From kodama at stanford.edu  Wed Sep  1 19:44:31 2010
From: kodama at stanford.edu (Takashi Kodama)
Date: Wed, 1 Sep 2010 19:44:31 -0700 (PDT)
Subject: raith free till 21:30 pm
Message-ID: <1003202338.574672.1283395471067.JavaMail.root@zm09.stanford.edu>


Finished earlier.


From Shifeng.Li at lifetech.com  Thu Sep  2 14:09:22 2010
From: Shifeng.Li at lifetech.com (Li, Shifeng)
Date: Thu, 2 Sep 2010 14:09:22 -0700
Subject: Raith Free from now to 7:00pm today
Message-ID: <E1CA2DFA97D06C468DA1582CA0342FDDD8390916F4@CBD01MAIL02.ads.invitrogen.net>

sorry for late notice because my sample cannot get ready by then.
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From mkseo at stanford.edu  Fri Sep  3 00:26:08 2010
From: mkseo at stanford.edu (Min-Kyo Seo)
Date: Fri, 3 Sep 2010 00:26:08 -0700 (PDT)
Subject: raith free till 2:30 am finished early
Message-ID: <1221769924.868696.1283498768972.JavaMail.root@zm08.stanford.edu>


 raith free till 2:30 am finished early
 
 Min-Kyo


From arkam at stanford.edu  Fri Sep  3 09:20:36 2010
From: arkam at stanford.edu (Arka Majumdar)
Date: Fri, 3 Sep 2010 09:20:36 -0700 (PDT)
Subject: free from 7 to midnight on friday
Message-ID: <1523920204.547417.1283530836134.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From bucklesm at stanford.edu  Fri Sep  3 09:25:16 2010
From: bucklesm at stanford.edu (Sonia Mary Buckley)
Date: Fri, 3 Sep 2010 09:25:16 -0700 (PDT)
Subject: free from midnight to 5 AM
In-Reply-To: <29867_1283530836_4C812054_29867_2960_2_1523920204.547417.1283530836134.JavaMail.root@zm06.stanford.edu>
Message-ID: <1407530710.634752.1283531116911.JavaMail.root@zm09.stanford.edu>

Took the earlier slot

----- Original Message -----
From: "Arka Majumdar" <arkam at stanford.edu>
To: "raith" <raith at snf.stanford.edu>
Sent: Friday, September 3, 2010 9:20:36 AM
Subject: free from 7 to midnight on friday



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From kodama at stanford.edu  Fri Sep  3 09:57:11 2010
From: kodama at stanford.edu (Takashi Kodama)
Date: Fri, 3 Sep 2010 09:57:11 -0700 (PDT)
Subject: raith release 16:30 pm to 19:00 pm today
Message-ID: <320077993.636488.1283533031933.JavaMail.root@zm09.stanford.edu>

I took later slots, thanks.


From kodama at stanford.edu  Mon Sep  6 09:47:59 2010
From: kodama at stanford.edu (Takashi Kodama)
Date: Mon, 6 Sep 2010 09:47:59 -0700 (PDT)
Subject: raith release from 14:00 to 16:30pm
Message-ID: <2061263021.695960.1283791679444.JavaMail.root@zm09.stanford.edu>

I finished my process on early slot.
Thanks,


From krivoire at stanford.edu  Mon Sep  6 14:19:41 2010
From: krivoire at stanford.edu (Kelley Rivoire)
Date: Mon, 6 Sep 2010 14:19:41 -0700 (PDT)
Subject: raith free tomorrow 3:30-8:30 pm
Message-ID: <2131050862.261038.1283807981014.JavaMail.root@zm02.stanford.edu>

another tool is down

Kelley


From gshambat at stanford.edu  Tue Sep  7 13:49:07 2010
From: gshambat at stanford.edu (Gary Shambat)
Date: Tue, 7 Sep 2010 13:49:07 -0700 (PDT)
Subject: Raith free now finished early
Message-ID: <962262660.281791.1283892547604.JavaMail.root@zm01.stanford.edu>



From Shifeng.Li at lifetech.com  Wed Sep  8 07:58:45 2010
From: Shifeng.Li at lifetech.com (Li, Shifeng)
Date: Wed, 8 Sep 2010 07:58:45 -0700
Subject: Raith free from 2:30pm to 7:30pm today
Message-ID: <E1CA2DFA97D06C468DA1582CA0342FDDD83A28B5F0@CBD01MAIL02.ads.invitrogen.net>


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From gshambat at stanford.edu  Thu Sep  9 06:33:06 2010
From: gshambat at stanford.edu (Gary Shambat)
Date: Thu, 9 Sep 2010 06:33:06 -0700 (PDT)
Subject: Free 9:30-11 sample not ready
Message-ID: <2005661652.327217.1284039186447.JavaMail.root@zm01.stanford.edu>



From kodama at stanford.edu  Thu Sep  9 06:52:55 2010
From: kodama at stanford.edu (Takashi Kodama)
Date: Thu, 9 Sep 2010 06:52:55 -0700 (PDT)
Subject: raith free now
Message-ID: <561689282.820182.1284040375037.JavaMail.root@zm09.stanford.edu>

Sorry for the delay, I could not prepare gds files for today's litho.


From mkseo at stanford.edu  Thu Sep  9 14:10:56 2010
From: mkseo at stanford.edu (Min-Kyo Seo)
Date: Thu, 9 Sep 2010 14:10:56 -0700 (PDT)
Subject: raith free till 5:00pm finished early
Message-ID: <769165747.412177.1284066656740.JavaMail.root@zm08.stanford.edu>


 raith free till 5:00pm, since I started early.

 Min-Kyo


From dlee76 at stanford.edu  Thu Sep  9 23:59:58 2010
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Thu, 9 Sep 2010 23:59:58 -0700
Subject: Reservation for raith
Message-ID: <7BD00166-7856-4E05-8B2D-2E6A8586EF81@stanford.edu>

Hi all,

I will start my session 30 minutes later.
My original reservation was fro 12:00 am.

Thank you.
Kind Regards,
Don

Donkoun Lee
Ph.D candidate
Prof. Wang's group
Mat. Sci. & Eng. Stanford Uni.


From arkam at stanford.edu  Fri Sep 10 16:25:49 2010
From: arkam at stanford.edu (Arka Majumdar)
Date: Fri, 10 Sep 2010 16:25:49 -0700 (PDT)
Subject: The software crashed while I am writing..and the whole computer
 froze--so I had to restart the raith computer
Message-ID: <790255746.697644.1284161149679.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From jwc at snf.stanford.edu  Mon Sep 13 14:16:51 2010
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 13 Sep 2010 14:16:51 -0700
Subject: question
In-Reply-To: <AANLkTim4s8XLkHJux9h6K6hNRRQKBWhnkoxk5dE06x=8@mail.gmail.com>
References: <AANLkTim4s8XLkHJux9h6K6hNRRQKBWhnkoxk5dE06x=8@mail.gmail.com>
Message-ID: <4C8E94C3.10806@snf.stanford.edu>

  Hello Xinran and Raith Community:

We do not have the Fixed Beam Moving Stage (FBMS) option installed on 
our system as it is running  the older version 4 Software for the RAITH 
150.  I also do not have laser height detection module option that may 
also be needed for this capability.

FBMS has been added to a number of RAITH 150 systems and is standard 
option on the version 5 and higher software and more recent RAITH 150 
Two and E-Line hardware configurations.  The way this module works is 
the Stage is scanned and is moving during the exposure operation.  The 
electron beam is unblanked and scanned in circular beam paths similar to 
when writing RAITH circles.   While the stage moves  larger areas are 
rapidly exposed to the dose specified per unit area.

This is very useful for writing waveguides and larger patterns such as 
in photonic crystals and plasmonic waveguide devices.  Its a useful 
option to have but only for some specific area write applications.

Great Question, soon to be a FAQ...

James Conway



On 8/6/2010 6:07 PM, Xinran Wang wrote:
> Hey James,
>
> I have question on raith. Is our system a fixed-beam-moving-stage 
> system? I was looking at the raith information and it seems that this 
> is not the standard configuration and needs a extra module.
>
> Thanks!
> Xinran


From ahazeghi at stanford.edu  Mon Sep 13 14:20:23 2010
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Mon, 13 Sep 2010 14:20:23 -0700
Subject: Jack hammering on Via Pueblo ....
In-Reply-To: <1162587A-BE79-4A25-AC78-42314A9548E5@gmail.com>
References: <2524_1284395638_4C8E5276_2524_279_1_4C8E5231.6040809@stanford.edu> <1162587A-BE79-4A25-AC78-42314A9548E5@gmail.com>
Message-ID: <0f3301cb5389$7a86f140$6f94d3c0$@edu>

James,
As of now RAITH is not usable for high-res SEMing due to high levels of
vibration. It is also not possible to do perform align write field because
the image is distorted. I am cancelling the rest of my session.


Thanks,
Arash



----------------------------------------------------------------------------
------
Arash Hazeghi

PhD Candidate
Stanford Center for Integrated Systems
CIS-X 300, 420 Via Palou Mall, 
Stanford, CA 94305

phone: +1-650-725-0418
web: http://www.stanford.edu/~ahazeghi




-----Original Message-----
From: ToeCutter [mailto:toecutter4ranger at gmail.com] 
Sent: Monday, September 13, 2010 1:02 PM
To: John Shott
Cc: labmembers
Subject: Re: Jack hammering on Via Pueblo ....

While the vibration may be visible on the SEM imaging section of the  
Raith during normal SEM operations, and all of our other SEM's images  
as well, it should not be evident during any Ebeam Lithography writes  
due to the very short dwell times when the system unblanks and is  
actually performing an exposure operation.

If anyone observes any artifact that could be attributed to these  
vibrations, please send me an SEM image and report and claim a free  
lunch from me!

Thank you,

James Conway


On Sep 13, 2010, at 9:32 AM, John Shott <shott at stanford.edu> wrote:

> SNF Lab Members:
>
> As many of you have learned, there is significant jack hammering  
> activity on Via Pueblo this morning.  We were supposed to receive  
> advance warning of when this would occur and did not.  We are  
> working with Stanford Project Management and McGuire & Hestor to try  
> to get better warning information in the future.
>
> This activity may disrupt operations of the Raith, SEMs and high- 
> resolution optical lithography.
>
> We apologize for this inconvenience and will hope to get more  
> advance warning of activities of this type in the future.
>
> John
>
>
>
>



From toecutter4ranger at gmail.com  Tue Sep 14 07:40:45 2010
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Tue, 14 Sep 2010 07:40:45 -0700
Subject: Jack hammering on Via Pueblo ....
In-Reply-To: <0f3301cb5389$7a86f140$6f94d3c0$@edu>
References: <2524_1284395638_4C8E5276_2524_279_1_4C8E5231.6040809@stanford.edu> <1162587A-BE79-4A25-AC78-42314A9548E5@gmail.com> <0f3301cb5389$7a86f140$6f94d3c0$@edu>
Message-ID: <C8B578D7-C406-44BE-8A24-333CD5FEF566@gmail.com>

Should be able to complete write field alignment if your scan is set  
up properly. Note demolition stops each day about 3:00 PM

We will look into it further this afternoon with users...

Best

James

On Sep 13, 2010, at 2:20 PM, "Arash Hazeghi" <ahazeghi at stanford.edu>  
wrote:

> James,
> As of now RAITH is not usable for high-res SEMing due to high levels  
> of
> vibration. It is also not possible to do perform align write field  
> because
> the image is distorted. I am cancelling the rest of my session.
>
>
> Thanks,
> Arash
>
>
>
> --- 
> --- 
> ----------------------------------------------------------------------
> ------
> Arash Hazeghi
>
> PhD Candidate
> Stanford Center for Integrated Systems
> CIS-X 300, 420 Via Palou Mall,
> Stanford, CA 94305
>
> phone: +1-650-725-0418
> web: http://www.stanford.edu/~ahazeghi
>
>
>
>
> -----Original Message-----
> From: ToeCutter [mailto:toecutter4ranger at gmail.com]
> Sent: Monday, September 13, 2010 1:02 PM
> To: John Shott
> Cc: labmembers
> Subject: Re: Jack hammering on Via Pueblo ....
>
> While the vibration may be visible on the SEM imaging section of the
> Raith during normal SEM operations, and all of our other SEM's images
> as well, it should not be evident during any Ebeam Lithography writes
> due to the very short dwell times when the system unblanks and is
> actually performing an exposure operation.
>
> If anyone observes any artifact that could be attributed to these
> vibrations, please send me an SEM image and report and claim a free
> lunch from me!
>
> Thank you,
>
> James Conway
>
>
> On Sep 13, 2010, at 9:32 AM, John Shott <shott at stanford.edu> wrote:
>
>> SNF Lab Members:
>>
>> As many of you have learned, there is significant jack hammering
>> activity on Via Pueblo this morning.  We were supposed to receive
>> advance warning of when this would occur and did not.  We are
>> working with Stanford Project Management and McGuire & Hestor to try
>> to get better warning information in the future.
>>
>> This activity may disrupt operations of the Raith, SEMs and high-
>> resolution optical lithography.
>>
>> We apologize for this inconvenience and will hope to get more
>> advance warning of activities of this type in the future.
>>
>> John
>>
>>
>>
>>
>


From dlee76 at stanford.edu  Tue Sep 14 14:00:55 2010
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Tue, 14 Sep 2010 14:00:55 -0700 (PDT)
Subject: Finished early
Message-ID: <1874189375.72249.1284498055588.JavaMail.root@zm03.stanford.edu>

Hi all.

The raith will be free from now to 15:30.

Thank you.
Best,
Donkoun Lee

-- 
Donkoun Lee
 
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984





From kodama at stanford.edu  Wed Sep 15 05:51:00 2010
From: kodama at stanford.edu (Takashi Kodama)
Date: Wed, 15 Sep 2010 05:51:00 -0700 (PDT)
Subject: raith free from 12:30 to 14:00 today
Message-ID: <801731382.147243.1284555060148.JavaMail.root@zm09.stanford.edu>

I finished my process on early slot.
Thanks,


From mkseo at stanford.edu  Wed Sep 15 09:57:39 2010
From: mkseo at stanford.edu (Min-Kyo Seo)
Date: Wed, 15 Sep 2010 09:57:39 -0700 (PDT)
Subject: raith free today from 10:00pm to 12:30 am
Message-ID: <98065833.49407.1284569859573.JavaMail.root@zm08.stanford.edu>


 samples not ready

 sorry for the late notice

 Min-Kyo


From mkseo at stanford.edu  Fri Sep 17 16:27:11 2010
From: mkseo at stanford.edu (Min-Kyo Seo)
Date: Fri, 17 Sep 2010 16:27:11 -0700 (PDT)
Subject: raith free today from 9:00pm to 12:00am
Message-ID: <196208517.31757.1284766031333.JavaMail.root@zm08.stanford.edu>


 raith free today from 9:00pm to 12:00am 

 samples cannot be ready.

 Really sorry for the late notice.

 Min-Kyo


From sqliu at stanford.edu  Sun Sep 19 16:53:08 2010
From: sqliu at stanford.edu (John Liu)
Date: Sun, 19 Sep 2010 16:53:08 -0700
Subject: Raith free 9:30pm-1:30am
Message-ID: <CE120A5B05D74C1CAFB16E1D23251EB6@PC>

Sorry for the late notice.  Samples won't be ready.
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From dlee76 at stanford.edu  Tue Sep 21 03:04:31 2010
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Tue, 21 Sep 2010 03:04:31 -0700 (PDT)
Subject: Shutdown the raith systemq
Message-ID: <1933841614.229109.1285063471269.JavaMail.root@zm03.stanford.edu>

Hi all:

During the process, suddenly the SEM image was removed. After then, I tried to turn on and off the beam. However, it does not work out. 

So, I decided to unload my samples but, during the unloading process, the loadlock error message came out. Since I do not know exactly how I can solve this problem, I left the system with the error message.

Sorry for the inconvenience.
Kind Regards,
Donkoun Lee

-- 
Donkoun Lee
 
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984





From toecutter4ranger at gmail.com  Tue Sep 21 12:10:40 2010
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Tue, 21 Sep 2010 12:10:40 -0700
Subject: Y motor control speed setting changed in VBD
Message-ID: <337EB46F-553E-4B28-A476-6B4A3C3954EF@gmail.com>

Greetings Raith Users:
Last evening Users encountered spurious problems with motor Y reaching  
upper exchange position in X:Y control.  This problem was identified  
as the Y motor drawing excessive current during these move request  
causing a software compliance error. I have adjusted the Y motor speed  
to a lower value and all is OK for use of the tool, until we can get  
the motor and possibly other parts shipped to us. Raith field service  
is being scheduled soon.

I will continue testing and checking these issues during my session on  
the tool this afternoon 1-6 PM

Thank you for your support!

James 


From arkam at stanford.edu  Tue Sep 21 20:12:06 2010
From: arkam at stanford.edu (Arka Majumdar)
Date: Tue, 21 Sep 2010 20:12:06 -0700 (PDT)
Subject: free till 9---finished early--it seems working fine--
Message-ID: <283343647.268664.1285125126749.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From bajcsy at stanford.edu  Thu Sep 23 01:33:58 2010
From: bajcsy at stanford.edu (Michal Bajcsy)
Date: Thu, 23 Sep 2010 01:33:58 -0700 (PDT)
Subject: free 9am-11am thursday
Message-ID: <958621278.483580.1285230838513.JavaMail.root@zm09.stanford.edu>

sample not ready


From bryane at stanford.edu  Thu Sep 23 08:48:29 2010
From: bryane at stanford.edu (Bryan Christopher Ellis)
Date: Thu, 23 Sep 2010 08:48:29 -0700 (PDT)
Subject: Raith free 11am-1pm
Message-ID: <559198245.297102.1285256909511.JavaMail.root@zm02.stanford.edu>

Samples not ready.

Bryan


From jwc at snf.stanford.edu  Thu Sep 23 11:40:18 2010
From: jwc at snf.stanford.edu (James W. Conway)
Date: Thu, 23 Sep 2010 11:40:18 -0700
Subject: Three Beams --- EIPBN 2011 1st Call for Papers
Message-ID: <4C9B9F12.1040602@snf.stanford.edu>

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From toecutter4ranger at gmail.com  Thu Sep 23 17:50:32 2010
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Thu, 23 Sep 2010 17:50:32 -0700
Subject: Raith status
Message-ID: <B6F8EB4D-875F-4FF2-B3FC-80585FAD5CAC@gmail.com>

Hi Arka and Raith Users:

Raith is pumping down after a motor replacement
Lev Markov will need an hour or two to finish his motor stage test and  
pump sys chamber down to set point to allow EHT enable. The gun has  
been up the whole time so no further delay will be necessary before  
emission will stabilize.  You will be good to go when lev leaves.
Call me if you have any questions or problems.

Have a nice evening,

James 
    


From arkam at stanford.edu  Thu Sep 23 19:51:30 2010
From: arkam at stanford.edu (Arka Majumdar)
Date: Thu, 23 Sep 2010 19:51:30 -0700 (PDT)
Subject: The raith is still pumping..and I could not find lev Markov--so I
 am releasing my time
Message-ID: <227170925.342427.1285296690062.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From altamash at stanford.edu  Thu Sep 23 23:08:22 2010
From: altamash at stanford.edu (Altamash Janjua)
Date: Thu, 23 Sep 2010 23:08:22 -0700 (PDT)
Subject: Raith released 7AM to 1 PM tomorrow morning
In-Reply-To: <906388741.32090.1285308355977.JavaMail.root@zm01.stanford.edu>
Message-ID: <1904616129.32151.1285308502947.JavaMail.root@zm01.stanford.edu>

Thanks,

Altamash


From lyjiao at stanford.edu  Fri Sep 24 14:47:34 2010
From: lyjiao at stanford.edu (Liying Jiao)
Date: Fri, 24 Sep 2010 14:47:34 -0700 (PDT)
Subject: Raith free now until 6 pm
In-Reply-To: <1132675283.523129.1285364631167.JavaMail.root@zm08.stanford.edu>
Message-ID: <885002858.523883.1285364854333.JavaMail.root@zm08.stanford.edu>

Finished earlier.

Liying


From khu834 at stanford.edu  Fri Sep 24 15:55:33 2010
From: khu834 at stanford.edu (Kevin Chih-Yao Huang)
Date: Fri, 24 Sep 2010 15:55:33 -0700
Subject: Raith free tomorrow 2-5pm
Message-ID: <AANLkTim-bQ8mJPF6zskjfmSq7k5S97iixiz8-Gi+To38@mail.gmail.com>

sample not ready.
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From arkam at stanford.edu  Mon Sep 27 19:10:25 2010
From: arkam at stanford.edu (Arka Majumdar)
Date: Mon, 27 Sep 2010 19:10:25 -0700 (PDT)
Subject: free till 8-30 finished early
Message-ID: <155141053.444483.1285639825597.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From dlee76 at stanford.edu  Wed Sep 29 10:14:48 2010
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Wed, 29 Sep 2010 10:14:48 -0700
Subject: Delay my process
Message-ID: <C8C8C218.8570%dlee76@stanford.edu>

Hi all:

Since I had some problems with my process, I will start my session from
11:30 AM, instead of 10:00 AM.

Thank you,
Best,
Donkoun Lee

-- 
Donkoun Lee
 
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984




From kodama at stanford.edu  Thu Sep 30 06:40:21 2010
From: kodama at stanford.edu (Takashi Kodama)
Date: Thu, 30 Sep 2010 06:40:21 -0700 (PDT)
Subject: raith free till 11:00 am
Message-ID: <725668940.6539.1285854021178.JavaMail.root@zm09.stanford.edu>

Sorry for the late notice. Sample is not ready.


From jwc at snf.stanford.edu  Thu Sep 30 14:22:44 2010
From: jwc at snf.stanford.edu (James W. Conway)
Date: Thu, 30 Sep 2010 14:22:44 -0700
Subject: If anyone has USB dongle please return them to me asap
Message-ID: <4CA4FFA4.4050603@snf.stanford.edu>

  Hello:

If anyone took a USB dongle from my desk while I was a away on vacation 
last month, or still has one checked out from before I left, could you 
please return it to me ASAP?

Thank you,

JWC




From toecutter4ranger at gmail.com  Thu Sep 30 17:16:56 2010
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Thu, 30 Sep 2010 17:16:56 -0700
Subject: Finished early 
Message-ID: <C34F354B-A047-4A8D-A5D2-DF7C5E6045B6@gmail.com>

System is available for next user
Best
JWC