344597622.2416471248543865394.JavaMail.root@zm06.stanford.edu> I am sorry for the late notice Krishna From jwc at snf.stanford.edu Wed Jul 29 09:28:43 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 29 Jul 2009 09:28:43 -0700 Subject: Cancelled all my raith sessions the week of August 10 - 14, 2009 will be away from the office that week. Message-ID: <4A7078BB.5040401@snf.stanford.edu> An HTML attachment was scrubbed... URL: From fanpy839 at stanford.edu Wed Jul 29 11:16:40 2009 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Wed, 29 Jul 2009 11:16:40 -0700 (PDT) Subject: session starting on Friday 1am released Message-ID: <1689772474.11306091248891400147.JavaMail.root@zm01.stanford.edu> Sample wont be ready in time. Sorry. From jwc at snf.stanford.edu Fri Jul 31 09:33:50 2009 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 31 Jul 2009 09:33:50 -0700 Subject: zep 520 In-Reply-To: <200907301514451566762@stanford.edu> References: <200907301514451566762@stanford.edu> Message-ID: <4A731CEE.7090806@snf.stanford.edu> I will check our inventory, we normally have another bottle in the stock room refrigerator. I will order more if needed to ensure a continuous supply. It economizes resist usage if you spin up a batch of wafers at once and not just individual wafers or pieces. I normally apply 1 - 2 ml / 100 mm wafer and obtain excellent results. If you desire thinner ZEP films on the order of 100 nm instead of the spec 240 - 260 nm thickness consider using the 1:1 ZEP: Anisole mixture. Thank you, James Conway Pengyu Fan wrote: > Hi James, > It looks like that we are about to run out of Zep 520 soon. I'm just > wondering where to purchase this resist since I might be using it a > lot in my following processes. > Best, > Pengyu > 2009-07-30 > ------------------------------------------------------------------------ > Pengyu Fan > PhD student, Materials Science & Engineering, Stanford University, > Stanford, CA > BS in Physics 2008, School of Physics, Peking University, Beijing, China -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jul 31 09:48:01 2009 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 31 Jul 2009 09:48:01 -0700 Subject: Current Lot of ESPACER has been tested this week and is working fine. Message-ID: <4A732041.5070606@snf.stanford.edu> Greetings Ebeam and RAITH Communities: I have had several users working with me through the course of the last few weeks that had reported either problems in charge compensation or poor contrast when imaging SOI and LTO Oxides over their target features during Ebeam sessions. All of these persons were attempting overlay target acquisition for second layer EBL writing. There had been concerns due to the fact that several weeks ago the material was left out and allowed to warm to room temperature over the weekend. This week Jamal Moline, Kyeongran Yoo, and I tested the current batch of ESPACER 300Z and found no problems with the solution. We tried 3000 rpm for 40 seconds with no post bake resulting in a sub-50 nm thin film. I also worked with a Quartz substrate spinning at 5000 rpm/ 40 seconds and a 90 second 90 degree C bake. This film was very thin, maybe a bit too thin on the extreme edges, and did not cover all mesa and raised target features on the substrate. However in imaging and EBL writing I encountered normal contrast and only the slightest of sample surface charge up during high magnification imaging. Please be frugal with this very expensive engineering material. Please dispense from syringes only and never pour directly from the bottle onto your wafer. Currently I am using 15 drops per 100 mm wafer and obtain complete coverage with suitable uniformity. Finally please make a personal effort to maintain this material at refrigerator temperatures (~5 degrees C.) Thank You for your interest in Ebeam Technologies here at Stanford Nanofabrication Facility. James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jul 31 09:59:24 2009 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 31 Jul 2009 09:59:24 -0700 Subject: share a ride on this Friday 10am-2pm? In-Reply-To: <686086399.3194471248978481152.JavaMail.root@zm07.stanford.edu> References: <686086399.3194471248978481152.JavaMail.root@zm07.stanford.edu> Message-ID: <4A7322EC.2010905@snf.stanford.edu> If you could please inform me of specific incidents I will be very firm with their entire group. James Georgi Diankov wrote: > Hi James, > > Can you please remind people not to delete the reservations they have just used in order to get more time for future reservations? I see this happening a lot recently. > > Thanks. See you in 1 hour. > > Georgi > > ----- Original Message ----- > From: "James Conway" > To: "Kyeongran Yoo" , "Georgi Diankov" > Sent: Thursday, July 30, 2009 9:05:29 AM GMT -08:00 US/Canada Pacific > Subject: Re: share a ride on this Friday 10am-2pm? > > This is your reminder that we are working together today along with Georgi Danikov in the same session on the RAITH system from 1 - 6 PM in the Ebeam Lab. We meet at 12 - 1:15 and load at 1:15 so don't be late.... > > James > > Kyeongran Yoo wrote: > > Dear James, > > On last Friday, my overlay run did not go well. > Can I share a ride with you on this Friday? > Please let me know. > > Many thanks, > Kyeongran ^__^ > -------------- next part -------------- An HTML attachment was scrubbed... URL: