From tbozorgg at stanford.edu  Sat Sep  1 13:51:34 2012
From: tbozorgg at stanford.edu (Tara Bozorg-Grayeli)
Date: Sat, 1 Sep 2012 13:51:34 -0700 (PDT)
Subject: Fatal Loadlock Error
In-Reply-To: <321676823.21649296.1346532290582.JavaMail.root@zm03.stanford.edu>
Message-ID: <710655690.21651662.1346532694193.JavaMail.root@zm03.stanford.edu>

Hi Raith Community,

Upon trying to unload, I was given error  "Fatal Error Loadlock: The system can be in a CRITICAL STATE" after procedure 'Unload:MoveStage1stPosition." Restarting Raith software did not help (but has on previous occasions of this error).

Do any users know what to do? This is not the same loadlock error received when the loadlock door is not held properly...

Best,
Tara

-- 
---

Tara Bozorg-Grayeli
Stanford University
Materials Science and Engineering 
Ph.D. Student
tbozorgg at stanford.edu
480-223-3992



From tbozorgg at stanford.edu  Sat Sep  1 14:03:44 2012
From: tbozorgg at stanford.edu (Tara Bozorg-Grayeli)
Date: Sat, 1 Sep 2012 14:03:44 -0700 (PDT)
Subject: Fatal Loadlock Error
In-Reply-To: <710655690.21651662.1346532694193.JavaMail.root@zm03.stanford.edu>
Message-ID: <1531530817.21654035.1346533424482.JavaMail.root@zm03.stanford.edu>

Hi Raith users,

I have reported it as a problem for now... I won't shutdown since James is out of town until September 11. I'm (obviously) releasing my session, so if you have an idea of how to fix this problem, please feel free to come in.


Thanks

----- Original Message -----
From: "Tara Bozorg-Grayeli" <tbozorgg at stanford.edu>
To: raith at snf.stanford.edu
Sent: Saturday, September 1, 2012 1:51:34 PM
Subject: Fatal Loadlock Error

Hi Raith Community,

Upon trying to unload, I was given error  "Fatal Error Loadlock: The system can be in a CRITICAL STATE" after procedure 'Unload:MoveStage1stPosition." Restarting Raith software did not help (but has on previous occasions of this error).

Do any users know what to do? This is not the same loadlock error received when the loadlock door is not held properly...

Best,
Tara


From dtschoen at stanford.edu  Tue Sep  4 12:03:23 2012
From: dtschoen at stanford.edu (David Schoen)
Date: Tue, 4 Sep 2012 12:03:23 -0700
Subject: Raitth Free Tomorrow 11:30-5pm EOM
Message-ID: <CALVXsuHhhjDVy8LfCLAABELBBVOrHDgvb8VMR+NLBXUd4ky3fg@mail.gmail.com>


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From dtschoen at stanford.edu  Wed Sep  5 16:17:39 2012
From: dtschoen at stanford.edu (David Schoen)
Date: Wed, 5 Sep 2012 16:17:39 -0700
Subject: Free Friday 10:30am-4pm (EOM)
Message-ID: <CALVXsuHsqr5s7ru38iDBE8L0jAahK=ziLjobGUgHkRM4axmL=A@mail.gmail.com>


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From jaypark at stanford.edu  Wed Sep  5 19:56:27 2012
From: jaypark at stanford.edu (Jason Parker)
Date: Wed, 5 Sep 2012 19:56:27 -0700 (PDT)
Subject: [Raith] Up & Thurs 6am-8:30am released
In-Reply-To: <CALVXsuHsqr5s7ru38iDBE8L0jAahK=ziLjobGUgHkRM4axmL=A@mail.gmail.com>
Message-ID: <1571634385.118561985.1346900187529.JavaMail.root@zm08.stanford.edu>

Raith users,

I'm halfway through a write and it looks like all is well with the Raith (thanks a bunch, Raith support team!).

I picked up this extra time tonight, so I'm releasing my time tomorrow. 6am-8:30am on Thursday, September 6 is available.

Jason


From tasyurek at stanford.edu  Thu Sep  6 13:49:31 2012
From: tasyurek at stanford.edu (Emel Tasyurek)
Date: Thu, 6 Sep 2012 13:49:31 -0700 (PDT)
Subject: Raith free today 9:30pm-12am
Message-ID: <1752265631.72465847.1346964571108.JavaMail.root@zm02.stanford.edu>

no longer needed


From arkam at stanford.edu  Thu Sep  6 13:55:50 2012
From: arkam at stanford.edu (Arka Majumdar)
Date: Thu, 6 Sep 2012 13:55:50 -0700 (PDT)
Subject: free from 2-30 to 5..do not need it..sorry for the late notice
Message-ID: <98041879.67599929.1346964950789.JavaMail.root@zm06.stanford.edu>



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From jaypark at stanford.edu  Thu Sep  6 14:32:56 2012
From: jaypark at stanford.edu (Jason Parker)
Date: Thu, 6 Sep 2012 14:32:56 -0700 (PDT)
Subject: Taken Re: free from 2-30 to 5..do not need it..sorry for the late
 notice
In-Reply-To: <98041879.67599929.1346964950789.JavaMail.root@zm06.stanford.edu>
Message-ID: <1908161001.119504877.1346967176546.JavaMail.root@zm08.stanford.edu>

Thanks, 3pm-5:30pm taken (and Friday 6am-8:30am released).

Jason

----- Original Message -----
From: "Arka Majumdar" <arkam at stanford.edu>
To: raith at snf.stanford.edu
Sent: Thursday, September 6, 2012 1:55:50 PM
Subject: free from 2-30 to 5..do not need it..sorry for the late notice



-- 
PhD Student
Ginzton Lab (EE)
Stanford University
www.cvitae.org/arkam/


From kcbalram at stanford.edu  Fri Sep  7 06:50:08 2012
From: kcbalram at stanford.edu (Krishna Coimbatore Balram)
Date: Fri, 7 Sep 2012 06:50:08 -0700 (PDT)
Subject: Raith free 8-10 AM.
Message-ID: <456299090.68161501.1347025808917.JavaMail.root@zm06.stanford.edu>



From hitoshi831223 at gmail.com  Fri Sep  7 12:00:38 2012
From: hitoshi831223 at gmail.com (Hitoshi Ishiwata)
Date: Fri, 7 Sep 2012 12:00:38 -0700
Subject: Raith free 2-4 pm today
Message-ID: <CALqLhX_+YXJiMGpUHw91L+wpKqzMutAUvf1j6J7foRt82NhwOA@mail.gmail.com>

sorry for late notice.
schedule conflict.
i will just use later slots.
thanks


-- 
Hitoshi Ishiwata
PhD Candidate
Electrical Engineering Department
Stanford University

McCullough Building
476 Lomita Mall rm 410
Stanford, CA 94305
Phone: (650) 804 0533
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From armandhr at stanford.edu  Fri Sep  7 12:22:52 2012
From: armandhr at stanford.edu (Armand Rundquist)
Date: Fri, 7 Sep 2012 12:22:52 -0700
Subject: Raith free 2-4 pm today
In-Reply-To: <CALqLhX_+YXJiMGpUHw91L+wpKqzMutAUvf1j6J7foRt82NhwOA@mail.gmail.com>
References: <CALqLhX_+YXJiMGpUHw91L+wpKqzMutAUvf1j6J7foRt82NhwOA@mail.gmail.com>
Message-ID: <CALtDwUa5b-ak+E-b=gskvgjzaM2aMn1vzqmaLFQiCB4soexS0Q@mail.gmail.com>

Taken, thanks.

-Armand

On Fri, Sep 7, 2012 at 12:00 PM, Hitoshi Ishiwata
<hitoshi831223 at gmail.com>wrote:

> sorry for late notice.
> schedule conflict.
> i will just use later slots.
> thanks
>
>
> --
> Hitoshi Ishiwata
> PhD Candidate
> Electrical Engineering Department
> Stanford University
>
> McCullough Building
> 476 Lomita Mall rm 410
> Stanford, CA 94305
> Phone: (650) 804 0533
>
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From hitoshi831223 at gmail.com  Sat Sep  8 15:21:44 2012
From: hitoshi831223 at gmail.com (Hitoshi Ishiwata)
Date: Sat, 8 Sep 2012 15:21:44 -0700
Subject: raith released 3-5pm
Message-ID: <CALqLhX9R10U38NMY1Hd9La2EQt+ZDX8MSZ-eCBqi2EXJy5BYUw@mail.gmail.com>

sorry for late notice.

-- 
Hitoshi Ishiwata
PhD Candidate
Electrical Engineering Department
Stanford University

McCullough Building
476 Lomita Mall rm 410
Stanford, CA 94305
Phone: (650) 804 0533
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From jwc at snf.stanford.edu  Tue Sep 11 15:29:49 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Tue, 11 Sep 2012 15:29:49 -0700
Subject: ACTION REQUIRED:  Please pick up and remove all your samples from
 the Ebeam Lab dry box and pass thru...
Message-ID: <504FBB5D.8020007@snf.stanford.edu>

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From jwc at snf.stanford.edu  Wed Sep 12 09:01:23 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 12 Sep 2012 09:01:23 -0700
Subject: REMINDER:  ZEP - 520 in anisole needs to be replaced into the refrigerator
 promptly after using this material.
Message-ID: <5050B1D3.7060707@snf.stanford.edu>

Greetings Raith Community:

Users are reminded that  ZEP - 520 in anisole needs to be replaced into 
the refrigerator promptly after using this material.
This is important as that if the material spend any significant amount 
of time at normal lab temperatures it will quickly degrade and often 
will hydrolyze and decompose. :-(

Please be sure to replace it in the resist refrigerator after your usage!


All the Best,

James


From jwc at snf.stanford.edu  Wed Sep 12 15:49:36 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 12 Sep 2012 15:49:36 -0700
Subject: E-beam lithography on RAITH 150...
In-Reply-To: <481606647.36852345.1344035857455.JavaMail.root@zm05.stanford.edu>
References: <481606647.36852345.1344035857455.JavaMail.root@zm05.stanford.edu>
Message-ID: <50511180.9020007@snf.stanford.edu>

Greetings Future and Current RAITH Users,

I have just returned from vacation.
This week and next I am scheduling for September and October for RAITH 
training and to complete some process work-in-progress developing 
application note(s) and final testing of several new EBL processes in 
development.

Please see me when you have a chance, or during my office hours, to 
schedule sessions with me to get your RAITH training started.  I hope to 
get some of you through the class course work before October so as to 
open a few more slots for others inbound... Hint: It's a good time to 
start getting your patterns on GDSII started so we can test them together.

Currently qualified RAITH Users working on the system wishing for 
enhanced project support, delve into advanced topics in EBL, or those 
interested in pursuing the Fixed Beam Moving Stage capability are also 
encouraged to engage with me in the coming months.

All the Best,

James Conway

On 8/3/2012 4:17 PM, Xiaoge Liu wrote:
> Hi James:
> I am planning to use Raith making strip Si waveguide. I heard that now Raith has new option that we can move substrate during e-beam exposure so we can make a much larger area lithography. So when will this be available? Does it require any special training?
>
> Thank you very much!
>
> Best Regard,
> Xiaoge



From jwc at snf.stanford.edu  Fri Sep 14 09:40:12 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Fri, 14 Sep 2012 09:40:12 -0700
Subject: Fwd: Raith Micrograph Award
In-Reply-To: <md5:CXKlzRq01nkAMliv04nluw==>
References: <md5:CXKlzRq01nkAMliv04nluw==>
Message-ID: <50535DEC.6020905@snf.stanford.edu>

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From tasyurek at stanford.edu  Mon Sep 17 09:18:33 2012
From: tasyurek at stanford.edu (Emel Tasyurek)
Date: Mon, 17 Sep 2012 09:18:33 -0700 (PDT)
Subject: Raith free 10:30am-1pm today
In-Reply-To: <737573502.93596349.1347898713362.JavaMail.root@zm02.stanford.edu>
Message-ID: <1907605914.93596353.1347898713664.JavaMail.root@zm02.stanford.edu>

Sorry for the late notice


From kcbalram at stanford.edu  Tue Sep 18 06:53:07 2012
From: kcbalram at stanford.edu (Krishna Coimbatore Balram)
Date: Tue, 18 Sep 2012 06:53:07 -0700 (PDT)
Subject: Raith free from 6-8 PM today
Message-ID: <53293389.77665279.1347976387196.JavaMail.root@zm06.stanford.edu>

Will not be able to make it to the session

Best,
Krishna


From tasyurek at stanford.edu  Wed Sep 19 14:38:16 2012
From: tasyurek at stanford.edu (Emel Tasyurek)
Date: Wed, 19 Sep 2012 14:38:16 -0700 (PDT)
Subject: Raith free now till 5pm
In-Reply-To: <2147337264.99176660.1348090515276.JavaMail.root@zm02.stanford.edu>
Message-ID: <168236798.99179733.1348090696505.JavaMail.root@zm02.stanford.edu>

finished early


From toecutter4ranger at gmail.com  Fri Sep 21 10:37:28 2012
From: toecutter4ranger at gmail.com (James Conway)
Date: Fri, 21 Sep 2012 10:37:28 -0700
Subject: releasing my reservation for SAT September 22, 2012
Message-ID: <CAGUEwb=az=8K=n5gpeSQFFQhUdObxZuA3jKjt-vNeY+M3FQt6A@mail.gmail.com>

Greetings:

Due to a coral snafu I am releasing my reservation for tomorrow SAT 9-22-12.
I don't work weekend!  :-)

Please take advantage of this available system time.

James


From janp at stanford.edu  Mon Sep 24 12:30:47 2012
From: janp at stanford.edu (Jan Petykiewicz)
Date: Mon, 24 Sep 2012 12:30:47 -0700
Subject: Raith free now <eom>
Message-ID: <CAEOdNiGyGNAtfyNC-8eGaYfO_qAFQjuEWmO0+qO_ghAUtPUU=g@mail.gmail.com>


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From bajcsy at stanford.edu  Mon Sep 24 15:29:58 2012
From: bajcsy at stanford.edu (Michal Bajcsy)
Date: Mon, 24 Sep 2012 15:29:58 -0700 (PDT)
Subject: reservation released this afternoon -- sample not ready
Message-ID: <2022051608.59728072.1348525798891.JavaMail.root@zm09.stanford.edu>



From zfyu at stanford.edu  Tue Sep 25 15:12:52 2012
From: zfyu at stanford.edu (Zongfu Yu)
Date: Tue, 25 Sep 2012 15:12:52 -0700 (PDT)
Subject: Raith free 8:30pm - 11pm today
In-Reply-To: <1907605914.93596353.1347898713664.JavaMail.root@zm02.stanford.edu>
Message-ID: <758280747.46896008.1348611172849.JavaMail.root@zm03.stanford.edu>

I don't need it anymore.


From jwc at snf.stanford.edu  Wed Sep 26 09:14:03 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 26 Sep 2012 09:14:03 -0700
Subject: Raith free 8:30pm - 11pm today
In-Reply-To: <758280747.46896008.1348611172849.JavaMail.root@zm03.stanford.edu>
References: <758280747.46896008.1348611172849.JavaMail.root@zm03.stanford.edu>
Message-ID: <506329CB.3080609@snf.stanford.edu>

Zongfu has a reservation on CORAL for the Raith for this morning 8 - 
11:00 AM  But either is not enabled or actually at the system currently. 
I peeked through the window and it seems that the system may be 
available for other users, or for the next User to start earlier than 
scheduled.  Please make use of this opportunity and availability for 
your patterning needs.

Good morning,

James

On 9/25/2012 3:12 PM, Zongfu Yu wrote:
> I don't need it anymore.



From zfyu at stanford.edu  Wed Sep 26 09:24:18 2012
From: zfyu at stanford.edu (Zongfu Yu)
Date: Wed, 26 Sep 2012 09:24:18 -0700 (PDT)
Subject: Raith free from now to 11am
In-Reply-To: <506329CB.3080609@snf.stanford.edu>
Message-ID: <1864948138.47406110.1348676658607.JavaMail.root@zm03.stanford.edu>

Sorry for the late notice. I thought I cancelled it.


From jwc at snf.stanford.edu  Wed Sep 26 10:05:09 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 26 Sep 2012 10:05:09 -0700
Subject: Raith free from now to 11am
In-Reply-To: <1864948138.47406110.1348676658607.JavaMail.root@zm03.stanford.edu>
References: <1864948138.47406110.1348676658607.JavaMail.root@zm03.stanford.edu>
Message-ID: <506335C5.9050008@snf.stanford.edu>

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From jwc at snf.stanford.edu  Fri Sep 28 09:58:33 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Fri, 28 Sep 2012 09:58:33 -0700
Subject: Fwd: Data Clean Corp. contract has been signed and PO in place. 
 -- Ebeam Lab access will be CLOSED from 12:00 AM until 7:00 AM SATURDAY morning.
In-Reply-To: <B3135EF4-9B08-40C5-B484-6A41DCB0BE73@stanford.edu>
References: <B3135EF4-9B08-40C5-B484-6A41DCB0BE73@stanford.edu>
Message-ID: <5065D739.8070008@snf.stanford.edu>

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From jwc at snf.stanford.edu  Fri Sep 28 10:23:27 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Fri, 28 Sep 2012 10:23:27 -0700
Subject: Fwd: Fwd: Arrival on Oct. 2  New Thread name ==>  Help  a visitor,
  Professor In-Hyouk Song from Texas State on the SEM nextTuesday?
In-Reply-To: <5065A2C4.8030600@stanford.edu>
References: <5065A2C4.8030600@stanford.edu>
Message-ID: <5065DD0F.6080707@snf.stanford.edu>

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From jwc at snf.stanford.edu  Fri Sep 28 12:36:40 2012
From: jwc at snf.stanford.edu (James W. Conway)
Date: Fri, 28 Sep 2012 12:36:40 -0700
Subject: more MaN 2403 resist and MaD 525 developer?
In-Reply-To: <CAJe+a3Wo3LoqTd7xeGPqRCuoRT5GscNFma8VOEDQTToYgT25LA@mail.gmail.com>
References: <CAJe+a3Wo3LoqTd7xeGPqRCuoRT5GscNFma8VOEDQTToYgT25LA@mail.gmail.com>
Message-ID: <5065FC48.5060107@snf.stanford.edu>

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From waqasm at stanford.edu  Sun Sep 30 16:44:31 2012
From: waqasm at stanford.edu (Waqas Mustafeez)
Date: Sun, 30 Sep 2012 16:44:31 -0700
Subject: Fw: released monday 9:30am to 2:30PM
Message-ID: <42A48E1876B84722A78E16E139219502@Waqaslaptop>

wafers not ready.

WM.
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