Comment raith SNF 2011-12-03 16:40:20: Update on External Scan Control

Jan Petykiewicz janp at stanford.edu
Mon Dec 5 22:41:08 PST 2011


I launched Raith first, SmartSEM second and had to manually switch over to
external control during writefield alignment.

-Jan

On Mon, Dec 5, 2011 at 12:16, James W. Conway <jwc at snf.stanford.edu> wrote:

> Kevin,
>
> Thanks for this observation.  I will continue to test to see what trips
> this.
>
> It shouldn't matter either way as multiple hand shakes in communications
> occur before I get to the writing part of the sequence.
>
> If other Users are seeing the horizontal streaks in their patterning,
> missing patterns or strange exposure artifacts resulting from external scan
> control not switching during your patterning -- please report back to this
> list.  I am tracking all exposure errors on the system.  I think it is only
> a rare intermittent problem at this point....
>
> James
>
> On 12/3/2011 4:40 PM, khu834 at snf.stanford.edu wrote:
>
>> It seems that this problem only occurs when lauching Raith first,
>> followed by the SmartSEM.
>> If you open SmartSEM, then Raith, everything functions as normal
>>
>>
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