From kodama at stanford.edu Tue Jun 1 06:21:19 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Tue, 1 Jun 2010 06:21:19 -0700 (PDT) Subject: raith release from 8:00 am to 10:30 am Message-ID: <1123735438.715123.1275398479341.JavaMail.root@zm09.stanford.edu> I am sorry for the delay. I find the shutdown of headway now. From mkseo at stanford.edu Wed Jun 2 00:04:14 2010 From: mkseo at stanford.edu (Min-Kyo Seo) Date: Wed, 2 Jun 2010 00:04:14 -0700 (PDT) Subject: raith is free from 3:30 am to 6:30 am today Message-ID: <1696816905.1033872.1275462254672.JavaMail.root@zm08.stanford.edu> I found that raith is free from 3:30 am to 6:30 am today. I hope that someone would use the slot. Enjoy. Min-Kyo From kodama at stanford.edu Wed Jun 2 16:58:18 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Wed, 2 Jun 2010 16:58:18 -0700 (PDT) Subject: raith release from 5:00 am to 7:00 am tomorrow In-Reply-To: <1696816905.1033872.1275462254672.JavaMail.root@zm08.stanford.edu> Message-ID: <1714523241.797104.1275523098316.JavaMail.root@zm09.stanford.edu> I plan to start two hours earlier tomorrow, so the time will be free. From sqliu at stanford.edu Thu Jun 3 07:45:52 2010 From: sqliu at stanford.edu (John Liu) Date: Thu, 3 Jun 2010 07:45:52 -0700 Subject: Raith Free 8-9am Message-ID: <4A7C87EEACB144FDB44F6ED8B6039F85@PC> Will finish early. -------------- next part -------------- An HTML attachment was scrubbed... URL: From sqliu at stanford.edu Thu Jun 3 11:49:55 2010 From: sqliu at stanford.edu (John Liu) Date: Thu, 3 Jun 2010 11:49:55 -0700 Subject: Raith released 8:30-11:30pm Saturday Message-ID: <1FF9EB39953D4DFD93B4BF89C50AE287@PC> An HTML attachment was scrubbed... URL: From hdonglee at stanford.edu Thu Jun 3 13:16:16 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Thu, 3 Jun 2010 13:16:16 -0700 (PDT) Subject: released session 12am-2am on Friday Message-ID: <525006684.638152.1275596176116.JavaMail.root@zm01.stanford.edu> taken another session. Hyung Dong Lee From gdiankov at stanford.edu Thu Jun 3 15:35:51 2010 From: gdiankov at stanford.edu (Georgi Diankov) Date: Thu, 3 Jun 2010 15:35:51 -0700 (PDT) Subject: Raith free now - 5 pm Message-ID: <1630435393.881911.1275604551223.JavaMail.root@zm07.stanford.edu> Finished early. From dalyx at stanford.edu Fri Jun 4 17:28:35 2010 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Fri, 4 Jun 2010 17:28:35 -0700 (PDT) Subject: RAITH free sunday 1pm-3pm. EOM Message-ID: <1037596730.726448.1275697715191.JavaMail.root@zm03.stanford.edu> From kcbalram at stanford.edu Sat Jun 5 00:36:46 2010 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sat, 5 Jun 2010 00:36:46 -0700 (PDT) Subject: Raith free tomorrow 10-12 AM Message-ID: <858352715.351823.1275723406540.JavaMail.root@zm06.stanford.edu> Picked up a later slot instead..... From kodama at stanford.edu Sat Jun 5 06:23:11 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Sat, 5 Jun 2010 06:23:11 -0700 (PDT) Subject: raith free from 7:30 am to 9:30 am Message-ID: <980407830.883100.1275744191109.JavaMail.root@zm09.stanford.edu> sorry for the delay. Sample will not be prepared till then. From hdonglee at stanford.edu Sat Jun 5 15:18:01 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Sat, 5 Jun 2010 15:18:01 -0700 (PDT) Subject: Raith is released 8:30pm-11:30pm today Message-ID: <1170666113.681878.1275776281349.JavaMail.root@zm01.stanford.edu> Samples won't be ready Hyung Dong From mkseo at stanford.edu Sat Jun 5 23:04:36 2010 From: mkseo at stanford.edu (Min-Kyo Seo) Date: Sat, 5 Jun 2010 23:04:36 -0700 (PDT) Subject: raith free Sunday 2:00am to 4:30 am Message-ID: <227524298.1174754.1275804276454.JavaMail.root@zm08.stanford.edu> Sorry for the late notice Min-Kyo From hdonglee at stanford.edu Sun Jun 6 11:06:01 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Sun, 6 Jun 2010 11:06:01 -0700 (PDT) Subject: raith free 4pm-6pm, 8:30pm-10pm Message-ID: <1683135864.689487.1275847561713.JavaMail.root@zm01.stanford.edu> sorry for late notice. Hyung Dong Lee From kcbalram at stanford.edu Sun Jun 6 20:06:22 2010 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sun, 6 Jun 2010 20:06:22 -0700 (PDT) Subject: Raith free till 10 PM Message-ID: <1766593650.375520.1275879982982.JavaMail.root@zm06.stanford.edu> Samples are not ready..... From kodama at stanford.edu Mon Jun 7 04:14:53 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Mon, 7 Jun 2010 04:14:53 -0700 (PDT) Subject: raith free till 7:30 am Message-ID: <743622942.908527.1275909293370.JavaMail.root@zm09.stanford.edu> took earlry slot, and finished earlier. Thanks, From khu834 at stanford.edu Mon Jun 7 20:39:17 2010 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Mon, 7 Jun 2010 20:39:17 -0700 Subject: raith free 9-12 Message-ID: Sample prep failed. -------------- next part -------------- An HTML attachment was scrubbed... URL: From sqliu at stanford.edu Tue Jun 8 17:32:18 2010 From: sqliu at stanford.edu (John Liu) Date: Tue, 8 Jun 2010 17:32:18 -0700 Subject: Raith free Wednesday morning 5:30-8:00am Message-ID: <3686B663BB064CA58524041F7E5D60EF@PC> An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Wed Jun 9 10:40:50 2010 From: gshambat at stanford.edu (Gary Shambat) Date: Wed, 9 Jun 2010 10:40:50 -0700 (PDT) Subject: Free 18:00 - 23:00 today sorry for late notice Message-ID: <1337880935.758944.1276105250566.JavaMail.root@zm01.stanford.edu> From mkseo at stanford.edu Wed Jun 9 10:42:51 2010 From: mkseo at stanford.edu (Min-Kyo Seo) Date: Wed, 9 Jun 2010 10:42:51 -0700 (PDT) Subject: Free 18:00 - 23:00 today sorry for late notice Message-ID: <1178066923.59515.1276105371467.JavaMail.root@zm08.stanford.edu> taken from 20:30 - 23:00 Thank you Min-Kyo From hdonglee at stanford.edu Fri Jun 11 18:14:39 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Fri, 11 Jun 2010 18:14:39 -0700 (PDT) Subject: raith free 9pm-11pm today In-Reply-To: <651790311.812780.1276305252293.JavaMail.root@zm01.stanford.edu> Message-ID: <1404235562.812784.1276305279373.JavaMail.root@zm01.stanford.edu> Sorry for late notice. Samples won't be ready. Hyung Dong Lee From hdonglee at stanford.edu Sat Jun 12 14:56:00 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Sat, 12 Jun 2010 14:56:00 -0700 (PDT) Subject: raith free 7:30pm-10pm today, 6:30pm-9:30 tomorrow(Sunday) In-Reply-To: <1429453019.818113.1276379708721.JavaMail.root@zm01.stanford.edu> Message-ID: <76197667.818118.1276379760281.JavaMail.root@zm01.stanford.edu> moved the sessions due to the delay of sample preparation. Hyung Dong Lee From kcbalram at stanford.edu Sun Jun 13 02:39:34 2010 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sun, 13 Jun 2010 02:39:34 -0700 (PDT) Subject: Raith free from 8 to 10 AM tomorrow Message-ID: <1373351763.48466.1276421974520.JavaMail.root@zm06.stanford.edu> Sample not ready.... From =?ISO-8859-15?Q?=22Br=E4uer=2C_Bj=F6rn_=3Cbbj=40stanford=2Eedu=3E?= Sun Jun 13 07:34:57 2010 From: =?ISO-8859-15?Q?=22Br=E4uer=2C_Bj=F6rn_=3Cbbj=40stanford=2Eedu=3E?= (=?ISO-8859-15?Q?=22Br=E4uer=2C_Bj=F6rn_=3Cbbj=40stanford=2Eedu=3E?=) Date: Sun, 13 Jun 2010 07:34:57 -0700 Subject: Raith free from 3 to 8 AM tomorrow Message-ID: <4C14EC91.5010801@stanford.edu> Sample not ready. From roopalik at stanford.edu Sun Jun 13 15:18:52 2010 From: roopalik at stanford.edu (Roopali Kukreja) Date: Sun, 13 Jun 2010 15:18:52 -0700 (PDT) Subject: Raith free tomorrow from 8:00 am to 2:00 pm Message-ID: <1510366209.52550.1276467532952.JavaMail.root@zm06.stanford.edu> Samples not ready.... -- From Roopali Kukreja PhD Candidate Material Science and Engg. Stanford University From erikdkim at stanford.edu Mon Jun 14 10:54:28 2010 From: erikdkim at stanford.edu (Erik Daniel Kim) Date: Mon, 14 Jun 2010 10:54:28 -0700 (PDT) Subject: RAITH release and vacuum pump issue In-Reply-To: <354291262.85189.1276537819121.JavaMail.root@zm04.stanford.edu> Message-ID: <417169789.85398.1276538068866.JavaMail.root@zm04.stanford.edu> I have cancelled my reservation since James is currently working on a problem with the turbo-pumping system (either with the pump itself or the controller). He's hoping to get things up and running in the next few hours but says it's looking 50/50 at this point. Erik From jwc at snf.stanford.edu Mon Jun 14 11:47:23 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 14 Jun 2010 11:47:23 -0700 Subject: Shutdown raith SNF 2010-06-14 11:05:48: NO system vacuum -- Turbo pump controller shipping for tomorrow at 10 AM delivery Message-ID: <4C16793B.4090307@snf.stanford.edu> An HTML attachment was scrubbed... URL: From sqliu at stanford.edu Mon Jun 14 18:15:52 2010 From: sqliu at stanford.edu (John Liu) Date: Mon, 14 Jun 2010 18:15:52 -0700 Subject: Raith released Wednesday 12-2:30pm Message-ID: An HTML attachment was scrubbed... URL: From gdiankov at stanford.edu Tue Jun 15 00:26:33 2010 From: gdiankov at stanford.edu (Georgi Diankov) Date: Tue, 15 Jun 2010 00:26:33 -0700 (PDT) Subject: Raith free Tuesday 6-8 pm (eom) Message-ID: <1942090064.1268797.1276586793703.JavaMail.root@zm07.stanford.edu> Took another time. From kodama at stanford.edu Wed Jun 16 06:12:06 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Wed, 16 Jun 2010 06:12:06 -0700 (PDT) Subject: free from 7:00 to 9:00am Message-ID: <988238075.1209541.1276693926317.JavaMail.root@zm09.stanford.edu> Sorry for the late notice, Sample will not be ready till then. From jwc at snf.stanford.edu Wed Jun 16 09:18:40 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 16 Jun 2010 09:18:40 -0700 Subject: reservation time change for tomorrow Thursday June 17, 2010 starting at 2 PM instead of 1:00 PM Message-ID: <4C18F960.8080506@snf.stanford.edu> Greetings Raith Users: Coral reservation time change for tomorrow Thursday June 17, 2010 starting at 2 PM instead of 1:00 PM on the RAITH system. Thank you, James From ytcheng at stanford.edu Wed Jun 16 09:32:22 2010 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Wed, 16 Jun 2010 09:32:22 -0700 Subject: raith 1:30-5:30pm Sat. released Message-ID: <000001cb0d71$7f988a80$7ec99f80$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jun 16 12:20:45 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 16 Jun 2010 12:20:45 -0700 Subject: Raith Cancellation for Friday June 25th 10 AM to 2 PM. Message-ID: <4C19240D.1070106@snf.stanford.edu> Due to outside business requiring me to be away that day I am canceling my RAITH system reservation for Friday June 25th 10 AM to 2 PM. Its up for grabs once it comes up on your scheduling view. Enjoy, James From sqliu at stanford.edu Thu Jun 17 12:23:50 2010 From: sqliu at stanford.edu (John Liu) Date: Thu, 17 Jun 2010 12:23:50 -0700 Subject: Raith free Friday 7-10am Message-ID: <1C5563740B144451A273CCA82A0C5329@PC> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 17 14:19:02 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 17 Jun 2010 14:19:02 -0700 Subject: I will be working on the RAITH this afternoon starting a few minutes later than 2:15 PM and I WANT MY SESSION! Message-ID: <4C1A9146.7000903@snf.stanford.edu> Greetings Raith Group 42 and Raith User Community: Running a few minutes late while I prepare my files BUT I DO WANT MY SESSION starting at 2:00 now for 2:15. I load at 2:30 PM if anyone wishes to share the ride. ;-) To RAITH Group 42: Some of you have finished your qualification session and now have obtained a login on the tool. For the rest of you in Group 42 or soon to come onto the system in coming RAITH Basic User classes you are welcome to join me this afternoon to continue, or start, your training on the system. If you are ready to qualify you can join me today 2:30 - 6:00 PM or tomorrow 10:00 AM to 2:00 PM. Otherwise you will have to make an appointment with me and get your session scheduled with me AND on CORAL. FYI: Michal B. is also scheduled to qualify on 6-24-2010 from 1:00 to 6:00 PM, and you may also join us for that session. Any RAITH Users seeking project support or assistance in operational procedures can see me this afternoon or simply schedule a session with me during my office hours. Your work and the quality of your Ebeam Lithography results are important to me, please don't hesitate to contact me if you have any concern are challenges while working on the system. All the Best in your Research, James Conway From gdiankov at stanford.edu Thu Jun 17 14:32:32 2010 From: gdiankov at stanford.edu (Georgi Diankov) Date: Thu, 17 Jun 2010 14:32:32 -0700 (PDT) Subject: Raith free this Friday 6-9:30 pm (eom) Message-ID: <556321229.69308.1276810352792.JavaMail.root@zm07.stanford.edu> From toecutter4ranger at gmail.com Thu Jun 17 16:34:33 2010 From: toecutter4ranger at gmail.com (James Conway) Date: Thu, 17 Jun 2010 16:34:33 -0700 Subject: Air handler shut down in Ebeam Lab early tomorrow morning Message-ID: Greetings Ebeam Lab Users: Tony and Jose with CIS facilities have just informed me that they will be shutting down the air handlers to the Ebeam Lab for an hour or so for testing and periodic maintenance during the period around 7 - 8 AM tomorrow Friday June 18, 2010. This will result in little to no flow of clean room air through the Ebeam lab during this period. Users of the Ebeam lab are advised to not handle nor dispense any solvents and refrain from wiping down lab bench surfaces with IPA during this period. Should any User begin to smell anything unusual you are advised to immediately vacate the lab and wait until full ar flow has been restored. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From kodama at stanford.edu Thu Jun 17 22:56:21 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Thu, 17 Jun 2010 22:56:21 -0700 (PDT) Subject: raith release from Saturday 5:00 am to 8:00 am Message-ID: <1499571512.1278231.1276840581801.JavaMail.root@zm09.stanford.edu> From dalyx at stanford.edu Fri Jun 18 12:57:13 2010 From: dalyx at stanford.edu (Dany Ly-Gagnon) Date: Fri, 18 Jun 2010 12:57:13 -0700 (PDT) Subject: Releasing RAITH 2-3pm. Message-ID: <1383558687.49285.1276891033844.JavaMail.root@zm03.stanford.edu> Won't be ready. James (before me) will also be finishing early. Best, Dany From hdonglee at stanford.edu Sat Jun 19 17:08:48 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Sat, 19 Jun 2010 17:08:48 -0700 (PDT) Subject: raith free 8pm - 10pm today Message-ID: <28972385.4840.1276992528389.JavaMail.root@zm01.stanford.edu> sorry for late notice. Hyung Dong Lee From kodama at stanford.edu Sat Jun 19 21:30:41 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Sat, 19 Jun 2010 21:30:41 -0700 (PDT) Subject: raith release from Sunday 5:00 am to 8:00 am Message-ID: <778737341.11979.1277008241488.JavaMail.root@zm09.stanford.edu> I took early slot. Thanks, From kcbalram at stanford.edu Sun Jun 20 10:15:07 2010 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sun, 20 Jun 2010 10:15:07 -0700 (PDT) Subject: Raith free till 1:00 PM Message-ID: <1970166519.12489.1277054107782.JavaMail.root@zm06.stanford.edu> Sorry for the late notice.... picked up a later slot instead...... From mkseo at stanford.edu Mon Jun 21 21:45:51 2010 From: mkseo at stanford.edu (Min-Kyo Seo) Date: Mon, 21 Jun 2010 21:45:51 -0700 (PDT) Subject: raith free tomorrow from 2:30 pm to 5:00 pm Message-ID: <1234005623.122157.1277181951511.JavaMail.root@zm08.stanford.edu> I moved my session later. Min-Kyo From yiyangg at stanford.edu Tue Jun 22 00:49:57 2010 From: yiyangg at stanford.edu (Yiyang Gong) Date: Tue, 22 Jun 2010 00:49:57 -0700 (PDT) Subject: raith stuck In-Reply-To: <1234005623.122157.1277181951511.JavaMail.root@zm08.stanford.edu> Message-ID: <1554511511.43838.1277192997022.JavaMail.root@zm06.stanford.edu> Hi everyone, Does anyone have the raith admin password right now? The gate valve didn't close on exit, and I can't reset the error without it. I would like to at least get the loadlock chamber to air, so the turbo doesn't keep pumping it overnight. Thanks, Yiyang ----- Original Message ----- From: "Min-Kyo Seo" To: "raith" Sent: Monday, June 21, 2010 9:45:51 PM Subject: raith free tomorrow from 2:30 pm to 5:00 pm I moved my session later. Min-Kyo From yiyangg at stanford.edu Tue Jun 22 00:52:15 2010 From: yiyangg at stanford.edu (Yiyang Gong) Date: Tue, 22 Jun 2010 00:52:15 -0700 (PDT) Subject: raith stuck In-Reply-To: <1554511511.43838.1277192997022.JavaMail.root@zm06.stanford.edu> Message-ID: <467522950.43859.1277193135358.JavaMail.root@zm06.stanford.edu> My cell is 650-646-8491. ----- Original Message ----- From: "Yiyang Gong" To: "raith" Sent: Tuesday, June 22, 2010 12:49:57 AM Subject: raith stuck Hi everyone, Does anyone have the raith admin password right now? The gate valve didn't close on exit, and I can't reset the error without it. I would like to at least get the loadlock chamber to air, so the turbo doesn't keep pumping it overnight. Thanks, Yiyang ----- Original Message ----- From: "Min-Kyo Seo" To: "raith" Sent: Monday, June 21, 2010 9:45:51 PM Subject: raith free tomorrow from 2:30 pm to 5:00 pm I moved my session later. Min-Kyo From khu834 at stanford.edu Wed Jun 23 10:42:48 2010 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Wed, 23 Jun 2010 10:42:48 -0700 Subject: Raith free 5-8pm Message-ID: Sample not ready -------------- next part -------------- An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Wed Jun 23 10:47:04 2010 From: gshambat at stanford.edu (Gary Shambat) Date: Wed, 23 Jun 2010 10:47:04 -0700 (PDT) Subject: Raith free 5-8pm In-Reply-To: Message-ID: <1576021745.63931.1277315224706.JavaMail.root@zm01.stanford.edu> Taken, also now releasing 22:30-3:00 since I have the earlier slot. ----- Original Message ----- From: "Kevin Chih-Yao Huang" To: raith at snf.stanford.edu Sent: Wednesday, June 23, 2010 10:42:48 AM Subject: Raith free 5-8pm Sample not ready From hdonglee at stanford.edu Wed Jun 23 11:01:08 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Wed, 23 Jun 2010 11:01:08 -0700 (PDT) Subject: Raith free, 10:30pm(June 24)-12:30am(June 25) Message-ID: <1529527301.64477.1277316068323.JavaMail.root@zm01.stanford.edu> move to another slot Hyung Dong Lee From jwc at snf.stanford.edu Wed Jun 23 14:03:35 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 23 Jun 2010 14:03:35 -0700 Subject: nearly out of ZEP In-Reply-To: References: Message-ID: <4C2276A7.3040005@snf.stanford.edu> I have already ordered a new batch and when that one arrives soon we will order a second bottle as a backup. Seems to me that usage is up from a year ago. ALL Users are requested to be very careful in your usage of this material and try to minimize wasting any amount as it is a very expensive resist material. When possible you should coat several substrates and use the full amount your withdrawn into the syringe and not just waste the unused material. (Please NEVER ever return any sample or unused material back to the source bottle.) Once applied to a wafer the material remains fine for EBL purposes for years... Best, James Conway On 6/20/2010 9:57 PM, Alex Neuhausen wrote: > Hi James, > Just wanted to let you know that there's about 1 ml of ZEP 520A left > in the bottle. > Best, > Alex > > Alex Neuhausen > PhD Candidate Electrical Engineering > Goldhaber-Gordon Lab > 476 Lomita Mall > Stanford, CA 94305 > Office: 650-725-2047 > Cell: 650-776-5672 From hdonglee at stanford.edu Wed Jun 23 17:11:36 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Wed, 23 Jun 2010 17:11:36 -0700 (PDT) Subject: raith free 8pm - 10:30pm Message-ID: <516145448.74598.1277338296257.JavaMail.root@zm01.stanford.edu> Sorry for late notice. Process flow has been delayed. Hyung Dong Lee From gshambat at stanford.edu Wed Jun 23 17:17:35 2010 From: gshambat at stanford.edu (Gary Shambat) Date: Wed, 23 Jun 2010 17:17:35 -0700 (PDT) Subject: raith free 8pm - 10:30pm In-Reply-To: <516145448.74598.1277338296257.JavaMail.root@zm01.stanford.edu> Message-ID: <560126446.74686.1277338655560.JavaMail.root@zm01.stanford.edu> Taken. ----- Original Message ----- From: "Hyung Dong Lee" To: "raith" Sent: Wednesday, June 23, 2010 5:11:36 PM Subject: raith free 8pm - 10:30pm Sorry for late notice. Process flow has been delayed. Hyung Dong Lee From kodama at stanford.edu Thu Jun 24 05:29:18 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Thu, 24 Jun 2010 05:29:18 -0700 (PDT) Subject: raith free till 8:00 am Message-ID: <423831085.134630.1277382558738.JavaMail.root@zm09.stanford.edu> I am so sorry for the delay, the sample will not be ready till then. From hdonglee at stanford.edu Thu Jun 24 09:23:19 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Thu, 24 Jun 2010 09:23:19 -0700 (PDT) Subject: Raith free 6pm -8pm today Message-ID: <1738844414.82244.1277396599349.JavaMail.root@zm01.stanford.edu> Samples won't be ready. Hyung Dong Lee From jwc at snf.stanford.edu Thu Jun 24 10:27:45 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 24 Jun 2010 10:27:45 -0700 Subject: All USERS please be more careful in your coral reservations. If you are not ready to write on your samples simply don't make the Coral reservation. Message-ID: <4C239591.4020006@snf.stanford.edu> An HTML attachment was scrubbed... URL: From gdiankov at stanford.edu Thu Jun 24 11:07:01 2010 From: gdiankov at stanford.edu (Georgi Diankov) Date: Thu, 24 Jun 2010 11:07:01 -0700 (PDT) Subject: Raith free today, Thursday, 8 - 10:30 pm Message-ID: <1322063217.174378.1277402821729.JavaMail.root@zm07.stanford.edu> Samples will be delayed. Sorry for the late notice. From jwc at snf.stanford.edu Thu Jun 24 11:17:16 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 24 Jun 2010 11:17:16 -0700 Subject: Ebeam Hitachi HL-700F Status Update: near perfect stitching and excellent resolution on tool during exposures this week Message-ID: <4C23A12C.6080400@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: moz-screenshot.png Type: image/png Size: 263976 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: HL700RESO.jpg Type: image/jpeg Size: 131016 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Jun 24 13:16:33 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 24 Jun 2010 13:16:33 -0700 Subject: JWC will be starting my session today at 2:00PM Message-ID: <4C23BD21.6020708@snf.stanford.edu> JWC will be starting my session today at 2:00PM instead of the normal 1:00 start time. We will want to use the remaining time of our session. JWC From toecutter4ranger at gmail.com Thu Jun 24 14:50:55 2010 From: toecutter4ranger at gmail.com (James Conway) Date: Thu, 24 Jun 2010 14:50:55 -0700 Subject: XR-1541 a new HSQ resist from Dow replacing FoX-12 formula several wafers available to test Message-ID: Good Afternoon: We recently received a new batch of the new Hydrogen Silsequioxane (HSQ) formula by Dow called XR-1541. Currently I am characterizing this batch of material and defining a process recipe for the Ebeam Lab. I have already spun up and measured thickness uniformity on about a dozen substrates with targeted thickness of 100 nm. I have several remaining wafers available for you to test out this material on either 100 mm <100> n+ B prime Silicon or on high quality Double Polished Fused Silica (Quartz) substrates with a 30/20 dig and scratch specification. These all were prepared during this weeks' 'Take a Spin with Me' class and should be suitable for EBL for about another week before the material on the wafers starts to degrade. Should you desire to test out this material and contribute to the Process Sheet definition with your data, please see me in the Ebeam lab this afternoon. You may also call me by phone tomorrow or over the weekend. My wafers written this week on EBEAM, the Hitachi HL-700F are also available for your inspection and review should you desire to take a look at them. Thank you for your interest in Ebeam Technologies here at SNF! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From khu834 at stanford.edu Fri Jun 25 10:23:07 2010 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Fri, 25 Jun 2010 10:23:07 -0700 Subject: Raith free Sat 1-4pm Message-ID: Equipment schedule conflict, switched to Sunday session -------------- next part -------------- An HTML attachment was scrubbed... URL: From dlee76 at stanford.edu Fri Jun 25 10:36:35 2010 From: dlee76 at stanford.edu (Donkoun Lee) Date: Fri, 25 Jun 2010 10:36:35 -0700 (PDT) Subject: Release my reservation from 11:00 to 16:30 today [Raith] Message-ID: <1850539894.117281.1277487395251.JavaMail.root@zm03.stanford.edu> Hi all: I am so sorry for the late notice. I cannot finish my previous process step due to a system problem. So, I cancel my reservation. Sorry again. Kind, Donkoun Lee -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From kcbalram at stanford.edu Fri Jun 25 14:13:29 2010 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Fri, 25 Jun 2010 14:13:29 -0700 (PDT) Subject: Raith Free till 5:00 PM Message-ID: <2120541610.120968.1277500409194.JavaMail.root@zm06.stanford.edu> Finished early.... From mkseo at stanford.edu Sat Jun 26 16:26:45 2010 From: mkseo at stanford.edu (Min-Kyo Seo) Date: Sat, 26 Jun 2010 16:26:45 -0700 (PDT) Subject: raith free today from 9:00 pm to 12:00pm Message-ID: <142196966.402213.1277594805231.JavaMail.root@zm08.stanford.edu> samples not ready Sorry for the late notice Min-Kyo From kodama at stanford.edu Sun Jun 27 22:00:00 2010 From: kodama at stanford.edu (Takashi Kodama) Date: Sun, 27 Jun 2010 22:00:00 -0700 (PDT) Subject: raith release from 4:30 am to 7:00 am Message-ID: <712643376.217283.1277701200391.JavaMail.root@zm09.stanford.edu> Sorry, Sample will not be ready till then. From khu834 at stanford.edu Sun Jun 27 23:46:07 2010 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Sun, 27 Jun 2010 23:46:07 -0700 Subject: need to reset load lock error Message-ID: I did not seal the vacuum during unload. Can someone reset the load lock error? Thank you. Regards, Kevin CY Huang -------------- next part -------------- An HTML attachment was scrubbed... URL: From bucklesm at stanford.edu Mon Jun 28 09:52:26 2010 From: bucklesm at stanford.edu (Sonia Mary Buckley) Date: Mon, 28 Jun 2010 09:52:26 -0700 (PDT) Subject: RAITH free 2PM to 7PM today In-Reply-To: <103568304.227525.1277743795647.JavaMail.root@zm09.stanford.edu> Message-ID: <1100694852.227656.1277743946678.JavaMail.root@zm09.stanford.edu> I'm sorry for the late notice. Sonia From bryane at stanford.edu Wed Jun 30 10:55:38 2010 From: bryane at stanford.edu (Bryan Christopher Ellis) Date: Wed, 30 Jun 2010 10:55:38 -0700 (PDT) Subject: Raith free until 1pm Message-ID: <397917406.190233.1277920538439.JavaMail.root@zm02.stanford.edu> We are out of ZEP so I can't use my reservation. Bryan From hdonglee at stanford.edu Wed Jun 30 10:58:56 2010 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Wed, 30 Jun 2010 10:58:56 -0700 (PDT) Subject: using early session, released 6pm-8pm session Message-ID: <1346081227.177867.1277920736834.JavaMail.root@zm01.stanford.edu> I am using 11:00am - 1pm session, so releasing my reservation(6pm-8pm). Thanks, Hyung Dong From jwc at snf.stanford.edu Wed Jun 30 11:18:22 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 30 Jun 2010 11:18:22 -0700 Subject: Raith free until 1pm In-Reply-To: <397917406.190233.1277920538439.JavaMail.root@zm02.stanford.edu> References: <397917406.190233.1277920538439.JavaMail.root@zm02.stanford.edu> Message-ID: <4C2B8A6E.6090100@snf.stanford.edu> Raith and Ebeam Users: I have qualified films of ZEP-520 on <100> B-prime Silicon 100 mm wafers and on 100 mm 20/40 dig/scratch spec. Quartz (Fused silica) available if anyone is in need. ZEP is on order and should arrive any day it was shipped from Japan on 6-21-10. FYI : Espacer is also coming soon... Please be frugal in usage of these expensive engineering materials. We are adjusting our order threshold points to accommodate the increased usage of these materials in the SNF clean room. James Conway On 6/30/2010 10:55 AM, Bryan Christopher Ellis wrote: > We are out of ZEP so I can't use my reservation. > > Bryan From jwc at snf.stanford.edu Wed Jun 30 11:20:00 2010 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 30 Jun 2010 11:20:00 -0700 Subject: using early session, released 6pm-8pm session In-Reply-To: <1346081227.177867.1277920736834.JavaMail.root@zm01.stanford.edu> References: <1346081227.177867.1277920736834.JavaMail.root@zm01.stanford.edu> Message-ID: <4C2B8AD0.8060307@snf.stanford.edu> FYI I have the 1:00 to 6:00 PM RAITH session and hope to be finished early and can share the ride loading at about 1:15 PM. I hope to finish about 5 - 5:30 PM... James On 6/30/2010 10:58 AM, Hyung Dong Lee wrote: > I am using 11:00am - 1pm session, so releasing my reservation(6pm-8pm). > > Thanks, > > Hyung Dong From hailiang at stanford.edu Wed Jun 30 11:52:13 2010 From: hailiang at stanford.edu (Hailiang Wang) Date: Wed, 30 Jun 2010 11:52:13 -0700 (PDT) Subject: raith released tonight 10pm-1am Message-ID: <824234373.206091.1277923933681.JavaMail.root@zm06.stanford.edu>