From gshambat at stanford.edu Sun Oct 2 21:06:07 2011 From: gshambat at stanford.edu (Gary Shambat) Date: Sun, 2 Oct 2011 21:06:07 -0700 (PDT) Subject: Raith free tomorrow 9:30-11:00 Message-ID: <2104106995.659742.1317614767248.JavaMail.root@zm01.stanford.edu> From tasyurek at stanford.edu Sun Oct 2 21:39:16 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Sun, 2 Oct 2011 21:39:16 -0700 (PDT) Subject: Raith available 1-3pm tomorrow (Monday) Message-ID: <385765300.791874.1317616756742.JavaMail.root@zm02.stanford.edu> From krivoire at stanford.edu Mon Oct 3 10:47:49 2011 From: krivoire at stanford.edu (Kelley Rivoire) Date: Mon, 3 Oct 2011 10:47:49 -0700 (PDT) Subject: raith free until noon Message-ID: <34310203.806961.1317664069719.JavaMail.root@zm02.stanford.edu> started and finished early Kelley From kodama at stanford.edu Mon Oct 3 16:10:25 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Mon, 3 Oct 2011 16:10:25 -0700 (PDT) Subject: raith free from 22:00 pm today Message-ID: <1424340388.1195801.1317683425015.JavaMail.root@zm09.stanford.edu> Sorry for the late notice. I had to change the schedule due to delay of the upstream process. Takashi From jwc at snf.stanford.edu Mon Oct 3 18:51:29 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 03 Oct 2011 18:51:29 -0700 Subject: RAITH System is available tonight after 8:30 to 9 PM till 10:00 AM tomorrow Please shift your reservations if possible. need access for RAITH Field service to complete adjustments tomorrow. Message-ID: <4E8A66A1.8060601@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Oct 4 10:24:44 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 04 Oct 2011 10:24:44 -0700 Subject: reticulation on ZEP using Lampoly? In-Reply-To: References: Message-ID: <4E8B415C.7010601@snf.stanford.edu> Hello to such a long list of people... I have seen reticulation of ZEP-520 at resist application when applying to oxides and nitrides long before, but your result is a particularly spectacular one. Thank you for the excellent SEM image. If you follow my standard ZEP-520A Process you should not see this type of problem. But if your sample is not perfectly clean you will often see this problem, based on many users experience. Questions: How was the SOI substrate cleaned before resist application? Did you employ a HMDS prime step or not? Did you measure the resist thickness using the nanospec? n = 1.54 using program 10. Please confirm this was present as applied and not after any RIE etch treatment. The reticulation you mention could also be Polymeric PTFE material if you employ CF4 or other Florine source during RIE. RIE can really beat up this material if you don't perform an extended pump down of the chamber before processing as that water vapor from adventitious sources in the chamber breaks down to O2 during RIE. Also best to avoid O2 in the processing. Once exposed how did you develop out. Last week upon reports from Kelly and one other user of dosage changes I spun ZEP-520A onto Silicon wafers during last Tuesday's 'Take a Spin with Me' class. I have done thickness measurements and inspected the batch bottle and so far found no problems. 268 - 270 nm films were deposited spinning at 8000 rpm with uniformity variations on the order of 4 to 10 Angstroms (0.4 to 1 nm) across a 100 MM SEMI WAFER. I am exposing this material in test today and next week. So before and after exposure I will perform an careful optical microscope inspection and report back to this list.. FYI the current bottle of ZEP is soon to run out and I have a new batch in the house ready to go. Thank you, James On 9/29/2011 5:41 PM, Kyeongran Yoo wrote: > Hello Raith, JEOL, and Lampoly users, > I have reticulation issue on my ZEP520 pattern after using Lampoly. > I am wondering if you have such a problem. If so, how did you solve > this issue? > Please take a look at the attached file and let me know your comments. > thank you very much and have a nice day. > best, > Kyeongran From dlee76 at stanford.edu Wed Oct 5 11:22:40 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Wed, 5 Oct 2011 11:22:40 -0700 Subject: Release my reservation from now to 15:30 Message-ID: Dear Raith user: In order to spin-coat the PMMA resist, I knew that the resist is not coated on the samples. So, I need to release my reservation. Sorry for the late notice. Don From tasyurek at stanford.edu Wed Oct 5 12:05:34 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Wed, 5 Oct 2011 12:05:34 -0700 (PDT) Subject: Raith free 5:30-7:30pm today Message-ID: <2100886157.894146.1317841534589.JavaMail.root@zm02.stanford.edu> From khu834 at stanford.edu Wed Oct 5 12:07:02 2011 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Wed, 5 Oct 2011 12:07:02 -0700 Subject: Raith free 5:30-7:30pm today In-Reply-To: <2100886157.894146.1317841534589.JavaMail.root@zm02.stanford.edu> References: <2100886157.894146.1317841534589.JavaMail.root@zm02.stanford.edu> Message-ID: Taken thank you. Kevin On Wed, Oct 5, 2011 at 12:05 PM, Emel Tasyurek wrote: > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vrinda at stanford.edu Wed Oct 5 13:15:11 2011 From: vrinda at stanford.edu (Vrinda Thareja) Date: Wed, 5 Oct 2011 13:15:11 -0700 Subject: Raith free from 7:30p to 11p today. Taken up an earlier slot. Message-ID: -- ~Vrinda Vrinda Thareja PhD Candidate Department of Materials Science and Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From dlee76 at stanford.edu Wed Oct 5 17:16:05 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Wed, 5 Oct 2011 17:16:05 -0700 Subject: Release my reservation on Thursday Message-ID: <2B9F9CD2-AE9C-47E7-B4B9-D8C031DD148A@stanford.edu> Dear Raith user: Since my previous process was not working out, I need to release my reservation on Thursday. Thank you. Don From jwc at snf.stanford.edu Wed Oct 5 17:28:51 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 05 Oct 2011 17:28:51 -0700 Subject: Handing my reservations tomorrow and Thursday on RAITH to Gary Shambat as I bumped him off the system several times this week for RAITH Field service access. In-Reply-To: References: <4E8CED3B.2070305@snf.stanford.edu> Message-ID: <4E8CF643.6070802@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Oct 5 19:01:34 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 05 Oct 2011 19:01:34 -0700 Subject: RAITH SYSTEM IS UP AND AVAILABLE FOR YOUR WORK. Message-ID: <4E8D0BFE.90706@snf.stanford.edu> An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Oct 7 04:13:43 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 7 Oct 2011 04:13:43 -0700 Subject: Replying to ZZP's call on blanking states last night Message-ID: <6117FA2B-043D-4457-A2E9-062CF7F7DF59@gmail.com> Hello All Missed ZZP's call about midnight I was alseep and didn't wake up on the call. If the blanker states have reversed logic try the following reset sequence: (It might have just been in his login. SMS to ZZP) Sorry to have missed your call. Try this: Be sure that the software Raith side is blanked. Then exit the Raith application. Exit the Smartsem. Close both windowns PC and' shut down 'computer. Then check the high speed digital scan Processer and check the far right hand switch it should be in the up position. If down move it up. If beam is still on on the blanker box unit above it, momentarily pull up on the far left reset switch and it should be OK. Please call me if you are still up, Lev Markov will be there at 10 AM. I'm just getting up at 4:00 AM and anyone on the machine can call me. James -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Oct 7 04:16:32 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 7 Oct 2011 04:16:32 -0700 Subject: password for the offline raith computer in the Ebeam room? In-Reply-To: <1800164623.793913.1317966808239.JavaMail.root@zm01.stanford.edu> References: <1800164623.793913.1317966808239.JavaMail.root@zm01.stanford.edu> Message-ID: <29764F7B-4A7B-4D6E-849E-00489D639F69@gmail.com> I am backing up that computer this evening on Iron Mountain. ETA tobfinished is 10 AM. Next user in lab please call me if there are problems. There is also a laptop on the network on the Hitachi EBeam writer that I left up for users or the SEM 4160 PC James On Oct 6, 2011, at 10:53 PM, Zhiping Zhang wrote: > Hi James, > > it seems the computer on the middle table is locked under your > account 'JWC'? Could you please tell me the password or the admin. > password? > > thanks, > Zhiping From toecutter4ranger at gmail.com Fri Oct 7 06:40:44 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 7 Oct 2011 06:40:44 -0700 Subject: Next user on the tool please call me if you are still having problems Message-ID: Next user on the tool please call me if you are still having problems or reply to this email that the system is fine From vrinda at stanford.edu Fri Oct 7 07:43:31 2011 From: vrinda at stanford.edu (Vrinda Thareja) Date: Fri, 7 Oct 2011 07:43:31 -0700 Subject: Would be starting my slot at 8:30a. Message-ID: -- ~Vrinda Vrinda Thareja PhD Candidate Department of Materials Science and Engineering Stanford University -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Fri Oct 7 09:01:02 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 7 Oct 2011 09:01:02 -0700 Subject: Raith field service here today 10-2 Message-ID: <57381DA1-7FB4-41EE-97BA-31DA2726248D@gmail.com> Good Morning, Raith field service will be here today 10-2 to continue configuration work to establish the API interface between the two PC's. They may need to use the network cable from the offline PC for their work so please don't expect network capability during this time. I am working from home today and can best be reached by email. Please refrain from calling me on my cell unless it's urgent until after 7 PM or before 7 AM as I am out of daytime minutes to 10-15-2011... I expect Users will fully utilize the tool over the weekend.and I would also like to encourage those users whom haven't given the new system a try to come and check it out. It's a whole new machine and it so fast you will be amazed! I Like It! Thank you for your support! James Conway From toecutter4ranger at gmail.com Fri Oct 7 09:12:26 2011 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 7 Oct 2011 09:12:26 -0700 Subject: Next EBEAM Lab Town Hall Meeting October 28, 2011 2 - 4 PM Packard 202 Message-ID: Greetings Everyone with an interest in Ebeam Lithography, the Raith Upgrade, or nanofabrication of MEMS Resonators is invited to our next EBEAM Lab Town Hall Meeting now scheduled for October 28, 2011 2 - 4 PM Packard 202. Refreshments will be provided. Please note this on your calendars. I will have several visitors that day and have asked them to present their work and update us on activities their centers. Mohammad Ali Mohammad from University of Alberta Edminton will be presenting his work on SiCN resonators using their Raith 150 and has fabricated sub-10 nm features . I will publish his abstract when received next week. The Agenda is now open for discussion and additions on beamtools at snf.stanford.edu From khu834 at stanford.edu Sun Oct 9 15:58:29 2011 From: khu834 at stanford.edu (Kevin Chih-Yao Huang) Date: Sun, 9 Oct 2011 15:58:29 -0700 Subject: raith free till 5:30pm Message-ID: Done early -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Oct 10 12:00:14 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 10 Oct 2011 12:00:14 -0700 Subject: Raith joystick speed setting In-Reply-To: References: Message-ID: <4E9340BE.7070709@snf.stanford.edu> ON the joystick controls or in user settings on the RAITH side there is a check off that links the magnification to the joystick speed. Higher the SEM magnification the slower the speed. Unchecking this box takes away that functionality. Note to turn off the high speed button on the joystick for normal operations too! Let me know if any Users are having problems with this. James On 10/9/2011 5:18 PM, Kevin Chih-Yao Huang wrote: > Hi James: > > For some reason, the joystick speed reverts to 10/10 for fast/slow > every time I change magnification. > Is there some way to save the setting so it doesn't always change? > > Thanks. > > Kevin From jwc at snf.stanford.edu Mon Oct 10 12:33:43 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 10 Oct 2011 12:33:43 -0700 Subject: RELEASING MY SESSION for WEDNESDAY OCTOBER 12, 2011 FROM 2 - 6 pm DUE TO SCHEDULING CHANGE... Message-ID: <4E934897.6070608@snf.stanford.edu> Greetings I am releasing my RAITH session for WEDNESDAY OCTOBER 12, 2011 FROM 2 - 6 pm DUE TO SCHEDULING CHANGE... Who wants it? I need to be off site for another meeting at this time... Thank you for your support! James From tasyurek at stanford.edu Wed Oct 12 20:04:10 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Wed, 12 Oct 2011 20:04:10 -0700 (PDT) Subject: Raith free 9:30-11:30pm today Message-ID: <314290808.1147217.1318475050961.JavaMail.root@zm02.stanford.edu> From jwc at snf.stanford.edu Fri Oct 14 10:15:08 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 14 Oct 2011 10:15:08 -0700 Subject: ANNOUNCEMENT and REMINDER: Raith Group 49- Four Day Short Course for Basic RAITH 150 Users Tuesday to Friday October 18th to 21st 2011 10 AM to 6 PM Message-ID: <4E986E1C.8080606@snf.stanford.edu> An HTML attachment was scrubbed... URL: From tasyurek at stanford.edu Sun Oct 16 12:57:10 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Sun, 16 Oct 2011 12:57:10 -0700 (PDT) Subject: Raith free 3-5pm today Message-ID: <792512881.1245853.1318795030271.JavaMail.root@zm02.stanford.edu> From tanemura at stanford.edu Tue Oct 18 01:48:21 2011 From: tanemura at stanford.edu (Takuo Tanemura) Date: Tue, 18 Oct 2011 01:48:21 -0700 Subject: raith error In-Reply-To: References: Message-ID: <4E9D3D55.3010200@stanford.edu> Hi All, I have encountered a loadlock error during unloading: "Error 8: MoveStage1stPosition." The Turbo Pump lamp was green, so FAQ No.1 did not solve the problem. I could not reset the error and my sample is inside. I am sorry for the inconvenience. Best, Takuo Tanemura From jwc at snf.stanford.edu Wed Oct 19 09:02:26 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 19 Oct 2011 09:02:26 -0700 Subject: raith error In-Reply-To: <4E9D3D55.3010200@stanford.edu> References: <4E9D3D55.3010200@stanford.edu> Message-ID: <4E9EF492.2020908@snf.stanford.edu> I arrived at the tool at ten in the morning and it was unloaded already. Next time you run into this type of problem please try to retry after pressing OK, and if that doesn't work you can always call me 24/7. All the Best, JWC On 10/18/2011 1:48 AM, Takuo Tanemura wrote: > Hi All, > > I have encountered a loadlock error during unloading: "Error 8: > MoveStage1stPosition." The Turbo Pump lamp was green, so FAQ No.1 did > not solve the problem. I could not reset the error and my sample is > inside. > > I am sorry for the inconvenience. > > Best, > Takuo Tanemura > From jwc at snf.stanford.edu Mon Oct 24 14:20:26 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 24 Oct 2011 14:20:26 -0700 Subject: ANNOUNCEMENT: Ebeam Lab Town Hall Meeting Friday October 28th 2011 2:00 to 3:30 PM Packard 202 -- VISITING SPEAKER: MOHAMMAD ALI MOHAMMAD -- NANOSCALE ELECTRON BEAM PROCESSING AND APPLICATIONS Message-ID: <4EA5D69A.1070108@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: clip_image002.png Type: image/png Size: 53535 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: clip_image004.png Type: image/png Size: 8753 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: clip_image006.png Type: image/png Size: 17304 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... 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ESPACER running low... on order Message-ID: <4EA83C2F.1080608@snf.stanford.edu> Greetings Ebeam and SEM Users: I have just restocked both ZEP-520 A and the last bottle in the current batch of 2% 950K PMMA Microchem material. Today I also ordered a new batch of ZEP and ESPACER. The current bottle of Espacer is down to the last 25 ml and we ask all Users to be careful and frugal in your usage of these very expensive engineering materials. BE SURE TO NOT ALLOW THE MATERIAL TO WARM UP! As we approach our extended lab shutdown we will be trying to reduce and/or delay ordering of all engineering materials, particularly those with short shelf lives, so we can start out the next year with new batches of everything in February. Thank you for your support, James Conway From ytcheng at stanford.edu Wed Oct 26 17:34:24 2011 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Wed, 26 Oct 2011 17:34:24 -0700 Subject: raith free 8-10 am tomorrow Message-ID: <007d01cc9440$2ddabef0$89903cd0$@stanford.edu> Schedule conflicts. Sorry. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Oct 27 09:47:12 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 27 Oct 2011 09:47:12 -0700 Subject: 5% 950K PMMA? In-Reply-To: <80C3C114-CF94-4C9C-B2D6-D30DFD7DAC8A@stanford.edu> References: <80C3C114-CF94-4C9C-B2D6-D30DFD7DAC8A@stanford.edu> Message-ID: <4EA98B10.9050807@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Oct 27 11:11:18 2011 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 27 Oct 2011 11:11:18 -0700 Subject: 2ND ANNOUNCEMENT: Ebeam Lab Town Hall Meeting Friday October 28th 2011 2:00 to 4:00 PM Packard 202 MOHAMMAD ALI MOHAMMAD -- NANOSCALE E BEAM PROCESSING AND APPLICATIONS and Carl Zeiss Microscopy Message-ID: <4EA99EC6.5060802@snf.stanford.edu> An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/png Size: 53535 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/png Size: 8753 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: not available Type: image/png Size: 17304 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... 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Name: Agenda -- Ebeam Town Hall Meeting 10282011.doc Type: application/msword Size: 24576 bytes Desc: not available URL: From tanemura at stanford.edu Thu Oct 27 11:49:26 2011 From: tanemura at stanford.edu (Takuo Tanemura) Date: Thu, 27 Oct 2011 11:49:26 -0700 Subject: Raith free 9pm-0am tonight In-Reply-To: <007d01cc9440$2ddabef0$89903cd0$@stanford.edu> References: <007d01cc9440$2ddabef0$89903cd0$@stanford.edu> Message-ID: <4EA9A7B6.2020605@stanford.edu> Sample not ready. Sorry. From tasyurek at stanford.edu Thu Oct 27 19:24:27 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Thu, 27 Oct 2011 19:24:27 -0700 (PDT) Subject: Raith free 7:30pm till midnight In-Reply-To: <1509438346.1654170.1319768471619.JavaMail.root@zm02.stanford.edu> Message-ID: <2060675757.1654249.1319768667961.JavaMail.root@zm02.stanford.edu> Started and finished early From dlee76 at stanford.edu Fri Oct 28 08:41:26 2011 From: dlee76 at stanford.edu (Donkoun Lee) Date: Fri, 28 Oct 2011 08:41:26 -0700 (PDT) Subject: Release my reservation from 10:00 am to 15:00 Message-ID: <1558022143.1395932.1319816486340.JavaMail.root@zm03.stanford.edu> Hi all: I tried to spin coat the 5% 950K PMMA on Ru layer. Usually, it works. However, today, I could not spin coat the resist. Maybe, I may need to do UV cleaning or deposit thin Au layer for modifying the surface energy.... Anyway, I released my reservation from 10:00 to 15:00. Sorry for the late notice. Don -- Donkoun Lee Ph.D Candidate Prof. Shan X. Wang's Group Dept. of Materials Science & Engineering, Stanford University McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045 Office: (650)-723-2939 Fax: (650)-736-1984 From kodama at stanford.edu Sun Oct 30 12:59:40 2011 From: kodama at stanford.edu (Takashi Kodama) Date: Sun, 30 Oct 2011 12:59:40 -0700 (PDT) Subject: raith free till 15:30 today Message-ID: <1229018208.2374329.1320004780849.JavaMail.root@zm09.stanford.edu> Finished early. thanks, From sgchong at stanford.edu Sun Oct 30 17:04:50 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Sun, 30 Oct 2011 17:04:50 -0700 (PDT) Subject: Starting 30min late Message-ID: <366554035.3115689.1320019490443.JavaMail.root@zm07.stanford.edu> Starting at 5:30 -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From tasyurek at stanford.edu Mon Oct 31 15:00:44 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Mon, 31 Oct 2011 15:00:44 -0700 (PDT) Subject: Raith available today 7-9pm Message-ID: <1929655532.1753448.1320098444496.JavaMail.root@zm02.stanford.edu>