FW: Liftoff recipe for maN2403

Arash Hazeghi ahazeghi at stanford.edu
Tue Mar 24 00:21:38 PDT 2009


Joogsun,
Spin MaN 2403 @ 2500 rpm for ~ 4000A thickness, lift off in Remover PG @
60-70C. Time depends on the total opening area you have and it is specific
to your patterns, it can take from 10 minutes to 1 hr.

Best,
Arash

-----Original Message-----
From: Joong Sun Park [mailto:mrjpark at stanford.edu] 
Sent: Tuesday, March 24, 2009 12:19 AM
To: raith at snf.stanford.edu
Subject: Liftoff recipe for maN2403

Hi Raith group,
I'm just wondering whether someone knows the liftoff recipe for  
maN2403 resist.
I will deposit 80nm platinum with innotec.
Thanks in advance.

Joongsun






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