James W. Conway
jwc at snf.stanford.edu
Wed Oct 19 09:02:26 PDT 2011
I arrived at the tool at ten in the morning and it was unloaded already.
Next time you run into this type of problem please try to retry after
pressing OK, and if that doesn't work you can always call me 24/7.
All the Best,
On 10/18/2011 1:48 AM, Takuo Tanemura wrote:
> Hi All,
> I have encountered a loadlock error during unloading: "Error 8:
> MoveStage1stPosition." The Turbo Pump lamp was green, so FAQ No.1 did
> not solve the problem. I could not reset the error and my sample is
> I am sorry for the inconvenience.
> Takuo Tanemura
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