Problem on SEM operation

Takashi Kodama kodama at stanford.edu
Sun Jun 19 03:59:35 PDT 2011


Hi all,

During my process, the SEM controller suddenly stopped working with small noise,
and any images were no longer appeared on the SEM software. 
Though I could unload my sample because raith software is normally working,
I could not fix the problem on the SEM. I reported the problem on coral as well.

Takashi Kodama
kodama at stanford.edu  



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