Shutdown the raith systemq
dlee76 at stanford.edu
Tue Sep 21 03:04:31 PDT 2010
During the process, suddenly the SEM image was removed. After then, I tried to turn on and off the beam. However, it does not work out.
So, I decided to unload my samples but, during the unloading process, the loadlock error message came out. Since I do not know exactly how I can solve this problem, I left the system with the error message.
Sorry for the inconvenience.
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045
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