From jason.ryan at stanford.edu Mon Jul 2 14:42:57 2012 From: jason.ryan at stanford.edu (Jason Ryan) Date: Mon, 2 Jul 2012 14:42:57 -0700 Subject: Repeated load lock errors Message-ID: Hi all, Even after applying pressure to the load lock door, RAITH was unable to pump down load lock on unloading. Error reads: It is not possible to pump the loadlock ! Let me know if there is something I can do to get back to normal operation. Apologies if it's my fault!! -- Jason Ryan *Ph.D. Candidate* *Hesselink Group* *Department of Electrical Engineering, Stanford University* *Clothing Manager * *Stanford Cycling* -------------- next part -------------- An HTML attachment was scrubbed... URL: From jason.ryan at stanford.edu Mon Jul 2 15:13:18 2012 From: jason.ryan at stanford.edu (Jason Ryan) Date: Mon, 2 Jul 2012 15:13:18 -0700 Subject: Repeated load lock errors In-Reply-To: References: Message-ID: Thanks, everyone. By following the advice from various raith users and pressing the red reset button on the turbo pump as in the RAITH FAQ No.1, all is well. On Mon, Jul 2, 2012 at 2:42 PM, Jason Ryan wrote: > Hi all, > > Even after applying pressure to the load lock door, RAITH was unable to > pump down load lock on unloading. > > Error reads: It is not possible to pump the loadlock ! > > Let me know if there is something I can do to get back to normal > operation. Apologies if it's my fault!! > > -- > Jason Ryan > > *Ph.D. Candidate* > *Hesselink Group* > *Department of Electrical Engineering, Stanford University* > *Clothing Manager > * > *Stanford Cycling* > > -- Jason Ryan *Ph.D. Candidate* *Hesselink Group* *Department of Electrical Engineering, Stanford University* *Clothing Manager * *Stanford Cycling* -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbozorgg at stanford.edu Mon Jul 2 18:53:04 2012 From: tbozorgg at stanford.edu (Tara Bozorg-Grayeli) Date: Mon, 2 Jul 2012 18:53:04 -0700 (PDT) Subject: Releasing my 20:00-24:00 reservation for today (eom) Message-ID: <296382432.2189780.1341280384018.JavaMail.root@zm03.stanford.edu> From armandhr at stanford.edu Tue Jul 3 10:06:24 2012 From: armandhr at stanford.edu (Armand Rundquist) Date: Tue, 3 Jul 2012 10:06:24 -0700 Subject: Raith free 10am - 1pm Message-ID: Processing stalled due to problems with etcher. -Armand -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbozorgg at stanford.edu Tue Jul 3 22:07:25 2012 From: tbozorgg at stanford.edu (Tara Bozorg-Grayeli) Date: Tue, 3 Jul 2012 22:07:25 -0700 (PDT) Subject: Releasing remaining reservation Message-ID: <562369285.3872523.1341378445594.JavaMail.root@zm03.stanford.edu> Finished early. Releasing now-midnight tonight and tomorrow 19:30-midnight. Best, Tara From toecutter4ranger at gmail.com Thu Jul 5 08:34:48 2012 From: toecutter4ranger at gmail.com (ToeCutter) Date: Thu, 5 Jul 2012 08:34:48 -0700 Subject: James 000 Thursday and Friday Message-ID: Good Morning, Going to stay at the ranch in Durham Thursday and Friday this week. Available by phone or email to toecutter4ranger at gmail.com should users have any questions. Will return to the office on Monday July 9th. James From arkam at stanford.edu Thu Jul 5 12:46:20 2012 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 5 Jul 2012 12:46:20 -0700 (PDT) Subject: runnling little late--so moved my seesion from 2 to 3...(eom) Message-ID: <1052777201.3816528.1341517580629.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From arkam at stanford.edu Thu Jul 5 15:54:08 2012 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 5 Jul 2012 15:54:08 -0700 (PDT) Subject: free till 5---finished early...but 5 to 7-30 is aso feee (eom) Message-ID: <1568321851.3945801.1341528848049.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From arkam at stanford.edu Fri Jul 6 09:51:59 2012 From: arkam at stanford.edu (Arka Majumdar) Date: Fri, 6 Jul 2012 09:51:59 -0700 (PDT) Subject: shortening my session free from 10-30 (eom) Message-ID: <354542471.4495990.1341593519684.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From whl0903 at stanford.edu Fri Jul 6 13:30:11 2012 From: whl0903 at stanford.edu (Evan Wang) Date: Fri, 6 Jul 2012 13:30:11 -0700 Subject: Raith free from now to 6pm In-Reply-To: <2143337305.14963226.1340569704296.JavaMail.root@zm03.stanford.edu> References: <2143337305.14963226.1340569704296.JavaMail.root@zm03.stanford.edu> Message-ID: <8BAC4EF0-7674-4CB6-8E5D-A51B979D75B8@stanford.edu> Sorry for the late notice. Evan -------------- next part -------------- An HTML attachment was scrubbed... URL: From janp at stanford.edu Tue Jul 10 00:41:42 2012 From: janp at stanford.edu (Jan Petykiewicz) Date: Tue, 10 Jul 2012 00:41:42 -0700 Subject: Raith free 8pm to midnight Tuesday Message-ID: Upstream equipment down. -Jan -------------- next part -------------- An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Tue Jul 10 08:37:18 2012 From: gshambat at stanford.edu (Gary Shambat) Date: Tue, 10 Jul 2012 08:37:18 -0700 (PDT) Subject: Raith free 1-3PM today Message-ID: <2078420583.13173441.1341934638818.JavaMail.root@zm01.stanford.edu> From jwc at snf.stanford.edu Tue Jul 10 17:44:04 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 10 Jul 2012 17:44:04 -0700 Subject: Releasing RAITH reservation for Thursday early morning from 00:00 til 6 AM UP for grabs Message-ID: <4FFCCC54.8050300@snf.stanford.edu> Greetings RAITH Community: Releasing the second part of my CORAL RAITH reservation for Thursday early morning from 00:00 til 6 AM UP for grabs James From jwc at snf.stanford.edu Wed Jul 11 08:46:05 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 11 Jul 2012 08:46:05 -0700 Subject: E-Spacer In-Reply-To: <1725181356.18582985.1341974127943.JavaMail.root@zm02.stanford.edu> References: <1725181356.18582985.1341974127943.JavaMail.root@zm02.stanford.edu> Message-ID: <4FFD9FBD.3090709@snf.stanford.edu> New bottle of ESPACER has just arrived and I am stocking into the clean room refrigerator NOW! All Users are requested to be very frugal in your usage of this material to minimize waste of this expensive engineering material. Best James On 7/10/2012 7:35 PM, Hamidreza Chalabi wrote: > Dear James, > > The current bottle of E-Spacer is empty. Do we have any extra one? I want to do some ebeam lithography tonight. Please help me. > > Best, > Hamidreza From jwc at snf.stanford.edu Wed Jul 11 09:07:56 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 11 Jul 2012 09:07:56 -0700 Subject: Releasing RAITH reservation for Thursday early morning from 00:00 til 6 AM UP for grabs In-Reply-To: <4FFCCC54.8050300@snf.stanford.edu> References: <4FFCCC54.8050300@snf.stanford.edu> Message-ID: <4FFDA4DC.7050909@snf.stanford.edu> I grabbed the midnight to 2:30 AM slot early Thursday morning just in case I need more write time on my patterning. Users needing time may wish to check on the system late tonight after about 11 PM to see if the write may have finished in order to take advantage of the time available for their patterning needs. James On 7/10/2012 5:44 PM, James W. Conway wrote: > Greetings RAITH Community: > > Releasing the second part of my CORAL RAITH reservation for Thursday > early morning from 00:00 til 6 AM UP for grabs > > James From jwc at snf.stanford.edu Wed Jul 11 09:27:52 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 11 Jul 2012 09:27:52 -0700 Subject: I will be on the tool this afternoon working on my Spatial Phase Modulation project writing on Quartz at 2 PM onwards Message-ID: <4FFDA988.2050100@snf.stanford.edu> Good Morning, I will be on the RAITH this afternoon writing on Quartz and extended large area write using the 60 um aperture and 1000 um write field. Happy to answer any questions that you may have had come up, add to your training knowledge, and get your logins established on the tool. I am also holding the next Raith training class next week Tuesday to Friday and all interested Users are welcome to attend to add to your knowledge if interested. All the Best through your Day, James From bajcsy at stanford.edu Thu Jul 12 16:10:17 2012 From: bajcsy at stanford.edu (Michal Bajcsy) Date: Thu, 12 Jul 2012 16:10:17 -0700 (PDT) Subject: Saturday 9am-2pm released Message-ID: <528749347.15853632.1342134617542.JavaMail.root@zm09.stanford.edu> From gshambat at stanford.edu Fri Jul 13 15:23:03 2012 From: gshambat at stanford.edu (Gary Shambat) Date: Fri, 13 Jul 2012 15:23:03 -0700 (PDT) Subject: Raith free 5:30-7:30 Message-ID: <1239528313.25588177.1342218183359.JavaMail.root@zm01.stanford.edu> Can no longer use. Thanks From armandhr at stanford.edu Fri Jul 13 15:28:43 2012 From: armandhr at stanford.edu (Armand Rundquist) Date: Fri, 13 Jul 2012 15:28:43 -0700 Subject: Raith free 5:30-7:30 In-Reply-To: <1239528313.25588177.1342218183359.JavaMail.root@zm01.stanford.edu> References: <1239528313.25588177.1342218183359.JavaMail.root@zm01.stanford.edu> Message-ID: Taken, thanks. -Armand On Fri, Jul 13, 2012 at 3:23 PM, Gary Shambat wrote: > Can no longer use. Thanks > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Jul 13 15:35:12 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Fri, 13 Jul 2012 15:35:12 -0700 Subject: Faraday cup positions for the standard sample holder have been updated on the system. Message-ID: <5000A2A0.4070705@snf.stanford.edu> An HTML attachment was scrubbed... URL: From tasyurek at stanford.edu Sat Jul 14 22:08:42 2012 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Sat, 14 Jul 2012 22:08:42 -0700 (PDT) Subject: Raith available Sunday 10:30am-12:30pm In-Reply-To: <1665284064.27185084.1342328920990.JavaMail.root@zm02.stanford.edu> Message-ID: <813239295.27185088.1342328922996.JavaMail.root@zm02.stanford.edu> won't be able to make it. From kangjuhy at stanford.edu Mon Jul 16 11:33:02 2012 From: kangjuhy at stanford.edu (Juhyung Kang) Date: Mon, 16 Jul 2012 11:33:02 -0700 (PDT) Subject: raith released 13:00-17:00 totay In-Reply-To: <375349427.20846497.1342463538069.JavaMail.root@zm07.stanford.edu> Message-ID: <1110033775.20848240.1342463582266.JavaMail.root@zm07.stanford.edu> Sorry for late notice. Samples are not prepared. From jwc at snf.stanford.edu Mon Jul 16 12:23:37 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 16 Jul 2012 12:23:37 -0700 Subject: Office hours In-Reply-To: References: Message-ID: <50046A39.3060401@snf.stanford.edu> I have office hours all summer on Tuesdays, Wednesdays and Fridays from 9 - 10 AM at ALLEN 31. If I am not in the office at that time check the Ebeam Lab first then call me on the cell phone at 415-412-4825. Thank you, James Conway On 7/16/2012 10:20 AM, Tara Bozorg-Grayeli wrote: > > Hey James, > Are you holding office hours? I'd like you to check a pattern I made. > > Best, > Tara > From jwc at snf.stanford.edu Mon Jul 16 13:32:27 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 16 Jul 2012 13:32:27 -0700 Subject: IMPORTANT: Please be sure to bake you samples before you load into the RAITH system. 90 degrees C two minutes at minimum. Message-ID: <50047A5B.1020205@snf.stanford.edu> An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Mon Jul 16 14:46:39 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 16 Jul 2012 14:46:39 -0700 Subject: ANNOUNCEMENT and REMINDER: Raith Group 52- Four Day Short Course for Basic RAITH 150 Users Tuesday to Friday July 17 th to 20th 10 AM to 6 PM Message-ID: <50048BBF.1020201@snf.stanford.edu> An HTML attachment was scrubbed... URL: From tbozorgg at stanford.edu Mon Jul 16 21:57:41 2012 From: tbozorgg at stanford.edu (Tara Bozorg-Grayeli) Date: Mon, 16 Jul 2012 21:57:41 -0700 (PDT) Subject: Fatal Error Loadlock In-Reply-To: <1472731129.21439283.1342501038103.JavaMail.root@zm03.stanford.edu> Message-ID: <1348898074.21439393.1342501061944.JavaMail.root@zm03.stanford.edu> Hi all, I'm trying to unload my sample, but after procedure 'Unload:MoveStage1stPosition," I was given the error "Fatal Error Loadlock: The system can be in a CRITICAL STATE." Can anyone let me know what I should do in regards to this? Thanks, Tara From jason.ryan at stanford.edu Mon Jul 16 21:59:37 2012 From: jason.ryan at stanford.edu (Jason Ryan) Date: Mon, 16 Jul 2012 21:59:37 -0700 Subject: 12:00 reservation released Message-ID: Sample not ready! Cheers, -- Jason Ryan *Ph.D. Candidate* *Hesselink Group* *Department of Electrical Engineering, Stanford University* *Clothing Manager * *Stanford Cycling* -------------- next part -------------- An HTML attachment was scrubbed... URL: From tbozorgg at stanford.edu Mon Jul 16 22:31:54 2012 From: tbozorgg at stanford.edu (Tara Bozorg-Grayeli) Date: Mon, 16 Jul 2012 22:31:54 -0700 (PDT) Subject: Fatal Error Loadlock In-Reply-To: <1348898074.21439393.1342501061944.JavaMail.root@zm03.stanford.edu> Message-ID: <1187207631.21450120.1342503114134.JavaMail.root@zm03.stanford.edu> Thanks. Back up and running. (Fixed by dismissing error and restarting/relogging into raith software, so maybe software bug) Sample unloaded and releasing rest of time until 12. Tara ----- Original Message ----- From: "Tara Bozorg-Grayeli" To: raith at snf.stanford.edu Sent: Monday, July 16, 2012 9:57:41 PM Subject: Fatal Error Loadlock Hi all, I'm trying to unload my sample, but after procedure 'Unload:MoveStage1stPosition," I was given the error "Fatal Error Loadlock: The system can be in a CRITICAL STATE." Can anyone let me know what I should do in regards to this? Thanks, Tara From audet at stanford.edu Tue Jul 17 10:14:49 2012 From: audet at stanford.edu (Ross Audet) Date: Tue, 17 Jul 2012 10:14:49 -0700 Subject: releasing Raith reservation Wednesday 6-10AM Message-ID: <003c01cd643f$ac4235f0$04c6a1d0$@stanford.edu> From arkam at stanford.edu Thu Jul 19 09:03:15 2012 From: arkam at stanford.edu (Arka Majumdar) Date: Thu, 19 Jul 2012 09:03:15 -0700 (PDT) Subject: free till 10...I a,m running late Message-ID: <1968461143.27081072.1342713795028.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From toecutter4ranger at gmail.com Thu Jul 19 14:32:24 2012 From: toecutter4ranger at gmail.com (James Conway) Date: Thu, 19 Jul 2012 14:32:24 -0700 Subject: ALL USERS READ ME: Log your runs in paper logbook or get off the system! Message-ID: This is your ONLY NOTICE reminding Users to be sure to record your electron Beam Exposure and SEM sessions in the paper log book. Recently many User run's have be forgetting to or ignoring this requirement. This data particularly the Beam I, sample type and resist coating, and your dose are important to me in order to properly document many resist processes and evaluate to monitor the health of the FE-GUN. I have grown weary of reminding and pressing many Users for this data recently and hence forth will simply remove you from Users access to the system if you choose to ignore this requirement. Thank you for your support! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From toecutter4ranger at gmail.com Thu Jul 19 14:37:57 2012 From: toecutter4ranger at gmail.com (James Conway) Date: Thu, 19 Jul 2012 14:37:57 -0700 Subject: EHT Trip brought the FEGun down today at 11:4AM for unknown reason Message-ID: Greetings: An unidentified cause, possibly a voltage or strong RF spike or inductive ripple through the house mains, has resulted in a Extra High Tension trip in the FE-Gun Power supply. After a short rest period to check out sub-systems on the system we restarted the FE-Gun and after two hours have returned to near normal emission values albeit with elevated vacumm levels in the system chamber. All Users are requested to be vigilent and careful in their operation of the tool and to report any anomalys encountered. The only other unusual event is that the Z coder counts errored on one move earlier in the morning. Homing the stage to recalibrate did not resolve any significant delta in WD or Z calibrations. RAITH Field service has been informed and consulted with. JWC From jwc at snf.stanford.edu Mon Jul 23 17:58:22 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 23 Jul 2012 17:58:22 -0700 Subject: Raith Status Monday July 23, 18:00 hours Message-ID: <500DF32E.5030300@snf.stanford.edu> Good Evening, Today we replaced the column chamber isolation valve that was observed to be leaking. We are baking the system overnight and will bring up the platform for testing tomorrow. Plan to return this tool to users as soon as possible likely at days end tomorrow. Will keep you updated, James From jwc at snf.stanford.edu Tue Jul 24 09:57:41 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 24 Jul 2012 09:57:41 -0700 Subject: Raith Status for Tuesday July 24th 2012 -- Hope to have system up for Users access starting 18:00 hours this evening. Message-ID: <500ED405.7010608@snf.stanford.edu> Good Morning Raith Community: We completed the bake out of the FE-Gun and have a good vacuum for Gun start up. At 9:30 we started the ramp up the gun to normal extraction voltage and filament current levels for normal operation. It is expected that the FE-Gun emission level will slowly increase throughout the day and reach stability late this afternoon. We will strive to qualify the system for operations after checking all the usual Electron Optics card and Gun control adjustments late this afternoon. Hope to have Users back on the system starting about 18:00 hours this evening if all goes well in our testing. We will update this list late this afternoon by 18:00 hours. Thank you for your support! James Conway - Stanford Clifton Porter -- RAITH USA Field Service From jwc at snf.stanford.edu Tue Jul 24 21:41:55 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 24 Jul 2012 21:41:55 -0700 Subject: Raith passed its qualification after repairs. EBL write in progress Users can start when it ends or at or about 12 AM... Message-ID: <500F7913.20905@snf.stanford.edu> An HTML attachment was scrubbed... URL: From tasyurek at stanford.edu Thu Jul 26 15:29:15 2012 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Thu, 26 Jul 2012 15:29:15 -0700 (PDT) Subject: Raith free tomorrow 8:30-10am Message-ID: <525162104.49069476.1343341755587.JavaMail.root@zm02.stanford.edu> From zzp at stanford.edu Fri Jul 27 00:15:52 2012 From: zzp at stanford.edu (Zhiping Zhang) Date: Fri, 27 Jul 2012 00:15:52 -0700 (PDT) Subject: raith free now to 6:30 am Message-ID: <1808309169.56716160.1343373352227.JavaMail.root@zm01.stanford.edu> Finished early. Thanks, Zhiping From toecutter4ranger at gmail.com Fri Jul 27 10:11:52 2012 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 27 Jul 2012 10:11:52 -0700 Subject: I will be starting my session at 10:30 Message-ID: <74C60799-D7A6-42EA-8D83-4206924598A1@gmail.com> I wish to maintain my Raith reservation and will be loading at 10:30 Starting 30 min later than planned James From hitoshi831223 at gmail.com Sat Jul 28 19:58:37 2012 From: hitoshi831223 at gmail.com (Hitoshi Ishiwata) Date: Sat, 28 Jul 2012 19:58:37 -0700 Subject: raith free today midnight till 630am tomorrow Message-ID: finished work on other day. thanks -- Hitoshi Ishiwata PhD Candidate Electrical Engineering Department Stanford University McCullough Building 476 Lomita Mall rm 410 Stanford, CA 94305 Phone: (650) 804 0533 -------------- next part -------------- An HTML attachment was scrubbed... URL: From zzp at stanford.edu Sat Jul 28 21:59:29 2012 From: zzp at stanford.edu (Zhiping Zhang) Date: Sat, 28 Jul 2012 21:59:29 -0700 (PDT) Subject: raith free 3:30-7pm tomorrow In-Reply-To: References: Message-ID: Work got done tonight. Thanks a lot! -------------- next part -------------- An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Sun Jul 29 23:31:36 2012 From: gshambat at stanford.edu (Gary Shambat) Date: Sun, 29 Jul 2012 23:31:36 -0700 (PDT) Subject: Raith free 1AM - 6:30AM Message-ID: <1896148630.59789386.1343629896937.JavaMail.root@zm01.stanford.edu> Sorry for late notice From toecutter4ranger at gmail.com Mon Jul 30 08:39:12 2012 From: toecutter4ranger at gmail.com (ToeCutter) Date: Mon, 30 Jul 2012 08:39:12 -0700 Subject: James will be 000 out today Monday July 30th Message-ID: <052B480C-C2B5-4C8A-BCAA-8FEBBFDD7FE2@gmail.com> Hello: James will be 000 I will be out today Monday July 30th Returning Tuesday morning at 9 AM Thank you James Conway From tbozorgg at stanford.edu Mon Jul 30 10:48:32 2012 From: tbozorgg at stanford.edu (Tara Bozorg-Grayeli) Date: Mon, 30 Jul 2012 10:48:32 -0700 (PDT) Subject: 14:30-19:00 released In-Reply-To: <1795899539.38444433.1343670358330.JavaMail.root@zm03.stanford.edu> Message-ID: <1906864668.38446230.1343670512646.JavaMail.root@zm03.stanford.edu> Sorry for the late notice. Best, -- --- Tara Bozorg-Grayeli Stanford University Materials Science and Engineering Ph.D. Student tbozorgg at stanford.edu 480-223-3992 From lindm at stanford.edu Tue Jul 31 11:58:37 2012 From: lindm at stanford.edu (Dianmin Lin) Date: Tue, 31 Jul 2012 11:58:37 -0700 (PDT) Subject: Raith free now till 2pm today In-Reply-To: Message-ID: <1158565759.39722812.1343761117355.JavaMail.root@zm07.stanford.edu> Finished early.