Byoung Il Lee
bilee at stanford.edu
Thu May 12 01:05:17 PDT 2011
Raith session canceled due to the load lock error, till the morning.
----- Original Message -----
From: "Pengyu Fan" stanford.edu>
To: "raith" <raith at snf.stanford.edu>
Sent: Wednesday, May 11, 2011 11:08:56 PM
Subject: raith error
I have encountered a loadlock error during loading, says"Error 212: MoveRobotArmIn", I followed the instructions on screen to manually retrieve the arm to outer position but the error is not cleared. I tried twice and then the error becomes "Error 214: CloseValve". I think the valve is not closed, the arm is in outer position and the chamber is still in vacuum.
I am afraid the pump is getting warm, does anybody know how to manually close the valve and stop pumping the chamber?
Thanks a lot!
Materials Science & Engineering
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