From barnarde at stanford.edu Mon Mar 2 09:50:59 2009 From: barnarde at stanford.edu (Edward Barnard) Date: Mon, 2 Mar 2009 09:50:59 -0800 Subject: Raith free tomorrow 0800-1200 Message-ID: <6FD0409F-F026-48D1-A9C9-08DC75CE54C7@stanford.edu> Edward Barnard Dept. of Mat. Sci. and Eng. Stanford University (650) 796-9301 http://brongersma.stanford.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From yiyangg at stanford.edu Tue Mar 3 00:35:25 2009 From: yiyangg at stanford.edu (Yiyang Gong) Date: Tue, 03 Mar 2009 00:35:25 -0800 Subject: water flow failure Message-ID: <49ACEBCD.7060403@stanford.edu> Hi everyone, I put a note on coral earlier, but this is another report of the water flow failing on and off for the last hour. The system can probably load, but will not run very long. Yiyang From xutian at stanford.edu Tue Mar 3 12:06:56 2009 From: xutian at stanford.edu (Xu Tian) Date: Tue, 3 Mar 2009 12:06:56 -0800 (PST) Subject: Vacuum in stage chamber is not ready In-Reply-To: <49ACEBCD.7060403@stanford.edu> Message-ID: <1467796337.1516431236110816720.JavaMail.root@zm02.stanford.edu> When I start the "load sample" procedure, there is a pop up error message "Vacuum in stage chamber is not ready, press Ok when ready" I can not begin the loading. Xu Tian ----- Original Message ----- From: "Yiyang Gong" To: "Raith SNF Mailing list" Sent: Tuesday, March 3, 2009 12:35:25 AM GMT -08:00 US/Canada Pacific Subject: water flow failure Hi everyone, I put a note on coral earlier, but this is another report of the water flow failing on and off for the last hour. The system can probably load, but will not run very long. Yiyang From ytcheng at stanford.edu Thu Mar 5 16:05:20 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Thu, 5 Mar 2009 16:05:20 -0800 Subject: raith free 9:30am-12:30pm Saturday Message-ID: <005801c99def$3d272550$b7756ff0$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Fri Mar 6 08:56:04 2009 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 6 Mar 2009 08:56:04 -0800 Subject: Will start my raith at 9:30am Message-ID: <20090306165602.C481B3B69E7@smtp5.stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From leoyu at stanford.edu Sat Mar 7 17:58:10 2009 From: leoyu at stanford.edu (Leo Yu) Date: Sat, 7 Mar 2009 17:58:10 -0800 (PST) Subject: Raith tomorrow 1000-1130 Message-ID: <1718323118.1941131236477490127.JavaMail.root@zm03.stanford.edu> Sample not prepared. Sorry for the late notice. From arkam at stanford.edu Sat Mar 7 20:25:41 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Sat, 7 Mar 2009 20:25:41 -0800 (PST) Subject: raith free till 9-30 Message-ID: <394609020.1990251236486341726.JavaMail.root@zm06.stanford.edu> finished early Arka -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From arkam at stanford.edu Tue Mar 10 18:11:09 2009 From: arkam at stanford.edu (Arka Majumdar) Date: Tue, 10 Mar 2009 18:11:09 -0700 (PDT) Subject: Raith free till 8 pm Message-ID: <1388179464.2562401236733869073.JavaMail.root@zm06.stanford.edu> Finished early -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From jwc at snf.stanford.edu Wed Mar 11 17:44:17 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 11 Mar 2009 16:44:17 -0800 Subject: JWC is finished earlier than was expected the system is available for next user or anyone wishing to come onto the system. Message-ID: <49B85AE1.9060708@snf.stanford.edu> JWC is finished earlier than was expected the system is available for next user or anyone wishing to come onto the system. James -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Wed Mar 11 16:49:32 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 11 Mar 2009 16:49:32 -0700 (PDT) Subject: JWC is finished earlier than was expected the system is available for next user or anyone wishing to come onto the system. In-Reply-To: <49B85AE1.9060708@snf.stanford.edu> Message-ID: <1832859947.2786001236815372361.JavaMail.root@zm03.stanford.edu> I will use the remainder of James's session Thanks, Arash ----- Original Message ----- From: "James Conway" To: "Li Zhang" , "Xinran Wang" , "Raith SNF Mailing list" Sent: Wednesday, March 11, 2009 5:44:17 PM GMT -08:00 US/Canada Pacific Subject: JWC is finished earlier than was expected the system is available for next user or anyone wishing to come onto the system. JWC is finished earlier than was expected the system is available for next user or anyone wishing to come onto the system. James -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangli at stanford.edu Wed Mar 11 16:59:58 2009 From: zhangli at stanford.edu (Li Zhang) Date: Wed, 11 Mar 2009 16:59:58 -0700 (PDT) Subject: raith free from 6pm today Message-ID: <763751477.2788731236815998617.JavaMail.root@zm03.stanford.edu> Sorry for the late notice. My sample broke at the last minute. Li From panjun at stanford.edu Thu Mar 12 09:47:50 2009 From: panjun at stanford.edu (Jun Pan) Date: Thu, 12 Mar 2009 09:47:50 -0700 (PDT) Subject: i will use Hailiang's slot Message-ID: <1918034650.2924411236876470516.JavaMail.root@zm06.stanford.edu> i'll use Hailiang's slot From jwc at snf.stanford.edu Thu Mar 12 14:02:23 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 12 Mar 2009 13:02:23 -0800 Subject: Starting my session at 1:40 to 2:00 PM JWC Message-ID: <49B9785F.2010707@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Mar 13 11:12:01 2009 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 13 Mar 2009 10:12:01 -0800 Subject: ANNOUNCEMENT: Raith Group XXXVI - Intensive Four Day Short Course for Basic Users Tuesday to Friday March 17th to 20th, 2009 10 AM to 6 PM Message-ID: <49BAA1F1.2000205@snf.stanford.edu> *Greetings RAITH Group XXXVI: ** If you are listed in the To: section of this email you are confirmed to be in RAITH Group** XXXVI -- the next RAITH** Four Day Basic User Short Course. If you are listed in the CC: section of this email, I am** still ** in need of further information or a commitment from you and I hope to add you in the next class if you cannot attend these sessions. Any RAITH users wishing to attend are welcome if you desire a review of operations on the RAITH 150 system. ** We wish to invite all interested parties to the Tuesday morning lecture session from 10:00 AM - 12:30 PM, and the following Demo Layer One training from 2 PM - 6 PM in the afternoon. All are also welcome to attend as observers the other 'Hands-On' sessions through the week. * *If you are listed in the To: section of this email: *This is your first reminder and confirmation of your commitment for attending the RAITH Group XXXVI Training course to March 17 to 20, 2009. You must have completed the prerequisite ALL LITHO and SEM training in order to attend as a participant. Otherwise you may attend as an Observer. _*You are expected to attend all sessions in order to gain the experience and skills you will need to qualify on the RAITH 150 system.* _Users are also encouraged to attend the *"Take a Spin with Me"* class covering Ebeam Resist handling procedures. I am next holding this class on Tuesday March 24th, 2009 from 10:15 - 12:30 PM. Thank you for your interest in Electron Beam Technologies at the Stanford Nanofabrication Facility, James Conway Ebeam Technology Group 650-725-7075 --------------------------------- * **RAITH Group** XXXVI **Schedule: ** * *Raith 150 Basic Users Training -- Intensive 4 Day Short Course* *March 17 to 20, 2009 from 10 - 6 PM Tuesday through Friday.* *The Plan of Action: *We will start out with a half day of lecture in the morning Tuesday; quickly moving into entirely 'hands on' operations training through the remainder of the week. We will break for lunch at various times, while the system is writing, so plan to be flexible with your other outside commitments. You should have started working on your GDS II patterns and preparing PMMA on your substrates if you wish to write on your material. Please bring your patterns and materials to the 'Hands-On' sessions. Some afternoons we may also be able to finish earlier, letting the system write on its own to the end of our reservations on the system.* * * Schedule:* Tuesday March 17, 2009: 10:00 - 12:30 Session 1: Basic Users Course Lecture -- CIS - 201 14:00 - 18:00 Session 2: RAITH System Demonstration - Layer One -- EBEAM LAB CIS L104 Wednesday March 18, 2009: 10:00 - 12:30 Session 3: RAITH System Demonstration - Layer Two: OVERLAY Layer 1 to Layer 2 registration -- EBEAM LAB CIS L104 14:00 - 18:00 Session 4: Hands On training session One -- EBEAM LAB CIS L104 Thursday March 19, 2009: 10:00 - 12:30 Session 5: Hands On training session Two -- EBEAM LAB CIS L104 14:00 - 18:00 Session 6: Hands On training session Three -- EBEAM LAB CIS L104 Friday March 20, 2009 10:00 - 12:30 Session 7: Hands On training session Four -- EBEAM LAB CIS L104 14:00 - 16:00 Session 8: Hands On training session Five -- EBEAM LAB CIS L104 Individual Qualification Sessions will be held after this class where you can demonstrate your skill on the system to me and gain your login to the system. I CAN PROVIDE A CD AND PRINTED MATERIALS AT THE FIRST MEETING, IF YOU HAVE NOT ALREADY RECEIVED ONE YET. James W. Conway Stanford Nanofabrication Facility Stanford University 650-725-7075 -- 415-412-4825 jwc at snf.stanford.edu * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Fri Mar 13 17:17:52 2009 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 13 Mar 2009 17:17:52 -0700 Subject: Raith free 5-7:30pm Saturday Message-ID: <20090314001753.0A113170843@smtp1.stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jesselu at stanford.edu Mon Mar 16 09:06:07 2009 From: jesselu at stanford.edu (Jesse Lu) Date: Mon, 16 Mar 2009 09:06:07 -0700 (PDT) Subject: 11am-1230pm free today Message-ID: <474046454.3835671237219567069.JavaMail.root@zm01.stanford.edu> sorry for late notice From dalyx at stanford.edu Mon Mar 16 11:40:20 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Mon, 16 Mar 2009 11:40:20 -0700 (PDT) Subject: 11am-1230pm free today In-Reply-To: <474046454.3835671237219567069.JavaMail.root@zm01.stanford.edu> Message-ID: <748362388.3614071237228820126.JavaMail.root@zm03.stanford.edu> I'll take it. Dany ----- Original Message ----- From: "Jesse Lu" To: raith at snf.stanford.edu Sent: Monday, March 16, 2009 9:06:07 AM GMT -08:00 US/Canada Pacific Subject: 11am-1230pm free today sorry for late notice From zhangli at stanford.edu Mon Mar 16 12:49:00 2009 From: zhangli at stanford.edu (Li Zhang) Date: Mon, 16 Mar 2009 12:49:00 -0700 (PDT) Subject: will start my session from 1:30pm Message-ID: <1543933057.3630731237232940959.JavaMail.root@zm03.stanford.edu> The sample preparation takes longer than expected. Will start my session from 1:30pm. From jwc at snf.stanford.edu Mon Mar 16 15:22:24 2009 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 16 Mar 2009 14:22:24 -0800 Subject: Creating a Raith community at Stanford Message-ID: <49BED120.3050102@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Mar 17 11:03:36 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 17 Mar 2009 10:03:36 -0800 Subject: Shutdown raith SNF 2009-03-17 09:11:52: water pump problems Message-ID: <49BFE5F8.3050502@snf.stanford.edu> An HTML attachment was scrubbed... URL: From krivoire at stanford.edu Tue Mar 17 20:28:21 2009 From: krivoire at stanford.edu (Kelley Rivoire) Date: Tue, 17 Mar 2009 20:28:21 -0700 (PDT) Subject: raith free until 11 pm In-Reply-To: <1908843602.4912881237346881807.JavaMail.root@zm02.stanford.edu> Message-ID: <1962460184.4912971237346901358.JavaMail.root@zm02.stanford.edu> finished my session early. Kelley From ahazeghi at stanford.edu Tue Mar 17 20:30:35 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 17 Mar 2009 20:30:35 -0700 (PDT) Subject: raith free until 11 pm In-Reply-To: <1962460184.4912971237346901358.JavaMail.root@zm02.stanford.edu> Message-ID: <203612420.3946431237347035649.JavaMail.root@zm03.stanford.edu> I will take it Thanks, Arash ----- Original Message ----- From: "Kelley Rivoire" To: raith at snf.stanford.edu Sent: Tuesday, March 17, 2009 8:28:21 PM GMT -08:00 US/Canada Pacific Subject: raith free until 11 pm finished my session early. Kelley -------------- next part -------------- An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Wed Mar 18 13:49:33 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 18 Mar 2009 13:49:33 -0700 Subject: RAITH available tonight from 9:30 to midnight Message-ID: <00ad01c9a80b$0aa5e280$1ff1a780$@edu> I found time on the tool yesterday, don't need my tonight's session. Arash ---------------------------------------------------------------------------- ------ Arash Hazeghi PhD Candidate Stanford Center for Integrated Systems CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305 phone: +1-650-725-0418 web: http://www.stanford.edu/~ahazeghi -------------- next part -------------- An HTML attachment was scrubbed... URL: From dalyx at stanford.edu Thu Mar 19 19:41:44 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Thu, 19 Mar 2009 19:41:44 -0700 (PDT) Subject: RAITH free 10pm to 11pm tonight Message-ID: <861686154.4308081237516904945.JavaMail.root@zm03.stanford.edu> Samples not ready. Dany From dalyx at stanford.edu Sat Mar 21 11:53:35 2009 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Sat, 21 Mar 2009 11:53:35 -0700 (PDT) Subject: RAITH free from now til 1pm. Message-ID: <913664726.4506281237661615698.JavaMail.root@zm03.stanford.edu> Done early. Dany From krivoire at stanford.edu Sun Mar 22 16:02:14 2009 From: krivoire at stanford.edu (Kelley Rivoire) Date: Sun, 22 Mar 2009 16:02:14 -0700 (PDT) Subject: raith free 5pm-10pm today Message-ID: <694311910.5640511237762934130.JavaMail.root@zm02.stanford.edu> sorry for late notice--sample did not work out. Kelley From mrjpark at stanford.edu Tue Mar 24 00:18:34 2009 From: mrjpark at stanford.edu (Joong Sun Park) Date: Tue, 24 Mar 2009 00:18:34 -0700 Subject: Liftoff recipe for maN2403 Message-ID: Hi Raith group, I'm just wondering whether someone knows the liftoff recipe for maN2403 resist. I will deposit 80nm platinum with innotec. Thanks in advance. Joongsun From ahazeghi at stanford.edu Tue Mar 24 00:21:38 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 24 Mar 2009 00:21:38 -0700 Subject: FW: Liftoff recipe for maN2403 Message-ID: <001b01c9ac51$2beb9e40$83c2dac0$@edu> Joogsun, Spin MaN 2403 @ 2500 rpm for ~ 4000A thickness, lift off in Remover PG @ 60-70C. Time depends on the total opening area you have and it is specific to your patterns, it can take from 10 minutes to 1 hr. Best, Arash -----Original Message----- From: Joong Sun Park [mailto:mrjpark at stanford.edu] Sent: Tuesday, March 24, 2009 12:19 AM To: raith at snf.stanford.edu Subject: Liftoff recipe for maN2403 Hi Raith group, I'm just wondering whether someone knows the liftoff recipe for maN2403 resist. I will deposit 80nm platinum with innotec. Thanks in advance. Joongsun From xinranw at stanford.edu Tue Mar 24 08:17:58 2009 From: xinranw at stanford.edu (Xinran Wang) Date: Tue, 24 Mar 2009 08:17:58 -0700 (PDT) Subject: raith free tonight 10:30 Message-ID: <1142968402.4784111237907878587.JavaMail.root@zm06.stanford.edu> I finished my exposure just now, don't need the session any more. Thanks, Xinran From jwc at snf.stanford.edu Tue Mar 24 13:36:59 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 24 Mar 2009 12:36:59 -0800 Subject: Liftoff recipe for maN2403 In-Reply-To: References: Message-ID: <49C9446B.1050709@snf.stanford.edu> Normally negative tone materials are not employed for lift off metallization as that they normally have a vertical resist profile and not one with a undercut suitable for metal liftoff. See me during my office hour is you need more information. James Conway Joong Sun Park wrote: > Hi Raith group, > I'm just wondering whether someone knows the liftoff recipe for > maN2403 resist. > I will deposit 80nm platinum with innotec. > Thanks in advance. > > Joongsun > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangli at stanford.edu Wed Mar 25 18:41:08 2009 From: zhangli at stanford.edu (Li Zhang) Date: Wed, 25 Mar 2009 18:41:08 -0700 (PDT) Subject: raith free now to 8pm Message-ID: <1885940263.5022971238031668089.JavaMail.root@zm03.stanford.edu> finished early Li From ahazeghi at stanford.edu Wed Mar 25 18:41:51 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 25 Mar 2009 18:41:51 -0700 Subject: raith free now to 8pm In-Reply-To: <1885940263.5022971238031668089.JavaMail.root@zm03.stanford.edu> References: <1885940263.5022971238031668089.JavaMail.root@zm03.stanford.edu> Message-ID: <002901c9adb4$090daee0$1b290ca0$@edu> I am taking it -----Original Message----- From: Li Zhang [mailto:zhangli at stanford.edu] Sent: Wednesday, March 25, 2009 6:41 PM To: raith at snf.stanford.edu Subject: raith free now to 8pm finished early Li From yiyangg at stanford.edu Wed Mar 25 21:31:15 2009 From: yiyangg at stanford.edu (Yiyang Gong) Date: Wed, 25 Mar 2009 21:31:15 -0700 Subject: raith free Thursday 9am session Message-ID: <49CB0513.6030207@stanford.edu> User Jesse Lu has canceled session, but can't remove it on coral. Feel free to use. From bdai at stanford.edu Wed Mar 25 21:56:16 2009 From: bdai at stanford.edu (Bing Dai) Date: Wed, 25 Mar 2009 21:56:16 -0700 (PDT) Subject: raith free Thursday 9am session In-Reply-To: <379997333.5060951238043337438.JavaMail.root@zm06.stanford.edu> Message-ID: <61273478.5060991238043376755.JavaMail.root@zm06.stanford.edu> I'll take the session. Thanks! Bing ----- Original Message ----- From: "Yiyang Gong" To: raith at snf.stanford.edu Sent: Wednesday, March 25, 2009 9:31:15 PM GMT -08:00 US/Canada Pacific Subject: raith free Thursday 9am session User Jesse Lu has canceled session, but can't remove it on coral. Feel free to use. From jwc at snf.stanford.edu Thu Mar 26 18:22:17 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 26 Mar 2009 17:22:17 -0800 Subject: Troubleshooting vibration in images on LEO SEM side of RAITH package will need access to system between 10 and 4 PM Message-ID: <49CC2A49.6020806@snf.stanford.edu> Greetings Lev Markov and I are troubleshooting vibration in images on LEO SEM side of RAITH package will need access to system between 10 and 4 PM. You are welcome to load and we will shoot shots on your samples! ;-) we would wish to start at 10 AM and hope to be finished earlier than 4 PM .... stay tuned, stay with the CORAL schedule if possible, James Conway Lev Markov -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Fri Mar 27 21:22:31 2009 From: zhangy at stanford.edu (Yuan Zhang) Date: Fri, 27 Mar 2009 21:22:31 -0700 Subject: Raith free till midnight Message-ID: <20090328042229.7C8BF17045E@smtp1.stanford.edu> Sorry for the late notice. But the sample went bad at previous step. -------------- next part -------------- An HTML attachment was scrubbed... URL: From ytcheng at stanford.edu Sat Mar 28 10:05:40 2009 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Sat, 28 Mar 2009 10:05:40 -0700 (PDT) Subject: raith free until 12:30pm Message-ID: <1082066637.21701238259940740.JavaMail.root@zm06.stanford.edu> Done early. ytcheng From ahazeghi at stanford.edu Mon Mar 30 21:47:29 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 30 Mar 2009 21:47:29 -0700 (PDT) Subject: reservation taken Message-ID: <551877366.356601238474849593.JavaMail.root@zm03.stanford.edu> user YJHUO is 44 minutes late so I am taking RAITH until 22:30 Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Mar 31 10:45:30 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 31 Mar 2009 09:45:30 -0800 Subject: Please return all the Raith dongles to me today. I have a new service patch to add and must register the dongles after the updates.] Message-ID: <49D256BA.3020700@snf.stanford.edu> An HTML attachment was scrubbed... URL: From zhangli at stanford.edu Tue Mar 31 14:45:55 2009 From: zhangli at stanford.edu (Li Zhang) Date: Tue, 31 Mar 2009 14:45:55 -0700 (PDT) Subject: raith free 4-6 pm today Message-ID: <1275788402.514041238535955018.JavaMail.root@zm03.stanford.edu> sorry for the late notice. My sample won't be ready by then. Li From jwc at snf.stanford.edu Tue Mar 31 19:22:17 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 31 Mar 2009 18:22:17 -0800 Subject: Please return the 5 mm headway chuck to me -- it was borrowed yesterday and not returned. Message-ID: <49D2CFD9.6050909@snf.stanford.edu> Raith Users: Someone asked to use the 5 mm standoff style headway chuck and with my permission but never returned it. I needed this assembly for my work today! Please return it ASAP! 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