From arkam at stanford.edu Tue Feb 1 18:19:44 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Tue, 1 Feb 2011 18:19:44 -0800 (PST) Subject: I am sorry..I cannot use raith now, as I am stuck somewhere else...so the time is up for grab..sorry abt this Message-ID: <543091817.728129.1296613184003.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From yuxinz at stanford.edu Tue Feb 1 18:41:14 2011 From: yuxinz at stanford.edu (Yuxin Zheng) Date: Tue, 1 Feb 2011 18:41:14 -0800 Subject: trouble with unloading the sample Message-ID: Errors occur when unloading the sample. I was not able to take out my sample. Yuxin -------------- next part -------------- An HTML attachment was scrubbed... URL: From dlee76 at stanford.edu Tue Feb 1 20:35:24 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Tue, 1 Feb 2011 20:35:24 -0800 (PST) Subject: Release my reservation Message-ID: <227850534.696154.1296621324193.JavaMail.root@zm03.stanford.edu> Hi all: Due to the unloading error, I released my reservation from 24:00 to 06:00 AM Thank you. Don -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From ahazeghi at stanford.edu Wed Feb 2 21:10:57 2011 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 2 Feb 2011 21:10:57 -0800 Subject: Pattern generator error Message-ID: <000001cbc360$be111b60$3a335220$@stanford.edu> I was using the system when the RAITH PC crashed with pattern generator error. I power cycled the RAITH PC but upon running RAITH the same error popped, imaging and stage functions work but it is not possible to write. System is available now in case anyone wants to try fixing it. Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From dlee76 at stanford.edu Wed Feb 2 22:46:52 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Wed, 2 Feb 2011 22:46:52 -0800 (PST) Subject: Release my reservation from 24:00 AM to 06:00 AM Message-ID: <1353594879.736558.1296715612467.JavaMail.root@zm03.stanford.edu> Hi all: Due to the system error, I released and shift my reservation. Thank you. Don -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From jwc at snf.stanford.edu Thu Feb 3 09:10:54 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 03 Feb 2011 09:10:54 -0800 Subject: Going into Lab at 9:30 AM to recover the pattern generator issues. Likely just needs a reset... Message-ID: <4D4AE19E.5010702@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Feb 3 10:43:46 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 03 Feb 2011 10:43:46 -0800 Subject: Raith is up for users Message-ID: <4D4AF762.1010904@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Feb 4 14:46:02 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 04 Feb 2011 14:46:02 -0800 Subject: Comment raith SNF 2011-02-04 14:42:22: 20 kev test completed Message-ID: <4D4C81AA.30102@snf.stanford.edu> An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Fri Feb 4 14:57:15 2011 From: gshambat at stanford.edu (Gary Shambat) Date: Fri, 4 Feb 2011 14:57:15 -0800 (PST) Subject: Starting Raith ~20 minutes late Message-ID: <1071135774.711164.1296860235723.JavaMail.root@zm01.stanford.edu> From yuxinz at stanford.edu Fri Feb 4 17:35:19 2011 From: yuxinz at stanford.edu (Yuxin Zheng) Date: Fri, 4 Feb 2011 17:35:19 -0800 Subject: 7pm - 11pm session released Message-ID: <8D27F8E11C834CE49239DA1853EF143A@YuxinZhengPC> sample not ready. Yuxin -------------- next part -------------- An HTML attachment was scrubbed... URL: From khu834 at stanford.edu Sun Feb 6 19:16:55 2011 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Sun, 6 Feb 2011 19:16:55 -0800 Subject: Raith free 8:30-11pm Message-ID: Done early -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Feb 8 16:53:03 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 08 Feb 2011 16:53:03 -0800 Subject: RAITH STATUS -- DOWN AND OFFLINE TO USERS:: Shutdown raith SNF 2011-02-08 16:21:21: Y axis stage motion no working... Message-ID: <4D51E56F.2090905@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Feb 10 18:34:09 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 10 Feb 2011 18:34:09 -0800 Subject: Stanford Raith 150 Status 18:30 hours Thursday February 10, 2011 SYSTEM IS COMING BACK UP THIS EVENING... Message-ID: <4D54A021.9000202@snf.stanford.edu> An HTML attachment was scrubbed... URL: From ahazeghi at stanford.edu Fri Feb 11 16:40:22 2011 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Fri, 11 Feb 2011 16:40:22 -0800 (PST) Subject: Reservation deleted-Monday 14:30-18:30 In-Reply-To: <1746811050.1007744.1297471219414.JavaMail.root@zm03.stanford.edu> Message-ID: <829713083.1007752.1297471222696.JavaMail.root@zm03.stanford.edu> Since the system came back online quickly I was able to finish my work today. Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From sgchong at stanford.edu Sat Feb 12 16:19:03 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Sat, 12 Feb 2011 16:19:03 -0800 (PST) Subject: [raith] Heavily over-exposed In-Reply-To: <784651650.111664.1297556141420.JavaMail.root@zm07.stanford.edu> Message-ID: <658381564.111693.1297556343949.JavaMail.root@zm07.stanford.edu> Hi, I just used raith and found out that my patterns were heavily over-exposed. Even 400nm gap between large areas disappeared by overexposure. I may have done something wrong, but did anyone who used raith after it came back up see this happen? Thanks, Soogine. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From zzp at stanford.edu Sun Feb 13 00:40:46 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Sun, 13 Feb 2011 00:40:46 -0800 (PST) Subject: loadlock error In-Reply-To: <658381564.111693.1297556343949.JavaMail.root@zm07.stanford.edu> Message-ID: <689778076.37546.1297586446062.JavaMail.root@zm01.stanford.edu> Hi all, I encountered "the Load Lock cannot be pumped..." error and pressed "CANCEL" at the second try without resetting the pump (found out that from FAQ too late). The machine is now the loadlock error state and cannot unload my sample. Very sorry for the inconvenience. thanks, Zhiping From toecutter4ranger at gmail.com Sun Feb 13 10:42:45 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Sun, 13 Feb 2011 10:42:45 -0800 Subject: Next user on Raith try to call me Message-ID: <052FF06A-E9CC-4B64-92FD-3D3BC23CFF27@gmail.com> Just became aware of a load lock error that needs sys admin to clear and reset. So either Zhiping or the next avail user please try to reach me and we can get it cleared over the phone. Poor cell coverage where I was last night James From zzp at stanford.edu Sun Feb 13 11:37:20 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Sun, 13 Feb 2011 11:37:20 -0800 (PST) Subject: Next user on Raith try to call me In-Reply-To: <052FF06A-E9CC-4B64-92FD-3D3BC23CFF27@gmail.com> Message-ID: <990212802.40451.1297625840679.JavaMail.root@zm01.stanford.edu> thank you very much James for the help. I managed to get my sample out and the machine is now in the proper standby mode for the next user. Zhiping ----- Original Message ----- From: "ToeCutter" To: "Ebeam Lab" , zzp at snf.stanford.edu Sent: Sunday, February 13, 2011 10:42:45 AM Subject: Next user on Raith try to call me Just became aware of a load lock error that needs sys admin to clear and reset. So either Zhiping or the next avail user please try to reach me and we can get it cleared over the phone. Poor cell coverage where I was last night James From jwc at snf.stanford.edu Mon Feb 14 17:10:56 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 14 Feb 2011 17:10:56 -0800 Subject: [raith] Did you have any over-exposure issue with raith over the weekend? In-Reply-To: References: Message-ID: <4D59D2A0.4020300@snf.stanford.edu> An HTML attachment was scrubbed... URL: From kodama at stanford.edu Tue Feb 15 03:14:07 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Tue, 15 Feb 2011 03:14:07 -0800 (PST) Subject: Finished earlier, free till 6:00 am In-Reply-To: <587561607.87527.1297767942484.JavaMail.root@zm09.stanford.edu> Message-ID: <1334193357.87572.1297768447825.JavaMail.root@zm09.stanford.edu> I could start my process and finish earlier than my estimation. Results were normal. Takashi Kodama From toecutter4ranger at gmail.com Tue Feb 15 06:54:33 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Tue, 15 Feb 2011 06:54:33 -0800 Subject: Next user try to call me to resolve load lock issues Message-ID: <0F05DB1A-1035-4E1F-8402-CE531F0BC52C@gmail.com> Good morning Next user on Raith try to call me to resolve load lock issues. Thought we had this cleared up last night about 10... James From toecutter4ranger at gmail.com Tue Feb 15 18:10:32 2011 From: toecutter4ranger at gmail.com (James Conway) Date: Tue, 15 Feb 2011 18:10:32 -0800 Subject: RAITH STATUS: Piezo leveling seems to be working today -- system is working well with excellent resolution... Message-ID: Greetings Raith Community: In my test the Piezo leveling using height control was working today during my session... We continue to troubleshoot what may be an intermittent communications or hardware issue. Once the new EDA module arrives we will install and test it again, and again, and again till I am happy! Leveling results: Standard Sample Holder WD set = 5 MM on center of 100 mm wafer with centered piezo positions: During leveling 3 spot focus acquisition total delta WD = 60 um After leveling with no errors called from Application total delta WD = 8.6 um Both measurements made across 90 mm across wafer. ________________________ System resolution today at 5 kV, 5 mm WD, using 30 um aperture: min resolvable feature on Au sputter coat on polymer = 1.2 nm FWHM 50% at 500kx mag. Range of measurements during the afternoon on five different places 1.2 to 1.79 nm Smallest contact hole found today on a NIL daughter master from a write on 12052010 was 11.17 nm. System is in an optimal state. _____________________ New users and old: Please be sure to hold the Load Lock Door down when starting the load lock procedure to AVOID LL errors! Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From hdonglee at stanford.edu Wed Feb 16 12:38:22 2011 From: hdonglee at stanford.edu (Hyung Dong Lee) Date: Wed, 16 Feb 2011 12:38:22 -0800 (PST) Subject: I really apologize for not using Raith this morning. Message-ID: <247572694.135304.1297888702357.JavaMail.root@zm01.stanford.edu> Dear raith users, I really apologize for not using Raith this morning. I promise not to make a reservation like this morning. I had to take care of my baby from last night to this early morning and totally forgot this task. I apologize again to other users who needed it. Best regards, Hyung Dong Lee From khu834 at stanford.edu Wed Feb 16 13:54:29 2011 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Wed, 16 Feb 2011 13:54:29 -0800 Subject: raith free Thur 12am Message-ID: write completed in earlier session -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Feb 18 10:22:36 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 18 Feb 2011 10:22:36 -0800 Subject: zhiping and I will be starting on the tool at 11:00 AM we wish to maintain our reservation. Message-ID: <4D5EB8EC.9000706@snf.stanford.edu> Starting on the RAITH 150 a bit late today... James From mbaennin at stanford.edu Fri Feb 18 17:34:37 2011 From: mbaennin at stanford.edu (Matthias Baenninger) Date: Fri, 18 Feb 2011 17:34:37 -0800 Subject: Raith Released Sunday 12pm-3pm In-Reply-To: References: Message-ID: <002401cbcfd5$2be32040$83a960c0$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From zzp at stanford.edu Sat Feb 19 01:51:23 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Sat, 19 Feb 2011 01:51:23 -0800 (PST) Subject: Raith Released Saturday 8pm-12pm In-Reply-To: <002401cbcfd5$2be32040$83a960c0$@edu> Message-ID: <1340950281.214821.1298109083870.JavaMail.root@zm01.stanford.edu> From krivoire at stanford.edu Mon Feb 21 11:42:25 2011 From: krivoire at stanford.edu (Kelley Rivoire) Date: Mon, 21 Feb 2011 11:42:25 -0800 (PST) Subject: raith free tomorrow 11am-2pm Message-ID: <1334569124.229761.1298317345628.JavaMail.root@zm02.stanford.edu> I only need part of my session. Kelley From arkam at stanford.edu Tue Feb 22 17:44:42 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Tue, 22 Feb 2011 17:44:42 -0800 (PST) Subject: free from 7 to mignight--the sample is not ready Message-ID: <1767562425.305284.1298425482121.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From ahazeghi at stanford.edu Wed Feb 23 17:28:34 2011 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Wed, 23 Feb 2011 17:28:34 -0800 (PST) Subject: Released 19:00-20:30 Message-ID: <205498912.335262.1298510914206.JavaMail.root@zm03.stanford.edu> sample will not be ready Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From tasyurek at stanford.edu Thu Feb 24 01:15:33 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Thu, 24 Feb 2011 01:15:33 -0800 (PST) Subject: Raith free from 11.30am to 2pm Message-ID: <1664411493.336611.1298538933879.JavaMail.root@zm02.stanford.edu> Sample not ready. From ahazeghi at stanford.edu Thu Feb 24 10:06:34 2011 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Thu, 24 Feb 2011 10:06:34 -0800 (PST) Subject: Load lock issue In-Reply-To: <604767048.353230.1298570320864.JavaMail.root@zm03.stanford.edu> Message-ID: <1770238584.353552.1298570794748.JavaMail.root@zm03.stanford.edu> I also encountered the load lock error "it is not possible to drive to upper exchange position" during unload like the previous user. I think there is a hardware problem with the Y motor. I kept pressing retry until the exchange position was reached. Please be advised you may not be able to unload your sample. I am going to leave it yellow-lighted. System is free now. Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From zzp at stanford.edu Sat Feb 26 01:13:40 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Sat, 26 Feb 2011 01:13:40 -0800 (PST) Subject: stage control module failed Message-ID: <1696025666.388032.1298711620386.JavaMail.root@zm01.stanford.edu> Hi all, I have to shut down the tool due to the stage control module failure. One of the scripts encountered an error. Unloading was not successful. sorry, Zhiping From toecutter4ranger at gmail.com Sat Feb 26 07:49:11 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Sat, 26 Feb 2011 08:49:11 -0700 Subject: stage control module failed In-Reply-To: <1696025666.388032.1298711620386.JavaMail.root@zm01.stanford.edu> References: <1696025666.388032.1298711620386.JavaMail.root@zm01.stanford.edu> Message-ID: <728E6177-12FC-45C3-835D-4E5F3CD312DB@gmail.com> Good morning all My cell phone battery was down last night and overnight ... Please try a shut down on both computers after gracefully exiting the windows OS and then start up manually after ten seconds or more powered down. This should reset all IEEE- 488 comms and the system should come up on itself If that doesn't work please call me or lev markov at (973) 444-5605 and we will try to assist you. Thank you James On Feb 26, 2011, at 2:13 AM, Zhiping Zhang wrote: > Hi all, > > I have to shut down the tool due to the stage control module > failure. One of the scripts encountered an error. Unloading was not > successful. > > sorry, > Zhiping From altamash at stanford.edu Sat Feb 26 13:35:22 2011 From: altamash at stanford.edu (Altamash Janjua) Date: Sat, 26 Feb 2011 13:35:22 -0800 (PST) Subject: Raith operational Message-ID: <1788284261.391832.1298756122863.JavaMail.root@zm01.stanford.edu> Hi All, I was able to clear the loading error. The system is still in shutdown mode but I talked to James and he said that users can use the system in this mode if needed. The system is currently writing my sample and my reservation ends at 730PM. So the next user can come in after my reservation ends. Thanks, Altamash From shott at stanford.edu Sat Feb 26 13:58:23 2011 From: shott at stanford.edu (John Shott) Date: Sat, 26 Feb 2011 13:58:23 -0800 Subject: Raith operational In-Reply-To: <1788284261.391832.1298756122863.JavaMail.root@zm01.stanford.edu> References: <1788284261.391832.1298756122863.JavaMail.root@zm01.stanford.edu> Message-ID: <4D69777F.5010400@stanford.edu> Raith community: Based on Altamash's email that he has been able to clear the loading error, I am clearing the shutdown so that others may enable and use the system. I will, however, be working with James to try to understand where we are interlocking this tool because a tool that is in shutdown, shouldn't be able to be run normally. Happy writing, John From kcbalram at stanford.edu Sun Feb 27 00:09:41 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sun, 27 Feb 2011 00:09:41 -0800 (PST) Subject: Raith free Sunday 3 to 5:30 PM Message-ID: <2001868870.437830.1298794181559.JavaMail.root@zm06.stanford.edu> Sample not ready.... Krishna From khu834 at stanford.edu Mon Feb 28 12:38:36 2011 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Mon, 28 Feb 2011 12:38:36 -0800 Subject: Free till 2:30pm Message-ID: Done early -------------- next part -------------- An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Mon Feb 28 12:42:08 2011 From: gshambat at stanford.edu (Gary Shambat) Date: Mon, 28 Feb 2011 12:42:08 -0800 (PST) Subject: Free till 2:30pm In-Reply-To: Message-ID: <746129493.428451.1298925728640.JavaMail.root@zm01.stanford.edu> Claiming ----- Original Message ----- From: "Kevin Chih-Yao Huang" To: "raith" Sent: Monday, February 28, 2011 12:38:36 PM Subject: Free till 2:30pm Done early