RAITH 150 VERSION 6 SERVICE PACK 5 JUST INSTALLED -- PLEASE REPORT ANY PROBLEMS OR ISSUES.

James Conway toecutter4ranger at gmail.com
Thu May 17 18:25:59 PDT 2012


Good Evening Raith Community,

RAITH 150 VERSION 6 SERVICE PACK 5 JUST INSTALLED -- PLEASE REPORT ANY
PROBLEMS OR ISSUES.

This included several bug fixes reported by various Users on this and other
RAITH tools.

I am asking ALL USERS to log into the paper notebook and report any issues
encountered to this list and CC JWC at snf.stanford.edu

I am also asking Users to report in the logbook and this email list if you
encounter External Scan Control errors as you start your patterning jobs.
If you see this it will appear at white and black lines scrolling along the
SMARTSEM FPD screen and the image will not be blanked and you will not be
writing your patterns correctly.  if on inspection you see little bars and
spaces that is the result in EBL writing.
If you could be so kind as to also not the last sequence of operations or
task you just completed it may be useful to assist us at identify the
problem.

While this SW SP may correct the External Scan Control switching problem
RAITH is coming in soon, possibly next week to switch out a scan card to
test the problem.  what makes this difficult to ID is that this is an
intermittent problem for most users.

Finally the system and particulary the FE-Gun emission brightness and spot
size are in an optimal state with a 10 kv beam waist of less than 1.4 nm
and < 1 nm at 25 kV!
If you are not getting exactly the pattern CD or alignments you expect
please see me during any offfice hour and also report to this list.

thank you for your support!

james
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