From jwc at snf.stanford.edu  Wed Jan  5 18:17:20 2011
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 05 Jan 2011 18:17:20 -0800
Subject: Raith status 18:00 hours 01-05-2011  SYSTEM IS UP AND QUALIFIED
Message-ID: <4D252630.8000401@snf.stanford.edu>

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From gshambat at stanford.edu  Wed Jan  5 18:58:25 2011
From: gshambat at stanford.edu (Gary Shambat)
Date: Wed, 5 Jan 2011 18:58:25 -0800 (PST)
Subject: Will finish by 9PM
Message-ID: <49916169.858105.1294282705155.JavaMail.root@zm01.stanford.edu>

For anyone who wants to sign on after me tonight I'll be done at 9PM. The next user can takeover.

Gary


From sgchong at stanford.edu  Mon Jan 10 14:19:13 2011
From: sgchong at stanford.edu (Soogine Chong)
Date: Mon, 10 Jan 2011 14:19:13 -0800 (PST)
Subject: raith free tonight (1/10) 10PM - 1AM
Message-ID: <376479296.65118.1294697953199.JavaMail.root@zm07.stanford.edu>

Turns out I don't need so many splits, so my session tomorrow will be enough to do all the writing I need.

-Soogine.

-- 
Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
mobile: +1-650-804-8556



From arkam at stanford.edu  Tue Jan 11 18:23:10 2011
From: arkam at stanford.edu (Arka Majumdar)
Date: Tue, 11 Jan 2011 18:23:10 -0800 (PST)
Subject: Raith free tomorrow 11am to 2 pm..took a longer slot today
Message-ID: <1892344296.93924.1294798990607.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From hitoshi831223 at gmail.com  Tue Jan 11 21:46:46 2011
From: hitoshi831223 at gmail.com (Hitoshi Ishiwata)
Date: Tue, 11 Jan 2011 21:46:46 -0800
Subject: Raith free tomorrow 11am to 2 pm..took a longer slot today
In-Reply-To: <1892344296.93924.1294798990607.JavaMail.root@zm06.stanford.edu>
References: <1892344296.93924.1294798990607.JavaMail.root@zm06.stanford.edu>
Message-ID: <AANLkTimcEHKE2r_Co=jxrBhjMvXNcV+XcVvkj=no1-d8@mail.gmail.com>

Hi all,

Raith free from 9am to 1030am tomorrow Jan. 12th.
Im taking time later.
thanks

hitoshi

On Tue, Jan 11, 2011 at 6:23 PM, Arka Majumdar <arkam at stanford.edu> wrote:

>
>
> --
> PhD Student
> Ginzton Lab (EE)
> Stanford University
> www.cvitae.org/arkam/
>



-- 
Hitoshi Ishiwata
PhD Candidate
Electrical Engineering Department
Stanford University

McCullough Building
476 Lomita Mall rm 410
Stanford, CA 94305
Phone: (650) 723-2056
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From sgchong at stanford.edu  Wed Jan 12 12:07:21 2011
From: sgchong at stanford.edu (Soogine Chong)
Date: Wed, 12 Jan 2011 12:07:21 -0800 (PST)
Subject: raith free Thur (1/13) 9PM-midnight
Message-ID: <673192235.167717.1294862841092.JavaMail.root@zm07.stanford.edu>

Took earlier slot today.

-- 
Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
mobile: +1-650-804-8556



From jwc at snf.stanford.edu  Wed Jan 12 18:48:21 2011
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 12 Jan 2011 18:48:21 -0800
Subject: ANNOUNCEMENT:  Raith Group 45- Four Day Short Course for Basic RAITH
 150 Users  Tuesday to Friday January 18 - 21, 2011 10 AM to 6 PM
Message-ID: <4D2E67F5.4060906@snf.stanford.edu>

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From hitoshi831223 at gmail.com  Thu Jan 13 12:57:23 2011
From: hitoshi831223 at gmail.com (Hitoshi Ishiwata)
Date: Thu, 13 Jan 2011 12:57:23 -0800
Subject: Raith free today 4pm to 6pm and 9pm to 11pm today
Message-ID: <AANLkTik6hxgufVW-KrrN3z_qMs+aM3Q3SGb71q=_9k38@mail.gmail.com>

sorry for late notice.

-- 
Hitoshi Ishiwata
PhD Candidate
Electrical Engineering Department
Stanford University

McCullough Building
476 Lomita Mall rm 410
Stanford, CA 94305
Phone: (650) 723-2056
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From toecutter4ranger at gmail.com  Fri Jan 14 10:08:02 2011
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Fri, 14 Jan 2011 10:08:02 -0800
Subject: Starting at 11:00
Message-ID: <EF85B27F-322E-4276-B620-A1E8F404082E@gmail.com>

Hi
I am over at the nanocenter
Will start at 11:00

Jwc 


From toecutter4ranger at gmail.com  Fri Jan 14 13:13:02 2011
From: toecutter4ranger at gmail.com (James Conway)
Date: Fri, 14 Jan 2011 13:13:02 -0800
Subject: System stage issues resolved. I am finished early and users are free
 to start on system again.
Message-ID: <AANLkTinrabHibcZ0UE2Gd5hXobPR9HJTVSaMAL6d5_3Z@mail.gmail.com>

System stage issues encountered last evening have been resolved. I am
finished early and next user(s) are free to start on system again.  My
session was to finish at 3:00 PM

If anyone encounters a problem or has a question please call me directly.

have a nice weekend,

James Conway
SNF
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From sgchong at stanford.edu  Sat Jan 15 22:15:39 2011
From: sgchong at stanford.edu (Soogine Chong)
Date: Sat, 15 Jan 2011 22:15:39 -0800 (PST)
Subject: raith free now until 1AM
Message-ID: <50727545.313816.1295158539023.JavaMail.root@zm07.stanford.edu>

Found problem with previous process steps and won't be using it.

-Soogine.

-- 
Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
mobile: +1-650-804-8556



From krivoire at stanford.edu  Sun Jan 16 16:24:33 2011
From: krivoire at stanford.edu (Kelley Rivoire)
Date: Sun, 16 Jan 2011 16:24:33 -0800 (PST)
Subject: raith free tomorrow 10am-2pm
Message-ID: <1800974811.216890.1295223873483.JavaMail.root@zm02.stanford.edu>

shortened my session

Kelley


From kcbalram at stanford.edu  Mon Jan 17 01:09:37 2011
From: kcbalram at stanford.edu (Krishna Coimbatore Balram)
Date: Mon, 17 Jan 2011 01:09:37 -0800 (PST)
Subject: Raith free till 2:30 AM
Message-ID: <255058108.246960.1295255377961.JavaMail.root@zm06.stanford.edu>



From gdiankov at stanford.edu  Mon Jan 17 14:46:35 2011
From: gdiankov at stanford.edu (Georgi Diankov)
Date: Mon, 17 Jan 2011 14:46:35 -0800 (PST)
Subject: Raith free until 7:30 pm
Message-ID: <335138093.339774.1295304395916.JavaMail.root@zm07.stanford.edu>

Previous step failed. Sorry for the late notice. 


From rpala at stanford.edu  Wed Jan 19 12:18:55 2011
From: rpala at stanford.edu (Ragip Pala)
Date: Wed, 19 Jan 2011 12:18:55 -0800
Subject: raith free today 18-19, Thu 7-9am, Fri 6-8am
Message-ID: <4D37472F.4010709@stanford.edu>

Sorry for the late notice... Sample preparation is postponed.
ragip


From justinwu at stanford.edu  Wed Jan 19 14:30:33 2011
From: justinwu at stanford.edu (Justin Zachary Wu)
Date: Wed, 19 Jan 2011 14:30:33 -0800 (PST)
Subject: raith free 6-10pm 1/20
Message-ID: <1408706000.407613.1295476233229.JavaMail.root@zm04.stanford.edu>

Problem with intended sample.

Justin Wu


From jwc at snf.stanford.edu  Wed Jan 19 18:04:45 2011
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 19 Jan 2011 18:04:45 -0800
Subject: ESPACER has been received and is now stocked in the lab.  Restrictions
 on usage due to its cost now in place.
Message-ID: <4D37983D.5000407@snf.stanford.edu>

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From sgchong at stanford.edu  Fri Jan 21 00:23:34 2011
From: sgchong at stanford.edu (Soogine Chong)
Date: Fri, 21 Jan 2011 00:23:34 -0800 (PST)
Subject: raith free today (Fri) 5:30-8:30AM
Message-ID: <1710434612.524997.1295598214019.JavaMail.root@zm07.stanford.edu>



-- 
Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
mobile: +1-650-804-8556



From khu834 at stanford.edu  Fri Jan 21 11:44:10 2011
From: khu834 at stanford.edu (Kevin Chih-Yao Huang)
Date: Fri, 21 Jan 2011 11:44:10 -0800
Subject: Raith free 10pm-12am
Message-ID: <AANLkTi=fk_rH1TpLRKmcER7krtEeyJVeaefk503VzHN3@mail.gmail.com>

Switched to later time
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From jwc at snf.stanford.edu  Fri Jan 21 18:19:03 2011
From: jwc at snf.stanford.edu (James W. Conway)
Date: Fri, 21 Jan 2011 18:19:03 -0800
Subject: New Ebeam process  RE2: NEW THREAD  PMMA's restocked today...
 chemicals stay in the SNF clean room...
In-Reply-To: <AANLkTimG8rE1Jr3cMd2s6QsvnMbhVqMr1zF6_AiKcE7m@mail.gmail.com>
References: <AANLkTimn7ftvp82Woa5upG0xN+O1aPHD6SHVc=chvShZ@mail.gmail.com>	<4D35C9B5.9000201@snf.stanford.edu> <AANLkTimG8rE1Jr3cMd2s6QsvnMbhVqMr1zF6_AiKcE7m@mail.gmail.com>
Message-ID: <4D3A3E97.4070603@snf.stanford.edu>

Ebeam Lab Users:

I have restocked the lab with both 5% 950K PMMA and 9% 950K PMMA this 
morning.

Where did the former bottles in the lab travel to?  Please return... 
No??Asked...

Note: While I have no problem if you need to coat a wafer or two for 
experiments in any lab any where else -- NO VOLUMES OF RESIST or any 
other chemicals are to leave the SNF clean room without approval.

Clear?

Have a great weekend,

James

On 1/19/2011 2:41 PM, Carter Lin wrote:
> Thank you James. Can you put some 5% 950K and 9% PMMA on the resist
> cabinet please?
>
> Best
> Carter
>
> On Tue, Jan 18, 2011 at 9:11 AM, James W. Conway<jwc at snf.stanford.edu>  wrote:
>> Hello Carter,
>> Dose is very dependent on acceleration voltage due to the penetration depth
>> and excitation volume into the sample.  Lower the Acc. voltage the lower the
>> doses.  Some effects are related to sidewall angle due to lower Acc. voltage
>> having effects from the back scatter range as well; this can be controlled
>> by careful dose-to-clear determination.  For 250 nm circles written as area
>> writes your dose on thick PMMA should be around 135 to 150 uC/cm**2 at 10
>> keV, and 160 - 175 uC/cm**2 at 15 keV.
>>
>> *** You will need to determine the proper dose for your non-standard film
>> thickness.  ***
>>
>> Higher acceleration dosages AT THE DOSE TO CLEAR and not overexposing will
>> render straight vertical side walls angles suitable for your processing.  In
>> fact I believe thinner thickness films 200 - 350 nm will work fine as well.
>> My recommendation is to expose using either single layer 300 nm of 5% 950K
>> PMMA or 5% 495K PMMA.  Attached are my 5% single layer processes for your
>> review.
>>
>> Best practice to prebake your thin films before plating at 90 degrees C for
>> 2 min. on hotplate to toughen up the resist and ensure suitable adhesion.

>> See me during office hours if you have any questions,
>>
>> James
>>
>> On 1/14/2011 9:18 PM, Carter Lin wrote:
>>
>> Hi James,
>>
>> I am planning to try a new process. Basically I want to use PMMA as
>> mask for electroplating some vertical nanopillars of 250nm diameter
>> and 1um in height. Here is the work flow I have in mind
>>
>> 1. coat glass substrate with Cr/Au as seeding layer
>> 2. spin 9% 950K PMMA to 1um thick
>> 3. write circles of diameter 250nm with 1500uC/cm^2 dose, develop
>> 4. electroplate Au to make pillars using PMMA as a mask
>>
>> I am writing to ask for your comments + suggestions, because I have
>> doubt on whether step 3 will work. The papers i read use 100kV
>> electron beams, but the max we can go with Raith is 30kV right? So
>> would that give a lot of scattering and leads to bad sidewall defined
>> for step 4? Meanwhile the dose seems to be 10x as high as the normal
>> dose we use. Will that be a problem?
>>
>> Thank you
>> Carter
>>
>>
>
>


From sgchong at stanford.edu  Sat Jan 22 04:01:04 2011
From: sgchong at stanford.edu (Soogine Chong)
Date: Sat, 22 Jan 2011 04:01:04 -0800 (PST)
Subject: raith free today (Sat) 1-4PM
Message-ID: <1254428768.573427.1295697664243.JavaMail.root@zm07.stanford.edu>



-- 
Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
mobile: +1-650-804-8556



From rpala at stanford.edu  Mon Jan 24 02:58:16 2011
From: rpala at stanford.edu (Ragip Pala)
Date: Mon, 24 Jan 2011 02:58:16 -0800
Subject: raith released Monday 19:00-21:30
Message-ID: <4D3D5B48.9090708@stanford.edu>

Previous process step postponed due to headway not working at this time..

-ragip


From krivoire at stanford.edu  Mon Jan 24 22:36:17 2011
From: krivoire at stanford.edu (Kelley Rivoire)
Date: Mon, 24 Jan 2011 22:36:17 -0800 (PST)
Subject: raith free Wed 9 am-2pm
Message-ID: <1948192932.463486.1295937377615.JavaMail.root@zm02.stanford.edu>

raith free Wed 9 am-2pm

Kelley


From toecutter4ranger at gmail.com  Wed Jan 26 17:07:37 2011
From: toecutter4ranger at gmail.com (James Conway)
Date: Wed, 26 Jan 2011 17:07:37 -0800
Subject: finished early next user may come in early if they desire...
Message-ID: <AANLkTi=s3-SYUFS_qeYkwb3-iLWgNWx9yoWp2Z=2Rqoc@mail.gmail.com>

Ragip Pala and Raith Users:

I am finished earlier than expected -- next user may come in early if they
desire...

Best,

James
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From hitoshi831223 at gmail.com  Wed Jan 26 21:09:42 2011
From: hitoshi831223 at gmail.com (Hitoshi Ishiwata)
Date: Wed, 26 Jan 2011 21:09:42 -0800
Subject: raith free today 930pm till 1130pm
Message-ID: <AANLkTi=-khrUJCPpZJpuT=Eu6VyAUwicd_GTgGv6LJ7A@mail.gmail.com>

SEM mode was not as high resolution as I thought it would be.
Using other machine as SEM.
sorry for late notice
-- 
Hitoshi Ishiwata
PhD Candidate
Electrical Engineering Department
Stanford University

McCullough Building
476 Lomita Mall rm 410
Stanford, CA 94305
Phone: (650) 723-2056
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From toecutter4ranger at gmail.com  Fri Jan 28 13:43:36 2011
From: toecutter4ranger at gmail.com (James Conway)
Date: Fri, 28 Jan 2011 13:43:36 -0800
Subject: system available finished session earlier than expected -- JWC
Message-ID: <AANLkTi=fmmf-97FTgn_YZjuto2j_WpnyOePZGTLp57ep@mail.gmail.com>

system available finished session earlier than expected  -- JWC
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From dlee76 at stanford.edu  Sun Jan 30 20:43:43 2011
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Sun, 30 Jan 2011 20:43:43 -0800 (PST)
Subject: Release my reservation from 24:00 to 06:00
Message-ID: <166358777.621835.1296449023895.JavaMail.root@zm03.stanford.edu>

Hi all:

Since I had a problem with a deposition tool, I need to release my reservation.

Sorry for the late notice.
Don

-- 
Donkoun Lee
 
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984





From kcbalram at stanford.edu  Sun Jan 30 22:21:38 2011
From: kcbalram at stanford.edu (Krishna Coimbatore Balram)
Date: Sun, 30 Jan 2011 22:21:38 -0800 (PST)
Subject: Starting raith at midnight instead of 10:30 PM
Message-ID: <1545041101.655206.1296454898986.JavaMail.root@zm06.stanford.edu>

Delay in process, Raith free till midnight

Krishna


From jwc at snf.stanford.edu  Mon Jan 31 11:30:29 2011
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 31 Jan 2011 11:30:29 -0800
Subject: Metal Lift-off with PMMA
In-Reply-To: <008801c86965$57a6ed30$946040ab@BILEEOFFICE>
References: <47AA1833.7080501@snf.stanford.edu> <008801c86965$57a6ed30$946040ab@BILEEOFFICE>
Message-ID: <4D470DD5.2030901@snf.stanford.edu>

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