Question about the selectivity between ZEP520A (or 5% 950K PMMA) and KOH(30%)

Donkoun Lee dlee76 at stanford.edu
Thu Oct 7 22:11:40 PDT 2010


Hi all:

Dose anybody have experience of the e-beam process with ZEP520A (or PMMAA)
followed by the KOH wet etching process? If you have, may I share the
experience?

Thank you.
Kind Regards,
Donkoun Lee

-- 
Donkoun Lee
 
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984





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