Raith - loadlock failure

ToeCutter toecutter4ranger at gmail.com
Sun Mar 28 09:19:04 PDT 2010


If you return to the Ebeam lab give me a call and we can try to clear  
the errors

James

On Mar 27, 2010, at 8:50 PM, Soogine Chong <sgchong at stanford.edu> wrote:

>
>
> ---------- Forwarded message ----------
> From: Soogine Chong <sgchong at stanford.edu>
> Date: Sat, Mar 27, 2010 at 8:49 PM
> Subject: Re: Raith - loadlock failure
> To: Kelley Rivoire <krivoire at stanford.edu>
> Cc: James Conway <jwc at snf.stanford.edu>, Bryan Ellis <bryane at stanford.edu 
> >, jesselu at stanford.edu, kocabas at stanford.edu
>
>
> Hi,
>
> Kelley, thanks for the reply.
>
> I guess there are two things that need to be done:
> 1. Resetting the loadlock error by an administrator
> 2. Bringing raith back to the up mode
>
> Can these be done without James physically being in the lab?  If so,  
> please let me know if there is anything I can do to help bring the  
> tool back up.  I'd hate to have the tool idle during the entire  
> weekend....
>
> Thanks,
> Soogine.
>
> On Sat, Mar 27, 2010 at 7:53 AM, Kelley Rivoire  
> <krivoire at stanford.edu> wrote:
> hi Soogine,
>
> Sorry, I wasn't awake when you sent this.
>
> John Liu had a similar problem Thursday, which I was able to help  
> him clear. However, since the tool is in shutdown mode now, I  
> suppose nothing can be done until James is back.
>
> Kelley
>
>
> On Sat, Mar 27, 2010 at 1:43 AM, Soogine Chong  
> <sgchong at stanford.edu> wrote:
> I will hang around in the fab for about 10 minutes or so, so if  
> you're awake, please give me a call at 650-804-8556.  Thanks!
>
> -Soogine.
>
>
> On Sat, Mar 27, 2010 at 1:42 AM, Soogine Chong  
> <sgchong at stanford.edu> wrote:
> Hi all,
>
> I had issues with pumping down the loadlock.  The turbo pump made a  
> loud noise for longer than usual (I did hold down the cover), and  
> raith gave me a loadlock pump error message.  After 2-3 attempts of  
> "retry", I pressed "cancel" (which I found out later that it was  
> something I shouldn't have done...).
>
> I hope this can be easily fixed soon....  Sorry for the  
> inconvenience this may cause.
>
> -Soogine.
>
> -- 
> Soogine Chong
> Stanford University
> PhD candidate in Electrical Engineering
> e-mail: sgchong at stanford.edu
> mobile: +1-650-804-8556
>
>
>
> -- 
> Soogine Chong
> Stanford University
> PhD candidate in Electrical Engineering
> e-mail: sgchong at stanford.edu
> mobile: +1-650-804-8556
>
>
>
>
> -- 
> Soogine Chong
> Stanford University
> PhD candidate in Electrical Engineering
> e-mail: sgchong at stanford.edu
> mobile: +1-650-804-8556
>
>
>
> -- 
> Soogine Chong
> Stanford University
> PhD candidate in Electrical Engineering
> e-mail: sgchong at stanford.edu
> mobile: +1-650-804-8556
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