Liftoff recipe for maN2403

James Conway jwc at snf.stanford.edu
Tue Mar 24 13:36:59 PDT 2009


Normally negative tone materials are not employed for lift off 
metallization as that they normally have a vertical resist profile and 
not one with a undercut suitable for metal liftoff.

See me during my office hour is you need more information.

James Conway

Joong Sun Park wrote:
> Hi Raith group,
> I'm just wondering whether someone knows the liftoff recipe for 
> maN2403 resist.
> I will deposit 80nm platinum with innotec.
> Thanks in advance.
>
> Joongsun
>
>
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