Fatal Loadlock Error

Tara Bozorg-Grayeli tbozorgg at stanford.edu
Sat Sep 1 13:51:34 PDT 2012


Hi Raith Community,

Upon trying to unload, I was given error  "Fatal Error Loadlock: The system can be in a CRITICAL STATE" after procedure 'Unload:MoveStage1stPosition." Restarting Raith software did not help (but has on previous occasions of this error).

Do any users know what to do? This is not the same loadlock error received when the loadlock door is not held properly...

Best,
Tara

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Tara Bozorg-Grayeli
Stanford University
Materials Science and Engineering 
Ph.D. Student
tbozorgg at stanford.edu
480-223-3992




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