Might need more time to write on my wafers...
James W. Conway
jwc at snf.stanford.edu
Thu Jun 28 21:55:23 PDT 2012
Ebeam Lab Users coming on after 5 AM...
I am still here babysitting my Quartz Mask exposure one chip completed
in about 4 hours 10 minutes plus or minus a few minutes. I shortened the
settling times to a minimum safe period of 3 ms.
Two more chips to go so I expect the exposure will complete at about 5
to 6 AM.
It would be so kind of everyone if you could let this exposure
complete. Its important to get a complete pattern block written (3
chips) in one exposure session.
The project is desperate for the wafers for their experiment.
Many thanks and good evening,
I can be reached at 415-412-4825 if anyone has questions. I be back
about 7 - 8 AM...
On 6/28/2012 5:36 PM, James Conway wrote:
> I am not sure how long it will take to write my patterns. The timer
> on the raith tool says 20 minutes but several sessions before were
> only able to complete one chip in six to ten hours sessions. for
> reasons unknown but likely a fracturing or patterning issue from the
> CIF import file...
> Would you like to exchange beam time on the RAITH with me trading your
> session tonight with mine from 10 until 3 PM tomorrow tentatively?
> RSVP and reply to all
> James Conway
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