Liftoff recipe for maN2403
jwc at snf.stanford.edu
Tue Mar 24 13:36:59 PDT 2009
Normally negative tone materials are not employed for lift off
metallization as that they normally have a vertical resist profile and
not one with a undercut suitable for metal liftoff.
See me during my office hour is you need more information.
Joong Sun Park wrote:
> Hi Raith group,
> I'm just wondering whether someone knows the liftoff recipe for
> maN2403 resist.
> I will deposit 80nm platinum with innotec.
> Thanks in advance.
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