From sgchong at stanford.edu Wed Jan 6 20:50:49 2010 From: sgchong at stanford.edu (Soogine Chong) Date: Wed, 6 Jan 2010 20:50:49 -0800 (PST) Subject: RAITH - Can expose at 2PM tomorrow if working with pieces Message-ID: <1520314571.1240161262839849395.JavaMail.root@zm07.stanford.edu> Hi all, I'm writing behalf of James (there is some issue with the server, and he can't write to this mailing list). RAITH is currently down due to problems with motors that load/unload the samples. However, if you're in a hurry, James has offered to manually load/unload the samples; exposing should still work fine. I will be exposing a wafer tomorrow (Thur) at 2PM, so we have room for another piece. If you have a sample (small enough to fit into the outer clip of the "new" sample holder), feel free to bring it and expose after us. -Soogine. From toecutter4ranger at gmail.com Wed Jan 6 20:53:11 2010 From: toecutter4ranger at gmail.com (ToeCutter) Date: Wed, 6 Jan 2010 20:53:11 -0800 Subject: Wanna write tomorrow? Message-ID: <50F1AF9E-A286-4C17-9F15-37348BBF04BA@gmail.com> Greetings and Happy New Year: System test and qualifications failed due to stage and loader issues today. I am hoping to load a batch of chips and Soogine's wafer at 2:00 PM Come join the fun if you wish to write before the weekend. James Believe in Yourself From jwc at snf.stanford.edu Thu Jan 7 10:50:13 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 07 Jan 2010 10:50:13 -0800 Subject: RAITH status Message-ID: <4B462CE5.5030504@snf.stanford.edu> An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Thu Jan 7 16:05:50 2010 From: toecutter4ranger at gmail.com (James Conway) Date: Thu, 7 Jan 2010 16:05:50 -0800 Subject: RAITH STATUS -- workaround developed to get around the Load Lock belt issues.... Message-ID: Greetings: A workaround has been developed to get around the Load Lock belt issues... We will be manually performing load lock exchanges until I receive the Load Lock belt and possibly other parts in tomorrows FEDX shipment at 10:30. I have loaded the system with several Users pieces and one wafer. They have coordinated amoungst themselves to schedule their writes and we plan to unload between 9:30 and 10:15 AM tomorrow. I hope to have the loader repaired by mid day tomorrow and begin qualification of the tool in the afternoon. Users whom are interested in writing are welcome to join me in that session late in the afternoon. Thank you JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Thu Jan 7 17:55:12 2010 From: toecutter4ranger at gmail.com (James Conway) Date: Thu, 7 Jan 2010 17:55:12 -0800 Subject: RAITH STATUS 18:00 Thursday James is performing the load and unloads manually -- please do not attempt to load yourself. Message-ID: Good Evening: We are currently loading and unloading the system manually under James's direct control. Users are requested to not try to load or unload the RAITH on their own. Please check messages under maintenance tab on coral RAITH. I will install the new loader belt tomorrow upon receipt of shipment. My plan is to come onto the system between 10 and 11AM unload the samples now inside and resume repairs with hopes of qualifying the tool Friday Afternoon and Evening. Thank you for your support! JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Jan 8 15:06:45 2010 From: toecutter4ranger at gmail.com (James Conway) Date: Fri, 8 Jan 2010 15:06:45 -0800 Subject: RAITH STATUS Message-ID: RAITH STATUS 15:00 hours Friday: neslab chillers up and running one on line on the system albeit with reduced flow... Brought up the IEE-4888 interfaces and they tested fine. Last night's piezo control errors simply may have been a comunication hang on the IEEE-4888 buss or an channel addressing drop. The vacuum system quickly pumped down and the FE-Gun stayed up since this mornings restart at 11. (Miracles do happen!) Tested loader after belt tension adjustments and it completed one load lock exchange cycle. All new robot arm limit settings established to avoid SW conflicts encountered yesterday. We are unloading users samples written last night and will soon reload more samples and test loader again. If you wish to load with us come on down -- we pump at 15:30... Further loader testing in progress. We will take the system down again monday abouty 12 - 1 PM to replace the Z motor in stage and to resolve all other issues with RAITH Filed service. More engineers are coming to help us through this Monday. USERS ARE REQUESTED TO MOVE THEIR CORAL RESERVATIONS TO BEYOND WED. AT 16:00 HOURS. Thank you for your support! JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Jan 8 16:23:24 2010 From: toecutter4ranger at gmail.com (James Conway) Date: Fri, 8 Jan 2010 16:23:24 -0800 Subject: RAITH STATUS In-Reply-To: <1967553282.1260301262994634847.JavaMail.root@zm02.stanford.edu> References: <1967553282.1260301262994634847.JavaMail.root@zm02.stanford.edu> Message-ID: NO -- we will be off line to users through the weekend. We have been testing the loader and we have no consistency in the robot arm positioning as we move in and then attempt to move back top the outer load lock position. This is due to the loader belt slipping on the motor drive gear once it reached the outer robot arm position. I will post a follow up message to the raith list shortly. sorry for this delay in your research. All the best for the weekend. James On Fri, Jan 8, 2010 at 3:50 PM, Xu Tian wrote: > Hi,James: > > Is it still OK to use my reservation this Sunday from 18:00 or should I > replace it with reservation beyond next Wednesday? > > Xu Tian > ----- Original Message ----- > From: "James Conway" > To: raith at snf.stanford.edu, lm at raithusa.com, "Cole Loomis" < > cl at raithusa.com> > Sent: Friday, January 8, 2010 3:06:45 PM GMT -08:00 US/Canada Pacific > Subject: RAITH STATUS > > RAITH STATUS 15:00 hours Friday: > > neslab chillers up and running one on line on the system albeit with > reduced flow... > Brought up the IEE-4888 interfaces and they tested fine. Last night's piezo > control errors simply may have been a comunication hang on the IEEE-4888 > buss or an channel addressing drop. > > The vacuum system quickly pumped down and the FE-Gun stayed up since this > mornings restart at 11. (Miracles do happen!) > > Tested loader after belt tension adjustments and it completed one load lock > exchange cycle. All new robot arm limit settings established to avoid SW > conflicts encountered yesterday. We are unloading users samples written last > night and will soon reload more samples and test loader again. If you wish > to load with us come on down -- we pump at 15:30... > > Further loader testing in progress. > > We will take the system down again monday abouty 12 - 1 PM to replace the Z > motor in stage and to resolve all other issues with RAITH Filed service. > More engineers are coming to help us through this Monday. > > USERS ARE REQUESTED TO MOVE THEIR CORAL RESERVATIONS TO BEYOND WED. AT > 16:00 HOURS. > > Thank you for your support! > > JWC > -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Jan 8 16:36:23 2010 From: toecutter4ranger at gmail.com (James Conway) Date: Fri, 8 Jan 2010 16:36:23 -0800 Subject: RAITH Status 16:30 Friday -- System will remain off line to users for exposures through the weekend. Message-ID: Greetings Raith Users: We have been testing the robot arm of the load lock loader. These test failed as we have no consistency in the robot arm positioning as we move in and then attempt to move back to the outer load lock position. This is due to the loader belt slipping on the motor drive gear once it reached the outer robot arm position and renders an offset in the T position. This problem surfaced as we began qualifications and previous test with RAITH Tuesday evening did not show significant problems on initial testing. Users are requested to move their current coral reservations to beyond next Wednesday at 16:00 hours. This extended interval of downtime was unexpected and I apologize for the delay in your research. Starting Monday afternoon when RAITH Field Service engineers arrive from New York and S. CAL, we will replace the loader belt, check the mechanicals to the robot arm, replace the pinion gear to the Z-motor which is drawing excessive current, and finally replace or repair the Neslab chillers. In my experience on beam tools it is very unusual to encounter so many different problems at Startup. But sometimes when things become urgent a series of small problems can result in bringing these complex systems down. Rest assured working with RAITH we will resolve all issues and get up and running for everyone as soon as possible. Stay tuned for update messages Tuesday and plan you ancillary processing accordingly. If you have further questions please send me a email to this address. My SNF email INBOX is currently unaccessible to me from my desktop PC. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From sqliu at stanford.edu Sat Jan 9 07:04:49 2010 From: sqliu at stanford.edu (John Liu) Date: Sat, 9 Jan 2010 07:04:49 -0800 Subject: raith weekend use In-Reply-To: References: Message-ID: <3B57F0F86F6749C0B915372F8D719193@PC> Dear users, FYI per James' request. Byoungil, Min-Kyo and myself loaded with James Friday afternoon to write on the Raith through the weekend. Min-Kyo wrote Friday night, Byoungil wrote overnight, and I will be writing and unloading only Sunday morning. -John -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jan 13 09:37:39 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 13 Jan 2010 09:37:39 -0800 Subject: RAITH status Wednesday and Thursday -- System is soon to start qualifications for performance and to establish performance baselines. See me for access if you wish to assist in these qualifications. Message-ID: <4B4E04E3.9070605@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: JWCinclean_room.jpg Type: image/jpeg Size: 192806 bytes Desc: not available URL: From jwconway at stanford.edu Wed Jan 13 18:27:56 2010 From: jwconway at stanford.edu (James Conway) Date: Wed, 13 Jan 2010 18:27:56 -0800 (PST) Subject: raith status 18:17 hours WED. -- SYSTEM WILL REMAIN OFF LINE FOR USERS THROUGH 18:00 TOMORROW AT EARLIEST In-Reply-To: <61453362.2896501263435752928.JavaMail.root@zm08.stanford.edu> Message-ID: <2052663648.2897231263436076196.JavaMail.root@zm08.stanford.edu> Dear RAITH Community: We completed all the work we had expected overnight last night; however in testing of the Laser Interferometer Stage we identified a new problem with Stage control for the X motor that we have not seem before. Understand that these systems are complex electro-mechanical systems and firmware interfaces; at times can be very sensitive to adjustments, modifications, and during of times of test often simply fail the initial testing. We are sparing no resources in our efforts to bring this system back up and through qualification for User access. I again now hope that I can complete qualifications tomorrow afternoon and hand off the tool to RAITH Champions for testing from 18:00 tomorrow onwards. My apologizes for the interruption to your research. Thank you for your support! JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Thu Jan 14 18:35:10 2010 From: toecutter4ranger at gmail.com (ToeCutter) Date: Thu, 14 Jan 2010 18:35:10 -0800 Subject: System will remain off line to users through tomorrow evening Message-ID: System will remain off line to users through tomorrow evening We had a water leak and lost a fitting to the e/o cards last evening. X motor issues seems to have been resolved and we are testing it in the morning. James From jwc at snf.stanford.edu Fri Jan 15 17:55:32 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 15 Jan 2010 17:55:32 -0800 Subject: RAITH STATUS 17:45 HOURS FRI. JAN. 15, 2010 --- SYSTEM IS COMING UP AND AVAILABLE TO RAITH CHAMPIONS ONLY UNLESS WITH MY PERMISSION. Message-ID: <4B511C94.4070509@snf.stanford.edu> *GREETINGS RAITH COMMUNITY:* The system has just come up. We have tested all interfaces but have not yet performed the qualification testing. I am handing the tool off to Kelly Rivoire for initial testing and then we resume the CORAL schedule for *RAITH CHAMPIONS ONLY* through Tuesday at 2 PM. Tuesday afternoon assuming the system is fine I will start Qualification testing for resolution and performance working together with the next RAITH Basic Users class. *Users are requested to not exceed 15 keV* until the gun pressure stabilizes and we have stable extraction current on the FE-Gun. I expect this to occur by next Thursday or so. Imaging resolution and brightness are superb and all Users will see a decided difference from before the holiday break. PLEASE CALL ME IMMEDIATELY IF YOU ENCOUNTER ANY SERIOUS PROBLEMS. 415-412-4825 THANK YOU FOR YOUR SUPPORT! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Green_Ball.gif Type: image/gif Size: 257 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri Jan 15 18:28:42 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 15 Jan 2010 18:28:42 -0800 Subject: ANNOUNCEMENT: Raith Group XL- (the 40th Class!) Four Day Short Course for Basic RAITH 150 Users Tuesday to Friday January 19 -22, 2010 10 AM to 6 PM plus one additional session. Message-ID: <4B51245A.5020905@snf.stanford.edu> An HTML attachment was scrubbed... URL: From bilee at stanford.edu Tue Jan 19 01:15:46 2010 From: bilee at stanford.edu (Byoung Il Lee) Date: Tue, 19 Jan 2010 01:15:46 -0800 (PST) Subject: Raith taken till 7am on Tue Message-ID: <1865880362.389011263892546887.JavaMail.root@zm03.stanford.edu> Raith taken till 7am on Tue. Thanks, Byoungil From hailiang at stanford.edu Wed Jan 20 17:01:54 2010 From: hailiang at stanford.edu (Hailiang Wang) Date: Wed, 20 Jan 2010 17:01:54 -0800 (PST) Subject: raith free 11pm-2am Message-ID: <1849305565.916641264035714224.JavaMail.root@zm06.stanford.edu> Process was delayed. Enjoy! From sgchong at stanford.edu Thu Jan 21 01:18:22 2010 From: sgchong at stanford.edu (Soogine Chong) Date: Thu, 21 Jan 2010 01:18:22 -0800 (PST) Subject: Raith free now until 3AM Message-ID: <1194354228.1079661264065502779.JavaMail.root@zm07.stanford.edu> Starting late. Sorry for the late notice. -Soogine. From kcbalram at stanford.edu Thu Jan 21 09:29:28 2010 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Thu, 21 Jan 2010 09:29:28 -0800 (PST) Subject: Raith Free till 10:00 AM.... Finished early..... Message-ID: <47905536.1053761264094968476.JavaMail.root@zm06.stanford.edu> From fanpy839 at stanford.edu Thu Jan 21 15:32:32 2010 From: fanpy839 at stanford.edu (fanpy839) Date: Thu, 21 Jan 2010 15:32:32 -0800 Subject: raith free 9pm Message-ID: <201001211532312973086@stanford.edu> Sorry about the late notice, samples wont be ready in time. 2010-01-21 fanpy839 -------------- next part -------------- An HTML attachment was scrubbed... URL: From dalyx at stanford.edu Thu Jan 21 16:40:39 2010 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Thu, 21 Jan 2010 16:40:39 -0800 (PST) Subject: Fwd: Switching Raith time -- Thursday & Friday evening In-Reply-To: <2115519598.53941263683469705.JavaMail.root@zm06.stanford.edu> Message-ID: <2016585250.1109911264120839560.JavaMail.root@zm03.stanford.edu> FYI: Linyou and I are switching Raith times tonight & tomorrow. Best, Dany ----- Forwarded Message ----- From: "Linyou Cao" To: "Dany-Sebastien Ly-Gagnon" Sent: Saturday, January 16, 2010 3:11:09 PM GMT -08:00 US/Canada Pacific Subject: Re: Switching Raith time Deal! Thanks a lot. Have a nice weekend! Linyou ----- Original Message ----- From: "Dany-Sebastien Ly-Gagnon" To: "Linyou Cao" Sent: Saturday, January 16, 2010 2:52:37 PM GMT -08:00 US/Canada Pacific Subject: Re: Switching Raith time Sure, that's fine with me. Dany On Sat, Jan 16, 2010 at 1:42 PM, Linyou Cao < linyouc at stanford.edu > wrote: Hi Dany, I am writing to see if we can trade my Raith time at 6:00pm-9:00pm next Thursday with yours at the following Friday. Many thanks, Linyou From hdonglee at stanford.edu Tue Jan 26 08:17:54 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Tue, 26 Jan 2010 08:17:54 -0800 (PST) Subject: Raith is available from 9:30am to 11:30am Message-ID: <258784392.1018571264522674623.JavaMail.root@zm01.stanford.edu> Dear all, Preparation of my sample won't be completed. Raith is free from 9:30am to 11:30am. Linyou and I switched the time. Best, Hyung Dong Lee From ithomann at stanford.edu Tue Jan 26 23:03:18 2010 From: ithomann at stanford.edu (Isabell Thomann) Date: Tue, 26 Jan 2010 23:03:18 -0800 (PST) Subject: ZEP dose In-Reply-To: <2109300907.1747271264575648718.JavaMail.root@zm05.stanford.edu> Message-ID: <829586236.1747701264575798256.JavaMail.root@zm05.stanford.edu> Dear Raith users, Does anybody know the optimum doses for ZEP520A for writing 30 nm , 20 nm , 10 nm wide single pixel lines on Aluminum substrates? Also does anyone know ZEP520A film thickness versus spin coating parameters? Best, Isabell Dr. Isabell Thomann Postdoctoral Scholar Department of Materials Science and Engineering Stanford University From whitejs at stanford.edu Wed Jan 27 10:15:13 2010 From: whitejs at stanford.edu (Justin Stewart White) Date: Wed, 27 Jan 2010 10:15:13 -0800 (PST) Subject: Raith free NOW to 1pm Message-ID: <1612340156.2228111264616113919.JavaMail.root@zm02.stanford.edu> Sorry for the late notice -- samples are junk .. From gdiankov at stanford.edu Wed Jan 27 12:50:01 2010 From: gdiankov at stanford.edu (Georgi Diankov) Date: Wed, 27 Jan 2010 12:50:01 -0800 (PST) Subject: Raith free 2 - 4:30 pm today Message-ID: <1806114433.537211264625401434.JavaMail.root@zm07.stanford.edu> Samples delayed. Sorry for the late notice. From dlee76 at stanford.edu Thu Jan 28 00:52:20 2010 From: dlee76 at stanford.edu (Donkoun Lee) Date: Thu, 28 Jan 2010 00:52:20 -0800 (PST) Subject: Release from 01:00 AM to 09:30 AM, Friday Message-ID: <2056988491.2520351264668740757.JavaMail.root@zm03.stanford.edu> Hi. Sorry for the late notice. My samples are not ready. Kind Regards, Donkoun Lee -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From serenaf at stanford.edu Fri Jan 29 12:15:09 2010 From: serenaf at stanford.edu (Serena Renee Faruque) Date: Fri, 29 Jan 2010 12:15:09 -0800 (PST) Subject: Raith free midnight to 5:30 am tonight Message-ID: <2076047836.1836991264796109762.JavaMail.root@zm01.stanford.edu> Samples not ready From hdonglee at stanford.edu Fri Jan 29 23:36:01 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Fri, 29 Jan 2010 23:36:01 -0800 (PST) Subject: Raith free from 3 am to 4:30 am on Saturday Message-ID: <964562509.1952081264836961248.JavaMail.root@zm01.stanford.edu> Sample is not ready. Best, Hyung Dong Lee From linyouc at stanford.edu Sat Jan 30 23:33:17 2010 From: linyouc at stanford.edu (Linyou Cao) Date: Sat, 30 Jan 2010 23:33:17 -0800 (PST) Subject: Raith free now till 2:00am Message-ID: <1830733158.608281264923197300.JavaMail.root@zm06.stanford.edu> Yes owen is down. Cannot prepare samples. Linyou -------------- next part -------------- An HTML attachment was scrubbed... URL: From rpala at stanford.edu Sun Jan 31 02:23:31 2010 From: rpala at stanford.edu (Ragip Pala) Date: Sun, 31 Jan 2010 02:23:31 -0800 (PST) Subject: sunday 14:30-17:00 released Message-ID: <919910133.2050281264933410996.JavaMail.root@zm01.stanford.edu> Won't be able to use it... Sorry for the late notice... -ragip From serenaf at stanford.edu Sun Jan 31 09:20:09 2010 From: serenaf at stanford.edu (Serena Renee Faruque) Date: Sun, 31 Jan 2010 09:20:09 -0800 (PST) Subject: sunday 10:00-11:00 released In-Reply-To: <919910133.2050281264933410996.JavaMail.root@zm01.stanford.edu> Message-ID: <1319336888.2062771264958409934.JavaMail.root@zm01.stanford.edu> Took a later spot. Sorry for late notice. ----- Original Message ----- From: "Ragip Pala" To: "raith" Sent: Sunday, January 31, 2010 2:23:31 AM GMT -08:00 US/Canada Pacific Subject: sunday 14:30-17:00 released Won't be able to use it... Sorry for the late notice... -ragip From kcbalram at stanford.edu Sun Jan 31 17:14:21 2010 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sun, 31 Jan 2010 17:14:21 -0800 (PST) Subject: Raith free till 9 PM Message-ID: <1777129220.691281264986861730.JavaMail.root@zm06.stanford.edu> Samples not ready...