loadlock error

Zhiping Zhang zzp at stanford.edu
Sun Feb 13 00:40:46 PST 2011


Hi all,

I encountered "the Load Lock cannot be pumped..." error and pressed "CANCEL" at the second try without resetting the pump (found out that from FAQ too late). The machine is now the loadlock error state and cannot unload my sample. Very sorry for the inconvenience.

thanks,
Zhiping



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