desum of ebeam pattern

Li, Shifeng Shifeng.Li at lifetech.com
Thu Aug 19 11:12:07 PDT 2010


Hi, All,
 After making e-beam resist pattern using Raith 150, which O2 plasma tool did you use for descum before you put the patterned substrates into metalization chamber? Also, if possible, please share me with the descum process parameters.

Thanks!
Shifeng
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