Problem fixed although still in shutdown mode

Soogine Chong sgchong at
Sun Mar 28 18:43:07 PDT 2010

Hi all, 

The loadlock error has been cleared, and it looks like the tool is usable now.  The tool is still in shutdown mode, though, and James is not available to put it out of shutdown mode.  Maybe you can use the tool with James' permission?  Wanted to let everyone know, in case there is any urgent work that needs to be done.


Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at
mobile: +1-650-804-8556

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