From arkam at stanford.edu Wed Aug 3 08:41:24 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Wed, 3 Aug 2011 08:41:24 -0700 (PDT) Subject: free till 10---finished early Message-ID: <666611772.473169.1312386084494.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From sgchong at stanford.edu Thu Aug 4 00:07:17 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Thu, 4 Aug 2011 00:07:17 -0700 (PDT) Subject: raith free Saturday 8/6 6-9PM Message-ID: <234331019.837712.1312441637366.JavaMail.root@zm07.stanford.edu> -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From khu834 at stanford.edu Thu Aug 4 21:01:20 2011 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Thu, 4 Aug 2011 21:01:20 -0700 Subject: done early, Raith free till 11pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From sgchong at stanford.edu Fri Aug 5 20:22:42 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Fri, 5 Aug 2011 20:22:42 -0700 (PDT) Subject: Raith Starting late at 9:30 Message-ID: <1169600796.933770.1312600962848.JavaMail.root@zm07.stanford.edu> -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From tasyurek at stanford.edu Sun Aug 7 11:57:43 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Sun, 7 Aug 2011 11:57:43 -0700 (PDT) Subject: Raith available 4-6pm today. Message-ID: <793325906.390966.1312743463338.JavaMail.root@zm02.stanford.edu> From jwc at snf.stanford.edu Tue Aug 9 13:04:20 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 09 Aug 2011 13:04:20 -0700 Subject: ALL RAITH DONGLES NEED TO BE RETURNED TO ME. CHECK YOUR DRAWERS PLEASE... Message-ID: <4E4192C4.8030408@snf.stanford.edu> GREETINGS RAITH USERS: ALL RAITH DONGLES NEED TO BE RETURNED TO ME TODAY OR TOMORROW AT THE LATEST. CHECK AND SEE IF YOU HAVE FORGOTTEN TO RETURN A RAITH DONGLE TO ME AND BRING IT BACK NOW! I NEED TO RETURN ALL FIVE DONGLES TO RAITH BEFORE I CAN TURN ON THE UPGRADED SYSTEM. THE OLD SOFTWARE WILL NOT WORK ON THE NEW SYSTEM.... THANK YOU, JAMES CONWAY From jwc at snf.stanford.edu Wed Aug 10 16:50:25 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 10 Aug 2011 16:50:25 -0700 Subject: NEW THREAD Name: HSQ Development notes ... WAS Re: cautions on HSQ develop and different dose factors for different patterns In-Reply-To: References: Message-ID: <4E431941.5080708@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: HSQ_XR-1541_process_v2_2010.doc Type: application/msword Size: 9243136 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 2002Henschel_study hiogh contrast for HSQ.pdf Type: application/pdf Size: 321470 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: J_Yang_K_Berggren_MIT_HSQsaltydevelopment10nmhp.pdf Type: application/pdf Size: 639019 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed Aug 10 17:53:57 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 10 Aug 2011 17:53:57 -0700 Subject: Raith UPGRADE status and several training sessions available to bring you back onto this tool quickly... Message-ID: <4E432825.1000507@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: HOOVER_BMP_150X_small.jpg Type: image/jpeg Size: 32963 bytes Desc: not available URL: From toecutter4ranger at gmail.com Fri Aug 12 13:10:10 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 12 Aug 2011 13:10:10 -0700 Subject: Raith coming on line to users at Midnight tonight Message-ID: Good Afternoon Raith Users The upgrad of the Raith is nearly complete and most users will migrate back to the system easily. While there were some challenges the Raith Team has completed the upgrade and we are now testing and checking the system. I believe KC Balram starts at midnight and he and Carter Lin attended the training yesterday. They are both Raith champions and have the lead for the system for the weekend. I will likely return to SNF Tuesday otherwise Wed. I am available most times by phone and SMS. New procedure: Windows up on both computers with the normal user login: user and you all know the passwd. ;-) Now the best part: NOW YOU Launch the app, column control and control Everything else from the Raith computer only. (read above 3 times please... ... ...) Login in to your Raith User Account with your old login and passwd. Launches the Raith150 app and the LEO side of the platform should also start the login into SMARTSEM automatically Logins on the Leo side of the platform will gave to be reestablished for users. For the weekend use these logins to get on the LEO side of the system: New Users less than 50 hours on tool: Login: Training and the acct passwd is the same. Ask if you forgot. Exp users and you are comfortable on the Raith. Login: testuser passwd: test For the weekend save any files you wish to on the LEO to: C:\users\username.dir\ C:\images\username.dir\ I will finish constructing that systems directory tree and establish your Logins again next week. Quick notes to success: F1 pops up context sensitive Help pages. SMARTSem manual is also in the Lab. Several interfaces have changed: REMCOM is history! Now TCP IP protocols. Everything is screaming fast on communications and operations between the computers and the column control is much improved. Everything can now be performed from the Raith user application. On the right hand side of the application a toolbar takes you to all the normal module windows you are used to seeing. Most have many new features plus all the functions you are used to. Be sure to update focus from the Raith side. You may see a value less than you expect on the Raith computer AFTER pressing adjust. It's a bug in the script we found and it has no impact on exposures, just ignore. The value you see after read is the true value .. (Changes on the LEO side for all other functions can still be performed manually, buts it's faster and esasier from the RAITH side) Writefield alignments can be started from the module window just press EXECUTE and it starts the PLS automatically. You may have to restablish your scan parameters from the defaults. We tried to set up default pages for everyone... Exposure module name changed to Patterning. Tons of new attributes. Follow the usual 'who you going to call ' protocol posted next to system rand we will together see how the weekend goes. Everyone should really be happy with this great upgrade, call me if you need help getting started. ***AND FINALLY, be sure to hold the load lock door down!!! Thank you for your support! James Conway Joe Klingfus and Lev Markov from Raith are here till 10 PM and may also be able to answer your questions. From toecutter4ranger at gmail.com Mon Aug 15 15:00:57 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Mon, 15 Aug 2011 15:00:57 -0700 Subject: Fwd: Raith coming on line to users at Midnight tonight References: Message-ID: I am resending this as a user by phone couldn't find it on the email archive. Please call me if you need help getting started on the system... James Begin forwarded message: > From: ToeCutter > Date: August 12, 2011 1:10:10 PM PDT > To: Ebeam Lab > Cc: Mary Tang , John Shott >, "jwb2005 at stanford.edu" > Subject: Raith coming on line to users at Midnight tonight > > Good Afternoon Raith Users > > The upgrad of the Raith is nearly complete and most users will > migrate back to the system easily. While there were some challenges > the Raith Team has completed the upgrade and we are now testing and > checking the system. > > I believe KC Balram starts at midnight and he and Carter Lin > attended the training yesterday. They are both Raith champions and > have the lead for the system for the weekend. I will likely return > to SNF Tuesday otherwise Wed. > I am available most times by phone and SMS. > > New procedure: > > Windows up on both computers with the normal user login: user and > you all know the passwd. ;-) > > Now the best part: > NOW YOU Launch the app, column control and control Everything else > from the Raith computer only. > (read above 3 times please... ... ...) > > Login in to your Raith User Account with your old login and passwd. > Launches the Raith150 app and the LEO side of the platform should > also start the login into SMARTSEM automatically > > Logins on the Leo side of the platform will gave to be reestablished > for users. > > For the weekend use these logins to get on the LEO side of the system: > > New Users less than 50 hours on tool: > Login: Training and the acct passwd is the same. Ask if you forgot. > > Exp users and you are comfortable on the Raith. Login: testuser > passwd: test > > For the weekend save any files you wish to on the LEO to: > > C:\users\username.dir\ > C:\images\username.dir\ > > I will finish constructing that systems directory tree and establish > your > Logins again next week. > > Quick notes to success: > F1 pops up context sensitive Help pages. SMARTSem manual is also in > the Lab. > > Several interfaces have changed: > > REMCOM is history! Now TCP IP protocols. Everything is screaming > fast on communications and operations between the computers and the > column control is much improved. > > Everything can now be performed from the Raith user application. On > the right hand side of the application a toolbar takes you to all > the normal module windows you are used to seeing. Most have many new > features plus all the functions you are used to. > > Be sure to update focus from the Raith side. You may see a value > less than you expect on the Raith computer AFTER pressing adjust. > It's a bug in the script we found and it has no impact on exposures, > just ignore. The value you see after read is the true value .. > > (Changes on the LEO side for all other functions can still be > performed manually, buts it's faster and esasier from the RAITH side) > > > Writefield alignments can be started from the module window just > press EXECUTE and it starts the PLS automatically. You may have to > restablish your scan parameters from the defaults. We tried to set > up default pages for everyone... > > Exposure module name changed to Patterning. Tons of new attributes. > > Follow the usual 'who you going to call ' protocol posted next to > system rand we will together see how the weekend goes. > Everyone should really be happy with this great upgrade, call me if > you need help getting started. > > ***AND FINALLY, be sure to hold the load lock door down!!! > > Thank you for your support! > > > James Conway > > Joe Klingfus and Lev Markov from Raith are here till 10 PM and may > also be able to answer your questions. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kcbalram at stanford.edu Tue Aug 16 04:21:07 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Tue, 16 Aug 2011 04:21:07 -0700 (PDT) Subject: Error Virtual Beam control Message-ID: <767235316.768761.1313493667791.JavaMail.root@zm06.stanford.edu> Got an error during exposure. Error virtual beam control, stage could not reach position Not exactly sure what went wrong, I have not seen this before. System free for next user. Best, Krishna From arkam at stanford.edu Tue Aug 16 16:24:47 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Tue, 16 Aug 2011 16:24:47 -0700 (PDT) Subject: could not do write field alignment--releasing the time Message-ID: <2002305062.792624.1313537087140.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From jwc at snf.stanford.edu Wed Aug 17 09:36:30 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 17 Aug 2011 09:36:30 -0700 Subject: RAITH Field service will need access to the system this morning Message-ID: <4E4BEE0E.6020005@snf.stanford.edu> Hi Gary and Arka, RAITH Field service will need access to the system this morning to effect repairs and make further adjustments to the RAITH 150 system starting as soon as we can... If possible would you be able to share the ride with me starting at 1:00 for your write(s)? We can work on your writes first and get your accounts set up and I can continue along after you. Sorry for the late notice I was unable to reach anyone anywhere from my campsite earlier this week in the Sierra Nevada far off the grid... just returned last evening... Thanks, James From jwc at snf.stanford.edu Wed Aug 17 09:43:46 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 17 Aug 2011 09:43:46 -0700 Subject: New Thread Name: RAITH TRAINING was ====> Re: E-beam Training In-Reply-To: References: Message-ID: <4E4BEFC2.4000603@snf.stanford.edu> Thursday or Friday may be better as I have several issues to resolve this day... There might not be too much training going on this afternoon. But everyone is welcome to join the fun.... I start on the system between 1 and 2 PM when released by RAITH Field service who are on site... Best James On 8/16/2011 3:19 PM, Soo Jin Kim wrote: > Dear James, > > I would like to ask whether you have a plan to do a Raith training > starting from tomorrow. > I missed your office hour this morning, however, I saw your calendar > opened and scheduled for Raith training starting from Wed. > Please let me know if you allow me to join this coming training or not. > Thank you. > > Regards, > > Soo Jin Kim > PhD Candidate > Electrical Engineering > Stanford University > > From jwc at snf.stanford.edu Wed Aug 17 12:40:05 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 17 Aug 2011 12:40:05 -0700 Subject: Raith UPGRADE status and several training sessions available to bring you back onto this tool quickly... In-Reply-To: References: <4E432825.1000507@snf.stanford.edu> Message-ID: <4E4C1915.7020608@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/jpeg Size: 32963 bytes Desc: not available URL: From jwc at snf.stanford.edu Wed Aug 17 12:47:36 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 17 Aug 2011 12:47:36 -0700 Subject: RAITH offline to users till this evening. Message-ID: <4E4C1AD8.1010802@snf.stanford.edu> Greetings Raith Community: I will not be teaching and training on the RAITH today Wednesday August 17, 2011. I just need more time to test and qualify the platform and needed to RAITH Field Service access to the tool into this afternoon as well. RAITH Field Service will needs some additional time today as we discovered we needed to replace the Z motor to the system. This requires a chamber vent and extended pump down period to bring the tool back into service. I expect to be back up around 18:00 and plan to stay late if needed to ensure we are up and functional for overnight usage. Thank you for your support! James From jwc at snf.stanford.edu Thu Aug 18 11:25:32 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 18 Aug 2011 11:25:32 -0700 Subject: Raith status 11 AM Thursday == System is up and ready for your usage. Message-ID: <4E4D591C.5030208@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: fireenclave.jpg Type: image/jpeg Size: 74848 bytes Desc: not available URL: From jwc at snf.stanford.edu Thu Aug 18 18:47:33 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 18 Aug 2011 18:47:33 -0700 Subject: Error Virtual Beam control In-Reply-To: <767235316.768761.1313493667791.JavaMail.root@zm06.stanford.edu> References: <767235316.768761.1313493667791.JavaMail.root@zm06.stanford.edu> Message-ID: <4E4DC0B5.3010308@snf.stanford.edu> If this come up again, try to reset the exposure or possibly named 'virtual beam control' module in the module status. Communication hang or time out in the log... Best JWC On 8/16/2011 4:21 AM, Krishna Coimbatore Balram wrote: > Got an error during exposure. > > Error virtual beam control, stage could not reach position > > Not exactly sure what went wrong, I have not seen this before. > > System free for next user. > > Best, > Krishna From bajcsy at stanford.edu Thu Aug 18 20:24:04 2011 From: bajcsy at stanford.edu (Michal Bajcsy) Date: Thu, 18 Aug 2011 20:24:04 -0700 (PDT) Subject: raith free until midnight -- finished early Message-ID: <2139720652.1255318.1313724244417.JavaMail.root@zm09.stanford.edu> From krivoire at stanford.edu Fri Aug 19 08:36:41 2011 From: krivoire at stanford.edu (Kelley Rivoire) Date: Fri, 19 Aug 2011 08:36:41 -0700 (PDT) Subject: raith free today 3-8pm Message-ID: <1136326423.706912.1313768201606.JavaMail.root@zm02.stanford.edu> sample is not ready Kelley From arkam at stanford.edu Fri Aug 19 15:46:54 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Fri, 19 Aug 2011 15:46:54 -0700 (PDT) Subject: My pattersn from last write did not come out--not sure what is the problme--so the time from 3-8 is up for grab-- Message-ID: <1369903371.880068.1313794014349.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From toecutter4ranger at gmail.com Fri Aug 19 17:05:54 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 19 Aug 2011 17:05:54 -0700 Subject: Write should be finished now Message-ID: <389E9371-4777-4114-A1EC-EDA4E55261AB@gmail.com> Ok to abort when ready From toecutter4ranger at gmail.com Sat Aug 20 00:41:09 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Sat, 20 Aug 2011 00:41:09 -0700 Subject: Next person coming in Raith call me Message-ID: <7A1B2D7A-BE93-4BA8-A9C2-CD7EB07CE686@gmail.com> I likely can help you with a load lock issue; need more info over the phone... 4154124825 From sgchong at stanford.edu Sat Aug 20 13:54:51 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Sat, 20 Aug 2011 13:54:51 -0700 (PDT) Subject: Questions/comments after first processing after upgrade Message-ID: <1414870818.1513375.1313873691426.JavaMail.root@zm07.stanford.edu> Hi James, I did my first run after the upgrade today, and here are some questions/comments. 1. When the patterns are being exposed, for each pattern, I get an image of where the pattern is going to be exposed on the LEO monitor. Is this normal? I'm afraid that this might expose the resist. (Previous users - did you also see this?) 2. Magnification seemed to be off but was fixed after the software was restarted. 3. The image taken during write field alignment were not discernable,and there were horizontal stripes on the LEO monitor. It was fixed after the software was restarted. The patterns are being exposed now. I'll update you on how the patterns came out after development. -Soogine. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From toecutter4ranger at gmail.com Sun Aug 21 09:12:49 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Sun, 21 Aug 2011 09:12:49 -0700 Subject: Please report your exposure results Message-ID: <92DF770A-5F71-4DC5-B2A1-C5944891837C@gmail.com> Good morning Wr have been chasing and troubleshooting a number of issues since I was on the system Friday. There have been a number of vacuum and load lock errors and at least one case when Z axis didn't move when commanded by a script... I also saw horizontal streaks on the Leo screen during the start of the exposures and tested w chkrboard patterns to test which showed same on Leo screen. This is not normal and may affect the writes... I have had several users call me on the LEO issue again. Asking all Users to report their exposure results: Did you see the lEO screen doing anything during your runs? Did your exposures come out? Any problems with manual write field alignment? In contact with Raith FS Thank you James From toecutter4ranger at gmail.com Mon Aug 22 11:29:21 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Mon, 22 Aug 2011 11:29:21 -0700 Subject: Raith field service will be working on the Raith Message-ID: <090894FF-FAA8-4008-AA42-A64BDE84A3ED@gmail.com> Raith field service will likely still need the tool this afternoon, as we are doing repairs to problems that came up this weekend. We hope to get the tool nvm up this afternoon but may need the system forbteatinh all afternoon. We hope to return the tool to the next user in the coral queue later. Thank you for your support, James From toecutter4ranger at gmail.com Mon Aug 22 11:41:35 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Mon, 22 Aug 2011 11:41:35 -0700 Subject: Please report your exposure results In-Reply-To: <001801cc6087$09766fb0$1c634f10$@raithusa.com> References: <92DF770A-5F71-4DC5-B2A1-C5944891837C@gmail.com> <001801cc6087$09766fb0$1c634f10$@raithusa.com> Message-ID: <7677F189-0DE4-48D6-BFEA-64F53BB033B6@gmail.com> The load lock errors were occurring at the move stage to upper Z position. When the streaks are observed on the leo screen the exposed patterns do not come out normally. Most users on the system thursday and friday are reporting exposure errors and problems with WF Alignment. I am working with users today along with Lev... I am soon to expect my test exp made Thursday and Friday using several user accounts to test... James On Aug 21, 2011, at 9:50 PM, "Joseph Klingfus" wrote: > Hello Ebeam community. > > The new Raith software reads old .csf files in the same way. The > difference would be in the exposure settings. One known difference > in the exposure outcome would be in the way in which arcs and curves > (primarily circles) are exposed. In the previous (old) software the > exposure ?dose? was a mix of ?area? and ?line? settings > and now these curved objects have separate settings so an adjustment > of dose and/or stepsize might happen. If there are strange exposur > e results or artifacts please send images of the result as well as t > he csf/gds pattern. > > > > Regarding the weird horizontal streaks across the image, we are > looking into that. Please keep us updated, the first reports were > that the streaks were in the ?Raith images? but the Zeiss/LEO > images were completely OK. Now it appears the horizontal steaks are > on the SEM images as well? > > > > Concerning errors with sample exchange, this is completely > unexpected. The new software should have more stable sample load/ > unload software. If/when the next error occurs during sample load/ > unload please try and record at which step the error occurs. > > > > Regards, Joe Klingfus. > > > > > > From: arka.majumdar at gmail.com [mailto:arka.majumdar at gmail.com] On > Behalf Of arka majumdar > Sent: Sunday, August 21, 2011 11:26 AM > To: ToeCutter > Cc: Ebeam Lab; Lev Markov; Cole Loomis; Kevin Burcham; Joe Klingfus > Subject: Re: Please report your exposure results > > > > My exposure did not come out. I believe that the new software is > having problem in reading the old .csf files. the resist was > exposed, but very different patterns are written----the exposed > pattern is totally different from the intended pattern. > > On Sun, Aug 21, 2011 at 9:12 AM, ToeCutter > wrote: > > Good morning > Wr have been chasing and troubleshooting a number of issues since I > was on the system Friday. > > There have been a number of vacuum and load lock errors and at least > one case when Z axis didn't move when commanded by a script... > > I also saw horizontal streaks on the Leo screen during the start of > the exposures and tested w chkrboard patterns to test which showed > same on Leo screen. This is not normal and may affect the writes... > > I have had several users call me on the LEO issue again. > > > Asking all Users to report their exposure results: > Did you see the lEO screen doing anything during your runs? > > Did your exposures come out? > > Any problems with manual write field alignment? > > In contact with Raith FS > > Thank you > > James > > > > > > > -- > Arka Majumdar > Graduate Student(MS/PhD) > Ginzton Lab (Vuckovic Group) > Stanford University > www.stanford.edu/~arkam -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Mon Aug 22 17:38:33 2011 From: toecutter4ranger at gmail.com (James Conway) Date: Mon, 22 Aug 2011 17:38:33 -0700 Subject: First test with a system account came out superb, now trying another user account to troubleshoot user reports of scan and exposure errors. system up for users overnight, down for users tomorrow 9 AM till 5 PM... Message-ID: Hello Raith Community: I have just completed an exposure in my JWC User account and everything was fine... stitching was perfect between write fields... No problems with Manual Align Write fields or presence of scan lines on LEO screens and/or during write field acquisitions... We are now testing justinwu's account with him present in hopes of reproducing the problems many Users encounterd over the weekend. I plan to take the system away from Users again tomorrow when RAITH field service arrives in the morning about 9 AM or earlier... We will continue to seek out solutions to the write field alignment and scanning issues. Outstanding also is changes to the piezo control or SW to allow successful leveling of the USH and Std. Sample Holders.... ALL USERS THE LEO SCREEN SHOULD FREEZE DURING PATTERNING (EXPOSURE) THANK YOU FOR YOUR SUPPORT! JAMES -------------- next part -------------- An HTML attachment was scrubbed... URL: From sgchong at stanford.edu Thu Aug 25 09:50:52 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Thu, 25 Aug 2011 09:50:52 -0700 (PDT) Subject: raith free 3-6PM today Message-ID: <1388192990.1723206.1314291052620.JavaMail.root@zm07.stanford.edu> Couldn't use a tool yesterday because of maintenance, so I'm not ready for another run. Sorry for the belated notice. -Soogine. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From dlee76 at stanford.edu Fri Aug 26 09:22:41 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Fri, 26 Aug 2011 09:22:41 -0700 (PDT) Subject: release my reservation from 13:00 to 18:00 today Message-ID: <2033491313.860218.1314375761873.JavaMail.root@zm03.stanford.edu> Hi all: I am so sorry for the late notice. Since I suddenly need to attend a projecct meeting, I cannot use the my raith reservation. Sorry, again. kind Regards, Donkoun Lee -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From kodama at stanford.edu Fri Aug 26 16:42:23 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Fri, 26 Aug 2011 16:42:23 -0700 (PDT) Subject: Raith release from 21:00 to 24:00 today Message-ID: <460248673.1564632.1314402143331.JavaMail.root@zm09.stanford.edu> I am sorry for the late notice. I need more time to make gds files. Takashi Kodama From jwc at snf.stanford.edu Fri Aug 26 17:17:04 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 26 Aug 2011 17:17:04 -0700 Subject: The New RAITH CHAMPIONS FOR 2011/2012.... Message-ID: <4E583780.50509@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: RAITH CHAMPIONS for 2011.doc Type: application/msword Size: 31744 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri Aug 26 17:46:17 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 26 Aug 2011 17:46:17 -0700 Subject: FAQ NO 6: =?windows-1252?Q?=93WHO_ARE_YOU_GOING_TO_CA?= =?windows-1252?Q?LL=94_for_assistance_on_the_RAITH_150?= Message-ID: <4E583E59.8020701@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: clip_image001.gif Type: image/gif Size: 73 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: RAITH FAQ NO 6 WHO ARE YOU GOING TO CALL_2011.doc Type: application/msword Size: 32256 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri Aug 26 18:41:31 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 26 Aug 2011 18:41:31 -0700 Subject: READ ALL OF ME: RAITH SYSTEM UP AND AVAILABLE TO USERS -- USING REMCON TILL FURTHER NOTICE, FOLLOW THESE PROCEDURES + New EBEAM and SNF Lab Protocols for cleanliness and safety. Message-ID: <4E584B4B.3000106@snf.stanford.edu> An HTML attachment was scrubbed... URL: From kodama at stanford.edu Sat Aug 27 17:01:05 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Sat, 27 Aug 2011 17:01:05 -0700 (PDT) Subject: problem on hardware communication In-Reply-To: <1887763510.1578290.1314489317487.JavaMail.root@zm09.stanford.edu> Message-ID: <1641687502.1578334.1314489664975.JavaMail.root@zm09.stanford.edu> Hi all, When I launched the raith software, the message was appeared on raith software. communication with the column control computer not possible please check the connection and retry I hardly operate the system so I release my reservation till 9:30 pm. I am not sure it this is common issue for all member or it comes from my account setting or not. Thanks, Takashi Kodama From dlee76 at stanford.edu Mon Aug 29 10:10:44 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Mon, 29 Aug 2011 10:10:44 -0700 Subject: My reservation Message-ID: I will start my scanning around 30 min later. Thank you. Don Sent from my iPhone From dlee76 at stanford.edu Tue Aug 30 10:16:15 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Tue, 30 Aug 2011 10:16:15 -0700 Subject: Release my reservation Message-ID: <0EB50AE6-447A-471A-96A2-94E5F8467638@stanford.edu> Hi Sorry for the late notice. I knew that my sample is not goo enough for the ebeam, I cannot use my reservation from 10:00 to 15:00 today. Thank you. Don Sent from my iPhone From ytcheng at stanford.edu Tue Aug 30 10:18:20 2011 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Tue, 30 Aug 2011 10:18:20 -0700 Subject: Release my reservation In-Reply-To: <0EB50AE6-447A-471A-96A2-94E5F8467638@stanford.edu> References: <0EB50AE6-447A-471A-96A2-94E5F8467638@stanford.edu> Message-ID: <001d01cc6738$d0b90e40$722b2ac0$@stanford.edu> I'll use it from 10:30am to 12:30pm. Thanks. ytcheng -----Original Message----- From: Donkoun Lee [mailto:dlee76 at stanford.edu] Sent: Tuesday, August 30, 2011 10:16 AM To: raith at snf.stanford.edu Subject: Release my reservation Hi Sorry for the late notice. I knew that my sample is not goo enough for the ebeam, I cannot use my reservation from 10:00 to 15:00 today. Thank you. Don Sent from my iPhone From armandhr at stanford.edu Tue Aug 30 13:44:58 2011 From: armandhr at stanford.edu (Armand Rundquist) Date: Tue, 30 Aug 2011 13:44:58 -0700 (PDT) Subject: Raith free until 3:30pm Message-ID: <39026797.1731915.1314737098213.JavaMail.root@zm08.stanford.edu> Finished early, rest of time released. From kcbalram at stanford.edu Wed Aug 31 03:26:46 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Wed, 31 Aug 2011 03:26:46 -0700 (PDT) Subject: problem on hardware communication In-Reply-To: <1641687502.1578334.1314489664975.JavaMail.root@zm09.stanford.edu> Message-ID: <1778837900.1134880.1314786406553.JavaMail.root@zm06.stanford.edu> Hi Takashi, I also got the same error. The reason why that showed up was that the smartSEM was not open in remcon mode. I exited the smart sem and restarted in the remcon mode and the system works fine. Best, Krishna ----- Original Message ----- From: "Takashi Kodama" To: raith at snf.stanford.edu Sent: Saturday, August 27, 2011 5:01:05 PM Subject: problem on hardware communication Hi all, When I launched the raith software, the message was appeared on raith software. communication with the column control computer not possible please check the connection and retry I hardly operate the system so I release my reservation till 9:30 pm. I am not sure it this is common issue for all member or it comes from my account setting or not. Thanks, Takashi Kodama From arkam at stanford.edu Wed Aug 31 07:54:57 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Wed, 31 Aug 2011 07:54:57 -0700 (PDT) Subject: having some porblme with exposure in raith--so shortening session : 11-1-30 time released Message-ID: <1659454152.1136778.1314802497105.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From arkam at stanford.edu Wed Aug 31 10:21:44 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Wed, 31 Aug 2011 10:21:44 -0700 (PDT) Subject: free..finished early Message-ID: <375167214.1141851.1314811304410.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From kodama at stanford.edu Wed Aug 31 15:21:09 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Wed, 31 Aug 2011 15:21:09 -0700 (PDT) Subject: problem on hardware communication In-Reply-To: <1778837900.1134880.1314786406553.JavaMail.root@zm06.stanford.edu> Message-ID: <1371843793.1729253.1314829269902.JavaMail.root@zm09.stanford.edu> Hi Krishna, I missed James's forward e-mail and it worked for me as well. Thanks so much. Takashi ----- Original Message ----- From: "Krishna Coimbatore Balram" To: "Takashi Kodama" Cc: raith at snf.stanford.edu Sent: Wednesday, August 31, 2011 3:26:46 AM Subject: Re: problem on hardware communication Hi Takashi, I also got the same error. The reason why that showed up was that the smartSEM was not open in remcon mode. I exited the smart sem and restarted in the remcon mode and the system works fine. Best, Krishna ----- Original Message ----- From: "Takashi Kodama" To: raith at snf.stanford.edu Sent: Saturday, August 27, 2011 5:01:05 PM Subject: problem on hardware communication Hi all, When I launched the raith software, the message was appeared on raith software. communication with the column control computer not possible please check the connection and retry I hardly operate the system so I release my reservation till 9:30 pm. I am not sure it this is common issue for all member or it comes from my account setting or not. Thanks, Takashi Kodama