From jaypark at stanford.edu  Mon Oct  1 12:51:29 2012
From: jaypark at stanford.edu (Jason Parker)
Date: Mon, 1 Oct 2012 12:51:29 -0700 (PDT)
Subject: [Raith] Free Tue afternoon, 11am-3pm
In-Reply-To: <631282220.268648567.1349121048049.JavaMail.root@zm08.stanford.edu>
Message-ID: <57842953.268651750.1349121089457.JavaMail.root@zm08.stanford.edu>

Hi Raith users,

Released reservation for tomorrow from 11am-3pm (Tue, Oct 2).

Jason


From dtschoen at stanford.edu  Tue Oct  2 13:33:16 2012
From: dtschoen at stanford.edu (David Schoen)
Date: Tue, 2 Oct 2012 13:33:16 -0700
Subject: Free Today 3-7pm
Message-ID: <CALVXsuFHsHfdXw7U3sm9ou=9n8ko6cXwMxPEv0S9BbXV4oYYgA@mail.gmail.com>

David
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From bajcsy at stanford.edu  Wed Oct  3 09:23:28 2012
From: bajcsy at stanford.edu (Michal Bajcsy)
Date: Wed, 3 Oct 2012 09:23:28 -0700 (PDT)
Subject: free until 2:30pm
Message-ID: <206142114.522953.1349281407991.JavaMail.root@zm09.stanford.edu>

sample not ready


From bajcsy at stanford.edu  Mon Oct  8 10:43:37 2012
From: bajcsy at stanford.edu (Michal Bajcsy)
Date: Mon, 8 Oct 2012 10:43:37 -0700 (PDT)
Subject: free now til noon
Message-ID: <720006421.8432314.1349718217718.JavaMail.root@zm09.stanford.edu>



From toecutter4ranger at gmail.com  Mon Oct  8 10:45:38 2012
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Mon, 8 Oct 2012 10:45:38 -0700
Subject: James will be 000 today Monday 
Message-ID: <509460D3-8BCA-4643-8433-EFA85B3E8EE7@gmail.com>

Hi All,

I will not be in the office today Monday Oct. 8th but will be returning Tuesday morning at the normal time. I am not feeling well possibly just a stomach flu.

I can be reached by phone and will be checking this email account later today.

Thank you

James



From fanpy839 at stanford.edu  Mon Oct  8 10:46:18 2012
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Mon, 8 Oct 2012 10:46:18 -0700
Subject: free now til noon
In-Reply-To: <720006421.8432314.1349718217718.JavaMail.root@zm09.stanford.edu>
References: <720006421.8432314.1349718217718.JavaMail.root@zm09.stanford.edu>
Message-ID: <CADPrSwwVLyYEPt6DgcWk4s49Z_oc=p74H1=zFRCmLFLc+hC3Sg@mail.gmail.com>

Taken. Thanks!
On Oct 8, 2012 10:43 AM, "Michal Bajcsy" <bajcsy at stanford.edu> wrote:
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From toecutter4ranger at gmail.com  Tue Oct  9 08:52:47 2012
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Tue, 9 Oct 2012 08:52:47 -0700
Subject: James will be 000 Tuesday oct 8
Message-ID: <0E5DE8C4-1624-4C8A-86D1-A8D050B99035@gmail.com>

I am still ill with a stomach flu or bug and will not be in today Tuesday Oct 9th. 

David could you please post a note on the clean room entrance that two classes:
Take a Spin with Me, headway resist training at 10:15 to 12:30 and the Introduction to Scanning Probe Microscopies from 3:00 to 5:30 PM have been cancelled and will be rescheduled till next week at the same times.

Thank you 

James Conway 
415-412-4825



From jwc at snf.stanford.edu  Thu Oct 11 14:12:27 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Thu, 11 Oct 2012 14:12:27 -0700
Subject: Fwd: Re: Shutdown raith SNF 2012-10-11 13:02:34: I/O trip  --- acually
 traced to low liquid level in chiller -- system coming online for user about
 4:30 - 5:00 PM.
In-Reply-To: <18649601.99.1349989705367.JavaMail.coral@shine>
References: <18649601.99.1349989705367.JavaMail.coral@shine>
Message-ID: <5077363B.8000801@snf.stanford.edu>

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From tasyurek at stanford.edu  Sun Oct 14 10:07:50 2012
From: tasyurek at stanford.edu (Emel Tasyurek)
Date: Sun, 14 Oct 2012 10:07:50 -0700 (PDT)
Subject: raith available 2:30-6pm today
Message-ID: <854513251.1163193.1350234470473.JavaMail.root@stanford.edu>

won't be able to make it.


From jwc at snf.stanford.edu  Mon Oct 15 14:54:58 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 15 Oct 2012 14:54:58 -0700
Subject: ANNOUNCEMENT:  Raith Group 53- Four Day Short Course for Basic RAITH
 150 Users  This Tuesday to Friday October 16 to 19th  10 AM to 6 PM
Message-ID: <507C8632.4020609@snf.stanford.edu>

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From dwnam at stanford.edu  Mon Oct 15 17:14:57 2012
From: dwnam at stanford.edu (Donguk Nam)
Date: Mon, 15 Oct 2012 17:14:57 -0700 (PDT)
Subject: Raith is free from 7pm to 9pm today
Message-ID: <1828040324.1143056.1350346497244.JavaMail.root@stanford.edu>

Sorry for the late notice.



From lindm at stanford.edu  Mon Oct 15 18:49:59 2012
From: lindm at stanford.edu (Dianmin Lin)
Date: Mon, 15 Oct 2012 18:49:59 -0700 (PDT)
Subject: Raith is free from 7am to 9:30am Tuesday
In-Reply-To: <1828040324.1143056.1350346497244.JavaMail.root@stanford.edu>
Message-ID: <1087966364.1611459.1350352199756.JavaMail.root@stanford.edu>

Taken,thanks! 

And release the section of 7am-9:30am Tuesday.

----- Original Message -----
From: "Donguk Nam" <dwnam at stanford.edu>
To: "Ebeam Lab" <raith at snf.stanford.edu>
Sent: Monday, October 15, 2012 5:14:57 PM
Subject: Raith is free from 7pm to 9pm today

Sorry for the late notice.



From jwc at snf.stanford.edu  Wed Oct 17 09:22:16 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 17 Oct 2012 09:22:16 -0700
Subject: Releasing my CORAL reservation for Friday October 26th, 2012 10 -
 3 PM
Message-ID: <507EDB38.7030206@snf.stanford.edu>

Good Morning Raith Users:

I am releasing my CORAL reservation for Friday October 26th, 2012 10 - 3 
PM as I will be off site that day.

Have at it when the reservation block comes up on CORAL later this week.

Best,

James


From jwc at snf.stanford.edu  Wed Oct 17 09:54:08 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 17 Oct 2012 09:54:08 -0700
Subject: Hard copies of the RAITH Nanosuite 6 Operations Procedures are available.
Message-ID: <507EE2B0.1040805@snf.stanford.edu>

Good Morning,

Noticed during my RAITH Basic Users Class yesterday that the hard copy 
of the Nanosuite 6 Operations Procedures was taken, lost or discarded. I 
am having a new copy laminated today.

Attached is a digital copy of this procedure for your reference and 
use.  I have also attached two documents that describe the DEMO.CSF 
pattern that we often use for resist process development and during our 
training sessions for your benefit.

I have printed out several extra hard copies of the Nanosuite 6 
Operations Procedure for my class today, and you are welcome to take a 
copy from the left hand desk in my office next to my phone.

Today and tomorrow 10 - 12:30 and 2:00 - 6:00 PM, and Friday 10 - 2 PM 
we are conducting the 53rd RAITH Basic Users short course and everyone 
interested in attending and adding to the discussions are welcome.  This 
is a great way to review and refresh yourself on the operations of the 
tool and get your questions answered.  Today we are writing in overlay 
to patterns we wrote yesterday and continuing exploring features in the 
software.

All the best for your research,

James Conway

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From lindm at stanford.edu  Thu Oct 18 20:37:21 2012
From: lindm at stanford.edu (Dianmin Lin)
Date: Thu, 18 Oct 2012 20:37:21 -0700 (PDT)
Subject: Raith is free from now to 9pm today
In-Reply-To: <1828040324.1143056.1350346497244.JavaMail.root@stanford.edu>
Message-ID: <1407509348.6471243.1350617841915.JavaMail.root@stanford.edu>

Finished. Next user can start.


From waqasm at stanford.edu  Fri Oct 19 15:00:14 2012
From: waqasm at stanford.edu (Waqas Mustafeez)
Date: Fri, 19 Oct 2012 15:00:14 -0700
Subject: Today 4pm to 7:30pm available
Message-ID: <DB1F96E00F8747CFB5209912FA37938D@WaqasPC>


the raith is available 4pm to 7:30pm today.. im down with a fever.

WM.
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From jwc at snf.stanford.edu  Mon Oct 22 11:55:21 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 22 Oct 2012 11:55:21 -0700
Subject: empty ZEP
In-Reply-To: <CAOvKTdVEV2eibyRispLBpc-jjEdxCUV8D=s_kv1U4J1QoqRLDQ@mail.gmail.com>
References: <CAOvKTdVEV2eibyRispLBpc-jjEdxCUV8D=s_kv1U4J1QoqRLDQ@mail.gmail.com>
Message-ID: <50859699.1080407@snf.stanford.edu>

Hello Zongfu and Ebeam Lab Users,

This seems really odd that the ZEP- 520 in Anisole is depleted as that I 
last checked the all resist bottle levels this Thursday and there was 
over 30 ml of material left in the ZEP-520A bottle.

Did some one take a small volume supply from the lab or use it to make 
up some 1:1 mixture with Anisole?  I noticed that the anisole bottle 
from Microchem was also nearly empty and it should have been half full.
I am ordering a new liter of Anisole today.

So then my friends and Lab Users, you are all reminded that no liquid 
chemicals or engineering materials in any form are to leave the SNF 
clean room or chemical stores. If you need wafers or pieces coated with 
ebeam resist this must be performed in the SNF clean room on the Headway 
2 coater.

If you or someone you know has taken materials from the Lab for other 
Labs this weekend, I need to know and welcome your reports of 
transgressions of this nature.  If I receive no replies I will take a 
look at cameras placed in the clean room.

Thank you,

JWC

On 10/20/2012 7:27 PM, Zongfu Yu wrote:
> Dear James,
>   ZEP is used up. I barely finish my coating. I am sure who to inform 
> about chemicals. Could you forward this email or let me know the 
> person who I should contact for chemical refills.
>  Thanks,
> Zongfu



From jwc at snf.stanford.edu  Mon Oct 22 11:56:55 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 22 Oct 2012 11:56:55 -0700
Subject: empty ZEP
In-Reply-To: <CAOvKTdVEV2eibyRispLBpc-jjEdxCUV8D=s_kv1U4J1QoqRLDQ@mail.gmail.com>
References: <CAOvKTdVEV2eibyRispLBpc-jjEdxCUV8D=s_kv1U4J1QoqRLDQ@mail.gmail.com>
Message-ID: <508596F7.5090305@snf.stanford.edu>

Hello Zongfu and Ebeam Lab Users,

This seems really odd that the ZEP- 520 in Anisole is depleted as that I 
last checked the all resist bottle levels this Thursday and there was 
over 30 ml of material left in the ZEP-520A bottle.

Did some one take a small volume supply from the lab or use it to make 
up some 1:1 mixture with Anisole?  I noticed that the anisole bottle 
from Microchem was also nearly empty and it should have been half full.
I am ordering a new liter of Anisole today.

So then my friends and Lab Users, you are all reminded that no liquid 
chemicals or engineering materials in any form are to leave the SNF 
clean room or chemical stores. If you need wafers or pieces coated with 
ebeam resist this must be performed in the SNF clean room on the Headway 
2 coater.

If you or someone you know has taken materials from the Lab for other 
Labs this weekend, I need to know and welcome your reports of 
transgressions of this nature.  If I receive no replies I will take a 
look at cameras placed in the clean room.

Thank you,

JWC

On 10/20/2012 7:27 PM, Zongfu Yu wrote:
> Dear James,
>   ZEP is used up. I barely finish my coating. I am sure who to inform 
> about chemicals. Could you forward this email or let me know the 
> person who I should contact for chemical refills.
>  Thanks,
> Zongfu



From jwc at snf.stanford.edu  Mon Oct 22 15:02:27 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 22 Oct 2012 15:02:27 -0700
Subject: empty ZEP
In-Reply-To: <CACHBp4Wn2kD6Fp6OvbW8HR6uYaBOyDJ_NJm5afZZMWtTs1OwbA@mail.gmail.com>
References: <CAOvKTdVEV2eibyRispLBpc-jjEdxCUV8D=s_kv1U4J1QoqRLDQ@mail.gmail.com> <508596F7.5090305@snf.stanford.edu> <CACHBp4VQ3xrhOAx5cJ=emYvKVnb5WCBviBooZmJJdO6QsNqNoQ@mail.gmail.com> <CACHBp4VokLYJ_pLmysg2eAN67M63+eBTU056kFBMQ9M8gq7jvg@mail.gmail.com> <CACHBp4Wn2kD6Fp6OvbW8HR6uYaBOyDJ_NJm5afZZMWtTs1OwbA@mail.gmail.com>
Message-ID: <5085C273.3010604@snf.stanford.edu>

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From jwc at snf.stanford.edu  Tue Oct 23 09:33:16 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Tue, 23 Oct 2012 09:33:16 -0700
Subject: HSQ  <<< Is there a better alternative for HSQ.   (Threads on
 HSQ processing... )
In-Reply-To: <A400F83E-460D-4ECC-82DC-7788AEA22C97@yale.edu>
References: <576228678.5384580.1350683818473.JavaMail.root@stanford.edu> <CC929BF2-F888-49EF-B533-38EB60AC4488@yale.edu> <5085CAC4.80103@snf.stanford.edu> <A400F83E-460D-4ECC-82DC-7788AEA22C97@yale.edu>
Message-ID: <5086C6CC.3050403@snf.stanford.edu>

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From jwc at snf.stanford.edu  Tue Oct 23 09:45:39 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Tue, 23 Oct 2012 09:45:39 -0700
Subject: Please reply if you desire to use HSQ in your processing before the
 Holiday break...
Message-ID: <5086C9B3.7040404@snf.stanford.edu>

Good morning HSQ USERS in the Ebeam Labs,

Pressured by the need to reduce expenses for consumable resist 
engineering materials and motivated to delay ordering the next batch 
until we start up next year, I wish to get your reply to this email 
promptly if you desire to use this material during November and early 
December. We are nearly out of this material in stock... There are 
sufficient supplies of outdated FoX-12 and FoX-25 for spin on oxide 
applications, but my not perform well for EBL/IBL.

Why?  The material has a short shelf life (90 days to 6 months at very 
best in the original source bottle.  If we can't use the next 100 ml up 
before shut down I would rather delay ordering the next batch until 
then. Its about $971.00 per 100 to 125 ml...




From tasyurek at stanford.edu  Tue Oct 23 17:31:05 2012
From: tasyurek at stanford.edu (Emel Tasyurek)
Date: Tue, 23 Oct 2012 17:31:05 -0700 (PDT)
Subject: Raith available tomorrow,Wed 10:30pm until Thursday 7:30am
Message-ID: <736266537.14264612.1351038665314.JavaMail.root@stanford.edu>



From jwc at snf.stanford.edu  Tue Oct 23 17:35:04 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Tue, 23 Oct 2012 17:35:04 -0700
Subject: [jeolusers] Please reply if you desire to use HSQ in your processing
 before the Holiday break...
In-Reply-To: <006201cdb165$0f6fc990$2e4f5cb0$@edu>
References: <5086C9B3.7040404@snf.stanford.edu> <006201cdb165$0f6fc990$2e4f5cb0$@edu>
Message-ID: <508737B8.3050801@snf.stanford.edu>

I ordered a new batch of HSQ today.  We are nearly out of HSQ in the lab 
but I received many replies requesting we keep it stocked...

All the Best,

James


On 10/23/2012 2:26 PM, Yuxin Zheng wrote:
> Hi James,
> We desire to use HSQ during this time. Please order new one.
> Thanks,
> Yuxin
>
> -----Original Message-----
> From: jeolusers-bounces at lists.stanford.edu
> [mailto:jeolusers-bounces at lists.stanford.edu] On Behalf Of James W. Conway
> Sent: Tuesday, October 23, 2012 9:46 AM
> To: Ebeam Lab; JEOL User List - Stanford University; Rich Tiberio; J
> Provine; Dustin Erickson; Kaveh Milaninia; Farid Zuberi
> Subject: [jeolusers] Please reply if you desire to use HSQ in your
> processing before the Holiday break...
> Importance: High
>
> Good morning HSQ USERS in the Ebeam Labs,
>
> Pressured by the need to reduce expenses for consumable resist engineering
> materials and motivated to delay ordering the next batch until we start up
> next year, I wish to get your reply to this email promptly if you desire to
> use this material during November and early December. We are nearly out of
> this material in stock... There are sufficient supplies of outdated FoX-12
> and FoX-25 for spin on oxide applications, but my not perform well for
> EBL/IBL.
>
> Why?  The material has a short shelf life (90 days to 6 months at very best
> in the original source bottle.  If we can't use the next 100 ml up before
> shut down I would rather delay ordering the next batch until then. Its about
> $971.00 per 100 to 125 ml...
>
>
> _______________________________________________
> jeolusers mailing list
> jeolusers at lists.stanford.edu
> https://mailman.stanford.edu/mailman/listinfo/jeolusers
>



From mmleczko at stanford.edu  Thu Oct 25 20:07:03 2012
From: mmleczko at stanford.edu (Michal Jakub Mleczko)
Date: Thu, 25 Oct 2012 20:07:03 -0700 (PDT)
Subject: Rest of reservation cancelled for tonight
In-Reply-To: <1828405002.15681983.1351220777679.JavaMail.root@stanford.edu>
Message-ID: <659262669.15682092.1351220823905.JavaMail.root@stanford.edu>

Having some issues with sample outgassing and stage leveling.

If anyone wants to get some work done before the midnight shutdown, feel free.



From zfyu at stanford.edu  Thu Oct 25 20:36:42 2012
From: zfyu at stanford.edu (Zongfu Yu)
Date: Thu, 25 Oct 2012 20:36:42 -0700 (PDT)
Subject: cancel my reservation Friday 7pm
Message-ID: <432941126.9949332.1351222602331.JavaMail.root@stanford.edu>



From tasyurek at stanford.edu  Fri Oct 26 15:29:52 2012
From: tasyurek at stanford.edu (Emel Tasyurek)
Date: Fri, 26 Oct 2012 15:29:52 -0700 (PDT)
Subject: Raith available tomorrow 1-4pm
Message-ID: <1181080227.20410183.1351290592917.JavaMail.root@stanford.edu>

have a cold and won't be able to make it tomorrow


From mmleczko at stanford.edu  Fri Oct 26 16:11:42 2012
From: mmleczko at stanford.edu (Michal Jakub Mleczko)
Date: Fri, 26 Oct 2012 16:11:42 -0700 (PDT)
Subject: Raih avaialble after 8 pm tonight.
Message-ID: <1635265200.17253250.1351293102304.JavaMail.root@stanford.edu>

Feeling under the weather today.


From lindm at stanford.edu  Sat Oct 27 15:59:43 2012
From: lindm at stanford.edu (Dianmin Lin)
Date: Sat, 27 Oct 2012 15:59:43 -0700 (PDT)
Subject: Raith is free 4-7pm today
In-Reply-To: <619688142.28900.1349245499912.JavaMail.root@zm09.stanford.edu>
Message-ID: <1786175177.15949376.1351378783371.JavaMail.root@stanford.edu>

Upstream equipments are down, won't use it.



From gshambat at stanford.edu  Sun Oct 28 18:52:53 2012
From: gshambat at stanford.edu (Gary Shambat)
Date: Sun, 28 Oct 2012 18:52:53 -0700 (PDT)
Subject: Oral Exam Announcement: Gary Shambat
In-Reply-To: <1325315025.35287112.1351475144328.JavaMail.root@stanford.edu>
Message-ID: <1852710272.35289181.1351475573324.JavaMail.root@stanford.edu>




Ph.D. Dissertation Defense for Gary Shambat 


Title: 
>From solid state to soft matter: 
Photonic nanocavities as advanced optoelectronic devices and single-cell biomedical probes 


Advisor: Professor Jelena Vu?kovi? 
Department of Electrical Engineering 

Thursday, November 8 th 2012 
10:00 AM 
(Refreshments at 9:45 AM) 

Location: Clark Auditorium (outside entrance at the very center of Clark building ) 





Abstract: 

Photonic nanocavities are wavelength-scale dielectric structures that possess remarkable properties due to their intrinsic small sizes and high quality factors. Simply by modifying the device materials and optical properties, one can realize nanocavities for diverse applications ranging from lasers to quantum optics and even biosensing. In this talk I will present two drastically different functions of nanocavities, both of which make them more practical for real-world adoption. 

The first half of my presentation will focus on how photonic crystal (PC) cavities can be utilized for ultra-low energy and ultra-fast optical sources for next-generation communications. To date, the true power of these nanocavities has only been demonstrated by using secondary optical control, preventing realistic integration of devices with electronics. We have therefore developed a new platform for efficiently driving PC cavities using a lithographically defined, lateral p-i-n junction. With our lateral junction we have demonstrated a world record low threshold laser with a threshold power of only 208 nW at 50K. At room temperature we find that these same devices behave as ultra-fast light-emitting diodes which can be directly modulated at up to 10 GHz. Additional active photonic devices incorporating a lateral junction will also be discussed. 

The second half of my talk describes the demonstration of a whole new class of tools that marry PC cavities to the tips of optical fibers. The form factor of the optical fiber lends itself to operation of the tool in exotic environments never before accessible to a nanocavity. Specifically we have used our probes to interrogate single human prostate cells with internalized PC cavities showing, for the first time, resonant photonic modes inside biological cells. The beams can be loaded in cells and tracked for days at a time, with cells undergoing regular division and migration. Furthermore, we present in vitro label-free protein sensing with our probes as a path towards quantitative, real-time biomarker detection in single cells. 

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From kodama at stanford.edu  Sun Oct 28 22:33:53 2012
From: kodama at stanford.edu (Takashi Kodama)
Date: Sun, 28 Oct 2012 22:33:53 -0700 (PDT)
Subject: raith free after 3:00 am
Message-ID: <1343274206.15346244.1351488833848.JavaMail.root@stanford.edu>

I released my reserve due to delay of my upstream process.
Sorry for the late notice.


From gshambat at stanford.edu  Mon Oct 29 16:45:21 2012
From: gshambat at stanford.edu (Gary Shambat)
Date: Mon, 29 Oct 2012 16:45:21 -0700 (PDT)
Subject: Releasing time now, problems with beam
Message-ID: <1669698397.40218847.1351554321486.JavaMail.root@stanford.edu>

Not reading any beam current and beam blanker is reversed...


From jwc at snf.stanford.edu  Tue Oct 30 11:46:18 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Tue, 30 Oct 2012 11:46:18 -0700
Subject: system is up and available to Users...
Message-ID: <5090207A.505@snf.stanford.edu>


Hello Raith Community:

Some one monkey wrenched the system late yesterday, and evidently had 
tripped off the power switch to the laser and switched the manual beam 
blank on switch to the DOWN (unblanked) position.
This was resolved by switching the laser power supply back on and 
returning the manual beam blank on switch to the UP (i.e., blanked) 
position.

This is the second time this has occurred in recent memory the last in 
late September.

System is back up and tested and available to Users whom have current 
reservations.

James


From jwc at snf.stanford.edu  Tue Oct 30 11:49:28 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Tue, 30 Oct 2012 11:49:28 -0700
Subject: Fwd: Oral Exam Announcement: Gary Shambat
In-Reply-To: <1852710272.35289181.1351475573324.JavaMail.root@stanford.edu>
References: <1852710272.35289181.1351475573324.JavaMail.root@stanford.edu>
Message-ID: <50902138.8040205@snf.stanford.edu>

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From lindm at stanford.edu  Tue Oct 30 16:23:55 2012
From: lindm at stanford.edu (Dianmin Lin)
Date: Tue, 30 Oct 2012 16:23:55 -0700 (PDT)
Subject: Raith is free now to 7:30pm today
In-Reply-To: <1786175177.15949376.1351378783371.JavaMail.root@stanford.edu>
Message-ID: <1939155643.387051.1351639435823.JavaMail.root@stanford.edu>

James finished early and I have finished my writing, so Raith is available now to 7:30pm today


From armandhr at stanford.edu  Tue Oct 30 16:37:57 2012
From: armandhr at stanford.edu (Armand Rundquist)
Date: Tue, 30 Oct 2012 16:37:57 -0700
Subject: Raith is free now to 7:30pm today
In-Reply-To: <1939155643.387051.1351639435823.JavaMail.root@stanford.edu>
References: <1786175177.15949376.1351378783371.JavaMail.root@stanford.edu>
	<1939155643.387051.1351639435823.JavaMail.root@stanford.edu>
Message-ID: <CALtDwUbK9mFmdSSSh011WtJk0BQc+GKY9ay8xHAsDTBWZ7D2=g@mail.gmail.com>

Thanks, I can use the time.

-Armand

On Tue, Oct 30, 2012 at 4:23 PM, Dianmin Lin <lindm at stanford.edu> wrote:

> James finished early and I have finished my writing, so Raith is available
> now to 7:30pm today
>
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From jwc at snf.stanford.edu  Wed Oct 31 17:18:20 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 31 Oct 2012 17:18:20 -0700
Subject: Small quantities of ZEON ZEP520A and 1:1 by volume diluted ZEP520A
 to ANILSOLE are in the resist refrigerator.
Message-ID: <5091BFCC.3040706@snf.stanford.edu>

Greetings Ebeam Lab Users

I have just placed a 30 ml brown bottle of ZEON ZEP520A positive tone 
ebeam resist and a second bottle of 1:1 by volume diluted ZEP520A to 
ANISOLE into the resist refrigerator in the SNF clean room.
This material came from Rich Tiberio's SNC Ebeam Lab stores from an old 
now long expired batch of resist from 2010 which expired 11-04-2010.

To the eye the material appears fine and has not hydrolyzed or gelated, 
but you may find that the exposure dose to line width characteristic 
could have changed.

Users are asked to be careful and frugal in your usage of this material 
AND TO CAREFULLY INSPECT YOUR EBL/IBL PATTERNING RESULTS BEFORE 
CONTINUING WITH PATTERN TRANSFER.
Users are also requested to report your dose-to-clear for Area, Single 
Pixel Line, and Dot doses along with your reference pattern dimensions 
to aid other users working with this material lot to this list.

The next batch of ZEP-520A has been ordered from ZEON Chemical in Japan 
--  but I have not received a expected shipping and delivery date as of 
this afternoon. Best guess is roughly three more weeks.

Thank you for your support!

James




From jwc at snf.stanford.edu  Wed Oct 31 17:56:34 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 31 Oct 2012 17:56:34 -0700
Subject: ZEP520A 1:1 to anisole spin speed thickness curve archived data
In-Reply-To: <CAOvKTdWZ_8XxWVR1Cz_6bRkiyPJGa6PkbumwpW36NNRpf0m8aw@mail.gmail.com>
References: <20121031223421.877BB140479@smtp.stanford.edu> <5091C029.3030805@snf.stanford.edu> <CAOvKTdWZ_8XxWVR1Cz_6bRkiyPJGa6PkbumwpW36NNRpf0m8aw@mail.gmail.com>
Message-ID: <5091C8C2.7080405@snf.stanford.edu>

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