From dwnam at stanford.edu Fri Jun 1 04:10:08 2012 From: dwnam at stanford.edu (Donguk Nam) Date: Fri, 1 Jun 2012 04:10:08 -0700 (PDT) Subject: Raith is free until noon today (EOM) Message-ID: <37703742.6042839.1338549008621.JavaMail.root@zm03.stanford.edu> From janp at stanford.edu Fri Jun 1 19:10:47 2012 From: janp at stanford.edu (Jan Petykiewicz) Date: Fri, 1 Jun 2012 19:10:47 -0700 Subject: Raith free NOW Message-ID: finished early -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 5 17:55:13 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 05 Jun 2012 17:55:13 -0700 Subject: Please return the software dongle for the raith offline software. Message-ID: <4FCEAA71.9060305@snf.stanford.edu> Hello Raith Community: Last month someone came by and asked to borrow the Raith Offline Software dongle for a day -- but never returned it. I need it for work here in the lab. Please return the software dongle to me today. In coming weeks I should be able to get the new network dongle to work across the network and everyone will be able to run the RAITH application software from their laptop without the dongle. Thank you, James Conway From dwnam at stanford.edu Wed Jun 6 00:21:56 2012 From: dwnam at stanford.edu (Donguk Nam) Date: Wed, 6 Jun 2012 00:21:56 -0700 (PDT) Subject: Raith is free from 5pm to 8:30pm today (EOM) Message-ID: <1766460473.2812787.1338967316797.JavaMail.root@zm03.stanford.edu> From arkam at stanford.edu Wed Jun 6 10:31:40 2012 From: arkam at stanford.edu (Arka Majumdar) Date: Wed, 6 Jun 2012 10:31:40 -0700 (PDT) Subject: free till 12, and next slot of 2 hours is also free...finished early (eom) Message-ID: <534248732.15648606.1339003900877.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From zzp at stanford.edu Wed Jun 6 21:28:58 2012 From: zzp at stanford.edu (Zhiping Zhang) Date: Wed, 6 Jun 2012 21:28:58 -0700 (PDT) Subject: raith free 1-3pm tomorrow Message-ID: Picked up the time slots tonight. Thanks, Zhiping -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 7 09:05:20 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 07 Jun 2012 09:05:20 -0700 Subject: June 7 is the tenth Anniversary of 'First Light' on the RAITH 150 Ebeam Lithography and Metrology System at Stanford Nanofabrication Facility Message-ID: <4FD0D140.7000904@snf.stanford.edu> Greetings Raith Community: Today is the Tenth Anniversary of 'First Light' on the Stanford Raith 150 system. In the course of the last ten years the Raith 150 tool and I have made significant contributions to basic research in Nano-Antennas, Photonic Crystals and Integrated Photonic Platforms, and more recently in Plasmonic devices in addition to all the normal device fabrications for MEMS, NEMS, and microelectronics. To date over 350 Users have been trained with nearly 200 currently working on the tool. More than 50 peer reviewed Journal articles in Photonics and Plasmonics have resulted from this effort and I have been credited with significant contributions in more than 35 PhD thesis and defenses in the last five years. In looking back at many successes here at Stanford, I believe my biggest contribution here at Stanford has been in the creation and support of a large community of researchers working in rabid collaboration on the RAITH 150 system. I look forward to further engagement with lab members in the next decade of research here at Stanford and hope to add Ion Beam Lithography capability to the Ebeam Lab this decade. Thank you for your support! James Conway Ebeam Technology Group Stanford nanofabrication Facility From arkam at stanford.edu Tue Jun 12 10:13:32 2012 From: arkam at stanford.edu (Arka Majumdar) Date: Tue, 12 Jun 2012 10:13:32 -0700 (PDT) Subject: free till 12--finished early Message-ID: <901761984.2305622.1339521212537.JavaMail.root@zm06.stanford.edu> -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From arkam at stanford.edu Wed Jun 13 10:54:08 2012 From: arkam at stanford.edu (Arka Majumdar) Date: Wed, 13 Jun 2012 10:54:08 -0700 (PDT) Subject: Diffusion Doping SOI wafer with Boron In-Reply-To: <1656732707.3495873.1339610008469.JavaMail.root@zm06.stanford.edu> Message-ID: <1864377774.3496286.1339610048161.JavaMail.root@zm06.stanford.edu> I want to dope a SOI wafer with Boron. Do you know about any company that can do this reliably. Please let me know Thanks Arka -- PhD Student Ginzton Lab (EE) Stanford University www.cvitae.org/arkam/ From tasyurek at stanford.edu Wed Jun 13 22:36:07 2012 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Wed, 13 Jun 2012 22:36:07 -0700 (PDT) Subject: Raith available 3-5:30pm tomorrow June 14 Message-ID: <1931951449.7707308.1339652167389.JavaMail.root@zm02.stanford.edu> From patrick.r.gallagher at gmail.com Thu Jun 14 10:02:19 2012 From: patrick.r.gallagher at gmail.com (Patrick Gallagher) Date: Thu, 14 Jun 2012 10:02:19 -0700 Subject: Raith available 3-5:30pm tomorrow June 14 In-Reply-To: <1931951449.7707308.1339652167389.JavaMail.root@zm02.stanford.edu> References: <1931951449.7707308.1339652167389.JavaMail.root@zm02.stanford.edu> Message-ID: I took this time and then released it. It's available again. On Wed, Jun 13, 2012 at 10:36 PM, Emel Tasyurek wrote: > From jwc at snf.stanford.edu Thu Jun 14 12:14:16 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 14 Jun 2012 12:14:16 -0700 Subject: NEW THREAD HSQ IN THE SNF LAB was Re: Raith time & XR-1541 bottle In-Reply-To: References: <4FDA2E8E.5000700@snf.stanford.edu> Message-ID: <4FDA3808.80009@snf.stanford.edu> I found the new bottle which is current in life was placed in the upper shelf and not back into ebeam tools refrigerator bin. I moved this back to proper storage place in the Ebeam tub and updated the label with a new one over the old one and listed for Ebeam lab Use only. The old bottle I was referring to is FOX - 12 a similar HSQ product expired in 2010 and 2008 in two bottles and I added a new white label on the bottle that says OLD/ EXPIRED and suitable for general lab usage. i.e., SOGlass ... Hope this clears things up. I plan to order a new bottle of HSQ in a month or so when I get to less than 20 ml of material. Users of XR-1541 are please requested to reply to this email with an expectation of how much HSQ they will need to get through the summer for their projects. Thank you, JWC On 6/14/2012 11:44 AM, Armand Rundquist wrote: > Hi James, > > Okay, I just thought I'd check. I'll probably cap this month anyway, > so it doesn't really matter. > > Yes, I am referring to the old, expired bottle of XR-1541, which J and > I were using as a spin-on glass. > > Thanks, > > Armand past communications -- excerpt deleted out of context for this new thread. From toecutter4ranger at gmail.com Thu Jun 14 12:17:23 2012 From: toecutter4ranger at gmail.com (ToeCutter) Date: Thu, 14 Jun 2012 12:17:23 -0700 Subject: Test of iPhone client Message-ID: This is just a test From jwc at snf.stanford.edu Mon Jun 18 18:02:43 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Mon, 18 Jun 2012 18:02:43 -0700 Subject: ANNOUNCEMENT and REMINDER: Raith Group 51- Four Day Short Course for Basic RAITH 150 Users Tuesday to Friday JUNE 19th to 22rd 10 AM to 6 PM Message-ID: <4FDFCFB3.5030000@snf.stanford.edu> An HTML attachment was scrubbed... URL: From armandhr at stanford.edu Tue Jun 19 18:36:59 2012 From: armandhr at stanford.edu (Armand Rundquist) Date: Tue, 19 Jun 2012 18:36:59 -0700 Subject: RAITH reservation released 6pm - 9:30pm Message-ID: RAITH is free whenever James's write finishes, should be ~7:15pm - 7:30pm. -Armand -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Jun 20 09:30:28 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Wed, 20 Jun 2012 09:30:28 -0700 Subject: NEW SNF Policy on coral adjustments by SNF Staff Message-ID: <4FE1FAA4.8040405@snf.stanford.edu> An HTML attachment was scrubbed... URL: From gshambat at stanford.edu Thu Jun 21 15:57:28 2012 From: gshambat at stanford.edu (Gary Shambat) Date: Thu, 21 Jun 2012 15:57:28 -0700 (PDT) Subject: Free 18:00 - 22:00 Message-ID: <2106536395.37605059.1340319448056.JavaMail.root@zm01.stanford.edu> Sorry for late notice From justinwu at stanford.edu Thu Jun 21 17:07:27 2012 From: justinwu at stanford.edu (Justin Zachary Wu) Date: Thu, 21 Jun 2012 17:07:27 -0700 (PDT) Subject: Free from 10pm-2am today In-Reply-To: <1608253586.19132824.1340323579851.JavaMail.root@zm04.stanford.edu> Message-ID: <549673864.19134169.1340323647164.JavaMail.root@zm04.stanford.edu> My apologies for the late notice, but measurements just performed indicate the sample I was planning to do would not be useful. From toecutter4ranger at gmail.com Fri Jun 22 00:25:50 2012 From: toecutter4ranger at gmail.com (ToeCutter) Date: Fri, 22 Jun 2012 00:25:50 -0700 Subject: Is anyone on the Raith tonight? Message-ID: <52E5C90C-4248-4BC5-B268-6CB2E43A12C2@gmail.com> I find it almost whimsical that when I have so many projects to complete in June that all the cancellations came in after I left SNF at 8PM! Will start earlier tomorrow if no one is on before 10am when my reservations resume. James From dwnam at stanford.edu Sun Jun 24 13:28:24 2012 From: dwnam at stanford.edu (Donguk Nam) Date: Sun, 24 Jun 2012 13:28:24 -0700 (PDT) Subject: Raith free from 2pm to 5pm Message-ID: <2143337305.14963226.1340569704296.JavaMail.root@zm03.stanford.edu> Sorry for the late notice. From dtschoen at stanford.edu Mon Jun 25 13:20:54 2012 From: dtschoen at stanford.edu (David Schoen) Date: Mon, 25 Jun 2012 13:20:54 -0700 Subject: Raith Free Tomorrow 3:30 to 7:30 Message-ID: eom -------------- next part -------------- An HTML attachment was scrubbed... URL: From chalabi at stanford.edu Tue Jun 26 17:59:59 2012 From: chalabi at stanford.edu (Hamidreza Chalabi) Date: Tue, 26 Jun 2012 17:59:59 -0700 (PDT) Subject: Raith Free from now till 8 pm In-Reply-To: <1849842615.34386608.1340758788872.JavaMail.root@zm02.stanford.edu> Message-ID: <837979112.34386648.1340758799574.JavaMail.root@zm02.stanford.edu> EOM From tasyurek at stanford.edu Wed Jun 27 13:38:43 2012 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Wed, 27 Jun 2012 13:38:43 -0700 (PDT) Subject: Raith available tomorrow 9-11am Message-ID: <766346988.37263247.1340829523280.JavaMail.root@zm02.stanford.edu> Moved my session to Friday. From waqasm at stanford.edu Thu Jun 28 14:34:58 2012 From: waqasm at stanford.edu (Waqas Mustafeez) Date: Thu, 28 Jun 2012 14:34:58 -0700 Subject: proximity correction? Message-ID: Hi I'm looking for someone who can guide me in how to run the proximity correction on raith. Please let me know if you have used it successfully. Thank you Waqas --------------------------------------- PhD Candidate, http://salleo.stanford.edu Electrical Engineering, Stanford CA -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Jun 28 20:45:00 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 28 Jun 2012 20:45:00 -0700 Subject: 2% 950K PMMA new bottle in the Fab. Message-ID: <4FED24BC.6000900@snf.stanford.edu> Good Evening RAITH and Ebeam Users: For reasons unknown and unusual Evan Wangs over night run did not exhibit any exposure artifacts from the focusing and write field alignments much less any devices writes or artifacts at all. We ran the session together and observed it exposing and had specimen current during the 'writing' as normal. Beam I was normal at ~0.193 or 0.194 NA at 10 kev 30 um aperture. HAS ANYONE has any unusual problems in recent exposures on the tool? As that today was absolutely fraught with gremlins in the lab on several pieces of equipment I have brought into the clean room a new bottle of 2% 950K PMMA in ANISOLE. James Conway PS I likely will be away tomorrow as someone got hurt at the ranch today (Not too serious just stepped on a foot by a horse...) From jwc at snf.stanford.edu Thu Jun 28 20:46:48 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 28 Jun 2012 20:46:48 -0700 Subject: Releasing my session for Friday June 29th 10:30 AM till 3:00 PM Message-ID: <4FED2528.7030009@snf.stanford.edu> Releasing my session for Friday June 29th 10:30 AM till 3:00 PM on the RAITH tool Several people I has asked said they have caught up on their work... so they don't need it either. Up for grabs... JWC From jwc at snf.stanford.edu Thu Jun 28 21:55:23 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Thu, 28 Jun 2012 21:55:23 -0700 Subject: Might need more time to write on my wafers... In-Reply-To: References: Message-ID: <4FED353B.8050402@snf.stanford.edu> Ebeam Lab Users coming on after 5 AM... I am still here babysitting my Quartz Mask exposure one chip completed in about 4 hours 10 minutes plus or minus a few minutes. I shortened the settling times to a minimum safe period of 3 ms. Two more chips to go so I expect the exposure will complete at about 5 to 6 AM. It would be so kind of everyone if you could let this exposure complete. Its important to get a complete pattern block written (3 chips) in one exposure session. The project is desperate for the wafers for their experiment. Many thanks and good evening, James I can be reached at 415-412-4825 if anyone has questions. I be back about 7 - 8 AM... On 6/28/2012 5:36 PM, James Conway wrote: > I am not sure how long it will take to write my patterns. The timer > on the raith tool says 20 minutes but several sessions before were > only able to complete one chip in six to ten hours sessions. for > reasons unknown but likely a fracturing or patterning issue from the > CIF import file... > > Would you like to exchange beam time on the RAITH with me trading your > session tonight with mine from 10 until 3 PM tomorrow tentatively? > > RSVP and reply to all > > Best, > > James Conway > > From tasyurek at stanford.edu Fri Jun 29 00:04:16 2012 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Fri, 29 Jun 2012 00:04:16 -0700 (PDT) Subject: Raith available 8:30-10:30 am tomorrow (Friday) Message-ID: <927594249.42149784.1340953456479.JavaMail.root@zm02.stanford.edu>