Jack hammering on Via Pueblo ....

ToeCutter toecutter4ranger at gmail.com
Tue Sep 14 07:40:45 PDT 2010


Should be able to complete write field alignment if your scan is set  
up properly. Note demolition stops each day about 3:00 PM

We will look into it further this afternoon with users...

Best

James

On Sep 13, 2010, at 2:20 PM, "Arash Hazeghi" <ahazeghi at stanford.edu>  
wrote:

> James,
> As of now RAITH is not usable for high-res SEMing due to high levels  
> of
> vibration. It is also not possible to do perform align write field  
> because
> the image is distorted. I am cancelling the rest of my session.
>
>
> Thanks,
> Arash
>
>
>
> --- 
> --- 
> ----------------------------------------------------------------------
> ------
> Arash Hazeghi
>
> PhD Candidate
> Stanford Center for Integrated Systems
> CIS-X 300, 420 Via Palou Mall,
> Stanford, CA 94305
>
> phone: +1-650-725-0418
> web: http://www.stanford.edu/~ahazeghi
>
>
>
>
> -----Original Message-----
> From: ToeCutter [mailto:toecutter4ranger at gmail.com]
> Sent: Monday, September 13, 2010 1:02 PM
> To: John Shott
> Cc: labmembers
> Subject: Re: Jack hammering on Via Pueblo ....
>
> While the vibration may be visible on the SEM imaging section of the
> Raith during normal SEM operations, and all of our other SEM's images
> as well, it should not be evident during any Ebeam Lithography writes
> due to the very short dwell times when the system unblanks and is
> actually performing an exposure operation.
>
> If anyone observes any artifact that could be attributed to these
> vibrations, please send me an SEM image and report and claim a free
> lunch from me!
>
> Thank you,
>
> James Conway
>
>
> On Sep 13, 2010, at 9:32 AM, John Shott <shott at stanford.edu> wrote:
>
>> SNF Lab Members:
>>
>> As many of you have learned, there is significant jack hammering
>> activity on Via Pueblo this morning.  We were supposed to receive
>> advance warning of when this would occur and did not.  We are
>> working with Stanford Project Management and McGuire & Hestor to try
>> to get better warning information in the future.
>>
>> This activity may disrupt operations of the Raith, SEMs and high-
>> resolution optical lithography.
>>
>> We apologize for this inconvenience and will hope to get more
>> advance warning of activities of this type in the future.
>>
>> John
>>
>>
>>
>>
>



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