Release my reservation from 10:00 am to 15:00
dlee76 at stanford.edu
Fri Oct 28 08:41:26 PDT 2011
I tried to spin coat the 5% 950K PMMA on Ru layer. Usually, it works. However, today, I could not spin coat the resist. Maybe, I may need to do UV cleaning or deposit thin Au layer for modifying the surface energy....
Anyway, I released my reservation from 10:00 to 15:00.
Sorry for the late notice.
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045
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