From sgchong at stanford.edu Sun May 1 19:47:08 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Sun, 1 May 2011 19:47:08 -0700 (PDT) Subject: raith free 9pm - midnight Message-ID: <1673654141.78675.1304304428370.JavaMail.root@zm07.stanford.edu> Sorry for the late notice. Found a later spot. I don't have access to coral now, so I couldn't release the reservation on coral. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From zzp at stanford.edu Sun May 1 20:01:07 2011 From: zzp at stanford.edu (Zhiping Zhang) Date: Sun, 1 May 2011 20:01:07 -0700 Subject: raith free 9pm - midnight In-Reply-To: <1673654141.78675.1304304428370.JavaMail.root@zm07.stanford.edu> References: <1673654141.78675.1304304428370.JavaMail.root@zm07.stanford.edu> Message-ID: Claim the two hours of 10 pm to midnight Thanks, Zhiping -----Original Message----- From: Soogine Chong [mailto:sgchong at stanford.edu] Sent: Sunday, May 01, 2011 7:47 PM To: raith at snf.stanford.edu Subject: raith free 9pm - midnight Sorry for the late notice. Found a later spot. I don't have access to coral now, so I couldn't release the reservation on coral. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From hitoshi831223 at gmail.com Tue May 3 14:52:06 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Tue, 3 May 2011 14:52:06 -0700 Subject: free today from 330pm to 530pm Message-ID: sample not ready. -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hitoshi831223 at gmail.com Tue May 3 23:05:17 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Tue, 3 May 2011 23:05:17 -0700 Subject: raith free tomorrow 8am-930am Message-ID: sorry for late notice. sample not ready -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tasyurek at stanford.edu Wed May 4 16:38:56 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Wed, 4 May 2011 16:38:56 -0700 (PDT) Subject: Raith free 11am-1:30pm tomorrow Message-ID: <1276825988.1000716.1304552336670.JavaMail.root@zm02.stanford.edu> From toecutter4ranger at gmail.com Wed May 4 18:19:50 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Wed, 4 May 2011 18:19:50 -0700 Subject: Finished early Message-ID: <3E2E57FF-E725-47AB-A8C8-91792A4E2C7C@gmail.com> I had problems with a PEC file from genysis BEAMER which crashes the Raith computer after trying to sort the many elements in the file I was then unable to bring the win XP OS back up until after many resets due to a registry issue. I went back to my registry backup from last Friday and the win OS is back up and seems to be running fine. I have now just swept the system for malware, cleaned up the drive and defragged the computer and checked the registry. So I am giving up the remainder of my session until 9:30 PM as I now do not have time to complete the pattern write of the non EPC file. I will start unloading in a half an hour System is available for the next user or anyone whom comes in... Thank you James From hitoshi831223 at gmail.com Thu May 5 15:36:11 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Thu, 5 May 2011 15:36:11 -0700 Subject: raith free today from 4pm to 530pm Message-ID: sorry for late notice. -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From kodama at stanford.edu Thu May 5 18:07:57 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Thu, 5 May 2011 18:07:57 -0700 (PDT) Subject: problem report Message-ID: <469258054.1207929.1304644077753.JavaMail.root@zm09.stanford.edu> Hi all, The pop-up error message "pattern generator is not ready, demo mode enabled" was appeared when I started the raith software. According to the James's instruction, I could solve the problem. Please follow the way if you have same issue. 1. shutdown the raith PC 2. turn off the hardware (only second controller "HIGH PERFORMANCE SCAN PROCESSOR" from the top). 3. turn on it 4. restart PC Thanks, Takashi Kodama From hitoshi831223 at gmail.com Fri May 6 09:52:45 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Fri, 6 May 2011 09:52:45 -0700 Subject: raith free today from 10 to 11am Message-ID: -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri May 6 10:12:25 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 6 May 2011 10:12:25 -0700 Subject: James Conway will not be in the lab today Message-ID: Hello All James Conway will not be in the lab today. I am still not feeling so well with problems with my allergies, and will be at home. People with questions or machine problems are welcome to call me. 001-415-412-4825 Thank you From toecutter4ranger at gmail.com Fri May 6 10:21:34 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 6 May 2011 10:21:34 -0700 Subject: Monitoring IEE-488 comms on the RAITH PC Message-ID: Good morning, Yesterday and overnight we started tracking any messages related to error messages on application launch or during your sessions. Specifically we are monitoring IEE-488 comms on the RAITH PC related to the piezo controller and the ELPHY Plus FE pattern generator... Please make a comment to coral should you encounter a problem and call me directly if you cannot resolve the issue by logging off gracefully both the Raith150.exe application and shutting down and retarting the windows OS. I swept the drive Wednesday and did not find any malware or viruses, and rhen cleaned and defragged the Raith PC Hard Drive. Finally I scanned the registry and found many registry errors and will obtain utilities to address this when I return Monday, or with Eric's help on Tuesday if he is available. Thank you, James Conway From kcbalram at stanford.edu Fri May 6 23:42:21 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Fri, 6 May 2011 23:42:21 -0700 (PDT) Subject: Raith free from midnight to 2:30 AM Message-ID: <1811312814.84.1304750541434.JavaMail.root@zm06.stanford.edu> Previous process step did not work out Krishna From tasyurek at stanford.edu Sat May 7 23:38:21 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Sat, 7 May 2011 23:38:21 -0700 (PDT) Subject: Raith free tomorrow (Sunday) 2:30 - 5 pm Message-ID: <969962890.12176.1304836701681.JavaMail.root@zm02.stanford.edu> From sgchong at stanford.edu Sun May 8 02:31:07 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Sun, 8 May 2011 02:31:07 -0700 (PDT) Subject: raith free today 7:30 - 10:30 AM Message-ID: <248615759.14806.1304847067005.JavaMail.root@zm07.stanford.edu> Sorry for the late notice. Sample not ready. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From fanpy839 at stanford.edu Sun May 8 15:35:58 2011 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Sun, 8 May 2011 15:35:58 -0700 Subject: raith free till 5 Message-ID: finished early. Pengyu Fan PhD Candidate Materials Science & Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From bajcsy at stanford.edu Sun May 8 17:18:49 2011 From: bajcsy at stanford.edu (Michal Bajcsy) Date: Sun, 8 May 2011 17:18:49 -0700 (PDT) Subject: released tomorrow (Monday) 11:30am-3:30pm Message-ID: <1492260709.22642.1304900329218.JavaMail.root@zm09.stanford.edu> sample not ready. Michal From fanpy839 at stanford.edu Tue May 10 23:10:04 2011 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Tue, 10 May 2011 23:10:04 -0700 Subject: raith free 12am Message-ID: samples not ready. sorry for the late notice Pengyu Fan PhD Candidate Materials Science & Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From kcbalram at stanford.edu Wed May 11 11:22:19 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Wed, 11 May 2011 11:22:19 -0700 (PDT) Subject: Raith free from 6 to 7:30 PM Message-ID: <824088716.129438.1305138139789.JavaMail.root@zm06.stanford.edu> Picked up a later slot.. Krishna From hitoshi831223 at gmail.com Wed May 11 12:03:26 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Wed, 11 May 2011 12:03:26 -0700 Subject: raith free today 12pm to 2pm Message-ID: sorry for late notice. sample not ready. -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Wed May 11 12:49:05 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Wed, 11 May 2011 12:49:05 -0700 Subject: Food in Allen X patio Message-ID: Heads up grad students Plenty of food remains in Allen X patio Good eats Jwc From fanpy839 at stanford.edu Wed May 11 23:08:56 2011 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Wed, 11 May 2011 23:08:56 -0700 Subject: raith error Message-ID: Hi All, I have encountered a loadlock error during loading, says"Error 212: MoveRobotArmIn", I followed the instructions on screen to manually retrieve the arm to outer position but the error is not cleared. I tried twice and then the error becomes "Error 214: CloseValve". I think the valve is not closed, the arm is in outer position and the chamber is still in vacuum. I am afraid the pump is getting warm, does anybody know how to manually close the valve and stop pumping the chamber? Thanks a lot! Best Pengyu Fan PhD Candidate Materials Science & Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From bilee at stanford.edu Thu May 12 01:05:17 2011 From: bilee at stanford.edu (Byoung Il Lee) Date: Thu, 12 May 2011 01:05:17 -0700 (PDT) Subject: raith error In-Reply-To: Message-ID: <1230829427.138036.1305187517710.JavaMail.root@zm03.stanford.edu> Raith session canceled due to the load lock error, till the morning. ----- Original Message ----- From: "Pengyu Fan" stanford.edu> To: "raith" Sent: Wednesday, May 11, 2011 11:08:56 PM Subject: raith error Hi All, I have encountered a loadlock error during loading, says"Error 212: MoveRobotArmIn", I followed the instructions on screen to manually retrieve the arm to outer position but the error is not cleared. I tried twice and then the error becomes "Error 214: CloseValve". I think the valve is not closed, the arm is in outer position and the chamber is still in vacuum. I am afraid the pump is getting warm, does anybody know how to manually close the valve and stop pumping the chamber? Thanks a lot! Best Pengyu Fan PhD Candidate Materials Science & Engineering Stanford University From toecutter4ranger at gmail.com Thu May 12 06:53:32 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Thu, 12 May 2011 06:53:32 -0700 Subject: Robot arm positioning errors last evening Message-ID: Sorry to have missed your phone call I was sleeping Will address the robot arm positioning issue when I arrive at SNF Should be in by 9 or so Best James -------------- next part -------------- An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Thu May 12 10:15:17 2011 From: gshambat at stanford.edu (Gary Shambat) Date: Thu, 12 May 2011 10:15:17 -0700 (PDT) Subject: Raith free 14:30-19:00 Message-ID: <1911614861.135589.1305220517981.JavaMail.root@zm01.stanford.edu> Sample not ready From lyjiao at stanford.edu Thu May 12 10:32:10 2011 From: lyjiao at stanford.edu (Liying Jiao) Date: Thu, 12 May 2011 10:32:10 -0700 (PDT) Subject: Raith free Friday 10:30-13:00 In-Reply-To: <1911614861.135589.1305220517981.JavaMail.root@zm01.stanford.edu> Message-ID: <1585913499.184975.1305221530271.JavaMail.root@zm08.stanford.edu> Raith free tomorrow 10:30-13:00. Sample will not be ready. Liying From sgchong at stanford.edu Fri May 13 11:38:28 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Fri, 13 May 2011 11:38:28 -0700 (PDT) Subject: raith free tonight (5/13) 9PM-midnight Message-ID: <985963446.291054.1305311908504.JavaMail.root@zm07.stanford.edu> -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From toecutter4ranger at gmail.com Sat May 14 09:43:54 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Sat, 14 May 2011 09:43:54 -0700 Subject: T robot arm issues seem to be resolved for now. Message-ID: <0E1C329D-671D-4F12-926A-3033E10BC64D@gmail.com> Good Morning: Thursday night I stayed late and did some adjustments to the tension of the Transfer arm of the load lock robot that loads the pallets into the machine; followed by new exchange position settings. We have now gone about 36 hours without problems and can consider the system back in Green light status. ( albeit I cannot change coral status back from yellow remotely) Please call me should you encounter any problems. Thank you, James Northern Cal today From hitoshi831223 at gmail.com Sat May 14 11:43:26 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Sat, 14 May 2011 11:43:26 -0700 Subject: raith free 12pm to 2pm today Message-ID: took earlier spot -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From altamash at stanford.edu Sat May 14 17:31:02 2011 From: altamash at stanford.edu (Altamash Janjua) Date: Sat, 14 May 2011 17:31:02 -0700 (PDT) Subject: Raith released from now till 10pm Message-ID: <535543638.191144.1305419462744.JavaMail.root@zm01.stanford.edu> Could not find the standard ZEP resist. The one in the refrigerator is 1:1 Zep with anisole and gives 91nm thick film at 5k. Too thin for me :( Altamash From kcbalram at stanford.edu Sat May 14 23:37:37 2011 From: kcbalram at stanford.edu (Krishna Coimbatore Balram) Date: Sat, 14 May 2011 23:37:37 -0700 (PDT) Subject: Raith free from 12:00 to 2:00 AM Message-ID: <96884310.241064.1305441457828.JavaMail.root@zm06.stanford.edu> Previous process step did not work out Sorry for the late notice.... Krishna From jwc at snf.stanford.edu Mon May 16 11:35:39 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 16 May 2011 11:35:39 -0700 Subject: Raith Field service expected this afternoon sometime after 1:30 PM for a quick look at the system Message-ID: <4DD16E7B.7070001@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 16 12:11:21 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 16 May 2011 12:11:21 -0700 Subject: ANNOUNCEMENT: Raith Group 45- Four Day Short Course for Basic RAITH 150 Users Tuesday to Friday May 17 to 20th, 2011 10 AM to 6 PM Message-ID: <4DD176D9.5010701@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon May 16 14:04:41 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 16 May 2011 14:04:41 -0700 Subject: Fwd: WG: MNE2011: Abstract Submission - Now Open !!! Message-ID: <4DD19169.7010306@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 5428 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/gif Size: 6003 bytes Desc: not available URL: From jwc at snf.stanford.edu Mon May 16 14:08:06 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 16 May 2011 14:08:06 -0700 Subject: Standard ZEP-520A resist In-Reply-To: References: Message-ID: <4DD19236.5000000@snf.stanford.edu> Users Currently we have in the refrigerator a new bottle of ZEP-520A resist and a special formulary of 1:1 by volume of ZEP-520A to Anisole for thinner films in the 100 - 200 nm thickness. Users are encouraged to report their exposure parameters, doses and images for inclusion into the next revision of the process suite coming out very soon. Please see me or email if you desire the current process sheet. Thank you, James On 5/14/2011 5:35 PM, Altamash Janjua wrote: > Hi James, > > Hope you are having a fun weekend. > > I could not find the standard ZEP resist. Can you please let me know > where it is? The one in the fridge is diluted 50%. > > Thanks, > > Altamash > > > -- > Altamash Janjua > From tasyurek at stanford.edu Mon May 16 14:47:58 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Mon, 16 May 2011 14:47:58 -0700 (PDT) Subject: Raith free 5-8pm today. Message-ID: <1924665548.266667.1305582478989.JavaMail.root@zm02.stanford.edu> Sorry for the late notice. From toecutter4ranger at gmail.com Mon May 16 19:59:40 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Mon, 16 May 2011 19:59:40 -0700 Subject: System shut down till tomorrow Message-ID: <4E7B1B9C-3558-487F-A0D1-3D592BA56060@gmail.com> Good evening The Raith system will be offline to users overnight. A small water leak was found and we hope to secure parts and effect repairs tomorrow. James From jwc at snf.stanford.edu Tue May 17 10:00:40 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 17 May 2011 10:00:40 -0700 Subject: Will the User(s) whom used the new batch of HSQ and left if out in the Lab cart please come and see me TODAY! Message-ID: <4DD2A9B8.2090301@snf.stanford.edu> Good Morning, Yesterday I brought out a brand new bottle of HSQ negative tone resist from Stores. A User brought this material out into the Lab sometime overnight and has left it in the Stainless steel roll away cart after dispensing and did not return it immediately to the refrigerator. Will this Users please see me TODAY! I would like to speak with him or her. This material MUST be kept, maintained and stored at 5 degrees C or below! If it warms up to normal temperatures it will quickly decompose with significant changes to its exposure and scumming characteristic. Thank you, James Conway From toecutter4ranger at gmail.com Tue May 17 19:31:05 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Tue, 17 May 2011 19:31:05 -0700 Subject: System is up and available to Users Message-ID: Good Evening The system came up this afternoon and was tested. Everything is normal albeit it will take several days for the FEGun emision to return to normal levels. Suitable for all users projects. Thank you for your support! James From tasyurek at stanford.edu Tue May 17 20:11:39 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Tue, 17 May 2011 20:11:39 -0700 (PDT) Subject: Raith free 11pm-1am tonight Message-ID: <643884977.315739.1305688299212.JavaMail.root@zm02.stanford.edu> Sorry for the late notice From tanemura at stanford.edu Wed May 18 14:25:35 2011 From: tanemura at stanford.edu (Takuo Tanemura) Date: Wed, 18 May 2011 14:25:35 -0700 Subject: Raith free 0am-3am tonight In-Reply-To: <643884977.315739.1305688299212.JavaMail.root@zm02.stanford.edu> References: <643884977.315739.1305688299212.JavaMail.root@zm02.stanford.edu> Message-ID: <4DD4394F.6050704@stanford.edu> From kodama at stanford.edu Thu May 19 03:03:51 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Thu, 19 May 2011 03:03:51 -0700 (PDT) Subject: raith free from 6:00 am to 10:00 am Message-ID: <619606217.409382.1305799431559.JavaMail.root@zm09.stanford.edu> Sorry for the late notice. I can not use this slot for the error on the upstream process. From fanpy839 at stanford.edu Thu May 19 17:37:39 2011 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Thu, 19 May 2011 17:37:39 -0700 Subject: raith free 10:30 Message-ID: Got a later spot. Pengyu Fan PhD Candidate Materials Science & Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From bajcsy at stanford.edu Sun May 22 19:33:53 2011 From: bajcsy at stanford.edu (Michal Bajcsy) Date: Sun, 22 May 2011 19:33:53 -0700 (PDT) Subject: raith released tomorrow 10am-12:30pm In-Reply-To: <1029649523.539845.1306117989167.JavaMail.root@zm09.stanford.edu> Message-ID: <130717217.539852.1306118033832.JavaMail.root@zm09.stanford.edu> sample not ready From arkam at stanford.edu Sun May 22 20:46:14 2011 From: arkam at stanford.edu (Arka Majumdar) Date: Sun, 22 May 2011 20:46:14 -0700 (PDT) Subject: raith free tomorrow (monday) 7 pm to 12 night....finished writing today Message-ID: <408032246.147671.1306122374274.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From hitoshi831223 at gmail.com Mon May 23 09:26:27 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Mon, 23 May 2011 09:26:27 -0700 Subject: raith free today 10am to 1230pm Message-ID: sorry for late notice. sample not ready -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Mon May 23 14:32:06 2011 From: gshambat at stanford.edu (Gary Shambat) Date: Mon, 23 May 2011 14:32:06 -0700 (PDT) Subject: Raith free 14:30 - 19:00 Message-ID: <411489348.410603.1306186326315.JavaMail.root@zm01.stanford.edu> Sample not working only now. Sorry for the late notice From jwc at snf.stanford.edu Mon May 23 15:09:55 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 23 May 2011 15:09:55 -0700 Subject: Please return the RAITH off line SW installation disk if you have it. Message-ID: <4DDADB33.20505@snf.stanford.edu> Hello All, Recently I loaned out the RAITH Offline SW installation disk but it may have never come back to me. If you have this please return it to me ASAP, it is needed by another user. Thanks James From hitoshi831223 at gmail.com Mon May 23 18:11:10 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Mon, 23 May 2011 18:11:10 -0700 Subject: free 8-11pm today Message-ID: problem with evaporation. sorry for late notice -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From hitoshi831223 at gmail.com Tue May 24 09:08:16 2011 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Tue, 24 May 2011 09:08:16 -0700 Subject: raith free today 930am till 11am Message-ID: -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue May 24 10:07:25 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 24 May 2011 10:07:25 -0700 Subject: Query of Interest from lab members working at SNF -- whom would be interested in using BeamPROP software application if we had it here at SNF? Message-ID: <4DDBE5CD.7090402@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: moz-screenshot.png Type: image/png Size: 98636 bytes Desc: not available URL: From langrock at stanford.edu Tue May 24 10:18:07 2011 From: langrock at stanford.edu (Carsten Langrock) Date: Tue, 24 May 2011 10:18:07 -0700 Subject: Query of Interest from lab members working at SNF -- whom would be interested in using BeamPROP software application if we had it here at SNF? In-Reply-To: <4DDBE5CD.7090402@snf.stanford.edu> References: <4DDBE5CD.7090402@snf.stanford.edu> Message-ID: If the goal is to simply calculate the modes and effective indices of ridge waveguide structures, no matter how many layers, there are free alternatives available on the web. A Matlab-based mode solver was also written by somebody in Prof. James Harris' group. I am sure that BeamProp does a lot more things than this, but maybe not all of these might be required by the majority of users. Our group maintains solvers for diffused waveguides as well as semiconductor-based slab / ridge waveguides. Carsten On May 24, 2011, at 10:07 AM, James W. Conway wrote: > Greetings Lab Members and Ebeam Lab Users: > > A number of Users working in the Ebeam Lab are working with and > fabricating optical waveguides, splitters, and resonators as well as > other types of nano-optical Photonic devices. > This email is intended to solicit interest from our Users working in > the lab towards acquiring BeamProp software package for our Lab. > The intention would be to split the cost of this application between > SNF and another Stanford group for their users. The application > would be maintained on SNF computing equipment in the Ebeam Lab > and add to our tool set of CAD and modeling software as we move > into the future. > > Please lend me your opinion by replying to this email if you are > interested or have any comments... > > Thank you, > > James Conway > Ebeam Technology Group > Stanford Nanofabrication Facility > > > > Example of the software with many thanks from Stephanie Claussen: > > > > > > _____________________________________ Dipl.-Phys. Carsten Langrock, Ph.D. Physical Sciences Research Associate Edward L. Ginzton Laboratory, Rm. 202 Stanford University 348 Via Pueblo Mall 94305 Stanford, CA Tel. (650) 723-0464 Fax (650) 723-2666 Ginzton Lab Shipping Address: Astro-Physics Building, Rm. 148 452 Lomita Mall Ginzton Lab Freight Deliveries: 491 South Service Road _____________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From tasyurek at stanford.edu Wed May 25 10:13:48 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Wed, 25 May 2011 10:13:48 -0700 (PDT) Subject: Raith - will start my session at 11:30am today Message-ID: <590035957.545379.1306343628846.JavaMail.root@zm02.stanford.edu> Sorry for the late notice From jwc at snf.stanford.edu Wed May 25 10:17:15 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 25 May 2011 10:17:15 -0700 Subject: Single slide showing your best EBL work on the RAITH Message-ID: <4DDD399B.2020509@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: crossbar_30nmP_AFMatHPLabs.jpg Type: image/jpeg Size: 22438 bytes Desc: not available URL: From jwc at snf.stanford.edu Fri May 27 11:01:04 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 27 May 2011 11:01:04 -0700 Subject: MaN2403 / MaD525 expired In-Reply-To: <4DDFD8FC.9040502@stanford.edu> References: <4DDD399B.2020509@snf.stanford.edu> <4DDFD8FC.9040502@stanford.edu> Message-ID: <4DDFE6E0.7080402@snf.stanford.edu> Good Morning, I have used the batch in the lab recently and did not have any problems with adhesion on Silicon and Quartz without HMDS prime. Is it possible that your substrates have some residue on them from previous resist processes? If you were doing optical lithography or PMMA EBL processing before on these substrates consider cleaning in Remover PG heated to above 40 degrees C for 10 or more minutes followed by 10 min. soak in Acetone, then Hot IPA with a perfect blow dry. I use the ultrasonic cleaner on wbsolvent. Some users whom employ the HMDS prime and others are reporting back to me that it adhere better for them without the HMDS prime. Possibly other users on this list may offer their suggestions for discussion. I will bring in a new bottle of MaN-2403 today likely from the same batch and we will discard the old bottle. The developer is a TMAH based basic solution and I don't think it will degrade significantly until it is over three years old. Please try the new bottle on both your substrates and a clean Silicon wafer and let me know if you are still having problems. Upon my return from Three Beams June 6 or 7th I will test the new bottle / batch and if it is in any way changes from my process definition I will promptly order a new bottle or two for us. Thank you for the heads up! James On 5/27/2011 10:01 AM, Takuo Tanemura wrote: > Hello James, > > We have noticed yesterday that MaN2403 in the fab has expired in Oct. > 2010. We are facing a problem that MaN2403 does not stick to a chip > (with thin SiO2 layer on Si) even after HMDS-primed with YES oven. We > never had a problem about half year ago with similar process. > > Also, we noticed MaD525 has expired in Nov. 2010. > > I am wondering if you have stock on these chemicals and could replace > them to new ones. > > Thank you, > > Takuo > From kodama at stanford.edu Fri May 27 11:28:38 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Fri, 27 May 2011 11:28:38 -0700 (PDT) Subject: MaN2403 / MaD525 expired In-Reply-To: <4DDFE6E0.7080402@snf.stanford.edu> Message-ID: <177813684.776550.1306520918641.JavaMail.root@zm09.stanford.edu> Hi all, I used both old and new bottle of MaN for my process, and the results were almost same. 10KeV, 10 micron aperture, and appropriate current density is from 40-60 micron/cm2. I encountered the poor adhesion on Si substrate as well, but I solved it by the surface cleaning as James mentioned. But in my case, only short time etching of the native dioxide was effective. So, wafer was put into 20:1 BOE for about 30 s, and coat MaN just after that. I suspect the poor adhesion come from the top thin oxide layer. Takashi Kodama kodama at stanford.edu ----- Original Message ----- From: "James W. Conway" To: tanemura at stanford.edu Cc: "Krishna C Balram" , "Ebeam Lab" Sent: Friday, May 27, 2011 11:01:04 AM Subject: Re: MaN2403 / MaD525 expired Good Morning, I have used the batch in the lab recently and did not have any problems with adhesion on Silicon and Quartz without HMDS prime. Is it possible that your substrates have some residue on them from previous resist processes? If you were doing optical lithography or PMMA EBL processing before on these substrates consider cleaning in Remover PG heated to above 40 degrees C for 10 or more minutes followed by 10 min. soak in Acetone, then Hot IPA with a perfect blow dry. I use the ultrasonic cleaner on wbsolvent. Some users whom employ the HMDS prime and others are reporting back to me that it adhere better for them without the HMDS prime. Possibly other users on this list may offer their suggestions for discussion. I will bring in a new bottle of MaN-2403 today likely from the same batch and we will discard the old bottle. The developer is a TMAH based basic solution and I don't think it will degrade significantly until it is over three years old. Please try the new bottle on both your substrates and a clean Silicon wafer and let me know if you are still having problems. Upon my return from Three Beams June 6 or 7th I will test the new bottle / batch and if it is in any way changes from my process definition I will promptly order a new bottle or two for us. Thank you for the heads up! James On 5/27/2011 10:01 AM, Takuo Tanemura wrote: > Hello James, > > We have noticed yesterday that MaN2403 in the fab has expired in Oct. > 2010. We are facing a problem that MaN2403 does not stick to a chip > (with thin SiO2 layer on Si) even after HMDS-primed with YES oven. We > never had a problem about half year ago with similar process. > > Also, we noticed MaD525 has expired in Nov. 2010. > > I am wondering if you have stock on these chemicals and could replace > them to new ones. > > Thank you, > > Takuo > From jwc at snf.stanford.edu Fri May 27 16:12:46 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 27 May 2011 16:12:46 -0700 Subject: New bottle of MaN-2403 and MaD 525 came into the lab today. Message-ID: <4DE02FEE.2050604@snf.stanford.edu> Greetings, I just brought a new bottle of MaN-2403 and MaD 525 developer into the lab today. I disposed of the nearly completed bottle and it is no longer in the Lab... Please handle this material carefully current process sheet is attached... James -------------- next part -------------- A non-text attachment was scrubbed... Name: Ma-N 2403 Process_NEW2010.doc Type: application/msword Size: 26624 bytes Desc: not available URL: From tanemura at stanford.edu Sat May 28 17:13:16 2011 From: tanemura at stanford.edu (Takuo Tanemura) Date: Sat, 28 May 2011 17:13:16 -0700 Subject: New bottle of MaN-2403 and MaD 525 came into the lab today. In-Reply-To: <4DE02FEE.2050604@snf.stanford.edu> References: <4DE02FEE.2050604@snf.stanford.edu> Message-ID: <4DE18F9C.2000104@stanford.edu> Thank you James and Takashi for the new bottle and suggestions. I will try again with and without the HMDS prime and let you know the result. Thanks, Takuo James W. Conway (2011/05/27 16:12): > Greetings, > > I just brought a new bottle of MaN-2403 and MaD 525 developer into the lab today. > I disposed of the nearly completed bottle and it is no longer in the Lab... > Please handle this material carefully > > current process sheet is attached... > > James From fanpy839 at stanford.edu Mon May 30 21:46:18 2011 From: fanpy839 at stanford.edu (Pengyu Fan) Date: Mon, 30 May 2011 21:46:18 -0700 Subject: raith free 10pm Message-ID: samples not ready. sorry for the late notice. Pengyu Fan PhD Candidate Materials Science & Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: